JPH01291432A - Pellet bonding apparatus - Google Patents

Abstract

PURPOSE:To eliminate the alteration of a regulation for altering a sucking force when different types of pellets are handled, and to simplify its operation by selecting an arbitrary one of a plurality of regulating valves in which sucking forces of a vacuum sucking unit having a filter are set in response to the types of the pellets by a selector, and altering it to a desired sucking force. CONSTITUTION:When a small pellet is handled, a switching valve 312 is switched, a forked throttle valve 314 is selected, valves 323, 324 are closed, and a valve 322 is opened. Thus, a vacuum pressure becomes, for example, 250mmHg. Dusts sucked through the sucking hole 267 of a guide body 264 are removed by a first filter 310 to protect the valves 312, 314. When a pellet is slightly larger than the small pellet, the valve 312 is switched to select a forked throttle valve 315 is selected, and the vacuum pressure is set, for exam ple, to 350mmHg. When a large pellet is handled, the valve 313 is switched, any of forked throttle valves 328, 329 is selected, and the vacuum pressure is set, for example, to 400 mmHg.

Description

DETAILED DESCRIPTION OF THE INVENTION (A) Industrial Application Field The present invention provides a needle for pushing up pellets to be picked up from the lower surface of a wafer sheet, and a needle for guiding the pellets to be picked up in a vertically movable manner and surrounding the pellets to be picked up. The present invention relates to a pellet bonding apparatus comprising a push-up guide in which a vacuum suction section is formed to suck pellets from the lower surface of the sheet, and the suction section is connected to a vacuum source.

(b) Conventional technology This type of pounding device has been disclosed in Japanese Patent Application Laid-Open No. 1665-1983.
It has been disclosed in Publication No. 36, etc.

Generally, when a pellet adhered to a wafer sheet is peeled off by pushing it up with a push-up needle, if the suction force of the vacuum suction unit is not set properly for the adhesion between the pellet and the sheet, the pellet may crack or break when the pellet is pushed up. Problems occur such as chipping, peeling off adjacent pellets, or being unable to peel off pellets that should be picked up.

For this reason, when handling different types of pellets, the operator must operate the pressure lIi adjustment gauge to change 8y4 in order to change the suction force, which is extremely troublesome.

(c) Problems to be Solved by the Invention Therefore, the present invention solves the problem without the troublesome work mentioned above.
The purpose is to enable the suction force of a vacuum suction unit to be changed when handling different types of pellets.

(d) Means for Solving the Problems To this end, the present invention provides a needle that pushes up the pellet to be picked up from the bottom surface of the wafer sheet, and an erosion needle that is movably guided downward, and is provided around the pellet to be picked up. In a pellet pumping device comprising a push-up guide in which a vacuum suction part for suctioning a certain pellet from the lower surface of the sheet is formed, and the suction part is connected to a vacuum source, there is a gap between the suction part and the vacuum source. , a plurality of adjustment valves whose suction force by the suction unit is changed depending on the type of pellet, and a selection device for selecting any one of the plurality of adjustment valves.

Further, the present invention provides the bullet pounding device, which includes:
Between the suction section and the vacuum source, a filter for removing dust, a switching valve provided downstream of the filter, and a switching valve connected in parallel between the switching valve and the vacuum source, and the suction section The suction force can be changed according to the type of pellet with multiple settings! It is equipped with an Ilt valve.

(e) Operation The suction force of the vacuum suction unit is selected by the selection device from among the plurality of adjustment valves each set according to the type of pellet, and the desired suction force is applied to the surroundings of the pellet to be picked up. A certain pellet is sucked from the bottom of the wafer sheet. Furthermore, since a filter for removing dust is provided, when a switching valve is used as a selection device, the switching valve can be protected.

(f) Example An embodiment of the present invention will be described below based on the drawings.

(1) is the main body of the electronic component mounting device, and the main body (1) includes a conveyor (2) for conveying printed circuit boards (including thick film boards) (P), lead frames, etc.; 3) A reversing device provided on the upper i side, and the reversing device!
A pair of positioning devices (4) provided on the downstream side of (3)
(5), suction collet exchange devices (7) and (8) fixed on the mounting base (6), and four wafer tables (9).
(10) A wafer support stand (11) (12) that can move in the XY force direction and rotate in the plane direction, and a top plate (13)
A mounting head (14) that is suspended from and movable in XY force directions
(15) is provided.

The conveyor (2) has a pair of drive sprockets (16
) (16), a pair of chains (18A) (18B>) stretched between driven sprockets (17) (17), and a printed circuit board (P) placed on the chains (18A) (18B>). is conveyed from the upstream side to the downstream side.At this time, the chains (18A) and (18B) are provided with engagement pieces (19) that engage with the rear end of the substrate (P) in the feeding direction at a predetermined interval.
is erected, and the board (P) is connected to both chains (18A) (18
B) is placed on top and is intermittently conveyed from the upstream side to the downstream side while being locked by each engagement piece (19).

The mutual spacing between the engaging pieces (19) is an integral multiple of the chain pitch, and all the substrates (P) that fall within this spacing can be fed together without any setup in terms of conveyance operation. can.

Next, the movement of the conveyor (2) and the movable chute (20A) will be described. When the drive motor (21) is energized,
The drive is transmitted via the belt (23) to intermittently drive the output shaft of the indexing device (22), and the output shaft is stretched between the output shaft pulley (24) and the boule (25) attached to the output shaft. The spline shaft (
27) rotates intermittently, both pulleys (28A) (28B
>(29A) (29B) Belt stretched between (30)
(31) causes the driving sprockets (16) (16) to rotate intermittently via the support shafts (32) (33). This allows both sprockets (16) (16), (17) (17
) rotates, so the printed circuit boards (P) on the chains (18A) (18B) are intermittently conveyed a predetermined distance.

On the other hand, the pole screw bodies (36) (37) are fitted into the nut bodies (34) (35) provided at both ends of the movable chute (20A), and the belt (39) and pulley (40) ( 41) through the screw body (36) (3
When 7) rotates, the movable chute (2OA) moves forward and backward with respect to the fixed chute (20B>. In other words, both chutes (20A) move forward and backward relative to the fixed chute (20B). You can expand or narrow the distance between 2OA>(20B>. At this time, the movable chute (
2OA) will move along the spline shaft (27) by means of the spline bearing (42).

43) consists of a pair of optical means for detecting the presence of the engagement piece (19) located one pitch upstream of the positioning device (4) when the conveyor (2) is stopped. The sensor detects the position shift of the conveyor (2) that moves intermittently.In other words, the chain (18
A> is extended and the stop position of the engaging piece (19) shifts, exceeding a certain tolerance range, the sensor (43)
If it detects that there is no electronic component mounting device, the entire electronic component mounting device is stopped. In this case, the operator manually turns the shaft of the indexing device (22) to correct the amount of deviation.

