JPH013035A - Film formation method - Google Patents
Film formation methodInfo
- Publication number
- JPH013035A JPH013035A JP62-157630A JP15763087A JPH013035A JP H013035 A JPH013035 A JP H013035A JP 15763087 A JP15763087 A JP 15763087A JP H013035 A JPH013035 A JP H013035A
- Authority
- JP
- Japan
- Prior art keywords
- glass plate
- film
- glass
- forming
- flexible member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 18
- 230000015572 biosynthetic process Effects 0.000 title description 9
- 239000011521 glass Substances 0.000 claims description 65
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000010408 film Substances 0.000 description 42
- 238000004544 sputter deposition Methods 0.000 description 14
- 230000000873 masking effect Effects 0.000 description 5
- 239000005340 laminated glass Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 210000001624 hip Anatomy 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、所要形状に切断されたガラス板表面に膜を形
成するに際し、膜をガラス板周縁部に形成させないよう
にするとともにガラス板の裏面まで被膜を形成させない
ようにする１漠の形成方法に関するものであり、特に透
明導電性膜等をスパッタリング法により前記ガラス板、
ことに曲げガラス板の周縁部を残して形成する際に適し
、車輌用、建築用合せ、複層ガラス等、より機能的ガラ
ス板を提供する際に好適な膜形成手段を提供するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention prevents the formation of a film on the periphery of the glass plate when forming a film on the surface of a glass plate cut into a desired shape, and also prevents the formation of a film on the glass plate. The present invention relates to a method for forming a film on the glass plate by sputtering a transparent conductive film, etc., to avoid forming a film on the back surface.
It is particularly suitable for forming bent glass sheets with the peripheral edges left intact, and provides a film forming means suitable for providing more functional glass sheets such as laminated glass for vehicles, architectural laminated glass, double glazing, etc. .
また、スパッタリング法以外の成膜法である蒸着法、Ｃ
ＶＤ法等にも広く採用し得るものである。In addition, evaporation method, which is a film forming method other than sputtering method, C
It can also be widely adopted in VD methods and the like.
従来、車輌用のリヤウィンドガラスにおいては防曇ある
いはアンテナ等の機能を持ったものが広く採用されてお
り、その付与手段としてはガラス表面上に導電性ペース
トをスクリーン印刷して端子部と発熱用線条部を設けて
焼付ける方法あるいは合せガラスの合せ面側に極微細線
を埋め込む方法によっているが、最近では車輌用のフロ
ントガラス等においても前記防曇効果等に加えて熱線反
射機能をも持たせることができる金属ｉ！ＩＩ！！２等
多機能の透明導電膜を前記合せ面側ガラス表面に設ける
構成の合せガラスが採用されてきている。該透明導電膜
を形成する手段としては蒸着法、ＣＶＤ法等、近年では
スパッタリング法も用いられ、耐熱性の点で該透明導電
膜は曲げ加工後のガラス板表面上に形成する必要があり
、使用時の車輌本体との絶縁の点および前記透明導電膜
の接着性と耐久性の点でガラス板の周縁部すなわち端面
より例えば数龍除いて膜を形成する必要があるものであ
る。Traditionally, rear window glass for vehicles has been widely used to have functions such as anti-fog or antenna functions, and the means for applying this is by screen printing a conductive paste on the glass surface to form terminals and heat generating parts. This method involves creating striations and baking them, or embedding ultra-fine wires into the laminated surface of laminated glass.Recently, windshields for vehicles, etc., have a heat ray reflective function in addition to the anti-fog effect. Metal i that can be used! II! ! Laminated glass having a structure in which a secondary multi-functional transparent conductive film is provided on the surface of the glass on the mating surface side has been adopted. Methods for forming the transparent conductive film include vapor deposition, CVD, and in recent years, sputtering, and in terms of heat resistance, the transparent conductive film must be formed on the surface of the glass plate after bending. In terms of insulation from the vehicle body during use and the adhesion and durability of the transparent conductive film, it is necessary to form the film on the peripheral edge, that is, the end surface of the glass plate, excluding, for example, several lengths.
