JPH01279745A - Composite multi-layered film - Google Patents
Composite multi-layered filmInfo
- Publication number
- JPH01279745A JPH01279745A JP10948088A JP10948088A JPH01279745A JP H01279745 A JPH01279745 A JP H01279745A JP 10948088 A JP10948088 A JP 10948088A JP 10948088 A JP10948088 A JP 10948088A JP H01279745 A JPH01279745 A JP H01279745A
- Authority
- JP
- Japan
- Prior art keywords
- film
- organic polymer
- polymer film
- alloy
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 21
- 239000010408 film Substances 0.000 claims abstract description 48
- 239000010409 thin film Substances 0.000 claims abstract description 25
- 229920000620 organic polymer Polymers 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 239000000956 alloy Substances 0.000 claims abstract description 18
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000000126 substance Substances 0.000 claims abstract description 10
- 230000005284 excitation Effects 0.000 claims abstract description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000010931 gold Substances 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- 229920006254 polymer film Polymers 0.000 claims abstract description 6
- 229920000515 polycarbonate Polymers 0.000 claims abstract description 5
- 239000004417 polycarbonate Substances 0.000 claims abstract description 5
- -1 polysiloxane Polymers 0.000 claims abstract description 5
- 229910052718 tin Inorganic materials 0.000 claims abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229920000098 polyolefin Polymers 0.000 claims abstract description 3
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 3
- 229910052709 silver Inorganic materials 0.000 claims abstract description 3
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims abstract 2
- 229910052802 copper Inorganic materials 0.000 claims abstract 2
- 229910052759 nickel Inorganic materials 0.000 claims abstract 2
- 229910010272 inorganic material Inorganic materials 0.000 claims description 6
- 239000011147 inorganic material Substances 0.000 claims description 6
- 229920000058 polyacrylate Polymers 0.000 claims description 4
- 239000011135 tin Substances 0.000 claims description 4
- 229910001020 Au alloy Inorganic materials 0.000 claims description 2
- 239000004698 Polyethylene Substances 0.000 claims description 2
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 229910052793 cadmium Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- 239000003353 gold alloy Substances 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229920000573 polyethylene Polymers 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 7
- 238000000151 deposition Methods 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 abstract description 2
- 229910004166 TaN Inorganic materials 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 239000002245 particle Substances 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000012528 membrane Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 （技術分野） この発明は、複合多層膜に関するものである。[Detailed description of the invention] (Technical field) The present invention relates to a composite multilayer film.
さらに詳しくは、この発明は、装飾性、保護性、機能性
等に優れた複合多層膜に関するものである。More specifically, the present invention relates to a composite multilayer film with excellent decorative properties, protective properties, functionality, and the like.
（背景技術）
金属、ガラス、セラミックス、プラスチック等の基板の
表面に、金属、無機物、あるいは有機ポリマーなどの蒸
着薄膜を形成し、絶縁膜、反射膜、光学薄膜、表示素子
、電子デバイスなどとして用いることはこれまでにも広
く行われている。そのための反応プロセスとして、真空
蒸着、スパッタリング、イオンブレーティング、ＣＶＤ
、ＭＯＣＶＤ、ＭＢＥなどの様々なものが知られてもい
る。(Background technology) A vapor-deposited thin film of metal, inorganic material, or organic polymer is formed on the surface of a substrate made of metal, glass, ceramics, plastic, etc., and used as an insulating film, a reflective film, an optical thin film, a display element, an electronic device, etc. This has already been widely done. Reaction processes for this purpose include vacuum evaporation, sputtering, ion blating, and CVD.
, MOCVD, and MBE are also known.
しかしながら、従来の薄膜形成方法、そして薄膜につい
ては、所望の物性、機能性を持った薄膜を製造するため
には、いまだに改善すべき課題があり、また、薄膜の利
用についても様々な見地からの検討が必要とされている
現状にある。However, with regard to conventional thin film formation methods and thin films, there are still issues that need to be improved in order to manufacture thin films with desired physical properties and functionality, and there are also issues that need to be improved from various perspectives regarding the use of thin films. The current situation requires consideration.