The reversing device (3) is disposed at a lower position between the chains (18A) and (18B) on the upstream side of the conveyor (2), and reverses the flow direction of the substrate (P) as necessary. The reversing device (3) is equipped with an XY child table 46) movable in the X and Y directions by an X-axis circumferential motor (44) and a Y-axis circumferential motor (45), and various other items. It consists of a mounting base (47) provided on the XY child table 46). (4
8) is a guide that is fixed to the mounting base (47) and guides the upper and lower rods (49) in a vertically movable manner;
) is provided at the top of the conveyor (2) and can protrude upward from the conveyor (2), (51) is a pulley (52) provided at the bottom of the upper and lower rods (49) and the output shaft pulley of the motor (53). 54) The belt (55) stretched between the belts (55) has one end rotatably connected to the operating rod of the cylinder (56) and the other end fitted between the support portions (57) at the lower ends of the upper and lower rods (49). It is a swinging member that can swing together with the intermediate portion as a fulcrum.

A plurality of suction passages (58) are formed at predetermined intervals in the push-up body (50) of the reversing device (3), and a plurality of suction passages (58) are formed in the upper and lower rods (49) to communicate with the suction W (58>). Vacuum passage (5
9) is formed, and the passage (59) further communicates with a vacuum source (not shown) via a rotary joint (60) and a tube (61).

Furthermore, a torque limiter (62) is provided on the output side of the indexing device (22) between it and the output shaft pulley (24).
An overload detection plate (63) is provided at the end thereof. Therefore, if an abnormality occurs during the transportation of printed circuit boards, resulting in an overload condition and the detection plate (63) moves in the axial direction, the pair of optical sensors (64) can detect the overload condition. can.

C65A) (65B) is the chute (20A) (20
A brake member is provided inside so as to face the upstream end of B), and a plurality of suction ports (66) communicating with a vacuum source are provided on the upper surface of each brake member. (67A) is a loader that stores a plurality of printed circuit boards (P) on a shelf and a storage box (68A) that can be raised and lowered by an elevator (not shown).
) and an extrusion member <6 for extruding the lowest substrate (P) in the box (68A) onto the conveyor (18A) (18B).
9). From this extrusion member (69), the storage box (6
When the substrate (P) in 8A) is pushed out, the conveyor (1
The brake member (65A) (65B) ensures that the conveyor is kept in a stable state by being sucked by the brake member (65A) (65B) so that it does not move smoothly onto the conveyor (18A) (18B) or fall from the conveyor (18A) (18B) due to excessive momentum. It is designed to be transferable. That is, when the extrusion member <69> starts the extrusion operation, suction by the vacuum source is started, and when the extrusion operation is finished, the suction is released.

Next, a pair of substrate positioning devices (4) and (5) will be explained, but since both have similar configurations, only one (5) will be explained. The positioning devices (4) and (5) are arranged in the feeding direction of the substrate (P), the width direction perpendicular to this, and the substrate C.
P) is positioned in each direction in the thickness direction, and will be explained below.

A shaft rod (72) passing through a pair of bearings (70) and (71) is provided with a width shifting cam (73), a lift cam (74), and a clamp cam (75) from the left in FIGS. 1 and 2. , the pulley (76) on the left end of the shaft (72) and the motor (7).
A belt (79) is stretched between the output shaft pulleys (78) of 7). Therefore, when the shaft rod (72) rotates due to the energization of the motor (77), each cam (73) (74) (75
) rotates, and each cam follower (80) (81) (82
), the vertical members (86), (87), and (88) move up and down, and accordingly, the cam levers (89, 90, and 9
1) also moves up and down.

First, the device (92) for regulating and positioning the substrate (P) in the feeding direction will be described.

(93) and (94) are a reference clamp and a movable clamp that contact the ends of the substrate (P) in the flow direction, respectively, with the support shaft <9
5) It is rotatable about (96) as a fulcrum. The reference clamp (93) is urged to rotate outward by the spring (97), and the movable clamp (94) is urged by the spring (98).
is urged to rotate inward by. (91
) is a cam lever provided at the top of the upper and lower members (88) as described above, which engages with the pins (99) and (100) protruding from the clamps (93) and (94) to release the clamps (
93) Controls the swinging of (94).

On the other hand, a linear guide (10
1), the X table (102) is horizontally movable, and the movable clamp (94) is attached to the table (102).
The movable body (103) that rotatably supports the screw shaft (103) is fixed, and the screw shaft (
A connecting body (106) integrated with a ball screw body (105) into which the ball screw body (104) is fitted is fixed. (107) (10
8) is a bearing.

Therefore, as the screw shaft (104) is rotated by the drive source, the X table (102) moves in the flow direction via the connecting body (106), so the movable body (103) also moves.
The movable clamp (94) can move near and far with respect to the reference clamp (93), and can accommodate various lengths of substrates (P) in the feeding direction.

Also, when the cam lever (91) moves upward, the movable clamp (
94) is rotated outward via the pin (100), the reference clamp (93) is also rotated outward by the spring (97), and both clamps (93) and (94) are lower than the substrate (P). It will be located in

As described above, the vertical member (88) is movable up and down via the guide (85), and the pin (110) protruding from the fixed chute (20B) and the pin (111) protruding from the vertical member (88) A spring (112) is stretched between the upper and lower members (88) and urges the upper and lower members (88) upward. Therefore, since the cam follower (82) at the end of the upper and lower members (88) comes into pressure contact with the clamp cam (75), the upper and lower members (88) move up and down in accordance with the shape of the cam (75).

Next, the regulation in the width direction perpendicular to the feeding direction of the substrate (P) will be described. First of all, at the top of the fixed chute (20B),
A fixed plate (115) is provided, and a movable bearing body (116) and a reference bearing body (117) are disposed at a predetermined interval on the fixed plate (115). On the other hand, the bearing (118) (11g) provided on the movable chute (20A)
A plurality of width shifting members (120) are attached to the supporting shaft (119) which can be rotatably supported by the supporting shaft (119), and the peripheral edge of the cylindrical portion thereof which can be rotated by a shaft (not shown) can come into contact with the substrate (P). A spring (12) as a biasing body is attached to a mounting rod (122) supported between a pair of support parts (121) (121).
3) One end is fixed, and each of the width adjustment members (120>) is urged to rotate in the direction of the substrate (P).Also, the width adjusting member (120>) is supported between the pair of support parts (121) (121). A transmission arm (12) rotatable by a support shaft (124).
5) is provided with an engaging rod (126) on the top thereof, and operates to move each of the width adjusting members (120) away from the substrate (P). A cam follower (127) is provided at the other end of the transmission arm (125), and a cam lever is used to move the vertical member (86) up and down, which has a cam follower (80) that engages with the width shifting cam (73). (89)
Due to the vertical movement of the lever (89), the transmission arm <125) is
will be rotated.

Next, the position of the component mounting surface on the board (P) is
A regulating device (13) to keep the thickness constant regardless of the thickness of the
0) will be explained. The fixed chute (20B> and the movable chute (20A) each have a linear guide (84).
(84) allows the suction up and down members (87A) to move up and down. Also, both shoes), (20B
) (Pins (131) protruding from 20A> (131) and pins protruding from the bottom of each upper and lower member (87A) <87A)
There are springs (133) (133) between the
) are stretched, and urge the upper and lower members (87) upward, respectively.

On the other hand, the cam followers (134) (134) provided at the ends of the upper and lower members (87A) (87A) are connected to the cam lever (9).
0) is pressed down. That is, the upper and lower members (8) each have a cam follower (81) that engages with the lift cam (74).
7) Since the cam lever (90) is provided at the upper end, the lift cam (74) allows the suction upper and lower members (87A
) (87A) will move up and down, respectively.