一方、建築用窓ガラスにおいても、例えば複層ガラスの
密閉空間に面したガラス表面上に熱線反射機能をもたせ
たフィルムを封着部を除いて貼着することが実開昭５６
−７００７９号公報に記載されており、さらに特開昭５
９−４５９４７号公報あるいは実開昭６１−７５３９号
公報には、複層ガラスにおいて、蒸着法、スパッタリン
グ法で金属薄膜等の熱線反射膜あるいは通電加熱膜を形
成するなかで、該膜被覆を全ガラス仮友面上にした後、
ガラス板周辺部あるいは周縁部の被ｊ模をトリミング等
の手段で取除いて複ｊ′ｈＪ化することが記載されてい
る。On the other hand, in the case of architectural window glass, for example, a film with a heat ray reflection function is pasted on the glass surface facing the closed space of double-glazed glass, excluding the sealing part.
-70079, and also in JP-A No. 5
Publication No. 9-45947 or Japanese Utility Model Application No. 61-7539 discloses that when forming a heat ray reflective film such as a metal thin film or an electrically heated film in double-layer glass using a vapor deposition method or a sputtering method, the film coating is completely removed. After putting on the glass mask,
It is described that the periphery or periphery of the glass plate is removed by means such as trimming to form a double j'hJ.
上述したように、ガラス板周縁部を除いて膜を形成する
手段としては従来単に膜形成側のみのマスキングテープ
貼着、成膜後の取除き等が通常用いられているものであ
った。As mentioned above, as a means for forming a film except for the peripheral edge of a glass plate, methods such as merely applying a masking tape only on the film forming side and removing the film after film formation have been conventionally used.
さらにまた、例えば、曲げガラス板にスバ・ツタリング
法で透明導電膜等を形成する際の搬送架台としては、基
台上に上面周縁部にマスキングテープを貼着した曲げガ
ラスを直接載置し、スパッタリングチャンバー内に搬送
するようになっていた。Furthermore, for example, as a transport stand when forming a transparent conductive film or the like on a bent glass plate by the suba-tuttering method, the bent glass with masking tape attached to the upper surface periphery is directly placed on the base. It was designed to be transported into a sputtering chamber.
前述したように、個々のガラス板ごとにマスキングテー
プを所要部分に貼り付ける作業あるいは所要部分のみト
リミング等で成膜した後取り除く作業については煩雑で
手間がかかり非能率であるものであった。また、種々の
異なる形状の曲げガラス板等を基台上に直接載置した際
、ガラスと基台の曲率が必ずしもすべて合致するもので
はく場合によってはガラス板Ｉ″ｌ縁部の裏面側まで被
膜が形成されるようなことがあったりして品質上も好ま
しくないこともあった。As mentioned above, the work of applying masking tape to the required parts of each glass plate, or the work of forming a film only on the required parts by trimming, etc., and then removing it is complicated, time-consuming, and inefficient. In addition, when bent glass plates of various different shapes are placed directly on the base, the curvatures of the glass and the base do not necessarily match, and in some cases, the curvature of the glass plate I In some cases, a film may be formed, which is unfavorable in terms of quality.
さらにマスキングテープは使い捨てのため不経済でもあ
った。またさらに、真空チャンバー内へガラス板を入れ
るため真空と大気圧との繰返し操作を行うことになり、
切換時における気流の乱れにより曲げガラス板等がバタ
ツキを生じ、時としては破損につながる場合もあるもの
であった。Furthermore, masking tape was disposable and therefore uneconomical. Furthermore, in order to insert the glass plate into the vacuum chamber, repeated operations between vacuum and atmospheric pressure are required.
The turbulence of the airflow during switching causes the bent glass plates and the like to flap, sometimes leading to breakage.
本発明は、従来のかかる欠点に鑑みてなしたものであっ
て、四辺の枠部材から対応する二辺にそれぞれ少なくと
も２個のたるみをもった可撓性の帯状ガラス板支持部材
を設けて、該支持部材をガラス板の大きさ、形状等に対
応して移動し、該ガラス板周縁部にキャップした可撓性
部材が充分当接するようにガラス板を支持部材上に載置
することによって、簡単に周縁部表裏両面をカバーし得
て確実に周縁部に腰を形成させない模の形成方法を提供
するものである。The present invention has been made in view of the conventional drawbacks, and includes providing flexible band-shaped glass plate support members each having at least two slacks on two corresponding sides of the four-side frame member, By moving the support member according to the size, shape, etc. of the glass plate, and placing the glass plate on the support member so that the flexible member capped on the peripheral edge of the glass plate is in sufficient contact with the glass plate. To provide a method for forming a pattern which can easily cover both the front and back surfaces of a peripheral edge part and reliably prevent the formation of waists in the peripheral edge part.
