JPH01274073A - Resistance measuring apparatus - Google Patents

Abstract

PURPOSE:To improve reliability of a measured value, by forming an apparatus of a highly heat-conductive insulator, and forming a recess part in which a body to be measured is housed at one side of the apparatus. CONSTITUTION:When the surface resistance of a body to be measured is measured, at first, said body to be measured is housed in a recess part 12 of a base stage 14. The recess part 12 of the base stage 14 is coupled with a protruding part 18 which is formed on a mounting stage 16. A temperature measuring sensor is further attached. Under the state wherein the base stage 14 and the mounting stage 16 are assembled, the base stage 14 and the mounting stage 16 are assembled into a temperature control apparatus. Thus, the temperature of the body to be measured can be made uniform. Since the temperature of the body to be measured, the mounting stage 16 and the base stage 14 is uniform, the sensor which is attached to the base stage 14 indicates the temperature of the body to be measured without directly measuring the body to be measured. In this way, the body to be measured can be measured at the uniform temperature all the time, and the reliability of the measured value is improved.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to surface resistance and
The present invention relates to a resistance measuring instrument used for simultaneous measurement of resistivity and temperature, and in particular to a resistance measuring instrument capable of measuring surface resistance/resistivity-temperature characteristics of conductive materials, semiconductive materials, etc. without destruction.

[Prior art] In general, growth layers and diffusion layers in semiconductors, metal vapor deposition films,
Alternatively, the resistivity of a conductive coating film or the like is one of the important parameters representing the electrical characteristics of the material. In particular, surface resistance, which is resistance per unit area, is often used for boat fishing as a measure of the conductivity level of a conductive polymer material that is a raw material for a conductive coating film. Here, the surface resistance is defined from the electrical resistance value between opposing sides of a unit square.

Furthermore, resistance-temperature characteristics are important for investigating the electrical characteristics of various materials in detail. That is, by examining the resistance-temperature characteristics, insulators and semiconductors.

It becomes possible to distinguish between metalloids, metals, superconductors, etc., and from this, the electronic state of the material can be estimated, which is effective in evaluating the material.

Regarding the measurement of the surface resistance of such a conductive coating film, the applicant of the present application has developed a simple surface resistance measuring device that is inexpensive, simple, and non-destructive and can measure the surface resistance of the object to be measured. It has already been filed as Japanese Patent Application No. 1988-71797 on May 14, 1985.

The simple surface resistance measuring device according to this application has a pedestal made of an electrically insulating material, and four spring contact probes are fixed to the top surface of the pedestal at a fixed distance apart, and the lower ends of these spring contact probes are fixed to the top surface of the pedestal. The child is configured so that it is caused to spring out slightly from the lower surface of both legs of the pedestal due to the elasticity of the spring.

In this way, the simple surface resistance measuring device is configured with four spring contact probes mounted on a stand made of electrical insulators, so this measuring device can always maintain the contact at a constant angle using the elasticity of the springs. The surface resistance of the object to be measured can be measured accurately and non-destructively by contacting the object to be measured with pressure.

[Problems to be solved by the present invention] Here, resistance,
When measuring resistance-temperature characteristics by simultaneous temperature measurement, the temperature of the object to be measured needs to be kept uniform. That is, if there is a temperature distribution inside the object to be measured, thermoelectromotive force is generated based on this temperature distribution, and not only the temperature but also the resistance value of the object to be measured differs from the true value, causing a problem in reliability.

This invention was made in view of the above-mentioned problems, and an object of the present invention is to always measure the object to be measured at a uniform temperature during measurement, and to It is an object of the present invention to provide a resistance measuring instrument capable of obtaining the same measurement result even after repeated measurement operations, improving reliability of measured values, and capable of measuring temperature dependence.

[Means for Solving the Problems] In order to solve the above-mentioned problems and achieve the objectives, the resistance measuring instrument of the present invention is formed from a highly thermally conductive insulator, and a measuring object is housed on one side. A base having a recess formed therein and a hole for a temperature measurement sensor, and a protrusion formed from a highly thermally conductive insulator to complementarily fit into the recess formed in the base. The pedestal has a convex portion on one side, and the convex portion and the concave portion are fitted together so that the pedestal and the base are combined. It is characterized by comprising a plurality of contact probes provided upright on the surface of the part.

Further, the contact probe is attached so as to be able to be pushed into the convex portion, and is urged by a biasing member so as to protrude from the surface of the convex portion.