(135) (135) is the chute (20A>
(20B) with a substrate holder provided on the top of the substrate (20B).
It has engaging parts (136) (136) that can be engaged with the upper surface of P).

Furthermore, a plurality of suction holes (137) are provided in the suction portion (138) on the upstream side of the upper and lower suction members (87A).
is opened and communicates with a vacuum source (not shown) via vacuum pipes (139) <139>. Therefore, the lower surface of the printed circuit board (P) can be sucked onto the upper part of the upper and lower members (87A) (87A).

Further, the upper surface of the upper and lower members (87A) is set at a slightly higher level than the conveyor (2) conveyance surface, and the engagement piece (19 of the chain (18A) <18B)
) (19), the substrate (P) is transferred from the transport surface of the conveyor (2) to the upper and lower members (87A) (87A), and at that point, vacuum suction is started. and conveyor (2)
When the conveyor (2) stops, the suction stops, but this suction prevents the printed circuit board (P) from moving due to inertia when the conveyor (2) stops. (87A) (87A)
, and the printed circuit board (P) is positioned in the feeding direction and in the width direction orthogonal to the feeding direction, and then placed in the engaging portions (136) (136) of the board holders (135) (135). Being forced.

Next, the wafer support stands (11) and (12) will be explained in detail, but since both have the same structure, only the support stand (11) will be explained. (140) is movable in the plane direction along the X-axis direction guide (143) and the Y-axis direction guide (144) by the XY child table, the X-axis circumferential motor (141), and the Y-axis circumferential motor (142). be. Further, the wafer table (9) placed on the XY child table 140) can be rotated forward and backward by a drive source (not shown).

Therefore, the desired wafer sheet (14, 6) will be located above the push-up needle device (145>).

Since there are four wafer tables (9), it is possible to handle at least one type and four or less types of wafers, each having a different size, for example.

Next, one mounting head (14) will be described in detail.

The head (14) can be moved in the X direction by a drive motor (154A) shown in FIG. 43 along a pole screw (151) supported by a support member (150) supported by the top plate (13). There is also a guide body (152) (i52
) along the drive motor (154B>).The output shaft pulley (154C) of the drive motor (154C) is disposed inside the approximately box-shaped head body (153)
A belt (158) is stretched between the pulley (157) at the end of the screw shaft (156), and the vertical moving body (1
59) is connected to the guide body (161) by the nut body (160).
It is possible to move up and down via the .

The vertical moving body (159) is equipped with a pressurizing motor (16).
2) and Rock Tsuremade (163) are fixed,
A spring mounting pin (164) is attached to the output shaft of the motor (162).
) is provided. A mounting pin (167) is protruded from the plunger (166) of the solenoid (163), and a mounting pin (169) is protruded from the L-shaped support (16B) fixed to the vertical moving body (159). A spring A (170) is stretched between.

The bearing part (171) of the vertical moving body (159) has a support shaft (1
72) allows the rocking body (173) to rotate, and the rocking body (173) has a U-shaped groove cut out at its upper end, into which the mounting pin (187) fits, and the rocking body (173) <173
) is provided with a pressure bearing body (174) at the other end.

(175) is a fixed bearing body that sandwiches the collar body (177) protruding from the rotary joint (176) with the pressure bearing body (174);
8). A mounting bottle (178) and a pressurizing motor (162) are provided protruding from the rocking body (173).
) Spring B (179) stretched between a mounting pin (164) protruding from a lever (165) fixed to the output shaft of
The pressure bearing body (174) is urged downward.

By controlling the rotation angle of this pressure motor (162), the rotation angle (176) and fixed bearing body (17) by the pressure bearing body (174) are controlled.
5) The pressing force can be made variable. This spring B
(179) is Berrett (180A), <180B)
This is to apply pressure when attaching the plate to the board (P).

In addition, a mounting pin (1) protruding from the vertical moving body (159)
A balance spring C (183) is installed between the mounting pin (182) protruding from the rotary joint (176) and the rotary joint (176).
) is stretched, and this elastic force is set so that the elastic force of the spring B<183) and the self-weight of the suction nozzle body (184) and the suction collet (185) are approximately equal, and the influence of the self-weight is reduced. It is being removed.

The rotary joint (176) has a bottle (186).
is provided protrudingly, and rotation of the joint <176) itself is prevented by a locking piece (187) that fits into this pin (186).

The suction nozzle body (184) has a low rigidity joint (17
6), hose (190), large bellet (180B)
It is connected to a vacuum source (not shown) via a vacuum switch (191) used to detect the presence or absence of suction. The adsorption nozzle body (184) is movable up and down within the vertical guide body (192), but a chamfered portion (193) is formed on the upper part of the nozzle body (1B4) to restrict the hair ring (194). ) prevents θ rotation within the upper and lower guide body (192).The vacuum switch (191) is activated when the suction pressure from the vacuum source exceeds a certain value, and the suction rollet (18
5) is determined to not be adsorbing the pellet.

Further, a drive motor (1
95), and its output shaft pulley (196) and a pulley (197) fixed around the upper and lower guide body (192).
) A belt (198) is stretched between the motors (1
95), the vertical guide body (192) rotates while being guided by the bearing body (199) via the belt (198), thereby also rotating the suction nozzle body (184) by θ.

At the lower end of the suction nozzle body <184), a suction fret (
185) is provided so as to be detachable by locking and unlocking the locking mechanism (200>).

(201) is a DC solenoid attached to the side surface of the head main body (153), and an operating lever (203) whose intermediate portion is pivotally supported is rotatably connected to its plunge (202). (204) is the head body (153)
It is a vertical slider that can move up and down along a guide rail (205) extending up and down, and has a pin (206) protruding from the slider (204) and a pin (207) protruding from the top of the head body (153). A spring D (208) is stretched between the two and biases the slider (204) upward.

The slider (204) is provided with a cam follower (210), and the head body (153) has an upper limit stopper (211) and a lower limit stopper (212).
Since the operating lever (203) is in contact with the cam follower (210), the solenoid (
When energized, the operating lever (203) rotates counterclockwise and pushes down the slider (204), causing the cam follower (210) to come into contact with the stopper (212) and stop. When the cam follower (210) is similarly demagnetized, the operating lever (203) The slider (204) is rotated clockwise by the spring D (208) until the lever <203) comes into contact with the upper limit stopper (211).
) is pushed up.

Therefore, since the photoelectric detection device (215), which is equipped with a light-emitting element (213) and a light-receiving element (214>) and is used to detect the adsorption of a thick but small pellet (1BOA), is provided at the lower end, the vertical slider The photoelectric detection device! (215) also moves up and down due to the up and down of (204).

Therefore, when the detection device (215) is in the downward position,
The beret (18) to which the suction collet (185) is adsorbed
0A) (180B>); when in the upper position, the presence or absence of the suction collet (185) itself can be detected.

(2g4A) (284B) are holding type interlocking changeover switches that can be switched at will by the user. (285)(
286) are an OR circuit and an AND circuit, respectively, and are connected to a microcomputer (287) which is a control device.

