JPH01262443A - Dew point measuring instrument - Google Patents

Dew point measuring instrument

Info

Publication number
JPH01262443A
JPH01262443A JP9073188A JP9073188A JPH01262443A JP H01262443 A JPH01262443 A JP H01262443A JP 9073188 A JP9073188 A JP 9073188A JP 9073188 A JP9073188 A JP 9073188A JP H01262443 A JPH01262443 A JP H01262443A
Authority
JP
Japan
Prior art keywords
dew
light
temperature
dew point
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9073188A
Other languages
Japanese (ja)
Inventor
Kensuke Akamatsu
謙介 赤松
Shiro Sagawa
史郎 寒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Espec Corp
Original Assignee
Tabai Espec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabai Espec Co Ltd filed Critical Tabai Espec Co Ltd
Priority to JP9073188A priority Critical patent/JPH01262443A/en
Publication of JPH01262443A publication Critical patent/JPH01262443A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To measure a dew point stably and accurately for a long period by providing an optical fiber for projection which guides light from a light source to a dew condensation part and an optical fiber for projection which guides light from the dew condensation part to an optical sensor. CONSTITUTION:The refrigerant of a refrigerating circuit 70 that a thermostatic humidistat 7 is normally equipped with is utilized and part of the low- temperature refrigerant which is insulated thermally and expanded by an expanding mechanism 72 is supplied to a cooling part 4 to cool the dew condensation part 1. Further, the temperature of the dew condensation part 1 is controlled by a heater 3. When the temperature of the dew condensation part 1 is lowered by stopping the heater 3 or decreasing its output, drops of dew are generated on the dew condensation part 1, and consequently the quantity of light which is projected from the optical fiber 5 for projection and reaches the optical fiber 6 for photodetection decreases and the optical sensor 9 detects that to detect the dewing. At this time, the temperature of the dew condensation part 1 is detected by a temperature sensor as a dew point. Consequently, the dew point measurement which is stable and accurate for a long period is enabled.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は露点測定装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a dew point measuring device.

〔従来の技術〕[Conventional technology]

従来、湿度を測定する代表的方法として、乾湿球式湿度
センサを用いる方法及び半導体式湿度センサを用いる方
法があり、更に、光学式露点計による方法がある。
Conventionally, typical methods for measuring humidity include a method using a wet and dry bulb type humidity sensor, a method using a semiconductor type humidity sensor, and a method using an optical dew point meter.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、乾湿球式湿度センサは、湿球のガーゼ又
はウィックが汚れると正確な湿度を測定できず、また、
該ガーゼやウィックを交換する必要が生じるので、長期
連続使用ができないという問題がある。半導体式湿度セ
ンサは、例えば恒温恒温器内のような過酷な条件下で用
いられた場合、温湿度条件によっては経時変化が大きく
、また、湿度測定精度が低下する。光学式露点計の場合
、そこに使用されている電子冷却素子等の電子部品が耐
熱性に劣ることから高温で使用できず、高温高温時等で
はサンプリング中に結露が発生し易く、そのため正確な
計測が困難となる。また、寸法が大きく且つ高価である
However, wet and dry bulb type humidity sensors cannot accurately measure humidity if the wet bulb's gauze or wick becomes dirty.
Since it is necessary to replace the gauze and wick, there is a problem that it cannot be used continuously for a long period of time. When a semiconductor humidity sensor is used under harsh conditions, such as in a thermostatic chamber, for example, the temperature and humidity change significantly over time depending on the temperature and humidity conditions, and the accuracy of humidity measurement decreases. In the case of optical dew point meters, the electronic components used therein, such as the electronic cooling element, have poor heat resistance, so they cannot be used at high temperatures, and condensation tends to occur during sampling at high temperatures, making it difficult to obtain accurate measurements. Measurement becomes difficult. Moreover, it is large in size and expensive.

