JPH01296421A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH01296421A
JPH01296421A JP12786688A JP12786688A JPH01296421A JP H01296421 A JPH01296421 A JP H01296421A JP 12786688 A JP12786688 A JP 12786688A JP 12786688 A JP12786688 A JP 12786688A JP H01296421 A JPH01296421 A JP H01296421A
Authority
JP
Japan
Prior art keywords
layer
magnetic pole
gap
thin film
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12786688A
Other languages
Japanese (ja)
Inventor
Hitoshi Takagi
均 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12786688A priority Critical patent/JPH01296421A/en
Publication of JPH01296421A publication Critical patent/JPH01296421A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To prevent the generation of the fluctuation in the base line of a reproduced output waveform and to improve recording and reproducing characteristics by lowering the height of a magneto-resistance effect element disposed between front end parts of two magnetic pole layers to the depth lower than the depth of the gap sandwiched directly by said ends. CONSTITUTION:The magneto-resistance effect element 31 which is laminated successively with the magnetic pole layer 12, a thin film coil 15 sandwiched by a gap layer 13 and an interlayer insulating layer 14, the 2nd magnetic pole layer 16, and a protective layer 17 and has the depth L of the gap depth Dg or below in the layer 13 is disposed on a nonmagnetic substrate 11. The 1st and 2nd magnetic pole layers 12, 16, therefore, function completely as a shielding magnetic material at the time of reproduction in the same manner as a shielded type material MR head in the constitution enclosing the element 31, by which the generation of the fluctuation in the base line of the reproduced output waveform is prevented and the problems such as increased waveform distortion and degraded recording density characteristic are solved.

Description

【発明の詳細な説明】 〔概 要〕 磁気ディスク装置、或いは磁気テープ装置等に用いられ
る再生用磁気抵抗効果素子を組込んだ記録・再生用の薄
膜磁気へノドに関し、 第一磁極層と第二磁極層磁極先端部で直接挟まれたギャ
ップ層におけるギャップ深さogと該ギャップ層中のM
R素子の高さLとの関係を適正化することにより、再生
出力波形の基線変動の発生を防止し、記録・再生特性の
向」−を図ることを目的とし、 第−磁極層と第二磁極層間に非磁性のギャップ層と薄膜
コイルが配設され、かつ該ギャップ層中に平坦な磁気抵
抗効果素子を有してなる薄膜磁気ヘッドであって、前記
ギャップ層中の磁気抵抗効果素子の素子高さを、該ギャ
ップ層による第一、第二磁極層の先端部で直接挟まれた
ギャップ層におけるギャップ深さより低くした構成とす
る。
[Detailed Description of the Invention] [Summary] This invention relates to a thin film magnetic head for recording and reproduction incorporating a magnetoresistive element for reproduction used in a magnetic disk device, a magnetic tape device, etc. Gap depth og in the gap layer directly sandwiched between the pole tips of the two magnetic pole layers and M in the gap layer
By optimizing the relationship with the height L of the R element, we aim to prevent baseline fluctuations in the reproduced output waveform and improve the recording/reproducing characteristics. A thin film magnetic head comprising a nonmagnetic gap layer and a thin film coil disposed between magnetic pole layers, and a flat magnetoresistive element in the gap layer, the magnetoresistive element in the gap layer having a flat magnetoresistive effect element. The element height is set to be lower than the gap depth in the gap layer directly sandwiched between the tips of the first and second magnetic pole layers.

〔産業上の利用分野] 本発明は磁気ディスク装置、或いは磁気テープ装置等に
用いられる薄膜磁気ヘッドに係り、特に再生用の磁気抵
抗効果素子を絹込んだ記録・再生用の薄膜磁気へノドに
関するものである。
[Industrial Field of Application] The present invention relates to a thin film magnetic head used in a magnetic disk device, a magnetic tape device, etc., and particularly relates to a thin film magnetic head for recording and reproducing in which a magnetoresistive element for reproducing is incorporated. It is something.

