JPH0129670B2 - - Google Patents

Info

Publication number
JPH0129670B2
JPH0129670B2 JP58136520A JP13652083A JPH0129670B2 JP H0129670 B2 JPH0129670 B2 JP H0129670B2 JP 58136520 A JP58136520 A JP 58136520A JP 13652083 A JP13652083 A JP 13652083A JP H0129670 B2 JPH0129670 B2 JP H0129670B2
Authority
JP
Japan
Prior art keywords
handling
nozzle
sphere
shaft
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58136520A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6029295A (ja
Inventor
Shigeo Aoki
Shigekazu Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13652083A priority Critical patent/JPS6029295A/ja
Publication of JPS6029295A publication Critical patent/JPS6029295A/ja
Publication of JPH0129670B2 publication Critical patent/JPH0129670B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Manipulator (AREA)
JP13652083A 1983-07-26 1983-07-26 球体のハンドリングノズル Granted JPS6029295A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13652083A JPS6029295A (ja) 1983-07-26 1983-07-26 球体のハンドリングノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13652083A JPS6029295A (ja) 1983-07-26 1983-07-26 球体のハンドリングノズル

Publications (2)

Publication Number Publication Date
JPS6029295A JPS6029295A (ja) 1985-02-14
JPH0129670B2 true JPH0129670B2 (pm) 1989-06-13

Family

ID=15177094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13652083A Granted JPS6029295A (ja) 1983-07-26 1983-07-26 球体のハンドリングノズル

Country Status (1)

Country Link
JP (1) JPS6029295A (pm)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729269B2 (ja) * 1985-12-04 1995-04-05 松下電器産業株式会社 電子部品装着装置
JP2656020B2 (ja) * 1986-01-14 1997-09-24 キヤノン株式会社 堆積膜形成装置
JP2656021B2 (ja) * 1986-01-14 1997-09-24 キヤノン株式会社 堆積膜形成装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54180576U (pm) * 1978-06-12 1979-12-20

Also Published As

Publication number Publication date
JPS6029295A (ja) 1985-02-14

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