そこで本発明は、長期にわたり安定した状態で正確に露
点測定を行うことができ、また、部品材質を環境試験装
置等においても安心して使用できるように選択すること
ができ、比較的小形安価に製作できる露点測定装置を提
供することを目的とする。
Therefore, the present invention enables accurate dew point measurement in a stable state over a long period of time, allows component materials to be selected so that they can be safely used in environmental test equipment, etc., and is relatively small and inexpensive to manufacture. The purpose is to provide a dew point measuring device that can.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は前記目的にしたがい、着露部、前記着露部を冷
却するための冷媒循環路を有する冷却部、光源からの光
を前記着露部へ導く投光用光ファイバ、前記着露部に入
射されて該着露部から来る光を光センセへ導く受光用光
ファイバ、前記着露部温度制御用ヒータ、前記着露部の
温度を検出するl温度検出センサを備えたことを特徴と
する露点測定装置を提供するものである。
In accordance with the above object, the present invention provides a dew deposition section, a cooling section having a refrigerant circulation path for cooling the dew deposition section, a light projecting optical fiber that guides light from a light source to the dew deposition section, and the dew deposition section. It is characterized by comprising a light-receiving optical fiber that guides the light incident on the dew-applying part and coming from the dew-applying part to an optical sensor, a heater for controlling the temperature of the dew-applying part, and a temperature detection sensor that detects the temperature of the dew-applying part. The present invention provides a dew point measuring device.

前記着露部に透光性部分を含んだものを採用したときに
は、前記両光ファイバを前記着露部の透光性部分を間に
して対峙させることができる。また、前記着露部に光反
射面を有するものを採用したときには、投光用光ファイ
バから前記光反射面に光を入射して該反射面からの反射
光を受光用光ファイバにて受けることができるように両
光ファイバを配置することができる。
When the dew-applying portion includes a light-transmitting portion, the two optical fibers can be opposed to each other with the light-transmitting portion of the dew-applying portion in between. Furthermore, when the dew-applying portion has a light reflecting surface, light may be incident on the light reflecting surface from the light emitting optical fiber and the light reflected from the reflecting surface may be received by the light receiving optical fiber. Both optical fibers can be arranged so that

前記着露部や光ファイバは合成樹脂製のものでもよいが
、耐熱性を与えるためにガラス製とすることができる。
The dew attachment part and the optical fiber may be made of synthetic resin, but may be made of glass in order to provide heat resistance.

また、前記冷却部材質にはアルミ等の金属を例示するこ
とができる。
Moreover, metals such as aluminum can be exemplified as the material of the cooling member.

〔作 用〕[For production]

本発明露点測定装置によると、着露部の温度は、冷却部
に冷媒が流されることにより冷却され、また、着露部の
温度が適宜温度制御用ヒータにて制御される。着露部の
温度が露点より高くて結露が生じていないときには、投
光用光ファイバによって着露部へ入射された光が該着露
部から受光用光ファイバを経て光センサへ導かれる。ヒ
ータによる加熱を零にして又は弱くして着露部の温度を
低下させると結露が生じ、この結露は光フアイバ間の光
の授受量を減少させる。この状態が光センサにより検出
され、それによって結露が検出される。
According to the dew point measuring device of the present invention, the temperature of the dew point is cooled by flowing a refrigerant through the cooling section, and the temperature of the dew point is appropriately controlled by a temperature control heater. When the temperature of the dew point is higher than the dew point and no dew condensation occurs, the light incident on the dew point by the light emitting optical fiber is guided from the dew point to the light sensor via the light receiving optical fiber. When the temperature of the dew point is lowered by zeroing or weakening the heating by the heater, dew condensation occurs, and this dew condensation reduces the amount of light exchanged between the optical fibers. This condition is detected by an optical sensor, thereby detecting condensation.

この結露検出とともに温度検出センサにより着露部の温
度が検出され、その温度から露点が求められる。
Along with this dew condensation detection, the temperature of the dew condensation part is detected by the temperature detection sensor, and the dew point is determined from the detected temperature.

