JPH0158940U - - Google Patents
Info
- Publication number
- JPH0158940U JPH0158940U JP15423187U JP15423187U JPH0158940U JP H0158940 U JPH0158940 U JP H0158940U JP 15423187 U JP15423187 U JP 15423187U JP 15423187 U JP15423187 U JP 15423187U JP H0158940 U JPH0158940 U JP H0158940U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating table
- orientation flat
- chucks
- transmission type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15423187U JPH0158940U (enExample) | 1987-10-07 | 1987-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15423187U JPH0158940U (enExample) | 1987-10-07 | 1987-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158940U true JPH0158940U (enExample) | 1989-04-13 |
Family
ID=31430781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15423187U Pending JPH0158940U (enExample) | 1987-10-07 | 1987-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158940U (enExample) |
-
1987
- 1987-10-07 JP JP15423187U patent/JPH0158940U/ja active Pending
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