このような課題のひとつは、色調に優れ、耐食性、密着
強度等の機能性も良好な、時計や装身具等に有用な外装
品に用いることのでき、しかも安価な複合多層膜を形成
することが難しかったことにある。特に近年になって、
その機能性が注目されている有機重合膜については、こ
れを金属、合金あるいは無機物の薄膜と多層化すること
は実用的なものとなっていない。One of these challenges is the ability to form an inexpensive composite multilayer film that has excellent color tone, good functionality such as corrosion resistance, and adhesion strength, and can be used for exterior products such as watches and jewelry. It was difficult. Especially in recent years,
Although organic polymer films are attracting attention for their functionality, it is not practical to multilayer them with thin films of metals, alloys, or inorganic materials.
この有機重合膜は、絶縁性に優れ、しかも安価で、かつ
耐食性、耐摩耗性、さらには色調の向上、あるいはその
変化の自由度が大きいことから、従来の金属、合金およ
び／または無機物のみからなる複合膜では実現すること
のできなかった装飾性、機能性を有するものであり、今
後の薄膜技術の重要な対象課題となっているものである
。しかしながら、これまでは、有機重合膜の特徴を生か
して複合多層膜を形成することは試みられてきていない
。This organic polymer film has excellent insulation properties, is inexpensive, and has corrosion resistance, abrasion resistance, and a high degree of freedom in improving color tone and changing it. It has decorative properties and functionality that could not be achieved with composite membranes, and is an important target for future thin film technology. However, until now, no attempt has been made to form a composite multilayer film by taking advantage of the characteristics of organic polymer films.
この発明の発明者は、このような状況に鑑みてこの発明
を行ったものであり、たとえば従来の外装品等において
は、金属、合金または無機物のみを多層化していること
から色調や機能性に限界があり、その自由度に乏しく、
かつ高価で性能向上が難しいという課題があったが、こ
のような欠点、課題を有機重合膜の形成と配設によって
克服し、従来実現することのできなかった装飾性、Ｒ能
性の実現を可能としたものである。The inventor of this invention made this invention in view of the above situation.For example, in conventional exterior products, etc., only metals, alloys, or inorganic materials are multilayered, so the color tone and functionality are affected. There are limits and lack of freedom,
However, these drawbacks and problems were overcome by forming and disposing an organic polymer film, and it was possible to achieve decorative properties and R properties that could not be achieved conventionally. This made it possible.
（発明の目的）
この発明は、以上の通りの事情からなされたものであり
、従来の薄膜形成方法の欠点を改善し、外装品としても
有用な色調およびび機能性に優れ、かつ安価に製造する
ことのできる有機重合膜を配設一体止した多層膜を提供
することを目的としている。(Objective of the Invention) The present invention has been made in view of the above-mentioned circumstances. It improves the drawbacks of the conventional thin film forming method, has excellent color tone and functionality useful as an exterior product, and can be manufactured at low cost. The purpose of the present invention is to provide a multilayer film in which an organic polymer film is integrally disposed.
（発明の開示）
この発明は、上記の目的を実現するために、金属、合金
および／または無機物からなる薄膜と有機重合膜とをプ
ラズマ励起により基板に蒸着してなることを特徴とする
複合多層膜を提供する。(Disclosure of the Invention) In order to achieve the above-mentioned object, the present invention provides a composite multilayer comprising a thin film made of a metal, an alloy and/or an inorganic material, and an organic polymer film deposited on a substrate by plasma excitation. Provide membrane.
この複合多層膜は、たとえば第１図に示したように、金
属、合金、セラミックス、あるいはプラスチック等から
なる基板（１）の上に、有機重合膜（２）を蒸着し、次
いで、金属、合金および／または無機物からなる薄膜（
３）、および有機重合膜（４）を順次に配設したものや
、さらには、第２図に示したように、基板（５）の上に
、金属、合金および／または無機物からなる薄膜（６）
、有機重合膜（７）、金属、合金および／または無機物
からなる薄膜（８）を気相蒸着して配設したちのなどと
して例示することができる。For example, as shown in FIG. 1, this composite multilayer film is produced by depositing an organic polymer film (2) on a substrate (1) made of metal, alloy, ceramics, plastic, etc. and/or a thin film made of inorganic material (
3) and an organic polymer film (4) are sequentially disposed, and as shown in FIG. 6)
, an organic polymer film (7), and a thin film (8) made of a metal, an alloy, and/or an inorganic substance formed by vapor phase deposition.
