JPH01300525A - Drying method and device - Google Patents

Abstract

PURPOSE:To enable uniform and clean drying treatment in a short time, and to reduce the generation of defective bodies to be dried by previously preheating a body to be washed before drying treatment and spraying steam against the body to be washed. CONSTITUTION:A body to be dried 1 is heated by a heated liquid. The liquid may be sprayed or sprinkled by using a nozzle 3, a shower, etc., or the body 1 may also be dipped and heated in a warm bath tank 2 as the method. Consequently, free water and steam are replaced quickly even in the body to be dried 1 having large heat capacity, the drying time is shortened, and possibility in which dust adheres from environment on drying can be reduced. Accordingly, the drying time is shortened, the contamination of the surface of the body to be dried and unequal and insufficient drying on drying treatment are prevented, and the generation of defective bodies to be dried due to contamination and adhesion and uneven and imperfect drying can be diminished.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a surface drying device for electronic components, etc., and in particular to semiconductor wafers, glass substrates, and magnetic disks.

A suitable drying device 11 is used for drying the original disk, etc.

[Conventional technology]

As conventional drying apparatuses for electronic parts, etc., there are the following types.

(1) Rotary drying device: A device that rotates the object to be dried at high speed and removes adhering water 8 from the surface of the object by using the centrifugal force 8 generated at this time.

(2) Gas blowing is a drying device i: A method in which clean air, a gas such as nitrogen, or a heated gas is sprayed onto the surface of the object to be dried to blow off water adhering to the surface.

(5) Steam drying equipment rR: A device that places the object to be dried in the vapor of a solvent that easily evaporates, replaces the vapor with layered water, and dries it.

As for drying, please refer to the Precision Cleaning System Technology Collection for Semiconductors and Electronic Components, Realize Co., Ltd. (1986), Vol. 1.
Discussed on pages 35-138.

[Problems to be Solved by the Invention] The above-mentioned prior art does not give sufficient consideration to the following points, and as a result, drying takes a long time, or drying becomes uneven or insufficient. On the contrary, there were problems such as contamination of the surface of the object to be dried.

In other words, at the rotation line, the water that is shaken off by the rotation hits the inner wall of the drying chamber and bounces off as mist, which re-adheres to the surface of the object to be dried and contaminates it. There was a risk of damage.

When drying by blowing gas, it is difficult to evenly dry the surface of the object to be dried, and uneven drying tends to occur.

In steam drying, by placing the object to be dried in a steam tank,
- As the steam cools down over time, the position of the steam becomes lower than the position of the object to be dried. In particular, when the heat capacity of the object to be dried is large, it takes a long time for the water adhering to the surface of the object to be cleaned to be converted into steam, resulting in a problem that the drying time becomes long.

The purpose of the present invention is to reduce the influence of the heat capacity of the object to be dried and shorten the drying time, and also to prevent the surface of the object to be dried from being contaminated during dry storage treatment and drying to be uneven or insufficient. It is an object of the present invention to provide a method and an apparatus t8 that can prevent the drying process from occurring and reduce the occurrence of defects in the dried object due to contamination adhesion and uneven/insufficient drying.

[Means for solving the problem] The above object can be achieved by preheating the object to be cleaned before the drying process and then spraying the object with steam.

[Effect]

The object to be dried is heated with heated liquid. This method may be carried out by spraying or spraying using a nozzle or shower, or by immersing in a hot bath.

By performing such processing, the object to be dried is heated, so even if the object to be dried has a large heat capacity, the adhering water core is quickly replaced with vapor, and the drying time is shortened.
In addition, the risk of dust adhesion from the environment during drying can be reduced.

〔Example〕

Hereinafter, one embodiment of the present invention will be explained with reference to FIG. Drying room for 4. It consists of a transport mechanism 5 that transports the object to be dried 18. The hot tub 2 is filled with liquid 6, which is a heating medium, and in order to prevent contamination due to liquid, the hot tub has an overflow type liquid supply section that can supply the heating medium from the bottom. The hot tub 2 is equipped with a heater 8 for heating and keeping warm.The drying chamber 4 has a steam nozzle 3 for drying the beads and a heater 9 for keeping warm. The steam nozzle 3 is connected to a steam supply section 10 that supplies steam.Furthermore, a cooling chamber 12 with a cooling jacket 11 is installed above the drying chamber 4 to prevent steam from leaking outside. The floating body 1 to be washed is attached to the arm 15, and the hot tub 2
It is immersed in the liquid 6 inside. After performing t1< for a certain period of time and the temperature of the object 1 to be dried rises to the desired temperature, the object 1 to be dried is
is conveyed by the arm 137, and steam is blown onto the surface of the object 1 to be dried from the steam nozzle 5. As a result, water and liquid 6, which is a heat medium, layered on the surface of the drying bed 1,
is replaced with steam and removed, and the drying process is completed.

Another embodiment of the present invention will be described with reference to FIG.

