JP5685142B2 - Dew point meter and hygrometer - Google Patents

Description

  The present invention relates to a dew point meter and a hygrometer.

  Conventionally, various types of dew point meters for measuring the dew point of the measurement space are known. For example, Patent Document 1 below discloses a mirror-cooled dew point meter. This mirror-cooled dew point meter utilizes the principle that when the reflecting mirror surface temperature falls below the dew point of the gas to be measured, the optical reflectivity of the reflecting mirror surface decreases due to condensation.

  Specifically, this dew point meter is provided with a housing into which the gas to be measured is introduced, and the reference light and the measuring light are respectively introduced from the first light source element and the second light source element outside the housing through the optical fiber into the housing. Is done. The reference light travels straight through the optical path for measurement in the housing and is guided to the first light receiving element by the optical fiber, while the measuring light is reflected by the mirror surface of the reflecting mirror in the housing and then the second light receiving element by the optical fiber. Be guided to. The reflecting mirror is provided with a heat pump whose cooling capacity is controlled by a control circuit, and the control circuit is configured based on the amount of reference light and measurement light received by the first light receiving element and the second light receiving element. The temperature of the reflecting mirror is adjusted by controlling the heat pump so that the amount of dew condensation that occurs in is constant.

  In the mirror-cooled dew point meter constructed in this way, the gas to be measured is brought into contact with the reflector, the mirror surface is condensed by moisture contained in the gas to be measured, and the amount of condensation on the mirror surface is adjusted by adjusting the temperature of the reflector by the control circuit. The temperature of the reflecting mirror when becomes constant is derived as the dew point.

  Patent Document 2 below discloses a hygrometer that measures humidity using a wet and dry bulb. In this hygrometer, a dry bulb thermometer and a wet bulb thermometer of the same type are installed side by side, and a tank containing water is placed under the wet bulb thermometer, and it is immersed in the water in this tank. The sensitive part of the wet bulb thermometer is wrapped by a wick made of gauze. And it is comprised so that relative humidity may be calculated | required from the difference of the dry bulb temperature which a dry bulb thermometer shows, and the wet bulb temperature which a wet bulb thermometer shows.

  However, the dew point meter of the above-mentioned Patent Document 1 has a very large number of two light source elements, two light receiving elements, a plurality of optical fibers, a reflecting mirror, a heat pump, a temperature sensor, a heat pump control circuit, a temperature measurement circuit, and the like. It is comprised by the structural member, and a structure becomes complicated.

  On the other hand, the hygrometer of the above-mentioned Patent Document 2 needs to perform complicated wick replacement work each time because the force to suck up water is weakened when the wick becomes old and becomes dirty. For this reason, the work burden concerning the maintenance of a hygrometer becomes large.

  Therefore, a dew point meter and a hygrometer of Patent Document 3 below have been developed. The dew point meter and the hygrometer are located in an external space of the heat pipe using a heat pipe (heat transfer portion) disposed across the measurement space and an external space separated from the measurement space by a heat insulating portion. The dew point and relative humidity of the measurement space are obtained by utilizing the fact that the surface temperature of the inner part located in the measurement space of the heat pipe becomes substantially equal to the dew point by cooling the outer part.

  Specifically, the dew point meter is arranged so as to straddle the measurement space and the external space through the heat insulation portion and the thermostatic chamber that separates the measurement space and the external space outside by the heat insulation portion (heat insulation wall). A heat pipe and an outer surface temperature detection unit that detects a surface temperature of an inner portion of the heat pipe.

  In this dew point meter, the outer part of the heat pipe is cooled, and the surface temperature of the inner part of the heat pipe (that is, the part where the working fluid evaporates) at that time is detected as the dew point of the measurement space.

  Thus, according to the above dew point meter, since it is composed of a heat pipe and an outer surface temperature detection unit, compared to a structure composed of a large number of members, such as a conventional mirror-cooled dew point meter, the structure Could be simplified. In addition, this dew point meter does not require a wick for measurement unlike the conventional wet and dry bulb hygrometer, so the work load related to maintenance such as replacing the wick every time the water sucks up becomes worse. I was able to.