金属、合金および／または無機物からなる薄膜としては
、たとえば金色の外装品とする場合には金または金合金
、あるいはＴｉＮなどがあり、これらに限られずに、所
要の色調と光沢を有する金属、合金または無機物とする
ことができる。金属または合金としては、金、Ｃｕ、Ａ
ｌ、Ｎｉ。Thin films made of metals, alloys, and/or inorganic substances include, for example, gold or gold alloys, TiN, etc. in the case of gold-colored exterior products, but are not limited to these. Or it can be an inorganic substance. Metals or alloys include gold, Cu, A
l, Ni.
Ａｇ、Ｚｎ、Ｓｎ、Ｔａ、Ｖ、Ｃｒ、Ｃｏ、Ｐｔ。Ag, Zn, Sn, Ta, V, Cr, Co, Pt.
Ｐｄ、Ｒｕ、Ｒｈ、Ｔｉ、Ｗ、Ｍｏ、Ｉ ｒ、Ｃｄ。Pd, Ru, Rh, Ti, W, Mo, Ir, Cd.
Ｓｂ、Ｈｆ、Ｇａ、Ｇｅ、Ｚｒ、Ｎｂ、Ｉｎ等の元素か
らなるもの、もしくは、それらの化合物からなる無機物
が例示される。Examples include those made of elements such as Sb, Hf, Ga, Ge, Zr, Nb, and In, or inorganic substances made of compounds thereof.
有機重合膜については、ポリカーボネート、ポリアクリ
レート、ポリエステル、ポリオレフィン、ポリエチレン
、ポリシロキサン等のポリマーがらの薄膜とすることも
できる。この場合、染色化合物、顔料等も蒸着させて着
色してもよい。The organic polymer film can also be a thin film made of polymers such as polycarbonate, polyacrylate, polyester, polyolefin, polyethylene, polysiloxane, and the like. In this case, a dyeing compound, a pigment, etc. may also be vapor-deposited for coloring.
基板についても格別の限定はなく、ガラス、金属、合金
、セラミックス、あるいはプラスチックの任意のものと
することができる。There are no particular limitations on the substrate either, and it can be made of any material such as glass, metal, alloy, ceramics, or plastic.
これらの金属、合金および／または無機物からなる薄膜
と有機重合膜は、これらを蒸発させた粒子をプラズマに
より励起してイオン化粒子、中性粒子、あるいはラジカ
ルの状態において蒸着させることにより形成する。励起
しないでスパッタリング等によって金属、合金の薄１摸
を形成することらできるが、複合多層膜の色調および密
着強度、耐摩耗性等を大幅に向上させるとの点からはプ
ラズマによる励起によって配設一体止することが好まし
い。Thin films and organic polymer films made of these metals, alloys, and/or inorganic substances are formed by evaporating these particles, exciting them with plasma, and depositing them in the state of ionized particles, neutral particles, or radicals. Although it is possible to form a thin layer of metal or alloy by sputtering without excitation, it is possible to form a thin layer of metal or alloy by sputtering, etc., but from the viewpoint of greatly improving the color tone, adhesion strength, abrasion resistance, etc. of the composite multilayer film, excitation by plasma is recommended. Preferably, they are fixed together.
蒸発させた粒子は、真空反応装置内においてグロー放電
によって励起し、プラズマ・イオン化するのが好ましい
、この際のプラズマ・イオン化の手段としてはホローカ
ソード方式、高周波励起方式等のイオンブレーティング
、プラズマＣＶＤ等の手段とすることができる。有機重
合膜の形成にあたっては、ポリマーの蒸発もしくは、モ
ノマーカスの導入によってプラズマ励起し、蒸着させて
らよい。It is preferable that the evaporated particles are excited by glow discharge in a vacuum reactor and subjected to plasma ionization.Means for plasma ionization in this case include ion blating such as a hollow cathode method, a high frequency excitation method, and plasma CVD. It is possible to use the following means. In forming an organic polymer film, the polymer may be evaporated or plasma may be excited by introducing a monomerus to deposit it.
励起には、レーサー光などの光照射の手段を採用するこ
ともできる。For excitation, light irradiation means such as laser light can also be employed.
