JPH0162651U - - Google Patents
Info
- Publication number
- JPH0162651U JPH0162651U JP1987157101U JP15710187U JPH0162651U JP H0162651 U JPH0162651 U JP H0162651U JP 1987157101 U JP1987157101 U JP 1987157101U JP 15710187 U JP15710187 U JP 15710187U JP H0162651 U JPH0162651 U JP H0162651U
- Authority
- JP
- Japan
- Prior art keywords
- section
- ion beam
- extraction electrode
- filament
- measurement section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 239000002784 hot electron Substances 0.000 claims 2
- 230000005856 abnormality Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157101U JPH0162651U (pt) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157101U JPH0162651U (pt) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0162651U true JPH0162651U (pt) | 1989-04-21 |
Family
ID=31436248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157101U Pending JPH0162651U (pt) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0162651U (pt) |
-
1987
- 1987-10-13 JP JP1987157101U patent/JPH0162651U/ja active Pending
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