JPH01321171A - Adsorbing nozzle member - Google Patents
Adsorbing nozzle memberInfo
- Publication number
- JPH01321171A JPH01321171A JP14975688A JP14975688A JPH01321171A JP H01321171 A JPH01321171 A JP H01321171A JP 14975688 A JP14975688 A JP 14975688A JP 14975688 A JP14975688 A JP 14975688A JP H01321171 A JPH01321171 A JP H01321171A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- nozzle member
- suction
- nozzle
- suction nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005553 drilling Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Manipulator (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、微小な対象ワークを真空の吸引力によって吸
着して搬送する吸着ノズル部材に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a suction nozzle member that suctions and conveys a minute target workpiece using vacuum suction force.
「従来の技術」
従来の吸着ノズル部材は、第４図に示されるように一個
の大きなノズル２を有するものであつた。"Prior Art" A conventional suction nozzle member has one large nozzle 2, as shown in FIG.
［発明か解決しようとする課題」
しかしながらこのような従来の吸着ノズル部材ｌは、ワ
ークＷを内部に吸い込ませないためノズル２の＋＋Ｐｆ
：は当然ワークＷより小さいものであり、吸着ノズル部
材ｌのＦ端面３とワークＷの吸着面との間には、空気流
がこれら両面に沿って流れるギャップｇが生じる。この
ためワークＷを鉛直方向に吸着したとき、水平方向の位
置ずれをおこす°１ｔかしばしばあった。[Problem to be solved by the invention] However, in such a conventional suction nozzle member l, in order to prevent the workpiece W from being sucked into the inside, the ++Pf of the nozzle 2
: is naturally smaller than the workpiece W, and a gap g is created between the F end surface 3 of the suction nozzle member l and the suction surface of the workpiece W, through which air flows along both surfaces. For this reason, when the workpiece W was suctioned in the vertical direction, the positional shift in the horizontal direction often occurred.
このような位置ずれは、第４図に示すように、吸着ノズ
ル部材ｌの端面３と、ワークＷの吸着面とがｆ行になく
、一方の隙間ｇが狭＜ （ｇｌ）他方か大きく （ｇ２
）なっていると、ワークＷの吸Ｒ面上を流れる気流の流
速はＶｌ＞Ｖ２となり。As shown in FIG. 4, such positional deviation is caused by the fact that the end surface 3 of the suction nozzle member l and the suction surface of the workpiece W are not in the f row, and one gap g is narrow < (gl) and the other gap is large ( g2
), the velocity of the airflow flowing on the suction R surface of the workpiece W becomes Vl>V2.
反対に圧力分布のｆ均はＰＩ＜Ｐ２となる。したかって
、ワークＷは０点を中心に先ず隙間の狭い側か持ち上げ
られ１次いで隙間の大きいほうが吸１１′されるためと
考えられる。On the other hand, the f average of the pressure distribution is PI<P2. Therefore, it is considered that the workpiece W is first lifted from the side with the narrower gap centering on the 0 point, and then the side with the larger gap is sucked 11'.
ワークＷか吸着される時に、上記のような位置ずれをお
こしたのでは、吸着ノズル部材によってワークを他所に
移動させて定置する際の位置決めか不正確となり、精密
な位置決めを常に確保するためには高価な検出装置や、
ずれを修正するための専用装置を必要としていた。If the above-mentioned positional deviation occurs when the workpiece W is suctioned, the positioning when moving the workpiece to another location and fixing it using the suction nozzle member will be inaccurate. requires expensive detection equipment and
A special device was required to correct the misalignment.
本発明は、このような従来の技術における問題点に着目
してなされたもので、鉛直方向の吸引に対して水平方向
の位置ずれをおこさないような吸着ノズル部材を提供す
ることを目的としている。The present invention has been made in view of the problems in the conventional technology, and an object of the present invention is to provide a suction nozzle member that does not cause displacement in the horizontal direction with respect to vertical suction. .
［課題を解決するための手段」
かかる目的を達成するための本発明の要旨とするところ
は、
微小な対象を吸引して搬送する吸着ノズル部材において
、
吸引源に接続する空気流路を有する基体の先に対象の吸
着面を有するノズル先端を設け、前記ノズル先端は、前
記空気流路の先で開口し、対象とするワークよりも広い
範囲に分布する多数の小径孔を穿設して成ることを特徴
とする吸着ノズル部材に存する。[Means for Solving the Problems] The gist of the present invention for achieving the above object is as follows: In a suction nozzle member that suctions and conveys a minute object, a base body having an air flow path connected to a suction source is provided. A nozzle tip having a target suction surface is provided at the tip of the nozzle, and the nozzle tip opens at the end of the air flow path and has a large number of small diameter holes distributed over a wider area than the target workpiece. The invention resides in a suction nozzle member characterized by the following.