JP 2003-194756 A Utility Model Registration No. 3021853 International Patent Application Publication WO2008 / 123313 Pamphlet

  However, in the dew point meter of Patent Document 3, it has been found that the surface temperature of the inner portion of the heat transfer section (heat pipe) and the dew point of the measurement space cannot be approximated unless the measurement space is within a specific humidity range. For this reason, it has been found that the above dew point meter has a problem that the humidity range in which the dew point can be accurately measured is narrow.

  Therefore, it is an object to provide a dew point meter and a hygrometer that can measure the dew point in a wide humidity range while having a simple structure with good maintainability.

  The present inventors paid attention to the following knowledge in order to solve the above problems.

  This knowledge relates to the heat balance of the heat flow passing through the heat flow sensor. Specifically, when heat in the measurement space is moved so as to pass through the heat flow sensor, sensible heat entering the heat flow sensor (or a member arranged so as to conduct heat to the heat flow sensor) from the measurement space; The heat balance is measured such that the amount of heat combined with the latent heat supplied to the heat flow sensor (or the member) due to condensation of the heat flow sensor (or the member) is equal to the amount of heat flow (heat flow rate) passing through the heat flow sensor. The latent heat changes depending on the humidity of the space.

  Based on this knowledge, the present inventors have scrutinized the above heat balance from the viewpoint of the dew point, and as a result, a member (heat flow forming part) for forming a heat flow passing through the heat flow sensor or the temperature of the heat flow sensor, the measurement space It has been found that a predetermined relational expression holds between the temperature of the heat flow, the heat flow rate of the heat flow passing through the heat flow sensor, and the dew point.

  The present invention has been made by paying attention to this relational expression, and is a dew point meter for measuring the dew point of a measurement space, which has a surface and a back surface, and passes between these surfaces and the back surface. A heat flow sensor for measuring the heat flow rate of the heat flow, a heat flow sensor attached to the heat flow sensor and capable of conducting heat on a back surface of the heat flow sensor, and a temperature for measuring the temperature of the heat flow sensor or the temperature of the heat flow sensor. A detection unit; a measurement space temperature detection unit that measures the temperature of the measurement space; and an arithmetic processing unit that calculates a dew point of the measurement space. And the said heat flow formation part changes the temperature of the back surface of the said heat flow sensor by the movement of the heat in the said heat flow formation part, and passes the inside of the said heat flow sensor by providing a temperature difference between the said back surface and the said surface. A heat flow is formed, and the arithmetic processing unit uses a relational expression based on a heat balance in the heat flow sensor when the heat flow is formed, and the temperature measurement position in the measurement space temperature detection unit and the temperature detection unit From the thermal resistance value between the temperature measurement position, the temperature measured by the temperature detection unit, the temperature measured by the measurement space temperature detection unit, and the heat flow rate measured by the heat flow sensor A dew point of the measurement space is calculated.

  According to this dew point meter, the temperature of the heat flow forming part or the heat flow sensor, the temperature of the measurement space, and the heat flow rate of the heat flow that passes between the front and back surfaces of the heat flow sensor (in the heat flow sensor) are measured, and When a heat flow that passes through the predetermined thermal resistance value (the thermal resistance value between the temperature measurement position at the measurement space temperature detection unit and the temperature measurement position at the temperature detection unit) is formed. By substituting into the relational expression based on the heat balance in the heat flow sensor, the dew point of the measurement space can be accurately obtained over a wide humidity range. This is because the dew point is calculated using a relational expression based on the heat balance in the heat flow sensor, which is established by changing the latent heat according to the humidity of the measurement space.

  In addition, the dew point meter is composed of a heat flow sensor, a heat flow formation unit, a temperature detection unit, a measurement space temperature detection unit, and an arithmetic processing unit, so that it is very like a conventional mirror-cooled dew point meter. The structure can be simplified as compared with a structure composed of many members. In addition, this dew point meter does not require a wick like a conventional wet and dry bulb hygrometer, so that it is possible to reduce the work load related to maintenance such as replacing the wick every time the water sucks up and becomes worse. . Therefore, in the dew point meter according to the present invention, the structure can be simplified while reducing the work burden related to maintenance.

  In the dew point meter according to the present invention, the heat flow forming unit has a heat pipe disposed across the measurement space and an external space separated from the measurement space by a heat insulating unit, and the heat flow sensor is The back surface may be attached to a portion located in the measurement space of the heat flow forming portion so as to be capable of conducting heat with a portion located in the measurement space of the heat pipe.