The basic structure of the drying apparatus includes a liquid nozzle 14 for supplying a heat medium to heat the object 1 to be dried before drying processing, and a steam nozzle 5 for drying the heated object 1 to be dried. It consists of a transport mechanism 5 that transports the object to be dried 18. liquid nozzle 14
1 is connected to a liquid supply section 7 that supplies a heated heat medium, and a steam supply section 10 that supplies steam to the steam nozzle.
is connected to.

A heater 8 is installed in the drying room 4 to keep it warm.
A cooling chamber 12 equipped with a cooling jacket 11 may be installed above the drying chamber 4 to prevent steam from leaking outside.

The object to be cleaned 1 is attached to the arm 16 and positioned near the liquid nozzle 14 . From the liquid nozzle 14, the liquid 6 heated to a certain temperature or higher is supplied from the liquid supply section 7 to the surface ζ of the object 1 to be dried. Next, after the temperature of the object to be dried 1 rises to a required temperature, the object to be dried is conveyed by the arm 15, and steam is blown over the surface of the object to be dried 1 from the steam nozzle 5. As a result, the water adhering to the surface of the object to be dried 1 is replaced with steam and removed, and the drying process is completed.

The liquid serving as the heat medium in each of the above embodiments may be water, alcohols, halogenated organic solvents, etc., and preferably a liquid whose viscosity decreases when heated. The use of water is particularly desirable in terms of safety, environment, and hygiene. Water is used as the steam to dry the object to be dried.
Although it is preferable to use vapors such as alcohols and halogenated organic solvents, it is also possible to use heated air or an inert gas such as nitrogen gas instead of vapors. In particular, it is desirable to use water in consideration of safety, environment, hygiene, etc. In addition, it is preferable to use the same liquid as the heat medium and the same liquid as the steam. The obi structure shown in FIG. 5 is preferable.

The outlet of the steam nozzle is preferably a nozzle with equally spaced ζ holes or a slit-shaped nozzle as shown in FIG.

The relationship between the heating temperature and the amount of water attached when water is used as the heat medium and a φ5 inch disk is used as the object to be dried is shown in the fifth table.
Figure ζ is shown. The water temperature was varied from 25°C to 90°C, and the amount of water layered when each medium-sized disk was immersed and warmed was compared. When water is 172° and above 50°C, it becomes below 115. Therefore, when using water, the temperature is 40°
The temperature is preferably 50°C or higher, particularly 50°C or higher.

In addition, by increasing the temperature of the object to be dried before drying, the drying process can be performed quickly, cleanly, and uniformly.
For example, it is also effective to perform hot water washing at the final stage of the washing process before the drying process.

$1 A drying device with the configuration shown in the figure uses water as a heat medium and steam, and the temperature of the hot tub is 90°C and the temperature of the drying room is 200°C.
°C, a 5-inch aluminum disc can be dried within 830 seconds.At this time, the lifting speed from the hot tub to the drying room is 1.7 cm/S, and the steam is a mixture of water vapor and nitrogen. 25 l/min,! 00°
Drying was carried out by flowing C'''C.

〔Effect of the invention〕

The advantage of this invention is that it is possible to perform a uniform and clean drying process in a short period of time, resulting in uneven drying and defects in the dried object due to insufficient drying and contamination. It has the effect of reducing

[Brief explanation of the drawing]

Fig. 1 is a block diagram of one embodiment of the present invention, Fig. 2 is a block diagram of another embodiment of the present invention, Fig. 5 is the shape of a steam nozzle, and Fig. 4 is a diagram of the steam outlet of the steam nozzle. FIG. 5 is a diagram showing the relationship between the temperature of the object to be dried and the violet layer of water. 1... Object to be dried 2... Hot tub 5... Steam nozzle 4... Drying chamber 5... Transport mechanism section 6... Liquid 7... Liquid supply section 8... Heater 9 ...Heater 10...Steam HkN 1i...Jacket 1
2...Cooling room 1! l... Arm 14...Liquid nozzle Fig. 1 Fig. 2 Meeting

Claims (1)

[Claims] 1. A method for drying the surface of an object to be cleaned by blowing steam onto the object, characterized in that the object to be cleaned is preheated before drying the object to be cleaned. Drying method. 2. The drying method according to claim 1, wherein the preheating is performed by immersing the object to be cleaned in a hot bath. 3. The drying method according to claim 1, wherein the preheating is performed by spraying a heat medium supplied from a liquid nozzle. 4. The drying method according to claim 3, wherein the liquid nozzle sprays the heat medium onto both sides of the object to be cleaned. 5. A drying device comprising a heating section that preheats the object to be cleaned, and a drying chamber that dries the object that has been preheated by the heating section. 6. The drying apparatus according to claim 5, wherein the heating section is a hot bath having a heated liquid inside. 7. The drying device according to claim 5, wherein the heating section has a liquid nozzle that supplies the heated heat medium. 8. The drying apparatus according to claim 7, wherein the liquid nozzle is provided facing both sides of the object to be cleaned. 9. The drying apparatus according to claim 5, wherein the drying chamber includes a steam nozzle for spraying steam for drying the object to be cleaned. 10. The drying apparatus according to claim 9, further comprising a cooling chamber adjacent to the drying chamber for preventing leakage of the steam.