イオングレーティング法による場合には、たとえば真空
反応装置内の圧力を１０−２〜１０°５１０「ｒ程度の
真空状態とし、アルゴン等の不活性ガスを導入してもよ
い、基板の温度は、室温〜４００°Ｃ程度の範囲とする
ことができる。無機物の薄膜を形成する場合には、酸素
、窒素、アンモニア、炭化水素、流１ヒ水素、弗化水素
などの反応性カスを導入し、反応性イオンブレーティン
グによって蒸着することもできる。この場合のガス圧は
、１０−４Ｔｏｒｒ以上とするのが好ましい。In the case of using the ion grating method, for example, the pressure inside the vacuum reactor may be set to a vacuum state of about 10-2 to 10°510"r, and an inert gas such as argon may be introduced. The temperature of the substrate is room temperature. -400°C.When forming a thin film of an inorganic substance, reactive gases such as oxygen, nitrogen, ammonia, hydrocarbons, arsenic, and hydrogen fluoride are introduced and reacted. Vapor deposition can also be performed by ion blating. In this case, the gas pressure is preferably 10<-4>Torr or more.
以上のごとくこの発明によって、安価で免訴１に優れ、
密着強度が良好な、さらには誘電性、導電性、光応答性
などの機能を持った複合多層膜が実現される。As described above, this invention is inexpensive and has excellent immunity from prosecution.
A composite multilayer film with good adhesion strength and functions such as dielectricity, conductivity, and photoresponsiveness can be realized.
次に、この発明の実施例を示す。もちろん、この発明は
、以下の実施例によって限定されないことはいうまでも
ない。Next, examples of this invention will be shown. It goes without saying that the present invention is not limited to the following examples.
実施例 １
高周波励起方式によるイオンブレーティング装置を用い
て複合多層膜を形成しな。基板としてはステンレス板を
用いた。Example 1 A composite multilayer film was formed using an ion blating device using a high frequency excitation method. A stainless steel plate was used as the substrate.
５ ｘ １０ ’Ｔｏｒｒのアルゴンカスを導入してス
テンレス基板のボンバード処理を行い。次いで８×１０
’Ｔｏｒｒの条件下に窒素ガスと蒸発Ｔｉ粒子との反
応性イオンブレーティングによりｒｉＮの薄膜を蒸着さ
せた。放電電力３００Ｗ、基板温度１００°Ｃの条件下
、３分間の反応によって、膜厚０．２μｎ１の”ｆ”
ｉ Ｎの薄膜を形成した。A 5 x 10 Torr argon gas was introduced to bombard the stainless steel substrate. Then 8×10
A thin film of riN was deposited by reactive ion brating with nitrogen gas and evaporated Ti particles under conditions of 'Torr. "f" with a film thickness of 0.2μn1 was formed by reaction for 3 minutes under the conditions of discharge power 300W and substrate temperature 100°C.
A thin film of iN was formed.
次いで４ Ｘ １０ ’Ｔｏｒｒのアルゴン圧の条件下
に、ポリカーボネートの蒸発粒子をプラズマイオン化し
て重合膜を蒸着さぜな。さらに、続いて３×１０ ’Ｔ
ｏｒｒのアルゴン圧の条件下において金の蒸発粒子をプ
ラスマイオン化して蒸着させた。A polymeric film is then deposited by plasma ionizing the evaporated polycarbonate particles under an argon pressure of 4 x 10' Torr. Furthermore, followed by 3×10'T
The evaporated gold particles were plasma ionized and deposited under the argon pressure conditions of 0.05 to 10.0 m.
優れた金色の色調の多層膜を得た。色調および密着強度
、耐摩耗性ともに、有機重合膜を存在させない場合に比
べてはるかに優れており、耐摩耗性は約２倍に増大して
いた。A multilayer film with an excellent golden color was obtained. The color tone, adhesion strength, and abrasion resistance were all far superior to the case where no organic polymer film was present, and the abrasion resistance was approximately doubled.
実施例 ２
実施例１で得られた複合多層Ｉ漠の表面に、４×１０−
３１ｏｒｒのアルゴン圧の条件下に、ポリカーボイ・−
ト重合膜を蒸着させた。硬質の透明重合膜が得られ、金
色の色調は光沢の良い、格調の高いものとなった。表面
の筺護性に＃Ｊ優れていた。Example 2 On the surface of the composite multilayer I obtained in Example 1, 4×10 −
Under the condition of argon pressure of 31 orr, polycarboy-
A polymerized film was then deposited. A hard transparent polymer film was obtained, and the golden color tone was high-gloss and elegant. #J had excellent surface protection.