  According to such a configuration, the heat in the heat pipe moves from a part (inside part) located in the internal space to a part (external side part) located in the external space in the heat pipe. The temperature of the back surface of the heat flow sensor capable of conducting heat changes, and a temperature difference is generated between the back surface and the surface. As a result, the internal side portion absorbs heat in the measurement space via the heat flow sensor. As a result, a heat flow passing through the heat flow sensor is formed.

  Specifically, when heat is transferred from the inner side portion to the outer side portion in the heat pipe, the temperature of the inner side portion is lowered, and the temperature of the back surface of the heat flow sensor capable of conducting heat with the portion is lowered, thereby causing the heat flow. It becomes lower than the temperature of the sensor surface. Thereby, the heat in the measurement space passes between the front surface and the back surface of the heat flow sensor and enters the inner portion, and a heat flow due to the heat in the measurement space is formed in the heat flow sensor.

  Moreover, a dew point meter with excellent responsiveness can be obtained by providing the heat flow forming portion with a heat pipe having a small thermal resistance.

  In addition, a heat flow sensor may be attached to the site | part located in the external space of a heat flow formation part. In this case, specifically, the dew point meter includes a first heat insulating portion attached to the heat flow forming portion, and the heat flow forming portion is separated from the measurement space and the measurement space by a second heat insulating portion. The heat flow sensor is disposed across the external space, and the heat flow sensor has an external space of the heat flow forming portion so that the back surface can conduct heat with a portion located in the external space of the heat pipe. It attaches to the site | part located inside, and the said 1st heat insulation part leaves the surface of the said heat flow sensor, and surrounds the said heat flow sensor and the site | part located in the external space of the said heat flow formation part.

  According to this configuration, the heat in the heat pipe moves from the inner side portion to the outer side portion in the heat pipe, whereby the temperature of the back surface of the heat flow sensor capable of conducting heat with the outer portion changes, and the back surface and the surface. A temperature difference is generated between the two, and the external portion releases heat to the external space via the heat flow sensor. As a result, a heat flow passing through the heat flow sensor is formed.

  Specifically, when heat is transferred from the inner side portion to the outer side portion in the heat pipe, the temperature of the outer side portion rises, and the temperature of the back surface of the heat flow sensor capable of conducting heat with the portion rises to increase the heat flow. It becomes higher than the temperature of the sensor surface. As a result, the heat in the measurement space that has absorbed heat at the internal site and moved to the external site passes between the back surface and the surface of the heat flow sensor and is released to the external space. As a result, a heat flow due to heat in the measurement space is formed in the heat flow sensor.

  In addition, when a heat flow sensor is attached to the site | part located in the external space of a heat flow formation part, a 1st heat insulation part is attached and all the heat | fever in the measurement space which entered the heat pipe from the internal side site | part is a heat flow sensor. The amount of heat in the measurement space that has passed through the inside and released into the external space and entered the heat pipe from the internal side portion and the heat that passes through the heat flow sensor and is released into the external space are made equal. Thus, the dew point of the measurement space can be obtained using the relational expression based on the heat balance in the heat flow sensor.

  Further, since the heat flow sensor is located in the external space, condensation on the heat flow sensor can be prevented, thereby preventing deterioration of the heat flow sensor due to condensation.

  The heat pipe may have an attachment surface having a shape corresponding to the back surface of the heat flow sensor, and the heat flow sensor may be attached to the heat pipe so that the back surface is in contact with the attachment surface.

  According to this configuration, the heat flow sensor can be easily attached. In addition, by attaching the heat flow sensor to the heat pipe so that the back surface of the heat flow sensor and the mounting surface of the heat pipe are in contact with each other, the heat capacity is compared to the case where other heat transfer members are interposed between the heat pipe and the heat flow sensor. The response speed when measuring the dew point can be increased.

  The heat flow forming unit may include a Peltier element, and the heat flow sensor may be attached to the heat flow forming unit such that a back surface thereof can conduct heat with a heat absorption side portion of the Peltier element.

  According to such a configuration, a heat flow passing through the heat flow sensor is formed by the heat absorption side portion of the Peltier element absorbing heat in the measurement space via the heat flow sensor and releasing the heat from the heat dissipation side portion.

