JPH0160946B2 - - Google Patents

Info

Publication number
JPH0160946B2
JPH0160946B2 JP56047214A JP4721481A JPH0160946B2 JP H0160946 B2 JPH0160946 B2 JP H0160946B2 JP 56047214 A JP56047214 A JP 56047214A JP 4721481 A JP4721481 A JP 4721481A JP H0160946 B2 JPH0160946 B2 JP H0160946B2
Authority
JP
Japan
Prior art keywords
gas
bearing
axis
movable body
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56047214A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57164527A (en
Inventor
Ryohei Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56047214A priority Critical patent/JPS57164527A/ja
Publication of JPS57164527A publication Critical patent/JPS57164527A/ja
Publication of JPH0160946B2 publication Critical patent/JPH0160946B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Electron Beam Exposure (AREA)
JP56047214A 1981-04-01 1981-04-01 Positioning device Granted JPS57164527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56047214A JPS57164527A (en) 1981-04-01 1981-04-01 Positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56047214A JPS57164527A (en) 1981-04-01 1981-04-01 Positioning device

Publications (2)

Publication Number Publication Date
JPS57164527A JPS57164527A (en) 1982-10-09
JPH0160946B2 true JPH0160946B2 (enExample) 1989-12-26

Family

ID=12768900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56047214A Granted JPS57164527A (en) 1981-04-01 1981-04-01 Positioning device

Country Status (1)

Country Link
JP (1) JPS57164527A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4901387B2 (ja) * 2006-09-15 2012-03-21 三菱農機株式会社 コンバイン
JP5102089B2 (ja) * 2008-04-09 2012-12-19 ピー・エス・シー株式会社 気体圧制御型微小振動制御装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567694A (en) * 1978-11-16 1980-05-21 Tokyo Shibaura Electric Co Automatic parallel table

Also Published As

Publication number Publication date
JPS57164527A (en) 1982-10-09

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