記録用のインダクティブ磁気ヘッドと再生用の磁気抵抗
効果素子とを一体に構成した記録・再生用薄膜磁気ヘッ
ドは、特開昭59−30223号公報、特開昭61−1
94620号公報等により既に提案されており、再生出
力が媒体速度に依存せず比較的大きな出力が得られるこ
とから高記録トランクの情報再生に極めて有利であるた
め、従来からの記録・再生用のインダクティブ磁気ヘッ
ドに取って代わるヘッドとして期待されている。
Thin-film magnetic heads for recording and reproducing which integrally constitute an inductive magnetic head for recording and a magnetoresistive element for reproducing are disclosed in JP-A-59-30223 and JP-A-61-1.
It has already been proposed in Japanese Patent Application No. 94620, etc., and since the reproduction output does not depend on the medium speed and a relatively large output can be obtained, it is extremely advantageous for information reproduction of high-recording trunks. This head is expected to replace inductive magnetic heads.

このような構成の磁気ヘットでは再生出力波形に基線変
動(ヘースラインシフト)が発生し易く、その結果、記
録密度特性が低下する傾向にある。
In a magnetic head having such a configuration, baseline fluctuations (Heasline shift) tend to occur in the reproduced output waveform, and as a result, recording density characteristics tend to deteriorate.

このため、そのような不都合を排除したヘッド構成が必
要とされている。
Therefore, there is a need for a head configuration that eliminates such inconveniences.

[従来の技術] 従来の再生用の磁気抵抗効果素子(以下MR素子と略称
する)を組込んだ記録・再生用薄膜磁気ヘッドは第3図
の要部断面図に示すように、例えば非磁性基板]1上に
第一磁極層12と、ギャップ層13及び層間絶縁層14
で挾まれた薄膜コイル15、第二磁極層16、保護層1
7が順に積層され、かつ該ギャップ層13内にMR素子
18が配設されている。
[Prior Art] A conventional recording/reproducing thin film magnetic head incorporating a magnetoresistive element (hereinafter referred to as MR element) for reproduction uses, for example, a non-magnetic [Substrate] A first magnetic pole layer 12, a gap layer 13, and an interlayer insulating layer 14 on the substrate]
A thin film coil 15, a second magnetic pole layer 16, and a protective layer 1 sandwiched between
7 are stacked in order, and an MR element 18 is disposed within the gap layer 13.

該MR素子18及びギャップ層13を挟んで直接対向す
る第一磁極層12と第二磁極層16及びMR素子18の
各先端部は、該第−磁極層12が配設された基板11面
に対して直交する面に露出され、この面を磁気記録媒体
20と対向する、所謂媒体対向面19としている。
The tips of the first magnetic pole layer 12, the second magnetic pole layer 16, and the MR element 18, which directly face each other with the MR element 18 and the gap layer 13 in between, are placed on the surface of the substrate 11 on which the second magnetic pole layer 12 is disposed. This surface is exposed on a surface perpendicular to the magnetic recording medium 20, and this surface is a so-called medium facing surface 19 that faces the magnetic recording medium 20.

そして第一、第二磁極層12.16及び薄膜コイル15
とからなる構成部と、該第−1第二磁極層12゜16を
シールド磁性体としたMR素子18とによって対向する
磁気記録媒体20に対して情報の書込みと読取りを分担
している。
And the first and second magnetic pole layers 12.16 and the thin film coil 15
Writing and reading of information to and from the opposing magnetic recording medium 20 are shared by the MR element 18 in which the -1st second magnetic pole layer 12.degree. 16 is made of a shielding magnetic material.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところで上記したような構成の従来の記録・再生用薄膜
磁気ヘッドでは、対向する磁気記録媒体20の情報の再
生時における再生出力波形に基線変動(ヘースラインシ
フト)が発生し、そのために該波形の歪の増大や記録密
度特性の低下を招くといった欠点があった。
By the way, in the conventional thin film magnetic head for recording and reproducing having the above-mentioned configuration, a base line fluctuation (Haesline shift) occurs in the reproduction output waveform when information is reproduced from the opposing magnetic recording medium 20, and as a result, the waveform This method has drawbacks such as an increase in distortion and a decrease in recording density characteristics.