  Specifically, in the Peltier element, the heat inside the heat transfer side part moves from the heat absorption side part to the heat radiation side part, thereby lowering the temperature of the heat absorption side part and lowering the temperature of the back surface of the heat flow sensor capable of conducting heat with the part. Thus, the temperature is lower than the surface temperature of the heat flow sensor. Thereby, the heat in the measurement space passes between the front and back surfaces of the heat flow sensor and enters the heat absorption side portion, and a heat flow is formed in the heat flow sensor due to the heat in the measurement space.

  In addition, by using the Peltier element, the heat flow rate passing through the heat flow sensor can be changed depending on the amount of current supplied to the Peltier element, so that the dew point of the measurement space can be measured in a wider humidity range.

  Further, the second temperature detection unit is configured by measuring the heat flow rate of the heat passing through the heat flow sensor by reversing the current supplied to the Peltier element (that is, releasing heat toward the back surface of the heat flow sensor). The thermal resistance value between the temperature measurement position at and the temperature measurement position at the first temperature detector can be obtained. That is, by providing the Peltier element in the heat flow forming unit, it is possible to measure the dew point without having to calculate the thermal resistance value in advance by performing calculation or test measurement and storing it in a memory or the like. Become.

  The heat flow sensor is attached to a heat absorption side portion of the Peltier element, and the Peltier element has the heat absorption side portion capable of absorbing heat in the measurement space via the heat flow sensor, and the heat dissipation side portion is The heat absorbed by the heat absorption side portion may be disposed so as to be radiable to an external space separated from the measurement space by a heat insulating portion.

  According to such a configuration, heat generated by driving the Peltier element can be released to the external space, so that the temperature in the measurement space can be easily controlled.

  The heat flow forming unit is disposed on the opposite side of the heat absorption side portion with the heat flow sensor interposed therebetween, and at least a part of the heat flow forming unit is exposed in the measurement space to transfer the heat in the measurement space through the heat flow sensor. A heat transfer member that can be supplied to the heat absorption side portion is provided, and the Peltier element may be arranged such that the heat dissipation side portion is located in the external space.

  According to this configuration, by disposing the heat transfer member closer to the measurement space than the heat flow sensor, the heat flow sensor is prevented from being exposed to the measurement space to prevent dew condensation on the sensor during dew point measurement. Deterioration due to condensation of the sensor can be prevented.

  Further, since the heat radiation side portion is located in the external space, the heat generated by driving the Peltier element can be released to the external space more efficiently.

  The Peltier element and a heat flow sensor attached to the heat absorption side portion may be disposed so as to be located in the measurement space.

  By configuring the Peltier element and the heat flow sensor in the measurement space in this way, a dew point can be provided without providing a hole or the like for releasing heat to the external space in the heat insulating part that separates the external space and the measurement space. Can be measured. Moreover, since it is not necessary to release the heat of the heat radiation side part to the external space, the degree of freedom of the arrangement of the Peltier elements in the measurement space is improved.

  The present invention is also a dew point meter for measuring a dew point in a measurement space, which has a front surface and a back surface, and a first heat flow for measuring a heat flow rate of a heat flow passing between the surface and the back surface. A first heat flow sensor having a sensor, a front surface and a back surface, the second heat flow sensor measuring the heat flow rate of the heat flow passing between the front surface and the back surface, and the first heat flow sensor; A first heat flow forming unit capable of conducting heat on a back surface of the sensor and the second heat flow sensor are attached, and a second heat flow forming unit capable of conducting heat on the back surface of the second heat flow sensor, and the first And a temperature detection unit that measures the temperature of the second heat flow forming unit or the temperature of the first and second heat flow sensors, a measurement space temperature detection unit that measures the temperature of the measurement space, An arithmetic processing unit for calculating a dew point. The first heat flow forming unit changes the temperature of the back surface of the first heat flow sensor by the movement of heat in the first heat flow forming unit to provide a temperature difference between the back surface and the surface. Thus, a heat flow passing through the first heat flow sensor is formed, and the second heat flow forming unit changes the temperature of the back surface of the second heat flow sensor by the movement of heat in the second heat flow forming unit. Thus, by providing a temperature difference between the back surface and the front surface, a heat flow passing through the second heat flow sensor is formed, and a heat flow rate of the heat flow passing through the second heat flow sensor is changed to the first heat flow sensor. The amount of heat flow is different from the heat flow rate of the heat flow passing through one heat flow sensor, and the arithmetic processing unit uses the relational expression based on the heat balance in each heat flow sensor when the heat flow is formed, The first measured by the detector And the second heat flow forming unit or the first and second heat flow sensors, the measurement space temperature measured by the measurement space temperature detection unit, and the first and second heat flow sensors, respectively. The dew point of the measurement space is calculated from the heat flow rate.

