JPH01280719A - Beam scanner - Google Patents
Beam scannerInfo
- Publication number
- JPH01280719A JPH01280719A JP63111083A JP11108388A JPH01280719A JP H01280719 A JPH01280719 A JP H01280719A JP 63111083 A JP63111083 A JP 63111083A JP 11108388 A JP11108388 A JP 11108388A JP H01280719 A JPH01280719 A JP H01280719A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser beam
- polygon
- reflecting mirror
- polygon mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001360 synchronised effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
２”−／
本発明は回転多面鏡を用いたビーム走査装置に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Industrial Application Field 2''-/ The present invention relates to a beam scanning device using a rotating polygon mirror.
従来の技術
以下図面を参照しながら、上述した従来のビーム走査装
置の一例について説明する。2. Description of the Related Art An example of the above-mentioned conventional beam scanning device will be described below with reference to the drawings.
第４図は回転多面鏡としてポリゴン・ミラーを用いた従
来のビーム走査装置の構成図を示すものである、第４図
において、１５はレーザ発振器、１６はレーザ・ビーム
、１７は反射鏡、１８はポリゴン拳ミラー、１９はｆΦ
θレンズ、２０ハ走査面である。レーザ発振器１５から
出たレーザ・ビーム１６は反射鏡１７によって等速回転
するポリゴン・ミラー１８の反射面に入射される。反射
したレーザΦビーム１６はｆ・θレンズ１９に入射し、
走査面２ｏ上で集光点が等速移動する。FIG. 4 shows a configuration diagram of a conventional beam scanning device using a polygon mirror as a rotating polygon mirror. In FIG. 4, 15 is a laser oscillator, 16 is a laser beam, 17 is a reflecting mirror, and 18 is a polygon fist mirror, 19 is fΦ
θ lens, 20mm scanning surface. A laser beam 16 emitted from a laser oscillator 15 is directed by a reflecting mirror 17 onto the reflecting surface of a polygon mirror 18 that rotates at a constant speed. The reflected laser Φ beam 16 enters the f/θ lens 19,
The focal point moves at a constant speed on the scanning surface 2o.
発明が解決しようとする課題
しかしながら上記のような構成では、ビームの高速走査
には適しているが面数が８面以下のポリゴン・ミラーを
用いた場合、各反則面の回転角が大きくなる。現実的に
はｆ・θレンズの製作上の３・＼−・
問題からｆ・θレンズ１９に入射するビームの回転角は
２０度を大きく越えることは好ましくない。Problems to be Solved by the Invention However, although the above configuration is suitable for high-speed beam scanning, when a polygon mirror with eight or fewer surfaces is used, the rotation angle of each irregular surface becomes large. In reality, it is not preferable for the rotation angle of the beam incident on the f.theta lens 19 to greatly exceed 20 degrees due to the following problems in manufacturing the f.theta lens.
従ってビーム走査に使われる反射面の利用率は小さい。Therefore, the utilization rate of the reflective surface used for beam scanning is small.
例えば８面ポリゴン・ミラーの場合、各面の利用率は４
５％であり、面数の減少とともに利用率は低下する。ま
た面数を大きくすれば利用率は増加するが、外接円半径
が大きくなり、場合によっては実際上製作困難な大きさ
のポリゴン・ミラーになるという課題を有していた。For example, in the case of an 8-sided polygon mirror, the utilization rate of each face is 4
5%, and the utilization rate decreases as the number of pages decreases. In addition, if the number of surfaces is increased, the utilization rate increases, but the radius of the circumscribed circle becomes large, and in some cases, there is a problem that the polygon mirror becomes large enough to be difficult to manufacture in practice.
本発明は上記課題に鑑み、高速走査が可能で、しかもビ
ームの利用率が高いビーム走査装置を提供するものであ
る。In view of the above problems, the present invention provides a beam scanning device that is capable of high-speed scanning and has a high beam utilization rate.