このような欠点は、ギャップ層13中傍の第一、第二磁
極層12.16の磁極先端部の形状とMR素子18の高
さに関係している。即ち、第3図に示すように第一磁極
層12と第二磁極層16の磁極先端部で直接挟まれたギ
ャップ層13のギャップ深さDgに対して該ギャップ層
13中に配設された前記MR素子18の高さLが大きい
場合には、第4回の部分拡大図に示すように再生時に磁
気記録媒体20からMR素子1Bの先端に磁束が流入す
ると同時に、例えば第二磁極層16の先端へ流入した磁
束21は、本来、第一磁極層12を経由して媒体側へ帰
還すべきものであるが、矢印で示すように第一、第二磁
極層12゜16間が広くなっている領域におけるMR素
子18の後部を経由して第一磁極層12へ流れて行くた
め、このMR素子18を経由して流れる磁束21により
再生出力波形の基線変動が引き起こされる。
Such a drawback is related to the shape of the magnetic pole tips of the first and second magnetic pole layers 12.16 near the center of the gap layer 13 and the height of the MR element 18. That is, as shown in FIG. When the height L of the MR element 18 is large, as shown in the fourth enlarged view, magnetic flux flows from the magnetic recording medium 20 to the tip of the MR element 1B during reproduction, and at the same time, for example, the second magnetic pole layer 16 Originally, the magnetic flux 21 flowing into the tip of the magnetic pole layer 12 should return to the medium side via the first magnetic pole layer 12, but as shown by the arrow, the space between the first and second magnetic pole layers 12°16 has become wider. Since the magnetic flux 21 flows through the rear part of the MR element 18 in the region where the magnetic flux 21 flows to the first magnetic pole layer 12, the base line fluctuation of the reproduced output waveform is caused by the magnetic flux 21 flowing through the MR element 18.

第5図はギャップ深さDgが2μm、MR素子の高さL
が5μmである場合の従来の記録・再生用薄膜磁気ヘッ
ドの計算機シミュレーションによる再生出力波形の一例
を示したもので、非常に大きな基線変動が現れているこ
とが確認できる。また図には、極性の異なる二つの磁化
反転に対する応答を示している。
In Figure 5, the gap depth Dg is 2 μm and the height L of the MR element.
This figure shows an example of a reproduction output waveform obtained by computer simulation of a conventional thin-film magnetic head for recording and reproduction when 5 μm, and it can be seen that a very large baseline fluctuation appears. The figure also shows responses to two magnetization reversals with different polarities.

本発明は上記した従来の欠点に鑑み、第一磁極層と第二
磁極層磁極先端部で直接挾まれたギャップ層におけるギ
ャップ深さDgと該ギャップ層中のMR素子の高さLと
の関係を適正化することにより、再生出力波形の基線変
動の発生を防止し、再生特性の向−ヒを図った新規な曹
膜磁気ヘッドを提供することを目的とするものである。
In view of the above-mentioned conventional drawbacks, the present invention provides a relationship between the gap depth Dg in the gap layer directly sandwiched between the first magnetic pole layer and the second magnetic pole tip and the height L of the MR element in the gap layer. The object of the present invention is to provide a novel carbon dioxide magnetic head which prevents the occurrence of baseline fluctuations in the reproduced output waveform and improves the reproduction characteristics by optimizing the reproduction characteristics.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は上記した目的を達成するため、第一磁極層と第
二磁極層間に非磁性のギャップ層と薄膜コイルが配設さ
れ、かつ該ギャップ層中に平坦な磁気抵抗効果素子を有
してなる薄膜磁気ヘッドであって、前記ギャップ層中の
MR素子の素子高ざLを、第一、第二磁極層の先端部で
直接挟まれたギャップ層におけるギャップ深さngより
低くした6一 構成とする。
In order to achieve the above object, the present invention includes a non-magnetic gap layer and a thin film coil disposed between a first magnetic pole layer and a second magnetic pole layer, and a flat magnetoresistive element in the gap layer. 6. A thin film magnetic head having a structure in which the element height L of the MR element in the gap layer is lower than the gap depth ng in the gap layer directly sandwiched between the tips of the first and second magnetic pole layers. shall be.

(作 用〕 本発明の薄膜磁気へ二7トでは、第一磁極層と第一、磁
極層磁極先端部で直接挟まれたギヤ、プ層中に、そのギ
ャップ深さより素子高さの低いMR素Y−が配設されて
いるため、再生時の該MR素子を取り巻く構成が公知の
シールド型M Rへ、・トと同様な構成となり、第一、
第二、磁極層がソールI・磁性体として完全に機能する
。この結果、再生出力波形のノ1(綿変動の発生が防止
される。
(Function) In the thin film magnetic head 27 of the present invention, an MR layer with an element height lower than the gap depth is provided in the gear layer directly sandwiched between the first magnetic pole layer and the first magnetic pole layer magnetic pole tip. Since the element Y- is provided, the configuration surrounding the MR element during reproduction is similar to that of the known shielded MR element, and the first,
Second, the magnetic pole layer fully functions as the sole I magnetic material. As a result, the occurrence of fluctuations in the reproduced output waveform is prevented.