Further, the present invention is characterized in that four contact probes are provided, and these are arranged along a straight line.

Further, the base is characterized in that a hole for a heater is formed.

The insulator here has a volume resistivity of 1012Ω・cm
If it is less than that, an electrical short circuit will occur between the object to be measured and the base, making it difficult to measure the resistance. However, if the volume resistivity of the object to be measured is small, no problem will occur during measurement if the difference between the volume resistivity of the base and the mount is IO1'Ω·cm or more.

In addition, a high thermal conductor has a thermal conductivity of 0.1 cal/cm.
sec'c or more, and if it is less than that, heat will not be transferred sufficiently between the object to be measured and the base, and a temperature distribution will occur within the object to be measured. Here, this electrical insulator with high thermal conductivity is aluminum nitride, silicon carbide,
Ceramics such as boron nitride, beryllium oxide, or diamond.

It is constructed from a member made of a highly thermally conductive electrically insulating material.

[Operation] When measuring the surface resistance of an object to be measured using the resistance measuring instrument configured as described above, the object to be measured is first placed in the recess of the base, and then the object is placed in the recess of the base. The concave portion of the stand and the convex portion formed on the stand are inserted so as to fit into each other. Furthermore, a temperature measurement sensor is installed. Then, by incorporating the base and the mount in a combination into a temperature control device, it becomes possible to make the temperature of the object to be measured uniform. Also. Since the temperature of the object to be measured, the mount, and the base are uniform, the temperature of the object to be measured is not measured directly, but the sensor attached to the base indicates the temperature of the object to be measured. In this way, the ratio measuring body can always measure at a uniform temperature, and the reliability of the measured values is improved.

[Embodiment] Below, the configuration of an embodiment of the resistance measuring instrument of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, a resistance measuring instrument 1° according to an embodiment of the present invention is made of an electrical insulator with high thermal conductivity, and has a rectangular recess 12 in which an object to be measured is housed on one side. The base 14 is provided with a hole 13.15 for a temperature sensor and a heater. Here, this electrical insulator with high thermal conductivity is composed of a member made of machinable ceramic H type manufactured by Ishihara Yakuhin Co., Ltd. Here, the recess 12 is formed approximately at the center of one side (upper surface) of the base 14, and the bottom surface of the recess 12 is defined as a mounting surface on which a sheet-shaped object to be measured is mounted. .

On the other hand, this resistance measuring instrument 10 includes a rectangular parallelepiped-shaped pedestal 16 made of a highly thermally conductive insulator, similar to the base 14. The surface of this pedestal 16 that faces one side of the base 14 (
A protrusion 18 is formed on the lower surface of the base 14 to complementarily fit into the recess 12 formed on the base 14.

That is, the convex portion 18 is formed in a rectangular shape having an outer surface that slides into contact with each corresponding inner surface of the recess 12 . Here, the protruding surface of the convex portion 18 and the bottom surface of the recessed portion 12 are set to be spaced apart from each other by a predetermined distance as shown in FIG. 2 when the pedestal 16 is fitted to the base 14. ing.

In addition, in the state in which the pedestal 16 is fitted to the base 14 in this way, each inner surface of the recess 12 of the base 14 and the pedestal 16
Since the corresponding outer surfaces of the convex portions 18 of the convex portions 18 come into sliding contact with each other, the internal space of the concave portions 12 is sealed at a uniform temperature, and there is no movement within the mutual plane, that is, lateral play. Since this is reliably prevented, the fitted state is maintained well. In addition, when the pedestal 16 is fitted to the base 14, the peripheral part of the lower surface of the pedestal 16 comes into contact with the peripheral part of the upper surface of the base 14, so that the discharge surface of the convex part 18 and the bottom surface of the recessed part 12 This means that they are kept at a constant distance.

Here, as shown in FIG. 1 again, the above-mentioned pedestal 16 has four spring contact probes with the upper and lower ends protruding upward and downward along the vertical direction from the upper surface and the lower surface, respectively. 22, 24, 26, and 28 are provided in a line on the same straight line and arranged in parallel at equal intervals. Each spring contact probe 22゜2
4.26.28 are sleeves 22a and 24a buried vertically within the frame 16.

26a, 28a and each sleeve 22a, 24a.

Probe bodies 22b and 24b are provided to be slidable in the vertical direction within 26a and 28a.

26b, 28b and each sleeve 22a, 24a.