Therefore, the changeover switch <284A) (284B)
With the settings as shown in Figure 3, if either the vacuum switch (191) or the photoelectric detection device (215) detects that there is no pellet 1, the pellet no-counter (r not shown) is activated in advance. The pickup operation is repeated a set number of times N, and when the number of times exceeds N, the microcomputer (287) controls each motor (154A) (154B>(154C) via the motor drive circuit (288) to complete the mounting operation. After returning the heads (14) and (15), the operation of the mounting device is stopped and the notification means (2
89>, the user is notified visually or audibly using an indicator light, buzzer, etc. After that, the user says "No"
Check whether this is true or not, and if it is not true, adjust the operating level of the vacuum switch (191), or use the photoelectric detection device!
, (215) and perform a trial run or restart the test run.

In addition, when the changeover switches (284A) and (284B) are switched, if both the vacuum switch (191) and the photoelectric detection device (215) detect the absence of pellets, the micro - The computer (287) receives the detection output and performs control in the same manner as described above.

In place of the changeover switches (284A) (284B), OR circuit (285), and AND circuit (286), equivalent functions can be provided using a key manual device and a random access memory (
Of course, it is also possible to replace it with RAM).

Next, the suction fret (185) will be explained.
A lock mechanism attachment part (216) is formed at the lower end of the nozzle body (184), and a lock mechanism (200) is provided in the attachment part (216). And in the mounting part (216),
A hollow mounting space (218) is formed, into which the adapter (219> of the suction fret (185) is fitted. Bearing bodies (220) (220>) are provided on both sides of the mounting portion (216).
A lock claw body (221) is disposed between each of them, and a support shaft (222) passes through these, and the lock claw bodies (221) are disposed so as to face each other, and their lower ends are held by a spring (223). They are urged to move closer to each other. (224) is a positioning pin protruding from the lower surface of the mounting portion (216), which can be fitted into a U-shaped groove (225) to be described later.

The suction fret (185) includes an adapter (219) that fits into the mounting space (218) of the mounting portion (216), and a lower part of the adapter (219>) that is attached to the mounting body (216) when the adapter (219) is fitted. The adapter flange part (2
26), and a suction part (227) that directly suctions the pellets (180A) (180B). Locking portions (228) with inwardly recessed lower portions are formed on both sides of the flange portion (226), and the lower end of the lock claw body (221) enters into the locking portion (228) to lock. It turns out.

Next, the suction collet exchange devices (7) and (8) will be described, but since both have the same structure, only one (7) will be described. The exchange device (7) is broadly divided into a tool stocker (231) and a stocker stand (23) that can be moved up and down by a drive source (not shown) with respect to a mounting plate (230).
2), and a plurality of lock release pins (23
3) and a pin mount (234>).

The stocker (231) and the stocker stand (232)
The two have substantially the same shape, and both have a plurality of mounting holes (235) and (236) that match each other at a predetermined interval. And stocker (231) and stocker stand (
Two compliance pins (237> are loosely fitted into the holes drilled in the stocker stand (232), and the stocker (231) and the stocker stand (232) are held together by the head (238) and the coil spring (239). The stocker (231) is pressed against each other via a steel ball (229) located in a groove formed on the top surface of the stocker (232).The stocker (231) is rolled on the stocker stand (232) by this ball (229). By making the diameter of the hole into which the pin (237) fits slightly larger than the diameter of the pin (237), the center of the suction nozzle body (184) and the stocker (231) are separated when the suction collet (185) is attached or detached.
) The adapter (2) of the suction collet (185) housed in
19) It is possible to absorb the misalignment of the center.

Lock release pins (233), each having the same length, are erected from the pin mount (234) and pass through the stocker (231) and the stocker stand (232).

At the front and rear of the upper opening periphery of the mounting hole (235) of the stocker (231), a suction collet support stand (240) is erected, and stone positioning pins (241) (241) are protruded. . Therefore, the suction fret (
185) is placed, the support stand (240
) on which the flange portion (226) abuts, and the flange portion (226) has a U-shaped groove (22
5) (225) are formed, each positioning pin <241
> (241) fits into the collet (225) and (225) to prevent the θ rotation of the collet (185).

The bottle mount (234) is connected to a guide (243) by a cylinder (242) attached to a mounting plate (230).
It is possible to move up and down while the shaft rods (244) (244) are fully guided by (243). (245) (245> is a bearing body provided on the stocker stand (232>), and a plurality of presser members <24> are provided at a predetermined interval on the bearing body (245).
A shaft rod (246) to which 7) is fixed is rotatably supported. The holding member <247> has a substantially crank shape, and one end engages with the adapter flange portion (226> from above), and the other end of any holding member (247) is provided with a drive source for rotation. cylinders (248) are connected.

In addition, the tool stocker (231) and the stocker stand (
Multiple mounting holes (235) (236) opened in 232)
The opening pitch of the hole (not shown) into which the lock release bin (233) fits, and the opening pitch of the hole (not shown) into which the lock release bin (233) fits
33) all have the same mounting pitch.

Next is the push-up needle device i! (145) will be explained in detail.

First, a drive motor (not shown) and a gear provided on its output shaft mesh with a gear (250).
0) rotates the rotating guide (251) and rotating plate (252).
can be rotated 90 degrees forward and backward. (254) is a base body that moves up and down by a cylinder (253>), and the rotation guide (251) is rotatable while being guided by a rotation guide bearing (255) attached to the base body (254).

The rotating plate (252) has first operating levers (258) and (259) movable along the first guide rails (255) and (257), respectively, at 90 degrees different positions, and second guide levers, respectively. Second actuation levers (262) (263) movable along the rail (260>(261)) are provided.The second actuation levers (262) (263) are provided with guide bodies (264) (265). One guide body (264) is provided with a small pellet (180A
), the outer diameter of the stage surface (266) is small and the diameter of the suction hole (26'7) is also small. A guide passage (269'l) is formed in the center, and four suction holes (267) each communicate with one gathering chamber (270), and then one communication passage (271) and a conduit (272). It communicates with a vacuum source through.

Moreover, the other guide body (265) has a large pellet (1
80B), its stage surface (273)
has an outer diameter larger than that of the stage surface (266);
The diameter of the suction hole (274) is also larger than that of the suction hole (267), and the guide body (265> is provided with a guide passage (276) and a guide passage (276) that allow, for example, four push-up needles <275) to move up and down. A support rod (275) that supports the needle (275)
The guide passage (277) that allows the vertical movement of the suction holes (276) has been completed, and the eight suction holes (274) each communicate with one gathering chamber (279), and then one communication passage (280).
) and a vacuum source via a conduit (281).

Therefore, the total suction force of the guide body (265>) is set to be larger than that of the guide body (264).

The push-up needle (268) and the support rod (277)
), the first actuating lever (25g>(259
) are installed respectively. Therefore, these springs (282) (
21113), both levers (25g) (259)
, (262) (263>) are urged to separate.

(290) and (291) are lower limit stoppers, which are the engaging portions (292>(293) of the first operating levers <258>(259).
) comes into contact with the levers (258) (259>
The lower limit of can be determined.

That is, the lower limit of the needle (268>(275)) is determined.

Then, the upper and lower rollers (294), which will be described later,
When the operating levers (258) and (259) move upward, the second operating levers (262) and (263) also move upward due to the springs (282) and (283>, but the upper limit stopper bolt (295) (296) is the upper limit stopper (
297) (298), upward movement is restricted. Additionally, a first lever (258).