実施例 ３
実施例１と同様にして、ガラス基板の上にポリアクリレ
ート重合膜の透明層と、金の薄膜とを蒸着させた。金色
の色調は良好であり、また耐摩耗性は、このポリアクリ
レート重合膜を蒸着させない場合の約２倍であった。Example 3 In the same manner as in Example 1, a transparent layer of polyacrylate polymer film and a thin gold film were deposited on a glass substrate. The golden color tone was good, and the abrasion resistance was about twice that of the case without this polyacrylate polymer film deposited.
実施例 ４
実施例３で得られた多層膜の表面にポリカーボネートの
重合膜と、ＩＴＯの透明導電膜を順次蒸着した０色調は
金色で、かつ表面導電性（抵抗、２００Ω／口）の複合
多層膜を得た。Example 4 A polycarbonate polymer film and an ITO transparent conductive film were sequentially deposited on the surface of the multilayer film obtained in Example 3 to produce a composite multilayer with a gold tone and surface conductivity (resistance, 200Ω/hole). A membrane was obtained.
この場合、ＩＴＯを蒸発源とし、酸素ガス３Ｘ１０−４
Ｔｏｒｒ、放電電力３００Ｗ、基板温度３０°Ｃにおい
てＩ’ｌ”Ｏ薄膜を形成した。０．３μｍ１１の透明導
電膜が得られた。In this case, ITO is used as the evaporation source, and oxygen gas 3X10-4
An I'l"O thin film was formed at Torr, discharge power of 300 W, and substrate temperature of 30° C. A transparent conductive film of 0.3 μm 11 was obtained.
第１図および第２図は、各々、この発明の一例を示した
断面図である。
１・・・基板
２・・・有機重合膜
３・・・金属、合金および／または無機物薄膜４・・・
有機重合膜
５・・・基板
６．８・・・金属、合金および／または無機物薄膜７・
・・有機重合膜FIG. 1 and FIG. 2 are sectional views each showing an example of the present invention. 1...Substrate 2...Organic polymer film 3...Metal, alloy and/or inorganic thin film 4...
Organic polymer film 5...Substrate 6.8...Metal, alloy and/or inorganic thin film 7.
・・Organic polymer membrane
Claims (5)
と有機重合膜とをプラズマ励起により基板に蒸着してな
ることを特徴とする複合多層膜。(1) A composite multilayer film comprising a thin film made of a metal, an alloy, and/or an inorganic substance and an organic polymer film deposited on a substrate by plasma excitation.
Ｎ、ＶＮ、ＴａＣ、Ｃの無機物の層を有する請求項（１
）記載の複合多層膜。(2) Gold, gold alloy and/or TiN, TaN, Zr
Claim (1) comprising a layer of inorganic materials of N, VN, TaC, and C.
) Composite multilayer film described.
、Ｓｎ、Ｔａ、Ｖ、Ｃｒ、Ｃｏ、Ｐｔ、Ｐｄ、Ｒｕ、Ｒ
ｈ、Ｔｉ、Ｗ、Ｍｏ、Ｉｒ、Ｃｄ、Ｓｂ、Ｈｆ、Ｇａ、
Ｇｅ、Ｚｒ、Ｎｂ、Ｉｎの群から選択される少くとも１
種の金属またはその合金の層を有する請求項（１）記載
の複合多層膜。(3) Gold and/or Cu, Al, Ni, Ag, Zn
, Sn, Ta, V, Cr, Co, Pt, Pd, Ru, R
h, Ti, W, Mo, Ir, Cd, Sb, Hf, Ga,
At least one selected from the group of Ge, Zr, Nb, and In
The composite multilayer film according to claim 1, comprising a layer of a metal or an alloy thereof.
ン、ポリエチレンおよび／またはポリアクリレートから
なる透明重合膜を有する請求項（１）記載の複合多層膜
。(4) The composite multilayer film according to claim (1), comprising a transparent polymer film made of polycarbonate, polysiloxane polyolefin, polyethylene and/or polyacrylate.
１）記載の複合多層膜。(5) A claim in which an organic polymer film is disposed as an intermediate layer (
1) The composite multilayer film described above.