26a, 28a and corresponding probe bodies 2
A coil spring 22c biases 2b, 24b, 26b, and 28b to protrude downward.

It is composed of 24c, 26c, and 28c.

Here, the probe bodies 22b, 24b, 26b.

28b and coil springs 22c and 24c.

26c and 28c are set to be electrically connected to each other.

In addition, all the sleeves 22a, 24a, 26a.

At the lower end of each of 28a is an inner flange 22d.

24d, 26d, and 28d are integrally formed, and each probe body 22b and 24b.

The upper ends of 26b and 28b have corresponding inner flanges 22
Outer flanges 22e, 24e, 26e, and 28e are integrally formed so as to be engageable with the outer flanges d, 24d, 26d, and 28d. Such inner flanges 22d, 24d, 26d,
28d and outer flanges 22e, 24e, 26e, 28
e, each probe body 22b, 24b, 2
6b.

28b will be prevented from falling off downwardly and will be configured such that further downward protrusion is limited in this engaged position.

Also, each probe body 22b, 24b.

The tips of the lower ends of 26b and 28b are formed into an inverted conical shape, and each tip is set to abut on the surface of the object to be measured at a predetermined constant minute area (bin point).

In this embodiment, the distance d between adjacent spring contact probes 22, 24, 26°28
is 0.05 to 1. Ocm, preferably 0.15cm
is set to . In addition, each probe body 22b, 24
The amount of downward protrusion in a state where no equivalent external force is applied to b, 26b, and 28b is set to 0.5 to 5.0 mm.

Also, coil springs 22c and 24c.

The spring constants of 26c and 28c are preferably as large as possible, and the value is preferably 10 g or more, preferably 100 g or more for each coil spring. Furthermore, each coil spring 22c.

The upper ends of 24c, 26c, and 28c are connected to conductive wires 22f and 2, respectively.
It is electrically connected to a computing machine (not shown) via 4f, 26f, and 28f. Specifically, the conductors 22f and 28f connected to the outer coil springs 22c and 28C are connected to a constant current power source, and the inner coil springs 24c and
Conductive wires 24f and 26f connected to 26c are connected to voltmeters, respectively.

The case where the resistance-temperature characteristics of a sheet-shaped object to be measured is measured using the resistance measuring device 10 configured as described above will be described below.

First, the object to be measured is formed into a sample shape that can be accommodated in the recess 12 of the base 14. Then, such a sample is placed on the bottom surface of the recess 12 of the base 14. in this way,
After the sample is placed on the base 14, the mount 16 is attached to the base 14 so that the protrusion 18 of the mount 16 fits into the recess 12 of the base 14, and fixed with screws or the like.

Further, the temperature sensor is fixed in the hole 13 for mounting the sensor, and the heater is fixed in the hole 15 for mounting the heater.

By attaching the frame 16 to the base 14 in this manner, as described above, each inner surface of the recess 12 of the base 14,
Since the corresponding outer surfaces of the convex portions 18 of the pedestal 16 come into sliding contact with each other, mutual movement within the plane, that is, lateral wobbling, is reliably prevented, and the pedestal 1
By contacting the peripheral portion of the lower surface of the frame 16 with the peripheral portion of the upper surface of the mount 4, the protruding surface of the convex portion 18 and the bottom surface of the recessed portion 12 are maintained at a constant distance. Thus, the positional relationship between the base 14 and the mount 16 is accurately defined.

In addition, in response to this fitting operation, before the peripheral portion of the lower surface of the pedestal 16 comes into contact with the peripheral portion of the upper surface of the base 14, the four spring contact probes 22.24, 26.2
8 will abut the surface of the sample. After this contact operation, until the peripheral portion of the lower surface of the pedestal 16 comes into contact with the peripheral portion of the upper surface of the base 14,
Each spring contact probe 22, 24゜26
．． 28 will be pushed up against the urging force of the corresponding coil springs 22c, 24c, 26c, and 28c.

As a result, four spring contact probes 22.
24, 26, and 28 always come into contact with the sample placed on the bottom surface of the recess 12 at a constant pressure and at a constant angle.

In this way, by using the resistance measuring device 1° of this embodiment, it is possible to always measure the sample in a fixed posture during measurement, and the measurement operation can be repeated several times on the same sample. The same measurement results can be obtained regardless of the measurement, and the reliability of the measurement values can be improved.