課題を解決するための手段
」−配置的を達成するだめに本発明のビーム走査装置は
、１木のビームと、回転によりビームを走査する複数の
回転多面鏡と、前記１木のビームを前記いずれか１つの
回転多面鏡の反射面に入射させる偏向装置という構成を
備えたものである。Means for Solving the Problems - In order to achieve the arrangement, the beam scanning device of the present invention includes a single beam, a plurality of rotating polygon mirrors that scan the beam by rotation, and a plurality of rotating polygon mirrors that scan the beam by rotation. This device is equipped with a deflection device that directs the light to the reflecting surface of any one of the rotating polygon mirrors.
作 用
本発明は上記した構成によって、反射面を回転もしくは
移動させる偏向装置か音響光学変調器を用いた偏向装置
によって、ビームの進路を変えることができる。従って
複数の回転多面鏡の反則面のうち、ｆ・θレンズで走査
可能な範囲にある面に絶えずビームが入射するように進
路を切替えることにより、１木のビームの利用率を飛躍
的に向上させることができる。Operation According to the above-described configuration, the present invention can change the course of the beam using a deflection device that rotates or moves a reflecting surface or a deflection device that uses an acousto-optic modulator. Therefore, by switching the course so that the beam is constantly incident on the surface within the scanning range of the f/θ lens among the nonconforming surfaces of multiple rotating polygon mirrors, the utilization rate of the single beam can be dramatically improved. can be done.
実施例
以下本発明の一実施例のビーム走査装置について、図面
を参照しながら説明する。Embodiment Hereinafter, a beam scanning device according to an embodiment of the present invention will be described with reference to the drawings.
第１図は本発明の第１の実施例におけるビーム走査装置
の構成図を示すものである。第１図において、１はレー
ザ発振器、２ａ、２ｂ、２ｃはレーザ・ビーム、３はビ
ーム光路に苅し４５度傾けて設置された回転式反射鏡、
４は通過孔、５は反射鏡、６，７ば８面ポリゴンφミラ
ー、８はポリゴン・ミラーの回転角が２ｃ度までが使用
可能なｆ・θレンズ、９は走査面、１０は反射鏡である
。FIG. 1 shows a configuration diagram of a beam scanning device in a first embodiment of the present invention. In FIG. 1, 1 is a laser oscillator, 2a, 2b, 2c are laser beams, 3 is a rotating reflector installed in the beam optical path and tilted at 45 degrees,
4 is a passing hole, 5 is a reflecting mirror, 6 and 7 are 8-sided polygon φ mirrors, 8 is an f/θ lens that can be used with a polygon mirror rotation angle of up to 2c degrees, 9 is a scanning surface, and 10 is a reflecting mirror It is.
レーザ発振器１から出たレーザ・ビーム２ａは、回転式
反射鏡３の回転位置によって、通過孔４を５”−′
通過したレーザ・ビーム２ｂと反射したレーザ・ビーム
２Ｃとに時間によって進路が変わる。レーザ・ビーム２
ｂは反射鏡５で反射し、レーザ・ビーム２ｂが入射する
時に有効回転角の位置に来るように設置されたポリゴン
・ミラー６によってｆ・θレンズ８に入射され走査面９
上を集光状態で走査される。一方、レーザ・ビーム７Ｃ
は反射鏡１ｏと６を反射した後、ポリゴンΦミラー６と
２２．５度の角度をずらせて設置されたポリゴン・ミラ
ー了によってｆ・θレンズ８に入射され走査面９上を集
光状態で走査される。The laser beam 2a emitted from the laser oscillator 1 changes its course depending on the time, depending on the rotational position of the rotary reflector 3, into a laser beam 2b that has passed through the passage hole 4 by 5''-' and a reflected laser beam 2C. .Laser beam 2
b is reflected by the reflecting mirror 5, and is incident on the f/θ lens 8 by the polygon mirror 6 installed so that it is at the position of the effective rotation angle when the laser beam 2b is incident, and is incident on the scanning surface 9.
