JPH01276657A - Lead frame - Google Patents

Lead frame

Info

Publication number
JPH01276657A
JPH01276657A JP10718888A JP10718888A JPH01276657A JP H01276657 A JPH01276657 A JP H01276657A JP 10718888 A JP10718888 A JP 10718888A JP 10718888 A JP10718888 A JP 10718888A JP H01276657 A JPH01276657 A JP H01276657A
Authority
JP
Japan
Prior art keywords
sealing
resin
lead frame
air
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10718888A
Other languages
Japanese (ja)
Inventor
Akira Koga
彰 小賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP10718888A priority Critical patent/JPH01276657A/en
Publication of JPH01276657A publication Critical patent/JPH01276657A/en
Pending legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To perform superior resin sealing which is free from air bubbles and unfilled parts, by providing grooves to a lead frame so that they may pass through from inside positions of resin sealing parts to their outside positions. CONSTITUTION:Grooves 10 are formed at positions corresponding to at least one place of corner parts in each semiconductor element mounting part 3 of a lead frame 1 in such a way that the grooves pass through from spaces 9 around the element mounting part 3 to the positions of outer frame parts 4. Then, the lead frame 1 is held by sealing molds 11A and 11B from up and down sides and resin sealing is carried out by injecting a sealing resin 14 from a sealing resin injection hole 12. In such a case, air left in the sealing molds 11A and 11B is exhausted wholly to the outside through the grooves 10 and an air vent 13 with the injection of the sealing resin 14 and then, the insides of the sealing molds 11A and 11B are filled with the sealing resin 14. On this occasion, no air passage shows loadings until the insides of the above sealing molds are filled thoroughly with the resin 14 and internal air is discharged completely to the outside. In this way, no bubbles and unfilled parts remain in the resin molding parts.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、主に樹脂封止型半導体装置部品に利用するこ
とのできるリードフレームに関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a lead frame that can be used mainly for resin-sealed semiconductor device parts.

従来の技術 第4図は従来のリードフレームの平面図、第5図は同従
来のリードフレームの樹脂封止状態を示す断面図であり
、第4図において、21は樹脂封止型半導体装置用のリ
ードフレームで、半導体素子22(第5図参照)を積載
する半導体素子積載部23と、この半導体素子積載部2
3をそのコーナ部で外枠部24につないで支持する半導
体素子積載部支持部25と、内部リード部26および外
部リード部27と、これらの内部および外部リード部2
6.27を隣りどうし、および外枠部24に結合する結
合部28とを有する。従来、半導体装置の樹脂封止は、
第5図に示すように前工程を終えたリードフレーム21
を封止金型29A、 29Bによりはさみ、封止樹脂3
0を封止樹脂注入口31より注入することにより行われ
る。
BACKGROUND ART FIG. 4 is a plan view of a conventional lead frame, and FIG. 5 is a cross-sectional view showing a resin-sealed state of the conventional lead frame. In FIG. This lead frame includes a semiconductor element loading section 23 on which semiconductor elements 22 (see FIG. 5) are loaded, and this semiconductor element loading section 2.
3, a semiconductor element loading section supporting section 25 that connects and supports the semiconductor element loading section 3 at its corner portion to the outer frame section 24, an internal lead section 26, an external lead section 27, and these internal and external lead sections 2.
6.27 are adjacent to each other and have a connecting portion 28 that connects them to the outer frame portion 24. Conventionally, resin encapsulation of semiconductor devices is
Lead frame 21 after the previous process as shown in Fig. 5
between the sealing molds 29A and 29B, and the sealing resin 3
This is done by injecting 0 from the sealing resin injection port 31.

発明が解決しようとする課題 ところが、このような樹脂封止工程においては、封止樹
脂30が成形される部分より外部にはみ出さないように
、リードフレーム21と封止金型29A。
Problems to be Solved by the Invention However, in such a resin sealing process, the lead frame 21 and the sealing mold 29A must be sealed so that the sealing resin 30 does not protrude beyond the molded portion.

29Bにより樹脂成形部の内部は外部から閉ざされた構
造となっているため、封止樹脂注入中にリードフレーム
21と封止金型29A、29Bによって閉ざされた部分
にある空気が外部に十分放出されず、樹脂成形体内に気
泡32として残ったり、封止樹脂30の未充填部分33
を引きおこすという問題がある。
Since the inside of the resin molded part is closed from the outside by 29B, the air in the part closed by the lead frame 21 and the sealing molds 29A and 29B is sufficiently released to the outside during injection of the sealing resin. Otherwise, air bubbles 32 may remain in the resin molded product, or unfilled portions 33 of the sealing resin 30 may remain.
The problem is that it causes

このため、従来は封止金型29A、 29Bに11詣成
形部から外部に向かう浅い清であるエアーベンド34を
1個所ないしそれ以上設けることにより金型内部の空気
を外部に放出していたが、封止樹脂30が注入されると
ともにエアーベンド34は順次閉ざされていくため、最
後まで完全に内部の空気を外部に放出できず、樹脂成形
体内の気泡32や未充填部分33を完全に防止すること
ができないという問題があった。
For this reason, conventionally, the air inside the molds was discharged to the outside by providing one or more shallow air bends 34 extending from the molding part to the outside in the sealing molds 29A and 29B. As the sealing resin 30 is injected and the air bends 34 are closed one after another, the internal air cannot be completely released to the outside until the end, completely preventing air bubbles 32 and unfilled areas 33 in the resin molding. The problem was that I couldn't do it.

