JPH0163137U - - Google Patents
Info
- Publication number
- JPH0163137U JPH0163137U JP1987158263U JP15826387U JPH0163137U JP H0163137 U JPH0163137 U JP H0163137U JP 1987158263 U JP1987158263 U JP 1987158263U JP 15826387 U JP15826387 U JP 15826387U JP H0163137 U JPH0163137 U JP H0163137U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boxes
- storage shelf
- shelf device
- transfer machine
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987158263U JPH0163137U (uk) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987158263U JPH0163137U (uk) | 1987-10-16 | 1987-10-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0163137U true JPH0163137U (uk) | 1989-04-24 |
Family
ID=31438432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987158263U Pending JPH0163137U (uk) | 1987-10-16 | 1987-10-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0163137U (uk) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274218A (ja) * | 2000-03-23 | 2001-10-05 | Sankyo Seiki Mfg Co Ltd | ダブルアーム型ロボット |
JP2011187796A (ja) * | 2010-03-10 | 2011-09-22 | Sokudo Co Ltd | 基板処理装置、ストッカー装置および基板収納容器の搬送方法 |
WO2017141555A1 (ja) * | 2016-02-15 | 2017-08-24 | 村田機械株式会社 | 保管装置及び搬送システム |
-
1987
- 1987-10-16 JP JP1987158263U patent/JPH0163137U/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274218A (ja) * | 2000-03-23 | 2001-10-05 | Sankyo Seiki Mfg Co Ltd | ダブルアーム型ロボット |
JP2011187796A (ja) * | 2010-03-10 | 2011-09-22 | Sokudo Co Ltd | 基板処理装置、ストッカー装置および基板収納容器の搬送方法 |
US9728434B2 (en) | 2010-03-10 | 2017-08-08 | Screen Semiconductor Solutions Co., Ltd. | Substrate processing apparatus, storage device, and method of transporting substrate storing container |
WO2017141555A1 (ja) * | 2016-02-15 | 2017-08-24 | 村田機械株式会社 | 保管装置及び搬送システム |
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