The top is scanned in a condensed state. On the other hand, laser beam 7C
After being reflected by the reflecting mirrors 1o and 6, it is incident on the f/θ lens 8 by a polygon mirror installed at an angle of 22.5 degrees with respect to the polygon Φ mirror 6, and is condensed on the scanning surface 9. scanned.
以上のように木実流側によれば、通過孔４を有する回転
式反射鏡３の回転数を、２２．６度の角度をずらせて設
置された２枚のポリゴン・ミラー６と７の回転数との間
で同期をとシ、それぞれのポリゴン・ミラーの有効回転
角の状態で反則させることにより、レーザ・ビームの利
用率が８９チとなり、１枚のポリゴン・ミラーの場合と
比べ利用率が倍になる。As described above, according to Kino-ryu, the rotation speed of the rotary reflector 3 having the passage hole 4 is changed by the rotation of the two polygon mirrors 6 and 7 installed at an angle of 22.6 degrees. By synchronizing the number of polygon mirrors and changing the effective rotation angle of each polygon mirror, the utilization rate of the laser beam becomes 89 degrees, which is lower than that of a single polygon mirror. will be doubled.
以下本発明の第２の実施例について図面を参照６ヘーノ しながら説明する。Please refer to the drawings below regarding the second embodiment of the present invention. I will explain while doing so.
第２図は本発明の第２の実施例を示すビーム走査装置の
構成図である。同図において、１１は音響光学変調器で
ある。FIG. 2 is a block diagram of a beam scanning device showing a second embodiment of the present invention. In the figure, 11 is an acousto-optic modulator.
」二足のように構成されたビーム走査装置について、以
下その動作を説明する。レーザ発振器１から出たレーザ
・ビーム２ａは音響光学変調器１１の動作状態によって
、進路をレーザ・ビーム２ｄと２ｅのいずれかに瞬時に
切り替えることができる。レーザ・ビーム２ｄは反射鏡
５で反射し、レーザ・ビーム２ｄが入射する時に有効回
転角の位置に来るように設置されたポリゴン・ミラー６
によってｆ・θレンズ８に入射され走査面９上を集光状
態で走査される。一方、レーザ・ビーム２ｅは反射鏡１
ｏを反射した後、ポリゴン・ミラー６と２２．５度の角
度をずらせて設置されたポリゴン・ミラー了によってｆ
・θレンズ８に入射され走査面９上を集光状態で走査さ
れる。The operation of the beam scanning device configured like two legs will be explained below. The course of the laser beam 2a emitted from the laser oscillator 1 can be instantaneously switched to either laser beam 2d or 2e depending on the operating state of the acousto-optic modulator 11. The laser beam 2d is reflected by a reflecting mirror 5, and a polygon mirror 6 is installed so that the laser beam 2d is positioned at an effective rotation angle when the laser beam 2d is incident.
The light is incident on the f/theta lens 8 and scanned on the scanning surface 9 in a condensed state. On the other hand, the laser beam 2e is reflected by the reflecting mirror 1.
After reflecting o, f is reflected by a polygon mirror placed at an angle of 22.5 degrees with polygon mirror 6.
- The light enters the θ lens 8 and scans the scanning surface 9 in a condensed state.
以上のようにレーザ・ビームの偏向装置として音響光学
変調器を設けることにより、第１の実施７１＼−／
例と同様にビームの利用率が８９％と高くなるだけでな
く、ビームの進路を瞬時に切り替えることができる。As described above, by providing an acousto-optic modulator as a laser beam deflection device, not only can the beam utilization rate be as high as 89% as in the first embodiment 71\-/ example, but also the beam path can be changed. You can switch instantly.
以下本発明の第３の実施例について図面を参照しながら
説明する。A third embodiment of the present invention will be described below with reference to the drawings.
