JPH0131657B2 - - Google Patents

Info

Publication number
JPH0131657B2
JPH0131657B2 JP57061808A JP6180882A JPH0131657B2 JP H0131657 B2 JPH0131657 B2 JP H0131657B2 JP 57061808 A JP57061808 A JP 57061808A JP 6180882 A JP6180882 A JP 6180882A JP H0131657 B2 JPH0131657 B2 JP H0131657B2
Authority
JP
Japan
Prior art keywords
ion
cathode
anode
ion source
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57061808A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58178943A (ja
Inventor
Kazuo Takayama
Katsuhiko Sunago
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai University
Ulvac Inc
Original Assignee
Tokai University
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai University, Nihon Shinku Gijutsu KK filed Critical Tokai University
Priority to JP57061808A priority Critical patent/JPS58178943A/ja
Publication of JPS58178943A publication Critical patent/JPS58178943A/ja
Publication of JPH0131657B2 publication Critical patent/JPH0131657B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
JP57061808A 1982-04-15 1982-04-15 イオン源 Granted JPS58178943A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57061808A JPS58178943A (ja) 1982-04-15 1982-04-15 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57061808A JPS58178943A (ja) 1982-04-15 1982-04-15 イオン源

Publications (2)

Publication Number Publication Date
JPS58178943A JPS58178943A (ja) 1983-10-20
JPH0131657B2 true JPH0131657B2 (cs) 1989-06-27

Family

ID=13181754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57061808A Granted JPS58178943A (ja) 1982-04-15 1982-04-15 イオン源

Country Status (1)

Country Link
JP (1) JPS58178943A (cs)

Also Published As

Publication number Publication date
JPS58178943A (ja) 1983-10-20

Similar Documents

Publication Publication Date Title
US5215703A (en) High-flux neutron generator tube
US4608513A (en) Dual filament ion source with improved beam characteristics
US4412153A (en) Dual filament ion source
JP2724464B2 (ja) イオン源装置
EP0095311B1 (en) Ion source apparatus
CN114471154B (zh) 同位素电磁分离器的离子源及其弧放电结构
US5821677A (en) Ion source block filament with laybrinth conductive path
US4891525A (en) SKM ion source
JPH0131657B2 (cs)
US4004172A (en) Gas discharge electron gun for generating an electron beam by means of a glow discharge
US4931698A (en) Ion source
JPH0353402Y2 (cs)
JP4029495B2 (ja) イオン源
JPS6321879Y2 (cs)
US4123684A (en) Thyratrons
US4839554A (en) Apparatus for forming an electron beam sheet
JP2569913Y2 (ja) イオン注入装置
JPS5740845A (en) Ion beam generator
JP2720971B2 (ja) ホローカソード型イオン源
RU2792635C2 (ru) Газоразрядный источник электронов
GB2070853A (en) Parallel-connected cathode segment arrangement for a hot cathode electron impact ion source
RU2035790C1 (ru) Полый катод плазменного эмиттера ионов
SU971022A1 (ru) Источник электронов со взрывным катодом
JPS6229862B2 (cs)
JPH08111198A (ja) イオン源