〔実 施 例〕〔Example〕

以下、本発明の実施例を図面を参照しつつ説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図には環境試験装置である恒温恒温器7に適用され
た一実施例Aが示されており、第2図には該実施例の断
面図が、また、第3図には該実施例の分解斜視図が示さ
れている。
FIG. 1 shows an embodiment A applied to a constant temperature incubator 7 which is an environmental test device, FIG. 2 is a sectional view of this embodiment, and FIG. An exploded perspective view of an example is shown.

この実施例Aは、透明ガラス製の板状着露部1、該着露
部の温度を検出するための温度センサ2、該着露部の温
度制御用電気ヒータ3、アルミ製伝熱板に冷媒循環通路
41を設けてなる冷却部4、及び一対のガラス製光ファ
イバ5.6を備えており、例えば焼結金属のメツシュの
粗いもの、金網、樹脂等からなる通気性ある保護カバー
aにて保護されている。
This embodiment A includes a plate-shaped dew deposition part 1 made of transparent glass, a temperature sensor 2 for detecting the temperature of the dew deposition part, an electric heater 3 for controlling the temperature of the dew deposition part, and an aluminum heat transfer plate. It is equipped with a cooling section 4 provided with a refrigerant circulation passage 41 and a pair of glass optical fibers 5.6, and is covered with a breathable protective cover a made of, for example, a coarse mesh of sintered metal, wire gauze, resin, etc. protected.

第3図に示すように、ヒータ3は中央部に透孔31を有
し、温度センサ2はその中央に配置されている。冷却部
4も中央部に透孔42を有する。
As shown in FIG. 3, the heater 3 has a through hole 31 in the center, and the temperature sensor 2 is placed in the center. The cooling section 4 also has a through hole 42 in the center.

ヒータ3は該孔31を冷却部4の孔42に揃えて適当な
接着剤(例えばエポキシ系接着剤)にて該冷却部へ接着
されている。
The heater 3 is bonded to the cooling section 4 with the hole 31 aligned with the hole 42 of the cooling section 4 using a suitable adhesive (for example, epoxy adhesive).

また、ガラス板1は同様な接着剤にてヒータ3の上から
冷却部4に接着されており、温度センサ2は同様な接着
剤にてガラス板1のヒータ孔31に臨む部分に取りつけ
られている。
Further, the glass plate 1 is bonded to the cooling unit 4 from above the heater 3 using the same adhesive, and the temperature sensor 2 is attached to the portion of the glass plate 1 facing the heater hole 31 using the same adhesive. There is.

光ファイバ5及び6はそれらの先端部51.61が、冷
却部孔42及びヒータ孔31を介して着露部1の両側に
配置され、対峙せしめられている。
The optical fibers 5 and 6 have their tip ends 51 and 61 disposed on both sides of the dew attachment part 1 via the cooling part hole 42 and the heater hole 31, and are faced to each other.

ファイバ5.6は恒温恒湿器7外へ延び、ファイバ5は
例えば発光素子のような光源8に、ファイバ6は光セン
サ9に接続されている。
Fiber 5 , 6 extends outside the temperature and humidity chamber 7 , fiber 5 is connected to a light source 8 , such as a light emitting device, and fiber 6 is connected to a light sensor 9 .

冷却部4の冷媒通路41の入口には管43が接続され、
管43の他端は恒温恒温器7の冷凍回路70における膨
張機構72と蒸発器73との間へ接続されている。冷媒
通路41の出口には管44が接続され、管44の他端は
冷凍回路70の蒸発器73から圧縮機71への戻り管へ
接続されている。
A pipe 43 is connected to the inlet of the refrigerant passage 41 of the cooling unit 4,
The other end of the tube 43 is connected between the expansion mechanism 72 and the evaporator 73 in the refrigeration circuit 70 of the constant temperature incubator 7 . A pipe 44 is connected to the outlet of the refrigerant passage 41, and the other end of the pipe 44 is connected to a return pipe from the evaporator 73 of the refrigeration circuit 70 to the compressor 71.