  According to this dew point meter, the temperature of each heat flow forming part or each heat flow sensor, the temperature of the measurement space, and the heat flow rate of the heat flow that passed through each heat flow sensor were measured, and the heat flow was formed inside them. By substituting into the relational expression based on the heat balance in each heat flow sensor, the dew point of the measurement space can be obtained with high accuracy in a wide humidity range. That is, by measuring the temperature of each heat flow forming section or each heat flow sensor and the heat flow rate of the heat flow that has passed through each heat flow sensor, the dew point of the measurement space can be measured in a wide humidity range without using a predetermined heat resistance value. Can be obtained with high accuracy. For this reason, if a relational expression based on the heat balance in each heat flow sensor when the heat flow is formed inside is prepared, the thermal resistance value is obtained in advance by calculation, test measurement, etc. Even if it is not stored, the dew point can be obtained only by the values obtained by actual measurement when measuring the dew point (the temperature of each heat flow forming part or each heat flow sensor, the temperature of the measurement space, and the heat flow rate of the heat flow that has passed through each heat flow sensor). Can be measured.

  In addition, since the dew point meter includes the first and second heat flow sensors, the first and second heat flow forming units, the temperature detection unit, the measurement space temperature detection unit, and the arithmetic processing unit, The structure can be simplified as compared with a conventional mirror-cooled dew point meter which is composed of a large number of members. In addition, this dew point meter does not require a wick like a conventional wet and dry bulb hygrometer, so that it is possible to reduce the work load related to maintenance such as replacing the wick every time the water sucks up and becomes worse. . Therefore, in the dew point meter according to the present invention, the structure can be simplified while reducing the work burden related to maintenance.

  The present invention is also a hygrometer for measuring the relative humidity of the measurement space, based on the dew point meter according to any one of the above and the dew point obtained by the arithmetic processing unit of the dew point meter. A humidity calculation processing unit that calculates the relative humidity of the measurement space.

  According to this hygrometer, the dew point of the measurement space can be accurately obtained in a wide humidity range by measuring the temperature of the heat flow forming part or the heat flow sensor, the temperature of the measurement space, and the heat flow rate of the heat flow that has passed through the heat flow sensor. Therefore, by calculating the relative humidity based on this dew point, the relative humidity in the measurement space can be obtained with high accuracy.

  In addition, the hygrometer according to the present invention includes a heat flow sensor, a heat flow formation unit, each temperature detection unit (temperature detection unit and measurement space temperature detection unit), a dew point meter including a calculation processing unit, and a humidity calculation processing unit. As a result, the structure can be simplified compared to a conventional hygrometer using a mirror-cooled dew point meter, which is composed of a large number of members. And since the wick is not required like the conventional wet and dry bulb hygrometer, the work burden concerning a maintenance can be reduced.

  As described above, according to the present invention, it is possible to provide a dew point meter and a hygrometer that can measure the dew point in a wide humidity range while having a simple structure with good maintainability.