Next, this resistance measuring device 10 is installed in a thermostatic oven, and the thermostatic oven is changed from a predetermined low temperature to a high temperature.
Alternatively, by heating with a heater built into the resistance measuring device 10, it is possible to accurately measure the temperature characteristics of the resistance. That is, the object (sample) to be measured is conventionally made of a substrate with poor thermal conductivity (for example, an epoxy substrate, with a thermal conductivity of 0.0001 cal/cm).
sec° C. or less), the way the heat is transferred from the substrate is not uniform, and temperature distribution tends to occur inside the object to be measured, causing problems in temperature detection.

However, in this embodiment, as mentioned above, the sample is surrounded by the highly thermally conductive base 14 during measurement, and heat is quickly and evenly transferred from the surroundings, so the temperature distribution of the sample is small. In addition, the trestle,
Since the temperature of the base and sample becomes constant in a short time, it becomes possible to read the temperature of the sample using a temperature sensor set on the base. In this way, resistance-temperature characteristics can be measured stably.

It goes without saying that the present invention is not limited to the configuration of the one embodiment described above, and can be modified in various ways without departing from the gist of the present invention.

For example, in the configuration of the embodiment described above, the base 14
Although the shape of the recessed portion 12 has been described as being rectangular, the present invention is not limited to this. For example, the base may be formed from a cylindrical body and the recessed portion may be defined from a cylindrical internal space.

Furthermore, if it is desired to set the cooling rate quickly, a notch or a through hole may be provided in the side wall of the base 14 so that the cooling gas directly contacts the object to be measured.

[Effects of the present invention] As detailed above, the resistance measuring instrument of the present invention is made of a highly thermally conductive insulator, has a recessed portion on one side in which the object to be measured is housed, and has a temperature measurement sensor. a base with a hole formed therein, and a pedestal made of a highly thermally conductive insulator and having a convex portion on one side formed to complementarily fit into a recess formed in the base. Then, when the convex part and the concave part are fitted to each other and the mount and the base are combined, a piece of paper is provided so as to stand up on the surface of the convex part so as to come into contact with the surface of the object to be measured housed in the concave part. It is characterized by comprising a plurality of contact probes.

Further, the contact probe is attached so as to be able to be pushed into the convex portion, and is urged by a biasing member so as to protrude from the surface of the convex portion.

Further, the present invention is characterized in that four contact probes are provided, and these are arranged along a straight line.

Further, the base is characterized in that a hole for a heater is formed.

Therefore, according to the present invention, the object to be measured can always be measured at a uniform temperature during measurement, and no matter how many times the measurement operation is repeated on the same object at the same temperature, the same measurement result will be obtained. As a result, a resistance measuring instrument is provided that can improve the reliability of measured values and also enables temperature-dependent measurements.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the configuration of an embodiment of a resistance measuring instrument according to the present invention; FIG. 2 is a sectional view showing a fitted state of a base and a mount in an embodiment of the resistance measuring instrument; FIG. 3 is a front view showing the structure of each spring contact probe. In the figure, 10... resistance measuring device, 12... recess, 13...
... Temperature sensor hole, 14 ... Base, 15 ... Heater hole, 16 ... Mount, 18 ... Convex part, 22 , 2
4, 26; 28... Spring contact probe, 22a; 24a; 26a; 28a... Sleeve, 22b: 24b, 26b, 2.8b...
Probe body, 22c; 24c; 26c; 2
8c...Coil spring, 22d, 24d, 2
6d: 28d...inner flange, 22e; 2
4e; 26e; 28e...outer flange, 2
2f, 24f, 26f, 28f... are conducting wires.

Claims (1)

[Scope of Claims] (1) A base made of a highly thermally conductive insulator, having a recess on one side for storing the object to be measured, and a hole for a sensor for temperature measurement; , a pedestal made of a highly thermally conductive insulator and having a protrusion on one side formed to complementarily fit into a recess formed in the base; A plurality of contact probes are provided upright on the surface of the convex portion so as to contact the surface of the object to be measured housed in the concave portion when the mount and the base are fitted together. A resistance measuring instrument characterized by: (2) The resistance measuring device according to claim 1, wherein the contact probe is attached so as to be able to be pushed into the convex portion, and is urged by a biasing member so as to protrude from the surface of the convex portion. . (3) Claim 1 characterized in that the contact probe is provided with four pieces, and these are arranged along a straight line.
Or the resistance measuring device according to 2. (4) The resistance measuring instrument according to any one of claims 1 to 3, wherein the base has a hole for a heater formed therein.