本発明はこのような従来の問題点を解消するものであり
、気泡や未充填のない樹脂封止ができるリードフレーム
を提供することを目的とするものである。
The present invention solves these conventional problems, and aims to provide a lead frame that can be sealed with resin without bubbles or unfilled parts.

課題を解決するための手段 上記問題を解決するために、本発明のリードフレームは
、樹脂封止部内側位置から樹脂封止部外側位置まで貫通
ずる溝部を設けたものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the lead frame of the present invention is provided with a groove portion passing through from a position inside the resin sealing part to a position outside the resin sealing part.

作用 上記構成により、樹脂封止工程において封止樹脂体内に
残った空気は溝部を通じて全て樹脂封止部の外側に放出
することができ、成形樹脂体内の気泡や未充填を完全に
防止することができる。
Effect With the above configuration, all the air remaining in the sealing resin body during the resin sealing process can be released to the outside of the resin sealing part through the groove, and it is possible to completely prevent air bubbles and unfilling in the molded resin body. can.

実施例 以下、本発明の一実施例について、図面を参照しながら
説明する。
EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例におけるリードフレームの斜
視図、第2図は同リードフレームの平面図、第3図は同
リードフレームの樹脂封止状態を示す断面図である。第
1図〜第3図において、1は樹脂封止型半導体装置用の
リードフレームで、半導体素子2を積載する半導体素子
積載部3と、この半導体素子積載部3をそのコーナ部で
外枠部4につないで支持する半導体素子積載部支持部5
と、内部リード部6および外部リード部7と、これらの
内部および外部リード部6,7を隣りどうし、および外
枠部4に結合する結合部8とを有する。さらにリードフ
レーム1には、各半導体素子WIt11部3の少なくと
も1箇所のコーナ部に対応する位置に、半導体素子積載
部3の周囲の空間部9から外枠部4の位置にまで貫通す
る溝部10が形成されている。また、11A、11Bは
、リードフレーム1を半導体素子2を配置した半導体素
子積載部3を中央に位置させて上下より挾む封止金型で
、適当箇所に封止樹脂注入口12が設けられているとと
もに、リードフレーム1の溝部10に対応する位置にエ
アーベンド13が形成されている。14は封止金型11
A、11Bの間に満たされる封止樹脂である。
FIG. 1 is a perspective view of a lead frame according to an embodiment of the present invention, FIG. 2 is a plan view of the lead frame, and FIG. 3 is a sectional view showing the lead frame in a resin-sealed state. 1 to 3, reference numeral 1 denotes a lead frame for a resin-sealed semiconductor device, which includes a semiconductor element loading section 3 on which a semiconductor element 2 is loaded, and an outer frame portion of the semiconductor element loading section 3 at its corner. Semiconductor element loading part support part 5 connected to and supported by 4
, an inner lead portion 6, an outer lead portion 7, and a connecting portion 8 that connects the inner and outer lead portions 6 and 7 to each other and to the outer frame portion 4. Further, in the lead frame 1, a groove portion 10 that penetrates from the space 9 around the semiconductor device mounting portion 3 to the position of the outer frame portion 4 is provided at a position corresponding to at least one corner portion of each semiconductor device WIt11 portion 3. is formed. Further, 11A and 11B are sealing molds in which a lead frame 1 is sandwiched from above and below with a semiconductor element loading section 3 in which a semiconductor element 2 is arranged placed in the center, and a sealing resin injection port 12 is provided at an appropriate location. At the same time, air bends 13 are formed at positions corresponding to the grooves 10 of the lead frame 1. 14 is a sealing mold 11
This is a sealing resin filled between A and 11B.

上記構成において、リードフレーム1は封止金型11A
、11Bによって上下からはさみ込まれ、封止樹脂注入
口12より封止樹脂14を注入することにより樹脂封止
が行われる。このとき封止金型11A。
In the above configuration, the lead frame 1 has a sealing mold 11A.
, 11B from above and below, and resin sealing is performed by injecting the sealing resin 14 from the sealing resin injection port 12. At this time, the sealing mold 11A.

11Bの中に残された空気は封止樹脂14の注入により
溝部10およびエアーベンド13を介して全て外部に放
出され、封止金型11A、11Bの中は封止樹脂14で
満たされる。この際に、抜ける空気の通路として、エア
ーベンド13だけでなく溝部10も形成されているので
、封止金型11A、11Bの中に封止樹脂14で満なさ
れるまでに空気の通路が目づまりすることはなく、内部
の空気を外部に完全に放出でき、樹脂成形部分内に気泡
や未充填箇所が残ることはない。
The air remaining in the molds 11B is completely discharged to the outside through the groove portion 10 and the air bend 13 by injection of the sealing resin 14, and the insides of the sealing molds 11A and 11B are filled with the sealing resin 14. At this time, since not only the air bend 13 but also the groove 10 is formed as a passage for the air to escape, the air passage is clearly visible before the sealing molds 11A and 11B are filled with the sealing resin 14. There is no clogging, the internal air can be completely released to the outside, and no air bubbles or unfilled areas remain within the resin molded part.