When (259) moves upward against the springs (282) and (283), the needle (26g) (275) rises and the pellet (1BOA>, (180) of the wafer sheet (146)
This will push up B>.

(299) and (300) are push-down pins, and when the first operating lever (25g) and (259) descend, the second
The actuating levers (262)<263) will also be lowered.

On the other hand, a drive motor (30
1) is attached, and a belt (305) is stretched between its output shaft pulley (302) and a pulley <304) above the screw shaft (303). (306) is the screw shaft (
303), and (307) is a vertical bar into which the screw shaft (303> is fitted and which moves up and down as the screw shaft (303) rotates.The vertical bar (307) is a support body that supports the rotation guide (251). ) is loosely inserted into the hollow part of the bar <307)
The upper and lower rollers (294) at the ends move the first operating levers (258) and (259) as the bar (307) moves upward.
As mentioned above, one of the two is moved upward.

(308) and (309) are rotary plate stoppers that respectively abut against the rotary plate (252) to ensure the stopping position of the rotary plate (252).
), (309) are provided with a shock absorber to reduce the impact when the rotary plate (252) comes into contact with the rotating plate (252).

As shown in FIG. 40, the guide body (264)
, (265) and the vacuum source are provided with first filters (310), (311) and switching valves (312), (
313), the switching valve (312), and a two-pronged throttle valve (314) (314) connected in parallel between (313) and the vacuum source.
15), (316) (317), second filter (
318) (319), (320) (321) and /<
L-bums (322) (323), (324) (325) are provided.

Furthermore, vacuum pressure! lt is a two-pronged throttle valve (314>(315)
.

One of the valves (316) and (317) open to the atmosphere (
It is determined by the degree of aperture of 326) (327), (328) and (329).

Said 1st c7) full)) -(310), (
311) removes lJ4 dust sucked in from the suction holes (267) and (274), and operates the switching valves (312) and (3
13) and two-pronged throttle valves (326) (327).

(32g)<329) and the second filter (3
18).

(319), (320), (321) are the two-pronged throttle valves (326) (327), (32g>(329)
Remove the dust sucked in from the valves (322) (
323), (324) and (325).

The operation of the above configuration will be explained below.

) Adjustment operation of conveyor (2) width Movable chute (2oA) relative to fixed chute (20B)
) will be described below.In order to enable the conveyor (2) to convey printed circuit boards (P) of various sizes, first the belt (39) is moved by the drive motor (38).
) and the respective pulleys (40, 41) to rotate the ball screw bodies (36, 37). Then the nut body (35
) (36) The movable chute (20A) moves forward and backward together with the movable chute (20A). At this time, the movable chute (2OA) moves along the spline shaft (
27). So both Sue! The chain (18B>) stretched between the rocket Ha) and (17) will also move, causing the printed circuit board (
This means that it can correspond to the width in the direction perpendicular to the feeding direction of P).

N) Printed circuit board (P) transport operation drive motor (2
When power is turned off to 1), the indexing device (22) is activated via the bell (23), and the output shaft pulley (24) is activated.
) and the belt (26) stretched between the pulley (25)
The drive sprockets (16) (16) rotate via the support shafts (32) (33). Therefore, the driven sprockets (17) (17) also rotate, and the chain (18A) (1
The printed circuit board (P) on 8B) will be transported intermittently.

At this time, the printed circuit board (P) is intermittently conveyed with its upstream end engaged with each engagement piece (19).

Note that the indexing device I! is used to prevent dimensional errors in machining the drive sprocket (16) from causing variations in feed accuracy.
(22), the sprocket (16)
1 rotation of this sprocket (16)
The number of teeth of the sprocket (16) and the boob are determined so that the rotation is one pitch for intermittent conveyance.

Also, from the loader (67A) to the chain (18A) (1
8B) To bridge the printed circuit board (P) above, first move the lowest board (P) in the storage box (68A) to the extrusion member (6
9) by extrusion. That is, the pushing member (69) operates so that each substrate (P) is positioned between each of the engaging pieces (19).

When the extrusion member (69) extrudes the substrate (P), each brake member (65A) (65
B) brakes the movement of the substrate (P) through each suction port (66) by means of a vacuum, so that the conveyor (18
A> (18B) After this transfer, the suction by the vacuum source is released in synchronization with the extrusion operation path T.

If an accident occurs during the transportation of the board (P) and an overload condition occurs, the torque limiter (62) will be activated and its detection plate (63) will move in the axial direction. - (64) can detect an overload condition. At this time, the drive motor (21) is de-energized and a notification means (not shown) notifies the user of this fact. Therefore, the user should remove the cause of the accident.

Although the printed circuit board (P) is transported in this manner, if the chain (18A) stretches due to changes over time, etc., and the stopping position of the engaging piece (19) shifts beyond the allowable range, When the sensor (43) detects the presence of the engaging piece (19) as "1" because the light is not blocked by the engaging piece (19), the entire electronic component mounting apparatus is stopped.In this case, the operator:
What is necessary is to manually turn the shaft of the indexing device (22), correct the amount of deviation, and return it to the normal position.

(i) Positioning device # (4) by positioning operation of printed circuit board (P) and chains (18A) (18B).
), the drive motor (2) is detected.
The power supply in step 1) is cut off and the conveyance of the printed circuit board (P) is stopped.

Then, the motor (77) is energized and the shaft rod (72) rotates via the belt (79), so each cam (73) (7
4) (75) also rotates, and each vertical member (86) (87) (88) moves up and down via cam followers (80) (81) (82) according to the shape of the cam. .

This controls the position of the printed circuit board (P) in the feeding direction, the width direction perpendicular to the feeding direction, and the vertical direction perpendicular to these directions.

■ Position regulating board (P) in the feeding direction of the printed circuit board (P)
) before reaching this position, the cam lever (9
1) is in the raised position, so it is in the state shown in FIG.

Then, in accordance with the clamp cam <75) that rotates when the motor (77) is energized, the -upper and lower members (88) are moved by the springs (
112), the movable clamp (94) is rotated by the spring (98) and the reference clamp (93) is rotated by the spring (97), thereby regulating the position of the printed circuit board (P) in the feeding direction. It is done.

That is, when the upper and lower members (88) descend along the guide (85), the movable clamp (94) rotates around the support shaft (96), and the reference clamp (93) rotates around the support shaft (95). . Therefore, each clamp comes into contact with the upstream end face and the downstream end face of the substrate (P).

If the dimensions of the printed circuit board (P) in the feeding direction are changed, before placing it on the chain (18A) (18B),
This is done by rotating the screw shaft (104) using a drive source (not shown). When this screw shaft (104) rotates, the X table (102) moves along the linear guide (101) via the ball screw body (105) and the connecting body (106).
) moves. Since a movable body (103) that supports the movable clamp (94) is fixed to this X table (102), the movable clamp (94) cannot move away from or approach the reference clamp (93). This makes it possible to deal with changes in the dimensions of the printed circuit board (P) in the feeding direction.

■ Position regulating board (P) in the width direction perpendicular to the feeding direction of the printed circuit board (P) Before the board (P) reaches this positioning position, the upper door member (86) and the cam lever (89) are in the raised position, so the spring (123), the width adjusting member (120) is in a state as shown in FIG.