図示していないが、冷凍回路70の凝縮器74から膨張
機構72へ到る冷媒の一部を別途設けた冷却部専用膨張
機構を介して冷却部4へ供給するようにしてもよい。
Although not shown, a part of the refrigerant reaching the expansion mechanism 72 from the condenser 74 of the refrigeration circuit 70 may be supplied to the cooling unit 4 via a separately provided expansion mechanism dedicated to the cooling unit.

なお、第1図中75は加熱蒸発式加湿器、76は加熱器
、77は気体循環用ファンである。
In FIG. 1, 75 is a heating evaporation type humidifier, 76 is a heater, and 77 is a gas circulation fan.

この実施例によると、恒温恒温器7に通常備わっている
冷凍回路70の冷媒が利用され、膨張機構72にて断熱
膨張した低温冷媒の一部が冷却部4に流されて着露部l
が冷却される。また、着露部lはヒータ3にて適宜加熱
され温度制御される。
According to this embodiment, the refrigerant in the refrigeration circuit 70 normally provided in the constant temperature incubator 7 is used, and a part of the low-temperature refrigerant that has been adiabatically expanded in the expansion mechanism 72 is flowed into the cooling part 4 and the dew condensation part l.
is cooled. Further, the dew deposition portion 1 is appropriately heated by a heater 3 and its temperature is controlled.

ヒータ3を停止又は出力低下させて着露部lの温度を下
げていくと、該着露部上に結露が生じ始め、その結果、
投光用ファイバ5から投光されて受光用ファイバ6へ達
する光量が減少し、光センサ9がこれを検出することに
より結露が検出される。この時の着露部1の温度が温度
センサ2にて検出され、これが露点とされる。
When the heater 3 is stopped or the output is reduced to lower the temperature of the dew condensation part l, dew condensation begins to form on the dew condensation part l, and as a result,
The amount of light emitted from the light emitting fiber 5 and reaching the light receiving fiber 6 decreases, and the optical sensor 9 detects this, thereby detecting dew condensation. The temperature of the dew deposition part 1 at this time is detected by the temperature sensor 2, and this is taken as the dew point.

第4図及び第5図に示す実施例Bは着露部として金属製
鏡10を採用したものである。この実施例で鏡10は電
気ヒータ30を介して接着剤(例えばエポキシ樹脂)に
より冷却部40に接着されている。また、鏡10には同
様な接着剤にて着露部温度検出用の温度センサ20が取
りつけられている。冷却部40は前記実施例と同様に冷
媒通路を備えており、それには冷媒供給管430.44
0が接続されている。また、鏡面101にはガラス製の
投光用光ファイバ50の先端部501と受光用光ファイ
バ60の先端部601が臨んでいる。
Embodiment B shown in FIGS. 4 and 5 employs a metal mirror 10 as the dew deposition part. In this embodiment, the mirror 10 is bonded to the cooling unit 40 with an adhesive (for example, epoxy resin) via an electric heater 30. Further, a temperature sensor 20 for detecting the temperature of the dew point is attached to the mirror 10 using a similar adhesive. The cooling unit 40 includes a refrigerant passage as in the previous embodiment, including refrigerant supply pipes 430, 44.
0 is connected. Further, a tip 501 of a glass light-emitting optical fiber 50 and a tip 601 of a light-receiving optical fiber 60 are facing the mirror surface 101 .

これら着露部10、冷却部40及び光ファイバ50.6
0の一部は前記実施例と同様に通気性良好な保護カバー
bにて覆われている。
These dew deposition section 10, cooling section 40 and optical fiber 50.6
A part of 0 is covered with a protective cover b having good air permeability as in the previous embodiment.