「作用」
吸引源を吸７１′ノズル部材の空気流路の後端部に連結
する。"Operation" A suction source is connected to the rear end of the air flow path of the suction 71' nozzle member.
ノズル先端は多数の小径孔の集合となっていて、ワーク
の吸着面１−にはノズル先端の前記小径孔が広く分布し
て開１１シており、ワークの吸着面の方向に圧力勾配が
生じないから、吸着の際ワークか横方向にずれることが
ない、すなわち、ワークの吸着表面に生ずる圧力勾配は
、ワーク表面と吸着ノズル部材の先端との間に生ずる面
方向の気流に起因するのであるが、本吸着ノズル部材で
は、このような気流が生じない。The tip of the nozzle is a collection of many small-diameter holes, and the small-diameter holes at the tip of the nozzle are widely distributed and open on the suction surface of the workpiece, creating a pressure gradient in the direction of the suction surface of the workpiece. Therefore, the workpiece does not shift laterally during suction. In other words, the pressure gradient that occurs on the suction surface of the workpiece is due to the lateral airflow that occurs between the workpiece surface and the tip of the suction nozzle member. However, in this suction nozzle member, such airflow does not occur.
「実施例」 以下、図面に基づき本発明の一実施例を説明する。"Example" Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図〜第３図は本発明の一実施例を示している。1 to 3 show an embodiment of the present invention.
吸着ノズル部材１０は、第１図に示すように、円筒形に
成された）、（体１１と、その後端部に設けられた吸引
源である真空ポンプ側に開口する真空後・」１開口１４
と、先端部に設けられ、多数の小径孔１７からなるノズ
ル先端１６と、前記真空吸引開口１４と前記ノズル先端
１６とを連通ずる基体１１の中心部に穿設された空気流
路１３とから成っている。The suction nozzle member 10 has a cylindrical shape, as shown in FIG. 14
, a nozzle tip 16 provided at the tip and consisting of a large number of small diameter holes 17, and an air flow path 13 bored in the center of the base body 11 that communicates the vacuum suction opening 14 and the nozzle tip 16. It has become.
ノズル先端１６の小径孔１７はモ坦に仕上げられた吸着
面１２に開口して、第２図に見るように、該吸着面１２
−杯に分４ｔ Ｌ／て配列されており、しかも隣接する
各小径孔１７は互いに近接して設けられている。なお第
２図に破線にて示される円形は空気流路１３のノズル背
面１８における内径である。また鎖線にて示されるのは
、ワークＷの一例である。The small diameter hole 17 of the nozzle tip 16 opens into the smooth suction surface 12, and as shown in FIG.
- The holes 17 are arranged at intervals of 4t L/, and the adjacent small-diameter holes 17 are provided close to each other. Note that the circle indicated by the broken line in FIG. 2 is the inner diameter of the air flow path 13 at the nozzle back surface 18. Moreover, what is shown by the chain line is an example of the workpiece W.
ス（体１１の先端近傍は、この吸着ノズル部材ＩＯをピ
ックアップアームなどの先端に嵌着するとき精確な当り
になるよう、先端テーバ部１５に形成されている。(The vicinity of the tip of the body 11 is formed into a tip tapered portion 15 so as to provide accurate contact when the suction nozzle member IO is fitted to the tip of a pickup arm or the like.
一方真空吸引開口１４の開く後端部外周には真空ホース
Ｈに挿嵌されて係止するよう段付継手１９に形成されて
いる。On the other hand, a stepped joint 19 is formed on the outer periphery of the open rear end of the vacuum suction opening 14 so as to be inserted into and locked with the vacuum hose H.
吸ノーノズル部材１０は、例えば第３図に示すような搬
送装置２０に使用される。The suction nozzle member 10 is used, for example, in a conveying device 20 as shown in FIG.
すなわち、ピックアンドプレース２１に、旋回および伸
縮して適宜な位置に停止可能なピックアップアーム２２
が支持され、このピックアップアーム２２の先端に吸着
ノズル部材１０を装置する一方１台座２３にも吸着ノズ
ル部材１０を対向して装着する。That is, a pick-up arm 22 that can rotate, extend and contract, and stop at an appropriate position is installed in the pick-and-place 21.
is supported, and the suction nozzle member 10 is mounted on the tip of the pickup arm 22, while the suction nozzle member 10 is also mounted on the pedestal 23 facing each other.
」−下の吸着ノズル部材１０．１０には切替バルブ２４
を介して吸引源である真空ポンプ２５が接続している。”-The lower suction nozzle member 10.10 has a switching valve 24.
A vacuum pump 25, which is a suction source, is connected via.
対象ワークＷは例えば、０．３ｍｓ口て板厚０．２Ｈの
ウェハチップである。The target workpiece W is, for example, a wafer chip with a width of 0.3 ms and a thickness of 0.2H.