Then, the upper and lower members (86) are lowered in accordance with the shape of the width-adjusting cam 73) rotated by the energization of the motor (77). Therefore, the spring (123) is applied to the width adjusting member (1).
20) has the support shaft (119) as the fulcrum and the upper part is the board (P)
Rotate to the side. This rotation causes the substrate CP> to be held between the movable bearing body (116). Therefore, the position of the substrate (P) in the width direction is regulated.

If the dimension of the printed circuit board (P) in the width direction perpendicular to the feeding direction changes, the drive motor (3
8), by moving the movable chute (20A) and widening or narrowing the distance from the fixed chute (20B), it is sufficient to allow these width adjusting members (120>) to move as a result.

■ Before the vertical regulation board (P) of the printed circuit board (P) reaches this positioning position, the upper and lower members (87) and the cam lever (90) are in the lowered position as shown in Fig. 13, and the suction The top surface of the upper and lower members (87A) (87B> is slightly higher than the top surface of the chain (18A) (18B>) and rests on the bell, each chain (18A) (18B)
The board (P) is transferred from the chain to the upper surface of each of the upper and lower members (87A) (87B) and is attracted thereto by the engaging piece (19). Then, when the conveyor (2) stops, the suction will stop, but due to this suction, the conveyor (
2) When the printed circuit board (F'
) rarely moves.

Then, when the upper and lower members (87) and the cam lever (90) rise according to the shape of the two-wheeled cam (74) that rotates when the motor (77) is energized, the printed circuit board (P>
is pushed up by the upper and lower members (87A>(87A) raised by springs (133) (133). Therefore, the position of the board (P) is restricted in the feed direction and the width direction perpendicular to the feed direction of B. With the board holder (13)
5) The engaging portion (136) of (135) comes into contact with the lower surface of (136) (see FIG. 14).

Therefore, by this regulation bag e (130), the substrate (P
) can be kept constant regardless of the thickness of the substrate (P).

Each position regulation of the board (P) described above can be started almost simultaneously by energizing the motor (77), but the position regulation in the feeding direction, the position regulation in the width direction perpendicular to this feeding direction, and these directions It ends in the order of position regulation in the vertical direction orthogonal to .

(iv) Operation of the wafer table (9) etc. The pellets are mounted on the printed circuit board (P) whose position is regulated as described above, but before this mounting, the desired wafer on the wafer table (9) is The wafer support platform (
11) is rotated in either forward or reverse direction by a drive source (not shown).

Next, the X-axis layer motor (141) and the Y-axis peripheral motor (142)
The guide body (2ft
4) so that the pellet (180A> on the desired wafer sheet <146) is located above the wafer sheet <146).

Then, the cylinder (253) moves the bezel (254) upward, and the guide body (264) moves the wafer sheet (
146). After that, the drive motor (301) is energized, and each pulley (302) (304) and belt (
305), the screw shaft (303) is rotated to raise the vertical bar (307). Then, the bar (307) becomes
Since the first lever is activated and raises < - (25g), the second lever (262) also rises due to the spring (282), but since the bolt (295) contacts the upper limit stopper (297), the second lever (262) also rises. movement is restricted.

However, since the first lever (258) further moves upward,
The push-up needle (268) rises. Therefore, as shown in FIG.
1) and the suction hole (267), the stage surface (26
6) Push up the suctioned sheet (146) and remove the pellet (180A) from the surface of the sheet (146) to hold it with the suction part (227) of the mounting B head (4). 227> is definitely a pellet (18
0A> is adsorbed.

However, at this time, the push-up needle (268) does not push up all at once from its lower limit stop position, but in order to synchronize with the rising timing of the suction fret (185) after the pellet is attracted, the upper end of the push-up needle (268) first moves up to the stage. The suction part (185) of the suction fret (185), which is lowered at this time, waits at the same level as the surface (266>) and rises with an appropriate timing signal to push up the sheet (146> (see Fig. 36). Even if the pellet (180A) is clamped between the lower end of the needle (227), the needle (26g) further rises, so the vertical moving body (159) of the mounting rod (14)
) is in a stopped state, the suction nozzle body (184) is raised against the wing B (179).

After this, push up needle (268) and suction nozzle body (184)
synchronously rise together while holding the pellet (180A>).After reaching a predetermined rise, only the nozzle body (184) rises, and the needle (268) descends to the standby position. return.

After this adsorption, the rotation of the drive motor (301) is reversed, the vertical bar (307) is moved downward, and the first operating lever (25g) is lowered by the spring (282), so that the needle <268) is lowered. However, when the vertical bar (307) further moves downward, the second operating lever (262) also descends, and this push-up needle device (145) is lowered by the cylinder (253) to return to its initial state.

If you want to load the next large pellet (180B), the wafer sheet (146) will be placed at the station (A).
Rotate the support base (11) so that it is located at
The Y table (140) and the support stand (11) are moved in the plane direction to prepare for the next mounting operation. Also, the rotary plate <252) of the push-up needle device <145> is rotated 90 degrees.

That is, the drive motor (not shown) is energized to rotate the rotation guide (251) and the rotation plate (252) by the gear (250) that meshes with the gear provided on the output shaft of the drive motor, and the rotation plate stopper (308) is rotated. This ensures a secure stopping position.

Therefore, the guide body (2) for large pellets (180B)
65) is located directly below the wafer sheet (146).

In addition, as shown in Fig. 40, the pellets are wafer-sealed).
When peeling from the wafer sheet (146),
) to the stage surface (266') can also be varied. That is, relatively small pellets (
180A), by switching the switching valve (312), you can select either the two-pronged throttle valve (314) or <315> to suction at a different vacuum pressure. ), the switching valve (3
By switching 13), the bifurcated drawing method (316)
, (317) can be selected to suction at different vacuum pressures.

Therefore, each guide body (264), (265) Nikki 2
1] The vacuum pressure of type i can be selected and adjusted, and can be adapted to the different sizes of wafers on each wafer table (9) (10).

For example, when handling the aforementioned small pellets (180A), the switching valve (312) is switched and the two-pronged throttle valve (31
4) Select each valve (323), (324),
(325) is closed and valve (322) is opened. Then, the vacuum pressure becomes, for example, 250rrrnHg. Also, at this time, the dust sucked in through the suction hole (267) of the guide body (264) is removed by the first filter (310), and the switching valve (312) and the two-pronged throttle valve (314) are protected. . Further, the dust sucked in from the valve (326) of the two-pronged throttle valve (314) is removed by the second filter <318), and the valve (322) is protected. This pellet (
When handling pellets slightly larger than 180A), the switching valve (312) is switched to select the two-pronged throttle valve (315), and the vacuum pressure is set to, for example, 350ml1g.

Of course, when handling large pellets (180B), switch the switching valve (313) and use the two-pronged throttle valve (328), (
329) and set the vacuum pressure to 300, for example.
88g.

400mm) Ig.

(V) Pellet mounting operation The mounting rod (14) can be moved in the X direction by a ball screw (151A) rotated by a drive motor (154A), and a ball screw (151B) that can be rotated by a drive motor (154B). ) by the guide body (152) (
152) in the Y direction.