すなわち、本発明は所要形状のガラス板周縁部に着脱自
在な可撓性部材を嵌合せしめて、搬送架台のガラス板支
持部材上に載置して膜を形成することを特徴とする膜の
形成方法を提供するものである。That is, the present invention provides a method for forming a film, which is characterized in that a removable flexible member is fitted to the peripheral edge of a glass plate having a desired shape, and the film is formed by placing the film on a glass plate support member of a transport frame. The present invention provides a method.
ここで、可撓性部材としては溝付きのシリコンゴムある
いはフッ素樹脂製等が好ましいものであるが、可撓性、
耐熱性、非付着性および耐化学薬品性等を有しているも
の、すなわち、スパッタリング処理等の繰返しに対して
性状変化が少ないものであれば採用し得るものである。Here, it is preferable that the flexible member is made of grooved silicone rubber or fluororesin.
Any material can be used as long as it has heat resistance, non-adhesive property, chemical resistance, etc., that is, material whose properties do not change much with repeated sputtering treatments and the like.
なお、可撓性部材の下部には弾力性をもたせしめるとか
、あるいは突起部を設ける等、これに類する部材または
形状を設けることが、仮令ガラス支持部材と隙間が生じ
たとしてもカバーできて好ましいものであり、さらに、
可撓性部材の上面の端部はテーバ−加工を施した方が成
膜時における膜の境界部分の厚みむらを解消でき好まし
いものである。It should be noted that providing elasticity at the bottom of the flexible member, or providing a similar member or shape such as a protrusion can cover any gaps that may arise with the temporary glass support member. It is preferable, and furthermore,
It is preferable that the ends of the upper surface of the flexible member be subjected to a tapering process to eliminate uneven thickness at the boundary portion of the film during film formation.
また、ガラス板支持部材としては、ステンレス、アルミ
ニウムあるいはフッ素樹脂等、可撓性、耐熱性などを有
し、スパッタリング処理等の繰返し使用に耐えるもので
あればよく、薄い帯状体から成り、四辺の枠部材から対
応する二辺にそれぞれ少なくとも２個のたるみをもたせ
た帯状体を架設し、しかもガラス板の大きさおよび形状
等によってそれぞれ移動可能に取り付けてあり、ガラス
板周縁部にキャップした可撓性部材と整合して充分当接
するようにすることができるものであり、さらに、ガラ
ス板周縁部がガラス板支持部材と重なる部分の寸法は約
１０１くらいが好ましいものである。The glass plate supporting member may be made of stainless steel, aluminum, fluororesin, etc., as long as it has flexibility, heat resistance, etc., and can withstand repeated use such as sputtering treatment. At least two strips with slack are installed on each of the two corresponding sides from the frame member, and each is attached movably depending on the size and shape of the glass plate, and a flexible band is provided with a cap on the periphery of the glass plate. Furthermore, the dimension of the portion where the peripheral edge of the glass plate overlaps with the glass plate supporting member is preferably about 101 mm.
なお、帯状体のたるみの間接については適時枠部材に弾
力性のある部材をもちいてその張り具合によってもよい
し、あるいは帯状体のそれぞれにａ接部材を取り付けて
行ってもよく、さらに、帯状体およびガラス板のセント
後の固定についても必要に応じて止め具等を用いてもよ
いことは言うまでもない。In addition, for indirection of slack in the belt-shaped body, it is possible to use an elastic member in the frame member and adjust its tension, or to attach an a-contact member to each of the belt-shaped bodies. It goes without saying that fasteners or the like may be used to secure the body and the glass plate after they are fixed, if necessary.
さらに、膜形成の方法としては、スパッタリング法が好
ましいが、蒸着法、ＣＶＤ法等を含み、任意に通用でき
るものである。Further, as a method for forming the film, a sputtering method is preferable, but any method can be used, including a vapor deposition method, a CVD method, and the like.
以下本発明の一実施例を図に基づいて説明する。 An embodiment of the present invention will be described below based on the drawings.