次に作用を説明する。Next, the effect will be explained.
真空ポンプ２５が台座２３の吸着ノズル部材ｌＯを吸引
するよう切持バルブ２４を切り替えておき、吸７１′ノ
ズル部材１０の吸着面１２に対象ワークＷを吸引させて
おく。The holding valve 24 is switched so that the vacuum pump 25 sucks the suction nozzle member 10 of the pedestal 23, and the target workpiece W is sucked into the suction surface 12 of the nozzle member 10 of suction 71'.
次に、木モな姿勢のワークＷの上方からピックアップア
ーム２２側の吸着ノズル部材１０のノズル先端１６を近
付けていく。このノズル先端１６の吸着面１２が対象ワ
ークＷに柔らかく接触したら切替バルブ２４を切り替え
、台座２３側の吸着ノズル部材ｌＯの接続は断ち、ピッ
クアップアーム２２側の吸着ノズル部材ＩＯに真空ポン
プ２５を接続させる。Next, the nozzle tip 16 of the suction nozzle member 10 on the pickup arm 22 side is brought closer to the workpiece W in a wooden posture from above. When the suction surface 12 of the nozzle tip 16 comes into soft contact with the target workpiece W, the switching valve 24 is switched, the suction nozzle member IO on the pedestal 23 side is disconnected, and the vacuum pump 25 is connected to the suction nozzle member IO on the pickup arm 22 side. let
真空ポンプ２５か接続した吸着ノズル部材ｌＯのノズル
先端１６は第２図に示すように、非常に微細な小径孔１
７を多数に、しかも対象とするワークＷよりも広い範囲
に配設したものてあり、かつ各小径孔１７は互いに近接
して穿設されているから、小さなワークＷが空気流路１
３に吸い込まれることはない。As shown in FIG. 2, the nozzle tip 16 of the suction nozzle member lO connected to the vacuum pump 25 has a very fine small diameter hole 1.
7 are arranged in large numbers over a wider area than the target workpiece W, and the small diameter holes 17 are bored close to each other, so that the small workpiece W can be placed in the air flow path 1.
Don't get sucked into 3.
そして、ワークＷの上面と吸着ノズル部材１０の吸着面
１２のうちの、小径孔１７の設けられていない平面とか
広く重なることは無いから、ワークＷ表面に分布圧力の
傾斜が生じることがなく、したがって吸引の際にワーク
Ｗか位置ずれを起すことかない。Since the upper surface of the workpiece W and the plane of the suction surface 12 of the suction nozzle member 10 where the small-diameter hole 17 is not provided do not overlap widely, there is no inclination of the distributed pressure on the surface of the workpiece W. Therefore, the workpiece W will not be misaligned during suction.
上の吸着ノズル部材ｌＯに吸着された対象ワークＷはピ
ックアップアーム２２が上昇旋回して搬送する。The target workpiece W attracted by the upper suction nozzle member IO is conveyed by the pick-up arm 22 pivoting upward.
なお、実験的にピラフアップアーム２２の先端の吸１１
ノズル部材１０を再度台座２３側の吸着ノズル部材ｌＯ
のにに対向位置させ、切替バルブ２４を＋ｉｉｊ記とは
逆に切り（）えて台座２３側の吸着ノズル部材１０の吸
着面１２の小径孔１７゜１７・・・に対象ワークＷを吸
着させ、３０倍のスコープて観察したところ、対象ワー
クＷの位ｌずれはなく、高精度のハンドリングに対し好
結果を有することか認められた。In addition, experimentally, the suction 11 at the tip of the pilaf up arm 22
Place the nozzle member 10 again on the suction nozzle member lO on the pedestal 23 side.
, the switching valve 24 is switched in the opposite direction to +iii, and the target workpiece W is adsorbed to the small diameter hole 17° 17 of the suction surface 12 of the suction nozzle member 10 on the pedestal 23 side. When observed with a 30x magnification scope, it was found that there was no displacement of the target workpiece W, indicating that good results were obtained for high-precision handling.
なお、実験は、−２５０■■Ｈｇ、小径孔直径０．０６
ｍｍ、 ワーク屯：Ｊ０．０９１ｍｇ”’Ｃ行ナイ。The experiment was carried out at -250■■Hg and a small hole diameter of 0.06.
mm, Work ton: J0.091mg"'C line nai.
１．１算１−小径孔１個当りの吸着力は約９１ｇであっ
た。The adsorption force per small diameter hole was approximately 91 g based on the calculation of 1.1.
なお、前記実施例では、吸着ノズル部材を対向して配置
した搬送装置を例示したか、一方の吸着ノズル部材をや
め、他の１段で位置決めして保持するものであってもよ
いことは言うまてもない。In addition, in the above embodiment, a conveying device in which the suction nozzle members are arranged facing each other is illustrated, but it should be noted that one suction nozzle member may be omitted and the other suction nozzle member may be positioned and held in one stage. Sorry.