[実施例〕 以−1V面を用いて本発明の実施例について詳細に説明
する。
[Example] Hereinafter, an example of the present invention will be described in detail using the -1V plane.

第1目し1木発明に係る記録・再生用薄膜磁気ヘットの
一実施例を示す要部断面図であり第3図と同等部分には
同一・符号を付している。
1 is a cross-sectional view of a main part showing an embodiment of a thin film magnetic head for recording and reproducing according to the invention, and the same parts as in FIG. 3 are given the same reference numerals.

本実施例においては、例えば非磁性基板11上に第一磁
極層12と、ギャップ層13、層間絶縁層14で挟まれ
た薄膜コイル15、第二磁極層16及び保護層17が順
に積層された構成におしJる前記ギャップ層13内に、
そのギャップ深さt)g以下の高さLを有する背丈の低
いMR素子31が配設されている。
In this embodiment, for example, a first magnetic pole layer 12, a gap layer 13, a thin film coil 15 sandwiched between an interlayer insulating layer 14, a second magnetic pole layer 16, and a protective layer 17 are laminated in this order on a nonmagnetic substrate 11. In the gap layer 13 having a structure,
A short MR element 31 having a height L that is less than the gap depth t)g is disposed.

従って、該MR素子31を取り巻く構成が公知のシール
ド型MRヘンI・と同様に第一、第二磁極層12、16
が再生時にシールド磁性体として完全に機能する構成と
されており、該MR素子31が従来のような第二磁極層
16がら第一磁極層12へ流入する磁束21の経路とな
らないため、再生出力波形の基線変動の発生が防止され
、波形歪の増大や記録密度特性の低下等の問題が解消さ
れる。
Therefore, the structure surrounding the MR element 31 is the same as that of the known shield type MR element I.
The MR element 31 is configured to function completely as a shielding magnetic material during reproduction, and the MR element 31 does not serve as a path for the magnetic flux 21 flowing into the first magnetic pole layer 12 from the second magnetic pole layer 16 as in the conventional case, so that the reproduction output is reduced. The occurrence of baseline fluctuations in the waveform is prevented, and problems such as increased waveform distortion and decreased recording density characteristics are resolved.

第2図は計算機のシミュレーションによる本発明の記録
・再生用薄膜磁気ヘッドの再生出力波形の一例を示した
もので、例えばギャップ深さDgが7μmであるのに対
して、MR素子31の高さLを5μmとした場合、再生
出力波形における基線変動が容易に解消でき、また確認
することができた。
FIG. 2 shows an example of the reproduction output waveform of the thin film magnetic head for recording and reproduction of the present invention based on computer simulation. For example, while the gap depth Dg is 7 μm, the height of the MR element 31 is When L was set to 5 μm, baseline fluctuations in the reproduced output waveform could be easily eliminated and confirmed.