第１図は、スパッタリング装置（図示４ず）内へ搬送す
る前におけるガラス板７を搬送架台１のガラス板支持部
材６ａ、６ｂ、 ６ｃ、、６ｄ上に載置した状態を示す
斜視図であり、搬送架台１は切欠き部３を有する基台２
の所要位置にある四辺形の四角に脚部材４を配設し、該
脚部材４の上部に枠部材５を設けてそれぞれ連結した状
態とし、該枠部材５からなる四辺において相対する二辺
を結び移動可能な帯状体のガラス板支持部材６ａ、 ６
ｂ、 ６ｃ、 ６ｄをたるんだ状態で架設して取り付け
、該支持部材で形成する中央部に、周縁部にキャップさ
れた可撓性部材８が充分型なり合って整合当接するよう
にガラス板７を載置したもので、セントを完了した状態
を示すものであり、この状態でこの１般送架台１をスパ
ッタリング装置内に移送し、ガラス板７のマスクされた
部分を除く全上面に、例えば金属薄膜、全屈酸化膜等の
透明導電膜、種々の多層膜などをスパッタリング法で形
成した。FIG. 1 is a perspective view showing a state in which the glass plate 7 is placed on the glass plate supporting members 6a, 6b, 6c, 6d of the conveying frame 1 before being conveyed into the sputtering apparatus (not shown). , the transport frame 1 has a base 2 having a notch 3
The leg members 4 are arranged in the squares of the quadrilateral at the required positions, and the frame members 5 are provided on the upper part of the leg members 4 to connect them, and the two opposing sides of the four sides of the frame members 5 are Glass plate support members 6a, 6 in the form of a tied and movable band
b, 6c, and 6d are erected and attached in a slack state, and a glass plate 7 is attached to the center portion formed by the support member so that the flexible member 8 capped at the peripheral portion is aligned and abutted sufficiently. This shows the state in which the centrifugation has been completed. In this state, the general feeding frame 1 is transferred into the sputtering apparatus, and the entire upper surface of the glass plate 7 except the masked part is coated with, for example, Metal thin films, transparent conductive films such as fully reflective oxide films, and various multilayer films were formed by sputtering.
その結果、ガラス板の周縁部の所要部分を除き、膜の境
界部分もハツキリと厚みむらもなく、全面に均一に成膜
でき、ガラス板の裏面に被膜することもなく、安定して
膜の形成ができた。As a result, the film can be formed uniformly over the entire surface, with no chips or uneven thickness at the boundary of the film, except for the required areas around the periphery of the glass plate, and there is no coating on the back side of the glass plate, resulting in stable film formation. The formation was completed.
なお、基台の切欠き部は、ガラス板の検知を行うもので
ある。Note that the notch in the base is used to detect the glass plate.
第２図は、第１図のＡ −Ａ’部分の断面図であり、ガ
ラス板支持部材６ａ、６ｂ、 ６ｃ、 ６ｄに可撓性部
材８が充分密着して当接しガラス板７に整合して合致せ
しめることを示す断面図である。FIG. 2 is a cross-sectional view taken along the line A-A' in FIG. FIG.
第３図は、透明導電膜を形成後、スパッタリング装置内
から取り出した可撓性部材８を取り除く前のガラス板７
を示す斜視図である。FIG. 3 shows the glass plate 7 taken out from the sputtering apparatus after forming a transparent conductive film and before removing the flexible member 8.
FIG.
第４図は、ガラス板７の周縁部にテーパ一部９付の可撓
性部材８をキャップし透明導電膜を形成したところの部
分拡大断面図である。FIG. 4 is a partially enlarged cross-sectional view of the peripheral edge of the glass plate 7 in which a flexible member 8 with a tapered portion 9 is capped to form a transparent conductive film.
前述したように、本発明によれば、ガラス板の周縁部に
キャップした可撓性部材とたるんだ状態で余裕をもたせ
ガラス板の曲率等積々の形状に適用可能な′？？Ｊ膜帯
状体のガラス板支持部材を当接するようにして膜の形成
を行うので、スパッタリング処理における種々の環境変
化に対しても、可撓性部材とガラス板支持部材とがよく
合致して隙間を生じさせないため、ガラス板およびガラ
ス板支持部材のバタツキ、破損がなく、ガラス板の裏面
までスパッタリング膜が形成されるような不都合もなく
、ガラス板も曲げガラス等の種々大きさ、形状に対して
ガラス板支持部材の影響を受けることがなく、熱的ある
いは機械的等積々の点で好ましいものであり、ガラス板
周縁部の膜境界部においても膜厚が均一になるという効
果をも奏するものである。As described above, according to the present invention, the flexible member capped on the peripheral edge of the glass plate has a slack state and is applicable to various shapes such as the curvature of the glass plate. ? Since the film is formed by bringing the glass plate supporting member of the J membrane strip into contact with each other, the flexible member and the glass plate supporting member are well matched and there is no gap even when various environmental changes occur during the sputtering process. Therefore, there is no flapping or damage of the glass plate and the glass plate support member, and there is no inconvenience such as a sputtering film being formed on the back side of the glass plate, and the glass plate can be used for various sizes and shapes such as bent glass. It is preferable in terms of thermal and mechanical stability, as it is not affected by the glass plate support member, and also has the effect of making the film thickness uniform even at the film boundary at the peripheral edge of the glass plate. It is something.