この第2実施例によると、冷媒が冷却部40に流されて
鏡10が冷却される。また、鏡10はヒータ30にて適
宜加熱され温度制御される。
According to this second embodiment, the mirror 10 is cooled by flowing the refrigerant into the cooling section 40. Further, the mirror 10 is appropriately heated by a heater 30 and its temperature is controlled.

ヒータ30を停止又は出力低下させて鏡IOの温度を下
げていくと、該鏡面101上に結露が生じ始め、その結
果、投光用ファイバ50から投光され、鏡面101にて
反射されて受光用ファイバ6へ達する光量が減少し、光
センサ9がこれを検出することにより結露が検出される
。この時の鏡IOの温度が温度センサ20にて検出され
、これが露点とされる。
When the temperature of the mirror IO is lowered by stopping the heater 30 or reducing its output, dew condensation begins to form on the mirror surface 101, and as a result, light is emitted from the light emitting fiber 50, reflected by the mirror surface 101, and received. The amount of light reaching the optical fiber 6 decreases, and the optical sensor 9 detects this, thereby detecting dew condensation. The temperature of the mirror IO at this time is detected by the temperature sensor 20, and this is taken as the dew point.

前記各実施例によると、長期使用による劣化のおそれが
おおきい部品は採用されておらず、従って 長期にわた
り正確に露点測定を行うことができ、また、各部品は耐
熱性を有しているので、恒温恒温器7においても長期に
わたり安定した状態で使用される。更に、冷媒通路を備
えた簡単な構造の安価な冷却部4.40を設けておくだ
けで、冷凍回路を有する恒温恒温器のような装置の該回
路の冷媒を着露部1.10の温度制御に供することがで
きるので、それだけ全体を簡素化、小形化でき、また、
安価に製作できる。
According to each of the above embodiments, there are no parts that are likely to deteriorate due to long-term use, so dew point measurements can be made accurately over a long period of time, and each part has heat resistance. The thermostatic chamber 7 is also used in a stable state for a long period of time. Furthermore, by simply providing a simple and inexpensive cooling section 4.40 with a refrigerant passage, the refrigerant in the circuit of a device such as a constant temperature incubator having a refrigeration circuit can be heated to the temperature of the dew point 1.10. Since it can be used for control, the whole can be simplified and downsized, and
Can be manufactured cheaply.

〔発明の効果〕〔Effect of the invention〕

本発明によると、長期にわたり安定した状態で正確に露
点測定を行うことができ、また、部品材質を環境試験装
置等においても安心して使用できるように選択すること
ができ、比較的小形安価に製作できる露点測定装置を提
供することができる効果がある。
According to the present invention, it is possible to accurately measure dew point in a stable state over a long period of time, the material of the parts can be selected so that it can be safely used in environmental test equipment, etc., and it can be manufactured in a relatively small size and at low cost. This has the advantage of being able to provide a dew point measuring device that can

【図面の簡単な説明】[Brief explanation of the drawing]

第1図から第3図は本発明の一実施例を示すもので、第
1図は恒温恒温器に適用した状態の説明図、第2図は断
面図、第3図は要部の分解斜視図であり、第4図は他の
実施例の断面図、第5図は第4図に示す実施例の要部の
分解側面図である。 A、B・・・露点測定装置、 1.10・・・着露部、 2.20・・・温度センサ、 3.30・・・ヒータ、 4.40・・・冷却部、 41・・・冷媒通路、 5.50・・・投光用光ファイバ、 6.60・・・受光用光ファイバ、 7・・・恒温恒温器。 出 願 人 タバイエスペンク株式会社第1図 第6図 41′ 9ど 第5図 A、B・・・露点測定装置、 1.10・・・着露部、 2.20・・・温度センサ、 3.30・・七−夕、 4.40・・・冷却部、 7・・・恒温恒温器
Figures 1 to 3 show an embodiment of the present invention. Figure 1 is an explanatory diagram of the state in which it is applied to a constant temperature incubator, Figure 2 is a sectional view, and Figure 3 is an exploded perspective view of the main parts. FIG. 4 is a sectional view of another embodiment, and FIG. 5 is an exploded side view of a main part of the embodiment shown in FIG. 4. A, B... Dew point measuring device, 1.10... Dew deposition part, 2.20... Temperature sensor, 3.30... Heater, 4.40... Cooling part, 41... Refrigerant passage, 5.50... Optical fiber for light emission, 6.60... Optical fiber for light reception, 7... Constant temperature incubator. Applicant Tabai Espenc Co., Ltd. Fig. 1 Fig. 6 Fig. 41' 9 Fig. 5 A, B... Dew point measuring device, 1.10... Dew deposition part, 2.20... Temperature sensor, 3. 30... Tanabata, 4.40... Cooling section, 7... Constant temperature incubator

