JPH0147931B2 - - Google Patents
Info
- Publication number
- JPH0147931B2 JPH0147931B2 JP6224781A JP6224781A JPH0147931B2 JP H0147931 B2 JPH0147931 B2 JP H0147931B2 JP 6224781 A JP6224781 A JP 6224781A JP 6224781 A JP6224781 A JP 6224781A JP H0147931 B2 JPH0147931 B2 JP H0147931B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- substrate
- etching
- vibrating piece
- crystal resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 35
- 238000005530 etching Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 8
- 239000010408 film Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6224781A JPS57176818A (en) | 1981-04-24 | 1981-04-24 | Manufacture of crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6224781A JPS57176818A (en) | 1981-04-24 | 1981-04-24 | Manufacture of crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57176818A JPS57176818A (en) | 1982-10-30 |
| JPH0147931B2 true JPH0147931B2 (en, 2012) | 1989-10-17 |
Family
ID=13194613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6224781A Granted JPS57176818A (en) | 1981-04-24 | 1981-04-24 | Manufacture of crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57176818A (en, 2012) |
-
1981
- 1981-04-24 JP JP6224781A patent/JPS57176818A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57176818A (en) | 1982-10-30 |
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