JPH0136909Y2 - - Google Patents
Info
- Publication number
- JPH0136909Y2 JPH0136909Y2 JP1541084U JP1541084U JPH0136909Y2 JP H0136909 Y2 JPH0136909 Y2 JP H0136909Y2 JP 1541084 U JP1541084 U JP 1541084U JP 1541084 U JP1541084 U JP 1541084U JP H0136909 Y2 JPH0136909 Y2 JP H0136909Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- rotary pump
- exhaust
- valve
- evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000010349 pulsation Effects 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910018110 Se—Te Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Description
【考案の詳細な説明】
（技術分野）
本考案はSe，Se−Te，Se−As系感光体や光学
薄膜等の真空蒸着装置に関し、詳しくはその排気
装置に係るものである。[Detailed Description of the Invention] (Technical Field) The present invention relates to a vacuum evaporation apparatus for Se, Se-Te, Se-As type photoreceptors, optical thin films, etc., and specifically relates to its exhaust apparatus.
（従来技術）
第１図は従来例に係る真空蒸着装置の排気系統
図である。(Prior Art) FIG. 1 is an exhaust system diagram of a vacuum evaporation apparatus according to a conventional example.
図において、１は真空容器、２は拡散ポンプ、
３はロータリーポンプ、４はメインバルブ、５は
粗引きバルブ、６は補助バルブである。 In the figure, 1 is a vacuum container, 2 is a diffusion pump,
3 is a rotary pump, 4 is a main valve, 5 is a roughing valve, and 6 is an auxiliary valve.
前述のセレンドラムやポリゴンミラー等の被蒸
着物はこの真空容器１内で蒸着されるのである
が、真空容器１内を真空するに際し、ロータリー
ポンプ３により、まず粗引きと呼ばれる初期排気
が行なわれ、次いで拡散ポンプ２で第２段階の排
気が行なわれるようになつている。 The objects to be deposited, such as the selenium drum and polygon mirror mentioned above, are deposited in this vacuum container 1, but when vacuuming the inside of the vacuum container 1, an initial evacuation called rough evacuation is first performed by the rotary pump 3. Then, the diffusion pump 2 performs a second stage of evacuation.
粗引きはメインバルブ４、補助バルブ６を閉め
て、粗引きバルブ５を開くことにより開始される
が、排気の初期においては、ロータリーポンプ３
の回転に同期して空気流に脈動が生じる。これに
よつて真空容器１内には乱流が発生して粉じんの
舞い上がりがみられ、これが被蒸着基板上に付着
した場合には被蒸着物の外観不良となる。 Roughing is started by closing the main valve 4 and auxiliary valve 6 and opening the roughing valve 5, but at the beginning of exhaustion, the rotary pump 3
Pulsations occur in the airflow in synchronization with the rotation of the As a result, turbulent flow is generated in the vacuum chamber 1, causing dust to fly up, and if this dust adheres to the substrate to be deposited, the appearance of the object to be deposited will be poor.
（目的）
本考案はこの様な従来例の欠点に鑑みてなされ
たものであり、ロータリーポンプを用いた真空排
気装置において、排気中における気流の脈動や乱
流の発生を防ぎ、これによつて被蒸着物の外観を
良くすることを目的とするものである。(Purpose) The present invention was developed in view of the shortcomings of the conventional examples, and is intended to prevent pulsation and turbulence of airflow during evacuation in a vacuum evacuation system using a rotary pump, thereby improving The purpose is to improve the appearance of the deposition target.
（構成）
以下本考案の構成を第２図以下の各実施例に基
づき説明する。(Structure) The structure of the present invention will be explained below based on the embodiments shown in FIG. 2 and below.
尚、従来例と同一個所は同一符号とする。 Note that the same parts as in the conventional example are given the same reference numerals.
第２図は第１実施例に係る排気系統図であり、
ロータリーポンプ３に対して粗引きバルブ５と並
例に、アキユムレーター７、バルブ８を設けたも
のである。このアキユムレーター７は内部が非真
空の容器であり、バルブ８はバルブ５を開くと同
時に開き、中真空（〜10-3Torr）まで、排気に
よる脈動を防ぐことができ、被蒸着基板への粉じ
ん付着を防止できた。 FIG. 2 is an exhaust system diagram according to the first embodiment,
In addition to the roughing valve 5, an accumulator 7 and a valve 8 are provided for the rotary pump 3. This accumulator 7 is a non-vacuum container inside, and the valve 8 opens at the same time as the valve 5 is opened, and can prevent pulsation due to exhaust to a medium vacuum (~10 -3 Torr), and prevent dust from being deposited on the substrate. Adhesion was prevented.
即ち、粗引きに際してロータリーポンプ３の吸
引力はアキユムレーター７により分散されるた
め、立ち上がり時、真空容器１内では急激な吸引
による空気の脈動が防がれるのである。そのた
め、容器１の内壁、底面等に付着している粉じん
の舞い上がりが抑制されるのである。 That is, since the suction force of the rotary pump 3 is dispersed by the accumulator 7 during rough evacuation, air pulsation due to rapid suction is prevented in the vacuum container 1 at the time of startup. Therefore, dust adhering to the inner wall, bottom surface, etc. of the container 1 is suppressed from flying up.
