JPH0143859Y2 - - Google Patents
Info
- Publication number
- JPH0143859Y2 JPH0143859Y2 JP9256486U JP9256486U JPH0143859Y2 JP H0143859 Y2 JPH0143859 Y2 JP H0143859Y2 JP 9256486 U JP9256486 U JP 9256486U JP 9256486 U JP9256486 U JP 9256486U JP H0143859 Y2 JPH0143859 Y2 JP H0143859Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- powder layer
- bell
- transparent quartz
- bell jar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 26
- 239000000843 powder Substances 0.000 claims description 16
- 239000010453 quartz Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000004886 process control Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9256486U JPH0143859Y2 (en)) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9256486U JPH0143859Y2 (en)) | 1986-06-18 | 1986-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62204323U JPS62204323U (en)) | 1987-12-26 |
| JPH0143859Y2 true JPH0143859Y2 (en)) | 1989-12-19 |
Family
ID=30954379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9256486U Expired JPH0143859Y2 (en)) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143859Y2 (en)) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3011866B2 (ja) * | 1994-11-30 | 2000-02-21 | 信越石英株式会社 | 枚葉式ウエーハ熱処理装置 |
-
1986
- 1986-06-18 JP JP9256486U patent/JPH0143859Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62204323U (en)) | 1987-12-26 |
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