Therefore, the mounting head (14) can move to a position above the pellets (180A) to be adsorbed on the wafer sheet (146) located at the station (A), and then lower the adsorption freight (185) to the desired position. pellets (180A) can be adsorbed. This point will be explained in detail below.

First, power is applied to the drive motor (154G), and each pulley (1
55), (157), the screw shaft (156) is rotated via the belt (158), and the vertical moving body (159) is lowered. Then, the pressurizing motor (162) presses the spring B.
(179), the pressurized bearing body (174) is connected to the rotary joint (176) and the fixed bearing body (174).
75), the suction nozzle body (1B4) moves along the upper and lower guide bodies (192) to the wafer seat 1- (
146). Therefore, as mentioned above, in conjunction with the needle <268) of the push-up needle device (145),
180A> can be reliably adsorbed.

After this adsorption, the rotation of the motor (154G) is allowed to be reversed, and the vertically moving body (15) is rotated by the screw shaft (156).
9), and after this rise, the lock solenoid (163) is energized. Therefore, the sucked plunger (166) swings (17) against the spring (170).
3) is rotated about the support shaft (172) as a fulcrum. Therefore, the fixed bearing body (175) and the pressurized bearing body (174) provided on the support body (168) fixed to the vertically moving body (159), the collar body (177) of the low rigidity joint (176) Lock in a clamped position. Of course, this locking operation is performed while the mounting head (14) is moving horizontally, and if necessary after this locking operation, the suction nozzle body (18) is
Perform the O rotation in step 4) to align the orientation of the pellet (180A) in the plane direction with the mounting orientation on the substrate (P).

That is, each pulley (1
96), (197), the suction nozzle body <184) is rotated by θ by the vertical guide body (192) and the regulation bearing (194) via the belt (198).

This suction nozzle body <184> moves to a position above the printed circuit board (P) whose position is regulated as described above by the horizontal movement of the mounting head (14),
A pellet (1 gOA) can be attached to a desired position on the substrate (P).

That is, as described above, the motor (154C) is energized to allow the vertical moving body (159) to descend, and the suction nozzle body (111
14> is lowered onto the board (P), but on the way there, the lock solenoid (163) is demagnetized to release the locking operation.

When this is installed, the pellet (180A> is pressed against the printed circuit board (P) by the spring B (179). Therefore, if you want to change this pressing force, you can change the rotation angle of the pressing motor (162) as desired. This can be done by setting the data to the value of .

In addition, during the suction operation by the suction fret (185),
When a vacuum suction operation is started by a vacuum source (not shown), a microcomputer (287) that centrally controls all of the mounting devices receives detection data from the vacuum switch (191) and the photoelectric detection device (215). It is taken in via an OR circuit (285) or an AND circuit (286).

Then, depending on the state of the changeover switch (284A < 284B), if the content of at least one detection data or both detection data is "No pellets", the number of times N set in advance in the no pellet counter (not shown) is determined. , the pick-up operation is repeated, and when the number of times exceeds 8, the mounting head (14), (15) is returned to the origin, the operation of the mounting device is stopped, and the user is notified by means (289).
The user is notified of this visually or audibly.

Therefore, the user should check whether or not it is true that there is no bellet r, and if it is not true, adjust the activation level of the vacuum switch (191) or adjust the height position of the photoelectric detection device (215). Perform a test run or run it again to confirm whether the adjustment is appropriate. If it is not appropriate, readjust it, and if it is appropriate, continue normal operation.

Furthermore, the mounting heads (14) and (15) are equipped with the chain (1
8A>(18B), the engagement pieces (19) are arranged at an interval that is an integral multiple of the interval between the engagement pieces (19), so that both heads can perform the bonding operation at the same time.

(■) Replacing the suction collet (185) The mounting operation will be performed as described above, but for example, if the pellet you want to install next is a large pellet (180B), replace the suction collet that matches it. (185), the replacement operation will be explained in the second section below.
This will be explained based on FIGS. 5 to 32.

First, as shown in FIG. 22, the suction nozzle body (
184) and suction collet (185), and replace the suction collet! (7) The suction collet is moved to a position above the attachment hole (235) of the seal stocker (231) where it is not housed.

Next, the pin mount (2) is driven by the cylinder (242).
34') and a drive source (not shown) to raise the seal stocker (231) (see FIG. 25).

After this, the nozzle body (184) and the collet <185
) is further lowered, the lock claw body (221), (2
21) comes into contact with the lock release bin (233) and the support shaft (2
22), (222) as a fulcrum to open it (second
(See Figure 6). Therefore, the lock is released, but the holding member (247), which had been rotated outward by the cylinder (248), is rotated inward by the drive of this cylinder (248), and the adapter flange portion (226)
hold down.

Of course, at this time, the positioning pin (
241) (241) are sleeping together, and the adsorption collet (18
5) Zero rotation is prevented.

Then, when the stocker (231) is lowered by the drive source as shown in FIG.
184) rises as described above, and the bin mount (234)
and the locking pin (233) is lowered (see FIG. 28). After this, the suction nozzle body (184) moves to a position above the suction cholera h (185) for large pellets l- (180A>) and descends, while the pin (233) also rises. (233) opens the lock claw bodies (221) (221) (see Fig. 29).

And Sealston car (231) and stocker stand (
232) rises and inserts the adapter (219) of the suction collet (185) into the mounting space (218). At this time, the positioning pin (224) on the bottom of the mounting part (216)
is fitted into the U-shaped groove (225) of the adapter flange portion (226), thereby preventing θ deviation during insertion.

Thereafter, the pressing member (247) is rotated outward by driving the cylinder (248).

After that, the release pin (233) is lowered, so that the lock claw bodies (221) (221) are aligned with the springs (223X223).
The suction nozzle body (184) and the suction collet (185> move upward, and the holding member (247) is now rotated inward to lower the stocker (231) and stocker stand (232), thereby completing the exchange operation of the suction collet (185).

By replacing the suction collet (185), it becomes possible to accommodate large pellets (180B).

Next, the operation for checking whether or not the adsorbed cholera 1-(185) has been reliably replaced will be described.

First, when the DC solenoid (201) is energized, the vertical slider (20
4> is pressed downward, and the follower (210)
is in contact with and locked to the lower limit stopper (212), so the photoelectric detection device (215) is in a state where the suction collet (
185) is adsorbing pellets (180A) and (180B>.However, when checking whether or not the above-mentioned pellet 7 (185) has been replaced, , the solenoid (201) can be demagnetized. That is, by demagnetizing the upper and lower sliders (201)
04) is raised by the spring D (208>), and the operating lever (203) comes into contact with and locks the upper limit stopper (211), and as shown in FIG. 19B, the photoelectric detection device (
215), the presence of the adsorption collet (185) can be confirmed.

If presence or absence is detected, the subsequent operation will be stopped and the user will be notified by notification means (not shown).

When the mounting operation is performed as described above, the positioning device (
4) Stop each operation. That is, the motor (77) is energized again and the width shifting cam (73) and lift cam (74) are turned on.
) and clamp cam (75), and then rotate the cam lever.
(91) and (89) and raise the cam lever (90).
), and also the upper and lower suction members <87A).