Claims (3)

【特許請求の範囲】[Claims] (1)着露部、前記着露部を冷却するための冷媒循環路
を有する冷却部、光源からの光を前記着露部へ導く投光
用光ファイバ、前記着露部に入射されて該着露部から来
る光を光センサへ導く受光用光ファイバ、前記着露部温
度制御用ヒータ、前記着露部の温度を検出する温度検出
センサを備えたことを特徴とする露点測定装置。
(1) a dew deposition section; a cooling section having a refrigerant circulation path for cooling the dew deposition section; a light projection optical fiber that guides light from a light source to the dew deposition section; A dew point measuring device comprising: a light-receiving optical fiber that guides light coming from a dew deposition part to an optical sensor; a heater for controlling the temperature of the dew deposition part; and a temperature detection sensor that detects the temperature of the dew deposition part.
(2)前記着露部は透光性部分を含んでおり、前記両光
ファイバは前記着露部の透光性部分を間にして対峙して
いる請求項1記載の露点測定装置。
(2) The dew point measuring device according to claim 1, wherein the dew deposition portion includes a light-transmitting portion, and the optical fibers face each other with the light-transmitting portion of the dew deposition portion in between.
(3)前記着露部は光反射面を有しており、前記両光フ
ァイバは、投光用光ファイバから前記光反射面へ光を入
射して該反射面からの反射光を受光用光ファイバにて受
けることができるように配置されている請求項1記載の
露点検出装置。
(3) The dew-applying portion has a light reflecting surface, and both of the optical fibers input light from the light-emitting optical fiber to the light-reflecting surface and converting the reflected light from the reflecting surface into light-receiving light. 2. The dew point detection device according to claim 1, wherein the dew point detection device is arranged so as to be received by a fiber.
JP9073188A 1988-04-13 1988-04-13 Dew point measuring instrument Pending JPH01262443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9073188A JPH01262443A (en) 1988-04-13 1988-04-13 Dew point measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9073188A JPH01262443A (en) 1988-04-13 1988-04-13 Dew point measuring instrument

Publications (1)

Publication Number Publication Date
JPH01262443A true JPH01262443A (en) 1989-10-19

Family

ID=14006707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9073188A Pending JPH01262443A (en) 1988-04-13 1988-04-13 Dew point measuring instrument

Country Status (1)

Country Link
JP (1) JPH01262443A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012047581A (en) * 2010-08-26 2012-03-08 Espec Corp Wet-bulb thermometer
JP2012083206A (en) * 2010-10-12 2012-04-26 Espec Corp Dew point meter, hygrometer, dew point derivation apparatus, humidity derivation apparatus, dew point measuring method and humidity measuring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012047581A (en) * 2010-08-26 2012-03-08 Espec Corp Wet-bulb thermometer
JP2012083206A (en) * 2010-10-12 2012-04-26 Espec Corp Dew point meter, hygrometer, dew point derivation apparatus, humidity derivation apparatus, dew point measuring method and humidity measuring method

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