第３図はアキユムレーターに変えてベローズ１
０とダツシユポツト９を用いた例であるが、アキ
ユムレーターと同じ効果が得られた。 Figure 3 shows bellows 1 instead of an accumulator.
This is an example using Dashpot 9 and Dashpot 9, but the same effect as the accumulator was obtained.
この実施例においても、粗引きバルブ５とバル
ブ１１とは同時に開かれ、ロータリーポンプ３の
吸引力によりベローズ１０も収縮するが、ダツシ
ユポツト９はその際、急激な収縮（従つて吸引）
を緩衝するための機能を果たす。 In this embodiment as well, the roughing valve 5 and the valve 11 are opened at the same time, and the bellows 10 is also contracted by the suction force of the rotary pump 3, but the dart pot 9 is rapidly contracted (and therefore suctioned).
It functions as a buffer.
第４図はダツシユポツト１２、ベローズ１３を
並列にならべたものであるが、これによつてベロ
ーズの寸法を小さくすることができた。 FIG. 4 shows a doss pot 12 and a bellows 13 arranged in parallel, which allows the size of the bellows to be reduced.
尚、第１実施例において、実験では500の真
空容器に対して50以上のアキユムレーターをつ
ければ、脈動は防止できた。また第２実施例のベ
ローズ、ダツシユポツトの場合にはロータリーポ
ンプの回転数に合わせてベローズ容量とダツシユ
ポツトを決める必要がある。500の真空容器に
対して300rpmのロータリーポンプを用いた場合、
ベローズ80ダツシユポツト15Kg・Ｓ／cmが最適
であつた。 In the first embodiment, pulsation could be prevented in experiments by attaching 50 or more accumulators to 500 vacuum vessels. Further, in the case of the bellows and dart pot of the second embodiment, it is necessary to determine the bellows capacity and the dart pot in accordance with the rotational speed of the rotary pump. When using a 300 rpm rotary pump for a 500 vacuum vessel,
The bellows 80 needle pot 15Kg・S/cm was the best choice.
（効果）
以上本考案の排気装置によれば、粗引き時、真
空容器内の乱流を防ぐことが出来るから、容器内
において、粉じんの舞い上がりを防止出来、従つ
て被蒸着物への粉じんの付着を防止することが出
来る。(Effects) As described above, according to the exhaust system of the present invention, it is possible to prevent turbulence in the vacuum container during rough evacuation, so it is possible to prevent dust from flying up inside the container, and therefore to prevent dust from reaching the object to be deposited. Adhesion can be prevented.
第１図は従来例に係る真空蒸着装置の排気系統
図、第２図は本考案の第１実施例に係る排気系統
図、第３図は同、第２実施例に係る排気系統図、
第４図は同、第３実施例に係る排気系統図であ
る。
３……ロータリーポンプ、７，９，１０，１
２，１３……緩衝手段。
FIG. 1 is an exhaust system diagram of a vacuum evaporation apparatus according to a conventional example, FIG. 2 is an exhaust system diagram according to a first embodiment of the present invention, and FIG. 3 is an exhaust system diagram according to a second embodiment of the present invention.
FIG. 4 is an exhaust system diagram according to the third embodiment of the same. 3...Rotary pump, 7, 9, 10, 1
2,13...Buffer means.
Claims (1)
いて、その排気経路の途中に、排気の脈動や乱
流の発生をなくするための緩衝手段を設けたこ
とを特徴とする真空蒸着における排気装置。 (2) 実用新案登録請求の範囲第(1)項において、前
記緩衝手段を排気経路に対して複数並置したこ
とを特徴とする真空蒸着における排気装置。[Claims for Utility Model Registration] (1) A vacuum evacuation device using a rotary pump, characterized in that a buffer means is provided in the middle of the evacuation path to eliminate exhaust pulsation and turbulence. Exhaust equipment for vacuum evaporation. (2) The exhaust device for vacuum evaporation according to claim (1) of the utility model registration, characterized in that a plurality of the buffer means are arranged in parallel to the exhaust path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1541084U JPS60132455U (en) | 1984-02-08 | 1984-02-08 | Exhaust equipment for vacuum evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1541084U JPS60132455U (en) | 1984-02-08 | 1984-02-08 | Exhaust equipment for vacuum evaporation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60132455U JPS60132455U (en) | 1985-09-04 |
| JPH0136909Y2 true JPH0136909Y2 (en) | 1989-11-08 |
Family
ID=30501229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1541084U Granted JPS60132455U (en) | 1984-02-08 | 1984-02-08 | Exhaust equipment for vacuum evaporation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60132455U (en) |
-
1984
- 1984-02-08 JP JP1541084U patent/JPS60132455U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60132455U (en) | 1985-09-04 |
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