第３図は本発明の第３の実施例を示すビーム走査装置の
構成図である。同図において、１２は反射鏡、１３ば８
面ポリゴン−ミラー、１４はポリゴン・ミラー１３と２
２．５度ずらせて同軸」−に同時回転するように設置さ
れたポリゴン・ミラーである。FIG. 3 is a configuration diagram of a beam scanning device showing a third embodiment of the present invention. In the same figure, 12 is a reflecting mirror, 13 is 8
Surface polygon mirror, 14 is polygon mirror 13 and 2
These are polygon mirrors installed so that they rotate simultaneously on the same axis with a 2.5 degree shift.
」二足のように構成されたビーム走査装置について、以
下その動作を説明する。レーザ発振器１から出たレーザ
・ビーム２は反射鏡１２によって、レーザ・ビーム２が
入射する時に有効回転角の位置に来るように設置された
ポリゴン・ミラー１３によってｆ・θレンズ８に入射さ
れ走査面９上を集光状態で走査される。反射鏡１２はレ
ーザ・ビーム２の光路上で平行移動が可能で、ポリゴン
・ミラー１４で走査する時は所定の位置に移動し、走査
面９上をレーザ・ビーム２は集光状態で走査される。The operation of the beam scanning device configured like two legs will be explained below. A laser beam 2 emitted from a laser oscillator 1 is incident on an f/theta lens 8 and scanned by a polygon mirror 13 installed at a position with an effective rotation angle when the laser beam 2 is incident by a reflecting mirror 12. The surface 9 is scanned in a condensed state. The reflecting mirror 12 can be moved in parallel on the optical path of the laser beam 2, and when scanning is performed by the polygon mirror 14, it is moved to a predetermined position, and the laser beam 2 is scanned on the scanning surface 9 in a condensed state. Ru.
以上のように、２枚のポリゴン・ミラーを２２．６度ず
らせて同軸上に同時回転するように設置し、反射鏡１２
を移動させ、それぞれのポリゴン・ミラーの有効回転角
の状態で反射させることにより、第１の実施例と同様に
レーザ・ビームの利用率が８９％となる。As described above, two polygon mirrors are installed so that they rotate simultaneously on the same axis with a 22.6 degree shift, and the reflecting mirror 12
By moving the polygon mirror and reflecting it at the effective rotation angle of each polygon mirror, the utilization rate of the laser beam becomes 89% as in the first embodiment.
なお、第１．第２および第３の実施例において２枚の８
面ポリゴン・ミラーを用いたが、ポリゴン・ミラー以外
の回転多面鏡や２枚以」二の回転多面鏡や、８面以外の
ポリゴン・ミラーも使用可能なことは言うまでもない。In addition, 1. In the second and third embodiments, two 8
Although a plane polygon mirror is used, it goes without saying that a rotating polygon mirror other than a polygon mirror, a two or more rotating polygon mirror, or a polygon mirror other than eight planes can also be used.
発明の効果
以上のように本発明は、１本のビームと、回転によりビ
ームを走査する複数の回転多面鏡と、前記１木のビーム
を前記いずれか１つの回転多面鏡の反射面に入射させる
偏向装置とを設けることにより、高速走査が可能で、し
かもビームの利用率を高くすることができる。Effects of the Invention As described above, the present invention includes one beam, a plurality of rotating polygon mirrors that scan the beam by rotation, and making the one beam incident on the reflecting surface of any one of the rotating polygon mirrors. By providing a deflector, high-speed scanning is possible and the beam utilization rate can be increased.