(87A) through the suction hole (137) on the printed board (
The suction by the vacuum source is stopped and the pressure is returned to atmospheric pressure so as to stop the adsorption of P), and the motor (77) is de-energized to return to the initial state. After that, the drive motor (21) is energized and Chain <P) (IIIA) (18B)
conveyed downstream by

(vi) Reversing operation of the printed circuit board (P) In this way, the mounted printed circuit board (P) is transported downstream, and as shown in FIG. 41, the storage box <68B> can be raised and lowered by an elevator (not shown). are stored sequentially. This storage box (68B> is the storage box (68B) of the loader (67A) mentioned above.
It has exactly the same structure as A). Therefore, all of the printed circuit boards (P) in the storage box (68A) of the loader (67A) can be completely stored in the storage box (68B) of the unloader (67B) after being mounted.

Here, some printed circuit boards (P) require a large number of pellets to be attached, and in this case, it is necessary to place them on the chain <18A) (18B) again. In this case, there is a storage box (68B) in which the printed circuit board (P) is stored and a storage box (68A) in which the printed circuit board (P) is not stored.
) and replaced them with the loader (67A) and Anne L7-da (
67B>.

In this case, the reference side when positioning the printed circuit board (P) is the opposite side, but it is sufficient to reverse it in the plane direction using the reversing device (3). The details will be explained below.

As mentioned above, from the loader (67A) to the chain (18A)
When the substrate (P) is placed on (18B)-F and is intermittently transported until it reaches a position directly above the reversing device (3), the power supply to the drive motor (21), which is the drive source for transport, is stopped. Then, the swinging member (55) rotates and the guide (48) moves the upper and lower rods (49) upward, and the tube (61) and the upper and lower rods 49 are moved upward by a vacuum source (not shown). ) and the suction path (58> of the pusher (50)), the printed circuit board (P) is sucked onto the upper surface of the pusher (50) and raised. ) to rotate the push-up body (50) by 180 degrees in the plane direction via the pulleys (54), (52) and the helmet 51).

After that, the driving of the sill (56) is stopped, the swinging member (55) is returned to the initial state, and the push-up body (50>
descend. At this time, the suction by the vacuum source is released and the pressure is returned to atmospheric pressure, so the printed circuit board (P) is placed on the chain (18A) (18B>) and the drive motor (21) for withdrawal is energized again. , the printed circuit board (P) that has been reversed by 180 degrees is transported again, positioned as described above, and a desired pellet is mounted.

Therefore, the reference side when positioning the printed circuit board (P) is the same side as when it was first retracted and positioned, so that the mounting accuracy is improved.

In addition, when transporting a board (P) whose width dimension perpendicular to the conveyance direction of the printed circuit board (P) has been changed, use the X-axis circumferential motor (44
), the Y-axis layer motor (45) is driven to move the XY child table 46), and the push-up body (50) is placed at the exact middle position of the chains (18A) (18B) whose mutual spacing has been changed. This can be dealt with by moving.

(g) Effects of the Invention As described above, the present invention has the advantage that in order to change the suction force of the vacuum suction unit when handling different types of pellets, the operator must be able to operate the pressure adjustment gauge and change the adjustment. Although it didn't happen, such trouble can be solved.

Further, when a switching valve is used as the selection device, dust can be removed by a filter, and the switching valve can be protected and its life can be extended.

[Brief explanation of the drawing]

Fig. 1 is a plan view of the electronic component mounting device, Fig. 2 is a front view seen from inside the fixed chute of the mounting device in the depth direction, and Fig. 3 is a right side view of the withdrawal section of the mounting device. Figure 4 is a partial front view of the chain (18A), and Figure 5 is taken along line x-x' in Figure 1.
A sectional view, FIG. 6 is a YY' sectional view of FIG. 1, and FIG. 7 is a device for positioning regulation in the feeding direction! (92) front view,
Figure 8 is a front view of the device (92) in the standby state;
The figure shows a yellowtail with a long dimension in the feeding direction using the same device (92).
FIG. 10 is a plan view of the positioning device (4), and FIG. 11 is a front view showing the positioning state of the board (P).
12 is a cross-sectional view of the main part showing the state before positioning the printed circuit board (P) in the width direction in the Z' cross-sectional view; FIG. The figure is a sectional view taken along the line v-v' in Figure 1, and shows the regulating device t (1
30) Main part sectional view showing the state before positioning, 1st
Figure 4 is a sectional view of the main part showing the positioning state by the regulating device (130), and Figure 15 is a partial plan view with the device for regulating the position in the width direction perpendicular to the board feeding direction removed. , FIG. 16 is a partially sectional front view of the mounting head;
Fig. 17 is a vertical right side view of the mounting head, Fig. 18 is a plan view of the mounting head with a portion cut away, Fig. 19A is a right side view of the mounting head with a portion cut away, and Fig. 19B shows the upper and lower sliders raised. Partially cutaway right side view of the mounting head in condition,
FIG. 20 is a vertical cross-sectional view of the lower end of the suction nozzle and a front view of the suction collet, FIG. 21 is a left side view of the lower end of the suction nozzle, and FIG. 22 is a vertical cross-sectional front view of the suction nozzle replacement device.
Figure 3 is a plan view of the exchanger, Figure 24 is a left side view of the exchanger, Figures 25 to 32 are diagrams showing the exchange operation of the suction collet, and Figure 33 is the push-up when handling small pellets. Figure 34 is a front view of the needle device, Figure 34 is a right side view of Figure 33, Figure 35 is a front view of the same device when handling large pellets, Figure 36 is a longitudinal section of the push-up guide for small pellets. Figure 37 is a plan view of the same guide, Figure 38 is a vertical cross-sectional view of the push-up guide when handling large pellets,
Fig. 39 is a plan view of the guide, Fig. 40 is a suction circuit diagram necessary for pushing up, Fig. 41 is a schematic diagram of the uninvented mounting device and shows the operation of the reversing device, and Fig. 42 is the reversing device. FIG. 43 is a block diagram related to the detection of whether or not the suction collet has suctioned the pellet. (145)... Push-up needle device, (146)... Wafer sheet, (180A) (180B)... Perent, (264>(265)... Guide body, (267)
(274)... Adsorption hole, (268) (275>...
Push-up needle, (310) (311)...filter,
(312) (313>... switching valve, (314) (31
5) (316) (317)...Two-pronged throttle valve.

Claims (2)

[Claims] (1) A needle that pushes up the pellet to be picked up from the bottom surface of the wafer sheet, and a vacuum suction section that guides the needle in a vertically movable manner and sucks pellets around the pellet to be picked up from the bottom surface of the sheet are formed. In the pellet bonding apparatus, the suction part is connected to a vacuum source, and the suction force of the suction part is changed depending on the type of pellet. A pellet bonding apparatus comprising a plurality of set regulating valves and a selection device for selecting an arbitrary one from among the plurality of regulating valves. (2) A needle that pushes up the pellet to be picked up from the bottom surface of the wafer sheet, and a vacuum suction section that guides the needle in a vertically movable manner and sucks pellets around the pellet to be picked up from the bottom surface of the sheet are formed. In a pellet bonding device comprising a push-up guide and having the suction part connected to a vacuum source, a filter for removing dust is provided between the suction part and the vacuum source, and a filter is provided downstream of the filter. A switching valve and a plurality of adjustment valves connected in parallel between the switching valve and a vacuum source and configured to change the suction force of the suction unit depending on the type of pellets. Pellet bonding equipment.