JPH0162651U - - Google Patents
Info
- Publication number
- JPH0162651U JPH0162651U JP1987157101U JP15710187U JPH0162651U JP H0162651 U JPH0162651 U JP H0162651U JP 1987157101 U JP1987157101 U JP 1987157101U JP 15710187 U JP15710187 U JP 15710187U JP H0162651 U JPH0162651 U JP H0162651U
- Authority
- JP
- Japan
- Prior art keywords
- section
- ion beam
- extraction electrode
- filament
- measurement section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 239000002784 hot electron Substances 0.000 claims 2
- 230000005856 abnormality Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例のブロツク図、第２
図は本考案の一実施例に用いられる比較処理部の
一例のブロツク図、第３図は従来のイオン注入装
置のブロツク図である。
１……フイラメント、２……フイラメント電源
、３……アークチヤンバー、４……アーク電源、
５……積算タイマー、６……絶縁碍子、７……ソ
ースガス、８……引き出し電極用電源、９……引
き出し電極、１０……加速・減速電極用電源、１
１……加速・減速電極、１２……真空容器、１３
……測定部、１４……比較処理部、１５……表示
部。
Fig. 1 is a block diagram of an embodiment of the present invention;
The figure is a block diagram of an example of a comparison processing section used in an embodiment of the present invention, and FIG. 3 is a block diagram of a conventional ion implantation apparatus. 1... Filament, 2... Filament power supply, 3... Arc chamber, 4... Arc power supply,
5...Integration timer, 6...Insulator, 7...Source gas, 8...Power source for extraction electrodes, 9...Extraction electrode, 10...Power source for acceleration/deceleration electrodes, 1
1...Acceleration/deceleration electrode, 12...Vacuum container, 13
...Measurement section, 14...Comparison processing section, 15...Display section.
Claims (1)
イラメントからの熱電子によりソースガスのイオ
ンを作るアークチヤンバーと該ソースガスのイオ
ンビームの引き出しの高効率化及びイオンビーム
の絞り込みを行なう加速・減速電極とイオンビー
ムの引き出しを行なう引き出し電極とから構成さ
れるイオン注入装置であつて、前記引出し電極に
電位を与える引出し電極用電源に接続されその電
流を測定する測定部と、前記測定部で測定した電
流値と設定電流値とを比較しその差が規定値以上
の場合表示部に信号を送出する比較処理部と、前
記比較処理部からの信号により装置の異常を表示
する表示部とを有することを特徴とするイオン注
入装置。 A filament for generating hot electrons, an arc chamber for generating source gas ions using the hot electrons from the filament, and an acceleration/deceleration electrode for highly efficient extraction of the source gas ion beam and narrowing down of the ion beam. An ion implantation device comprising an extraction electrode for extracting an ion beam, a measurement section connected to an extraction electrode power supply that applies a potential to the extraction electrode and measures the current, and a measurement section for measuring the current measured by the measurement section. and a set current value, and a comparison processing section that sends a signal to a display section if the difference is greater than or equal to a specified value, and a display section that displays an abnormality in the device based on the signal from the comparison processing section. Features of ion implantation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157101U JPH0162651U (en) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157101U JPH0162651U (en) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0162651U true JPH0162651U (en) | 1989-04-21 |
Family
ID=31436248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157101U Pending JPH0162651U (en) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0162651U (en) |
-
1987
- 1987-10-13 JP JP1987157101U patent/JPH0162651U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS55116249A (en) | Electron arresting type detector | |
| GB913956A (en) | Improvements in and relating to ion sources | |
| JPH0162651U (en) | ||
| JPS6082956A (en) | Ac modulation type quadrupole mass spectrometer | |
| JPS5727554A (en) | Tetrode mass spectrograph | |
| GB1507087A (en) | Extractor ion source | |
| JPS6253561U (en) | ||
| JPS6214724U (en) | ||
| JPS5911400Y2 (en) | Field emission ion source | |
| JPS62175559U (en) | ||
| JPS5574038A (en) | Vacuum measuring device for picture tube | |
| JPS56162043A (en) | Bipolar ion current probe device | |
| JPS63111750U (en) | ||
| SU115799A1 (en) | Method for determining the content of impurities in helium | |
| JPH01112554U (en) | ||
| JPS61168634U (en) | ||
| JPS6339725Y2 (en) | ||
| JPH0166744U (en) | ||
| JPH0229149U (en) | ||
| JPH0198470U (en) | ||
| JPH01122252U (en) | ||
| JPH01160653U (en) | ||
| JPS6157750U (en) | ||
| JPS6387826U (en) | ||
| JPS60211753A (en) | Electron ray radiation device |