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63109480A JP2599176B2 (en) | 1988-05-02 | 1988-05-02 | Golden ornaments |
| BR8900933A BR8900933A (en) | 1988-05-02 | 1989-02-24 | MULTIPLE COMPOUND FILM, MULTIPLE LAYER COMPOSITE FILM AND MULTIPLE LAYER COMPOSITE FILM |
| EP19890304375 EP0341010B1 (en) | 1988-05-02 | 1989-05-02 | Composite film |
| EP19920202490 EP0516248B1 (en) | 1988-05-02 | 1989-05-02 | Multilayered film |
| DE1989617509 DE68917509T2 (en) | 1988-05-02 | 1989-05-02 | Composite layer. |
| DE1989627234 DE68927234T2 (en) | 1988-05-02 | 1989-05-02 | Multilayer |
| TW79107513A TW205022B (en) | 1988-05-02 | 1989-05-18 | |
| US07/500,243 US5079101A (en) | 1988-05-02 | 1990-03-27 | Composite film |
| US08/155,183 US5409782A (en) | 1988-05-02 | 1993-11-22 | Composite film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63109480A JP2599176B2 (en) | 1988-05-02 | 1988-05-02 | Golden ornaments |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01279745A true JPH01279745A (en) | 1989-11-10 |
| JP2599176B2 JP2599176B2 (en) | 1997-04-09 |
Family
ID=14511312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63109480A Expired - Lifetime JP2599176B2 (en) | 1988-05-02 | 1988-05-02 | Golden ornaments |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2599176B2 (en) |
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|---|---|---|---|---|
| US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
| US9664626B2 (en) | 2012-11-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Coating inspection method |
| US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
| JP2017181502A (en) * | 2016-03-29 | 2017-10-05 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | Colored timepiece component |
| US9863042B2 (en) | 2013-03-15 | 2018-01-09 | Sio2 Medical Products, Inc. | PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases |
| US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
| US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
| US10016338B2 (en) | 2013-03-11 | 2018-07-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
| US10189603B2 (en) | 2011-11-11 | 2019-01-29 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
| US10201660B2 (en) | 2012-11-30 | 2019-02-12 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like |
| US10537273B2 (en) | 2009-05-13 | 2020-01-21 | Sio2 Medical Products, Inc. | Syringe with PECVD lubricity layer |
| US11077233B2 (en) | 2015-08-18 | 2021-08-03 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
| US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
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| JPS56147830A (en) * | 1980-04-18 | 1981-11-17 | Asahi Glass Co Ltd | Formation of hard coating film |
| JPS60242050A (en) * | 1984-05-17 | 1985-12-02 | 住友ベークライト株式会社 | Manufacture of transparent conductive film |
| JPS62127462A (en) * | 1985-11-26 | 1987-06-09 | Seiko Instr & Electronics Ltd | Production of dial plate for timepiece |
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1988
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52116896A (en) * | 1976-03-29 | 1977-09-30 | Matsushita Electric Ind Co Ltd | Electrode plate and its preparation |
| JPS56147830A (en) * | 1980-04-18 | 1981-11-17 | Asahi Glass Co Ltd | Formation of hard coating film |
| JPS60242050A (en) * | 1984-05-17 | 1985-12-02 | 住友ベークライト株式会社 | Manufacture of transparent conductive film |
| JPS62127462A (en) * | 1985-11-26 | 1987-06-09 | Seiko Instr & Electronics Ltd | Production of dial plate for timepiece |
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| US10537273B2 (en) | 2009-05-13 | 2020-01-21 | Sio2 Medical Products, Inc. | Syringe with PECVD lubricity layer |
| US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
| US11123491B2 (en) | 2010-11-12 | 2021-09-21 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
| US11148856B2 (en) | 2011-11-11 | 2021-10-19 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
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| US10577154B2 (en) | 2011-11-11 | 2020-03-03 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
| US9664626B2 (en) | 2012-11-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Coating inspection method |
| US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
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| US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
| US10016338B2 (en) | 2013-03-11 | 2018-07-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
| US10912714B2 (en) | 2013-03-11 | 2021-02-09 | Sio2 Medical Products, Inc. | PECVD coated pharmaceutical packaging |
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| US11344473B2 (en) | 2013-03-11 | 2022-05-31 | SiO2Medical Products, Inc. | Coated packaging |
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| US11077233B2 (en) | 2015-08-18 | 2021-08-03 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
| JP2017181502A (en) * | 2016-03-29 | 2017-10-05 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | Colored timepiece component |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2599176B2 (en) | 1997-04-09 |
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