「発明の効果」
本発明に係る吸着ノズル部材によれば、ノズル先端を多
数の小径孔の集合に構成し、しかも対象とするワークよ
りも広い範囲に分布するようにしたから、ワーク上面に
平行な気流が生じることがなく、ワークを吸引するとき
に位置ずれを生じることがない、したかってワークを吸
引して他に移送して定置したときにも精確に位置決めて
きて、高価な位置検出装置や、生じたずれを修正するた
めの専用装置を必要としない。"Effects of the Invention" According to the suction nozzle member according to the present invention, the nozzle tip is configured with a large number of small diameter holes, which are distributed over a wider range than the target workpiece, so that the nozzle tip is parallel to the upper surface of the workpiece. There is no air current generated, and there is no positional deviation when suctioning the workpiece.This means that even when the workpiece is suctioned, transferred to another location, and placed in a fixed position, it is accurately positioned, and does not require expensive position detection equipment. There is no need for special equipment to correct the deviations that occur.
第１図および第２図は本発明の一実施例を示しており、
第１図は吸着ノズル部材の縦断面図、第２図はノズル先
端の正面［Ａ、第３図は搬送装置の概念図、第４図は従
来の吸着ノズル部材の作用説明図である。
１０・・・吸着ノズル部材 １１・・・基体１２−・
・吸着モ坦面 １３−・・空気流路１４・・・真
空吸引開口 １５・・・先端テーバ部１６−・・ノ
ズル先端 １７−・・小径孔１８・・・ノズル背
面 １９・・・段付継手代理人ブｌ’ｆ’ｉｊ
Ｌ ’ｉｌｌ；月” ＜８双、”ｉ第１図
第２図
１６ノス７Ｌ先馬1 and 2 show an embodiment of the present invention,
FIG. 1 is a longitudinal sectional view of the suction nozzle member, FIG. 2 is a front view of the nozzle tip [A, FIG. 3 is a conceptual diagram of a conveying device, and FIG. 4 is an explanatory diagram of the operation of a conventional suction nozzle member. 10... Adsorption nozzle member 11... Base body 12-...
・Adsorption flat surface 13-...Air flow path 14...Vacuum suction opening 15...Top tapered part 16-...Nozzle tip 17-...Small diameter hole 18...Nozzle back surface 19...Stepped joint agent bl'f'ij
L'ill;Moon"<8 pairs, "i Figure 1 Figure 2 16 Nos 7L first horse
Claims (1)
、 吸引源に接続する空気流路を有する基体の先に対象の吸
着面を有するノズル先端を設け、 前記ノズル先端は、前記空気流路の先で開口し、対象と
するワークよりも広い範囲に分布する多数の小径孔を穿
設して成ることを特徴とする吸着ノズル部材。[Scope of Claims] A suction nozzle member that suctions and conveys a minute object, the nozzle tip having a suction surface for the object is provided at the tip of a base body having an air flow path connected to a suction source, the nozzle tip comprising: A suction nozzle member characterized in that the suction nozzle member is formed by drilling a large number of small diameter holes that open at the end of the air flow path and are distributed over a wider area than the target workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14975688A JPH01321171A (en) | 1988-06-17 | 1988-06-17 | Adsorbing nozzle member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14975688A JPH01321171A (en) | 1988-06-17 | 1988-06-17 | Adsorbing nozzle member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01321171A true JPH01321171A (en) | 1989-12-27 |
Family
ID=15482063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14975688A Pending JPH01321171A (en) | 1988-06-17 | 1988-06-17 | Adsorbing nozzle member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01321171A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5516125A (en) * | 1994-11-30 | 1996-05-14 | Texas Instruments Incorporated | Baffled collet for vacuum pick-up of a semiconductor die |
| JPH08150586A (en) * | 1994-11-29 | 1996-06-11 | Japan Aviation Electron Ind Ltd | General purpose suction type robot hand |
| CN111107738A (en) * | 2018-10-29 | 2020-05-05 | 株式会社富士 | Suction nozzle and component mounting machine |
-
1988
- 1988-06-17 JP JP14975688A patent/JPH01321171A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08150586A (en) * | 1994-11-29 | 1996-06-11 | Japan Aviation Electron Ind Ltd | General purpose suction type robot hand |
| US5516125A (en) * | 1994-11-30 | 1996-05-14 | Texas Instruments Incorporated | Baffled collet for vacuum pick-up of a semiconductor die |
| CN111107738A (en) * | 2018-10-29 | 2020-05-05 | 株式会社富士 | Suction nozzle and component mounting machine |
| CN111107738B (en) * | 2018-10-29 | 2023-03-21 | 株式会社富士 | Suction nozzle and component mounting machine |
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