Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Topcon Corp
Original Assignee
Toshiba Corp
Tokyo Kogaku Kikai KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Kogaku Kikai KKfiledCriticalToshiba Corp
Priority to JP4413080ApriorityCriticalpatent/JPS56143098A/ja
Publication of JPS56143098ApublicationCriticalpatent/JPS56143098A/ja
Publication of JPH0141925B2publicationCriticalpatent/JPH0141925B2/ja