JPH0163133U - - Google Patents
Info
- Publication number
- JPH0163133U JPH0163133U JP1987157485U JP15748587U JPH0163133U JP H0163133 U JPH0163133 U JP H0163133U JP 1987157485 U JP1987157485 U JP 1987157485U JP 15748587 U JP15748587 U JP 15748587U JP H0163133 U JPH0163133 U JP H0163133U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- spin dryer
- rotating shaft
- spaced apart
- gas flowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987157485U JPH0163133U (enrdf_load_html_response) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987157485U JPH0163133U (enrdf_load_html_response) | 1987-10-16 | 1987-10-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0163133U true JPH0163133U (enrdf_load_html_response) | 1989-04-24 |
Family
ID=31436970
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987157485U Pending JPH0163133U (enrdf_load_html_response) | 1987-10-16 | 1987-10-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0163133U (enrdf_load_html_response) |
-
1987
- 1987-10-16 JP JP1987157485U patent/JPH0163133U/ja active Pending
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