９ ”−７9”-7
第１図は本発明の第１の実施例におけるビーム走査装置
の構成図、第２図は本発明の第２の実施例におけるビー
ム走査装置の構成図、第３図は本発明゛の第３の実施例
におけるビーム走査装置のｆ’ｆ＆成図、第４図は従来
のポリゴン・ミツ−を用いたビーム走査装置の構成図で
ある。
３・・・・・・回転式反射鏡、４・・・・・・通過孔、
６．７・・・・・・ポリゴン・ミラー、９・・・・・・
反射面、１１・・曲・音響光学変調器、１２・・・・・
・反射鏡、１３．１４・・・・・ポリゴン・ミラー。FIG. 1 is a block diagram of a beam scanning device according to a first embodiment of the present invention, FIG. 2 is a block diagram of a beam scanning device according to a second embodiment of the present invention, and FIG. 3 is a block diagram of a beam scanning device according to a second embodiment of the present invention. Fig. 4 is a block diagram of a beam scanning apparatus using a conventional polygon beam. 3... Rotating reflector, 4... Passing hole,
6.7...polygon mirror, 9...
Reflective surface, 11... Curved acousto-optic modulator, 12...
・Reflector, 13.14...Polygon mirror.
Claims (5)
数の回転多面鏡と、前記１本のビームを前記いずれか１
つの回転多面鏡の反射面に入射させる偏向装置とを備え
たビーム走査装置。(1) One beam, a plurality of rotating polygon mirrors that scan the beam by rotation, and the one beam
A beam scanning device equipped with a deflection device that causes the beam to be incident on the reflecting surface of two rotating polygon mirrors.
移動によりビームを偏向する特許請求の範囲第１項記載
のビーム走査装置。(2) The beam scanning device according to claim 1, wherein the deflection device has a beam reflecting surface and deflects the beam by rotation or movement.
第１項記載のビーム走査装置。(3) The beam scanning device according to claim 1, wherein the deflection device is an acousto-optic modulator.
はならない特許請求の範囲第１項 記載のビーム走査装置。(4) The beam scanning device according to claim 1, wherein the reflecting surface of the rotating polygon mirror is not parallel to the scanning surface at the same time.
請求の範囲第１項記載のビーム走査装置。(5) The beam scanning device according to claim 1, wherein the rotation centers of the plurality of rotating polygon mirrors are coaxial.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63111083A JPH01280719A (en) | 1988-05-06 | 1988-05-06 | Beam scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63111083A JPH01280719A (en) | 1988-05-06 | 1988-05-06 | Beam scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01280719A true JPH01280719A (en) | 1989-11-10 |
Family
ID=14551951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63111083A Pending JPH01280719A (en) | 1988-05-06 | 1988-05-06 | Beam scanner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01280719A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998010885A1 (en) * | 1996-09-13 | 1998-03-19 | Komatsu Ltd. | Mask scanning laser marker and scanning method therefor |
| KR100611210B1 (en) * | 2001-03-28 | 2006-08-09 | 삼성에스디아이 주식회사 | Optical Apparatus of One Panel Projection System |
| CN104553353A (en) * | 2014-12-18 | 2015-04-29 | 广州创乐激光设备有限公司 | Controlled distance indicating method, marking method and controlled distance indicating device for 3D laser marking machine and 3D laser marking machine |
| CN113574440A (en) * | 2019-03-06 | 2021-10-29 | 川崎重工业株式会社 | Light guide device |
-
1988
- 1988-05-06 JP JP63111083A patent/JPH01280719A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998010885A1 (en) * | 1996-09-13 | 1998-03-19 | Komatsu Ltd. | Mask scanning laser marker and scanning method therefor |
| KR100611210B1 (en) * | 2001-03-28 | 2006-08-09 | 삼성에스디아이 주식회사 | Optical Apparatus of One Panel Projection System |
| CN104553353A (en) * | 2014-12-18 | 2015-04-29 | 广州创乐激光设备有限公司 | Controlled distance indicating method, marking method and controlled distance indicating device for 3D laser marking machine and 3D laser marking machine |
| CN113574440A (en) * | 2019-03-06 | 2021-10-29 | 川崎重工业株式会社 | Light guide device |
| EP3936923A4 (en) * | 2019-03-06 | 2022-12-28 | Kawasaki Jukogyo Kabushiki Kaisha | Light guide device |
| CN113574440B (en) * | 2019-03-06 | 2023-06-16 | 川崎重工业株式会社 | Light guide device |
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