また、マスキング作業の効率が格段に向」二するととも
に、可撓性部材も繰返し使用でき極めて経済的である。Furthermore, the efficiency of masking work is greatly improved, and the flexible member can be used repeatedly, making it extremely economical.
図面は本発明の一実施例を示すものであり、第１図は’
ｔｉ］撓性部付性部材部にキャンプしたガラス板を搬送
架台上に載置した斜視図、第２図は第１図のＡ −Ａ’
部分の断面図、第３図は成膜後のガラス板の斜視図、第
４図は第３図のＢ−Ｂ部分の部分拡大断面図である。
１・・搬送架台、２・・基台、４・・脚部材、６ａ、
６ｂ、６ｃ、６ｄ・・ガラス板文持部材、７・・ガラス
板、８・・可撓性部材、
９・・テーパ一部
特許出願人 セントラル硝子株式会社１、パ二：
第２図 第３図
を
第４図 ７The drawings show one embodiment of the present invention, and FIG.
ti] A perspective view of a glass plate camped on a flexible member part mounted on a conveyance frame, FIG. 2 is a perspective view of A-A' in FIG.
FIG. 3 is a perspective view of the glass plate after film formation, and FIG. 4 is a partially enlarged sectional view of the portion BB in FIG. 3. 1...Transportation frame, 2...Base, 4...Leg member, 6a,
6b, 6c, 6d...Glass plate holding member, 7...Glass plate, 8...Flexible member, 9...Taper Partial patent applicant Central Glass Co., Ltd. 1, Pani: Fig. 2 Fig. 3 Figure 4 7
Claims (1)
合せしめて、搬送架台のガラス板支持部材上に載置して
膜を形成することを特徴とする膜の形成方法。1. A method for forming a film, which comprises: forming a film by fitting a removably flexible member to the peripheral edge of a glass plate having a desired shape, and placing the flexible member on a glass plate support member of a transport frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62157630A JPH0645480B2 (en) | 1987-06-26 | 1987-06-26 | Membrane formation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62157630A JPH0645480B2 (en) | 1987-06-26 | 1987-06-26 | Membrane formation method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH013035A true JPH013035A (en) | 1989-01-06 |
| JPS643035A JPS643035A (en) | 1989-01-06 |
| JPH0645480B2 JPH0645480B2 (en) | 1994-06-15 |
Family
ID=15653922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62157630A Expired - Lifetime JPH0645480B2 (en) | 1987-06-26 | 1987-06-26 | Membrane formation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645480B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079856Y2 (en) * | 1990-05-30 | 1995-03-08 | セントラル硝子株式会社 | Transport stand |
| JPH0589334U (en) * | 1992-05-22 | 1993-12-07 | セントラル硝子株式会社 | Glass board carrier |
| DE4307382A1 (en) * | 1993-03-09 | 1994-09-15 | Leybold Ag | Mask for covering the radially outer region of a disk-shaped substrate surface |
| DE10006121C1 (en) | 2000-02-11 | 2001-05-23 | Sekurit Saint Gobain Deutsch | Glass pane coating station using cathode sputtering has a pane transport box or frame with a metal woven material against the rear surface of the glass to prevent the deposit of particles on the rear side of the pane |
| JP4688373B2 (en) * | 2001-09-18 | 2011-05-25 | 宇部興産株式会社 | Nylon resin molded joint for bonding and bonding method |
| WO2012090887A1 (en) * | 2010-12-27 | 2012-07-05 | 淀川ヒューテック株式会社 | Tray for placing plate in flat manner |
| FR3049943B1 (en) * | 2016-04-06 | 2020-08-28 | Saint Gobain | DEVICE FOR CONVEYING AND HOLDING SHEETS OF GLASS, IN PARTICULAR IN A WASHING INSTALLATION, AND PROCESS FOR IMPLEMENTATION |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0215261A3 (en) * | 1985-09-10 | 1989-07-05 | Balzers Aktiengesellschaft | Lens-mounting support, e.g. a moiunting support for ophthalmic lenses which have to be cleaned for a following coating process |
-
1987
- 1987-06-26 JP JP62157630A patent/JPH0645480B2/en not_active Expired - Lifetime
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