[発明の効果] 以上の説明から明らかなように、本発明に係る薄膜磁気
ヘットによれば、再生出力波形の基線変動の発生が容易
に解消される優れた利点を存し、再生特性が著しく向上
する等、実用上の効果は大きく、この種の記録・再生用
薄膜磁気ヘッドに適用して極めて有利である。
[Effects of the Invention] As is clear from the above description, the thin-film magnetic head according to the present invention has an excellent advantage in that the occurrence of baseline fluctuations in the reproduced output waveform is easily eliminated, and the reproduction characteristics are significantly improved. It has great practical effects such as improved performance, and is extremely advantageous when applied to this type of thin film magnetic head for recording and reproducing.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図し土木発明に係る薄膜磁気へンドの一実施例を示
す要部断面図、 第2図は本発明に係る薄膜磁気ヘッドの再生出力波形を
説明するだめの図、 第3図は従来の薄膜磁気ヘッドの一例を説明するための
要部断面し、 第4図は従来の薄膜磁気ベントのギャップ近傍を示す部
分拡大断面図、 第5図は従来の薄膜磁気ヘッドの再生出力波形の基線変
動を説明するためのMである。 第1図において、 11は非磁性基板、12は第一磁極層、】3はギャップ
層、14ば層間絶縁層、15は薄膜コイル、16は第二
磁極層、17は保護層、31はMR素子をそれぞれ示す
。 一1〇− −加、0−150−10.0−5.0 0.0 5,0
 10015.020−0酸化反転徨L(如す 1710月み瀉−辱1ヒカ4祷多を酬するし]第2 図 第4図
Fig. 1 is a sectional view of a main part showing an embodiment of a thin film magnetic head according to a civil engineering invention, Fig. 2 is a diagram for explaining the reproduction output waveform of the thin film magnetic head according to the invention, and Fig. 3 is a conventional diagram. 4 is a partially enlarged cross-sectional view showing the vicinity of the gap of a conventional thin-film magnetic vent, and FIG. 5 is a baseline of the reproduction output waveform of the conventional thin-film magnetic head. This is M for explaining the fluctuation. In FIG. 1, 11 is a nonmagnetic substrate, 12 is a first magnetic pole layer, 3 is a gap layer, 14 is an interlayer insulating layer, 15 is a thin film coil, 16 is a second magnetic pole layer, 17 is a protective layer, and 31 is an MR. The elements are shown respectively. 110- -K, 0-150-10.0-5.0 0.0 5,0
Figure 2 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 第一磁極層(12)と第二磁極層(16)間に非磁性の
ギャップ層(13)と薄膜コイル(15)が配設され、
かつ該ギャップ層(13)中に平坦な磁気抵抗効果素子
(31)を有してなる薄膜磁気ヘッドであって、上記ギ
ャップ層(13)中の磁気抵抗効果素子(31)の素子
高さを、第一、第二磁極層(12、16)の先端部で直
接挟まれたギャップ層(13)におけるギャップ深さよ
り低くしたことを特徴とする薄膜磁気ヘッド。
A nonmagnetic gap layer (13) and a thin film coil (15) are arranged between the first magnetic pole layer (12) and the second magnetic pole layer (16),
and a thin film magnetic head having a flat magnetoresistive element (31) in the gap layer (13), wherein the element height of the magnetoresistive element (31) in the gap layer (13) is , a thin film magnetic head characterized in that the gap depth is lower than that in a gap layer (13) directly sandwiched between the tips of the first and second magnetic pole layers (12, 16).
JP12786688A 1988-05-24 1988-05-24 Thin film magnetic head Pending JPH01296421A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12786688A JPH01296421A (en) 1988-05-24 1988-05-24 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12786688A JPH01296421A (en) 1988-05-24 1988-05-24 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH01296421A true JPH01296421A (en) 1989-11-29

Family

ID=14970590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12786688A Pending JPH01296421A (en) 1988-05-24 1988-05-24 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH01296421A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0452846A2 (en) * 1990-04-16 1991-10-23 Hitachi, Ltd. Narrow track thin film magnetic head and fabrication method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047224A (en) * 1983-08-25 1985-03-14 Mitsubishi Electric Corp Magnetic head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047224A (en) * 1983-08-25 1985-03-14 Mitsubishi Electric Corp Magnetic head

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0452846A2 (en) * 1990-04-16 1991-10-23 Hitachi, Ltd. Narrow track thin film magnetic head and fabrication method thereof
US5850326A (en) * 1990-04-16 1998-12-15 Hitachi, Ltd. Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer
US6111723A (en) * 1990-04-16 2000-08-29 Hitachi, Ltd. Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer
US6278578B1 (en) 1990-04-16 2001-08-21 Hitachi, Ltd. Narrow track thin film head having a focused ion beam etched air bearing surface
US6307707B1 (en) 1990-04-16 2001-10-23 Hitachi, Ltd. Narrow track thin film head including magnetic poles machined by focused ion beam etching
US6538844B2 (en) 1990-04-16 2003-03-25 Hitachi, Ltd. Method of fabricating a magnetic head by focused ion beam etching
US6665141B2 (en) 1990-04-16 2003-12-16 Hitachi, Ltd. Magnetic head having track width defined by trench portions filled with magnetic shield material
US6839200B2 (en) 1990-04-16 2005-01-04 Hitachi, Ltd. Combination perpendicular magnetic head having shield material formed at both ends of an upper pole of a write element

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