発明の効果 以上のように本発明によれば、リードフレームに樹脂封
止部内側位置からvIJ脂對止側止側位置まで貫通する
溝部を設けることにより、気泡や未充填のない優れた樹
脂封止が行われた半導体装置を実現できるものである。
Effects of the Invention As described above, according to the present invention, by providing the lead frame with a groove that penetrates from the inside position of the resin sealing part to the vIJ resin sealing side position, excellent resin sealing without air bubbles or unfilled parts can be achieved. Accordingly, it is possible to realize a semiconductor device in which the process is stopped.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における半導体装置用リード
フレームの斜視図、第2図は同リードフレームの平面図
、第3図は同リードフレームの樹脂封止状態を示す断面
図、第4図は従来のリードフレームの平面図、第5図は
同従来のリードフレームの樹脂封止状態を示す断面図で
ある。 1・・・リードフレーム、2・・・半導体素子、3・・
・半導体素子積載部、4・・・外枠部、5・・・半導体
素子積載部支持部、6・・・内部リード部、7・・・外
部リード部、8・・・結合部、10・・・溝部、IIA
、IIB・・・封止金型、12・・・封止樹脂注入口、
13・・・エアーベンド、14・・・封止樹脂。 代理人   森  本  義  弘 第1図 ! / ? t・・−炒Y゛フし−16、Δ−−ψコ部1)−M、り
うS−半部!)4麟L#p/ρ−寺狸 第4図 第ダ図 2f’B \
FIG. 1 is a perspective view of a lead frame for a semiconductor device according to an embodiment of the present invention, FIG. 2 is a plan view of the lead frame, FIG. 3 is a sectional view showing the lead frame in a resin-sealed state, and FIG. The figure is a plan view of a conventional lead frame, and FIG. 5 is a sectional view showing the conventional lead frame in a resin-sealed state. 1...Lead frame, 2...Semiconductor element, 3...
- Semiconductor element loading section, 4... Outer frame section, 5... Semiconductor element loading section support section, 6... Internal lead section, 7... External lead section, 8... Coupling section, 10. ...Mizobe, IIA
, IIB... Sealing mold, 12... Sealing resin injection port,
13... Air bend, 14... Sealing resin. Agent Yoshihiro Morimoto Figure 1! / ? t...-Fried Y゛Fushi-16, Δ--ψko part 1)-M, Riu S-half part! )4RinL#p/ρ-Teratanuki Figure 4Da Figure 2f'B \

Claims (1)

【特許請求の範囲】[Claims] 1、半導体素子積載部、内部リード部、外部リード部お
よび結合部を有するリードフレームであつて、樹脂封止
部内側位置から樹脂封止部外側位置まで貫通する溝部を
設けたリードフレーム。
1. A lead frame having a semiconductor element mounting portion, an internal lead portion, an external lead portion, and a coupling portion, the lead frame having a groove portion penetrating from a position inside the resin sealing portion to a position outside the resin sealing portion.
JP10718888A 1988-04-27 1988-04-27 Lead frame Pending JPH01276657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10718888A JPH01276657A (en) 1988-04-27 1988-04-27 Lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10718888A JPH01276657A (en) 1988-04-27 1988-04-27 Lead frame

Publications (1)

Publication Number Publication Date
JPH01276657A true JPH01276657A (en) 1989-11-07

Family

ID=14452701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10718888A Pending JPH01276657A (en) 1988-04-27 1988-04-27 Lead frame

Country Status (1)

Country Link
JP (1) JPH01276657A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536847U (en) * 1991-10-16 1993-05-18 株式会社三井ハイテツク Lead frame
US5293065A (en) * 1992-08-27 1994-03-08 Texas Instruments, Incorporated Lead frame having an outlet with a larger cross sectional area than the inlet
KR100247385B1 (en) * 1997-10-14 2000-03-15 김규현 The top cavity insert of mold for semiconductor package

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281737A (en) * 1985-10-07 1987-04-15 Hitachi Ltd Manufacture of semiconductor and lead frame
JPS62108562A (en) * 1985-11-06 1987-05-19 Hitachi Ltd Lead frame for semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281737A (en) * 1985-10-07 1987-04-15 Hitachi Ltd Manufacture of semiconductor and lead frame
JPS62108562A (en) * 1985-11-06 1987-05-19 Hitachi Ltd Lead frame for semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536847U (en) * 1991-10-16 1993-05-18 株式会社三井ハイテツク Lead frame
US5293065A (en) * 1992-08-27 1994-03-08 Texas Instruments, Incorporated Lead frame having an outlet with a larger cross sectional area than the inlet
KR100247385B1 (en) * 1997-10-14 2000-03-15 김규현 The top cavity insert of mold for semiconductor package

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