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Priority to JP12035184UpriorityCriticalpatent/JPS6135960U/ja
Publication of JPS6135960UpublicationCriticalpatent/JPS6135960U/ja
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Publication of JPH0141800Y2publicationCriticalpatent/JPH0141800Y2/ja
Improving optical measurement stability in UV appts. for determining material characteristics - flushing optically disturbing gas, e.g. ozone produced by oxidation, from optical path using inert gas