JPH01280267A - Inspection instrument for solid-state image pickup element - Google Patents

Abstract

PURPOSE:To shorten the time of inspection processing by irradiating the solid- state image pickup element with reference light, converting its output signal from analog to digital and storing the digital signal, and comparing the stored data in parallel by set conditions of an optical means and output conditions of the image pickup element. CONSTITUTION:A: The driving condition of the solid-state image pickup element is set. B: An optical device is set under a prescribed condition. C: Digized data after A/D conversion are stored. D: The stored data are processed and decided. Those A-D are regarded as a unit block and optical condition and electric condition are set properly. Processes A-I-C-I are performed as a test I and when the storage of the data is finished, a process D-I and processes A-II-C-II as a test II are performed in parallel. Then when those processes are finished, data are ORed and compared with previous data. Similarly, those data processes are performed repeatedly to make a decision. The data processes are formed in parallel and the processing time is shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an inspection apparatus for a solid-state image sensor, and more particularly to an inspection apparatus that can shorten inspection processing time by digitizing output signals of a solid-state image sensor.

2. Description of the Related Art In recent years, solid-state imaging devices have begun to be used as image sensors for video cameras.

By the way, inspection of solid-state image sensors ranges from so-called manual inspection, in which a test jig is used to bring the device into actual operation, the subject is displayed on a TV monitor, etc., and a human visually inspects and makes a judgment.
There is a shift to automatic inspection in which analog output signals are digitized and arithmetic units for image processing are used to automatically make decisions.

In order to perform an automated inspection similar to that performed by the human eye, it is necessary to perform the inspection while assuming the actual operating conditions of the video camera.

The configuration and operation of a conventional inspection device will be explained.

FIG. 2 shows the configuration of a conventional solid-state image sensor testing apparatus, which tests the solid-state image sensor in an actual operating state. FIG. 3 is an inspection flowchart that roughly divides the inspection process.

A procedure for testing a solid-state image sensor using the testing apparatus shown in FIG. 2 will be described. An electric signal is applied by a bias circuit 1 and a pulse circuit 2, and reference light is irradiated by an optical device 3. When this condition is met, an analog signal is output from the output terminal of the solid-state image sensor 4. This analog output signal is proportional to the intensity of the irradiated light up to a certain amount of light. The output signal is amplified by a signal amplifier 5 according to the input capacity of the A/D converter 6. The amplified analog output signal is converted into a digital signal by an A/D converter 6 and sequentially stored in a memory 7. Using the information stored in the memory 7, the image processing arithmetic unit 8 performs calculations and judgments.

Problems to be Solved by the Invention In the conventional inspection flow, as shown in FIG. The time required to set the conditions of the apparatus and the time required to input data into the memory have a large impact on the inspection processing time, and are the main factors that reduce inspection efficiency.

An object of the present invention is to provide an inspection apparatus that can shorten inspection processing time by changing the inspection flow.

Means for Solving the Problems The present invention provides an optical means for irradiating a solid-state image sensor with reference light, an A/D converter for converting an output signal of the solid-state image sensor into a digital signal, and an A/D converter for converting the digital signal into a digital signal. The solid-state image sensing device inspection apparatus includes a data storage unit for storing data, and a determination unit that compares data in the data storage unit in parallel for each setting condition of the optical unit or output condition of the solid-state image sensing device.

Effects According to the present invention, the time required for inspection can be shortened by performing parallel processing of digital signals.

Example Hereinafter, the present invention will be explained in detail with reference to Examples.

FIG. 1 is an inspection flowchart using an apparatus according to an embodiment of the present invention. As shown in FIG. C: Store digitized data after A/D conversion; D: Perform arithmetic processing and judgment on stored data. Using A-D as a unit block, set appropriate optical and electrical conditions. Set the state. At this time, the processing of A-C is
This is the process of accumulating measurement data, and if the storage capacity is sufficient, it can be stored repeatedly in the memory. On the other hand, the process of D, i.e., arithmetic processing and judgment of stored data, is
Parallel processing is possible. In the present invention, first, as test (2), processes A-1-C-1 are executed, and when the storage of the data is completed, next, process D-1 of test I is executed and test (2) is performed. The processes A-It to C-■ are executed in parallel. Then, when this process is completed, it has a function of performing a logical AND comparison with the previous data. Thereafter, the determination is made by repeating the data processing process as described above.

According to this inspection device, data processing is parallelized and processing time can be shortened.

Effects of the Invention As explained above, according to the present invention, each device constituting a solid-state image pickup device inspection device is changed from sequential processing to parallel processing, reducing inspection processing time and streamlining inspection. There is an economic effect that this can be done. This is particularly effective for tests with many inspection items.

[Brief explanation of the drawing]

FIG. 1 is an inspection flowchart of a solid-state image sensing device inspection apparatus according to an embodiment of the present invention, FIG. 2 is a block diagram of a conventional apparatus, and FIG. 3 is an inspection flowchart of a conventional apparatus. DESCRIPTION OF SYMBOLS 1... Bias circuit, 2... Pulse circuit, 3... Optical device, 4... Solid-state image sensor, 5... Signal amplifier , 6...A/
D converter, 7...Memory, 8...
Image processing calculation device. Name of agent: Patent attorney Toshio Nakao and one other person Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] an optical means for irradiating a solid-state image sensor with reference light; an A/D converter for converting an output signal of the solid-state image sensor into a digital signal; a data storage section for storing the digital signal; and a data storage section for storing the digital signal. A testing device for a solid-state image sensor, comprising: a determination means for comparing data in parallel for each set condition of the optical means or output condition of the solid-state image sensor.