It is a schematic block diagram for demonstrating the dew point meter by 1st Embodiment. It is a partial expansion perspective view of the heat flow formation part to which the heat flow sensor in the said dew point meter was attached. It is a conceptual diagram for demonstrating the movement of heat and thermal resistance in the heat flow formation part and heat flow sensor of the said dew point meter. It is a schematic block diagram for demonstrating the dew point meter by 2nd Embodiment. It is a conceptual diagram for demonstrating the movement of heat and thermal resistance in the heat flow formation part and heat flow sensor of the said dew point meter. It is a schematic block diagram for demonstrating the dew point meter by 3rd Embodiment. It is a conceptual diagram for demonstrating the movement of heat and thermal resistance in the heat flow formation part and heat flow sensor of the said dew point meter. It is a schematic block diagram for demonstrating the dew point meter by 4th Embodiment. It is a conceptual diagram for demonstrating the movement of heat and thermal resistance in the heat flow formation part and heat flow sensor of the said dew point meter. It is a schematic block diagram for demonstrating the hygrometer by 5th Embodiment. It is a figure for demonstrating the heat flow formation part of the dew point meter by other embodiment. It is a conceptual diagram for demonstrating the movement and heat resistance of the heat in the heat flow formation part and heat flow sensor of the dew point meter by other embodiment. It is a figure for demonstrating the heat pipe which has an attachment part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First embodiment>
1 is a schematic configuration diagram for explaining a dew point meter according to a first embodiment of the present invention, FIG. 2 is a partially enlarged perspective view of FIG. 1, and FIG. 3 is a dew point shown in FIG. It is a conceptual diagram for demonstrating the movement of heat and thermal resistance in the heat flow formation part and heat flow sensor of a meter.

The dew point meter 10 of this embodiment measures a dew point _Td in the measurement space S1, and includes a heat flow sensor 12, a heat flow forming unit 20, a cooling fan 28, and a first temperature detection unit (temperature detection unit). 14, a second temperature detection unit (measurement space temperature detection unit) 16, and an arithmetic processing unit 30.

The heat flow sensor 12 measures the amount of heat flow (heat flow rate) Q _eo passing through the inside thereof. Specifically, the heat flow sensor 12 has a surface 12a and a back surface 12b, and measures the heat flow rate Q _eo of the heat flow passing between the surface 12a and the back surface 12b. The heat flow sensor 12 is connected to the arithmetic processing unit 30 and outputs a signal (heat flow signal) corresponding to the measured heat flow rate Q _eo . The heat flow sensor 12 is attached to the heat flow forming unit 20 in the measurement space S1.

  The heat flow forming unit 20 includes a heat pipe 22, a heat transfer plate 24, and a plurality of cooling fins 26, 26,..., And the temperature of the back surface 12 b of the heat flow sensor 12 is changed by heat movement in the heat flow forming unit 20. A heat flow that passes through the heat flow sensor 12 is formed by changing the temperature difference between the back surface 12b and the front surface 12a.

  The heat pipe 22 is disposed across the measurement space S1 and the external space S2 outside the measurement space S1. A portion of the heat pipe 22 located in the measurement space S1 is an inner portion (internal measurement portion) 22a, and a portion located in the outer space S2 is an outer portion (external side portion) 22b. The measurement space S1 is, for example, a space inside the constant temperature and humidity chamber 101 surrounded by a heat insulating wall 100 (heat insulating portion). On the other hand, the external space S2 is a space outside the constant temperature and humidity chamber 101. By driving the constant temperature and humidity chamber 101, the temperature of the measurement space S1 can be made higher than the temperature of the external space S2. A through hole 100 a is formed in the heat insulating wall 100 constituting the constant temperature and humidity chamber 101. The heat pipe 22 is disposed across the measurement space S1 and the external space S2 by being inserted through the through hole 100a.

  In addition, in this embodiment, although the heat pipe 22 is used, it is not limited to this. For example, instead of the heat pipe 22, a rod-like member (for example, a copper rod or the like) having a high thermal conductivity (that is, a low thermal resistance value) may be used.

  The heat transfer plate 24 is a member for transferring the heat that has passed through the heat flow sensor 12 to the inner part 22a of the heat pipe 22, and is attached to the inner part 22a of the heat pipe 22 in the measurement space S1. The heat transfer plate 24 has a plate shape and is formed of a material having high thermal conductivity (low resistance value). Specifically, one main surface (mounting surface) 24 a of the heat transfer plate 24 has the same shape as the back surface 12 b of the heat flow sensor 12, and the thickness of the heat transfer plate 24 is larger than the outer diameter of the heat pipe 22. (See FIG. 2). The heat pipe 22 is attached to the heat transfer plate 24 by inserting the inner portion 22a in a direction orthogonal to the thickness direction. The heat flow sensor 12 is attached to the attachment surface 24a of the heat transfer plate 24 so that the back surface 12b of the heat flow sensor 12 is in surface contact. Thereby, the back surface 12b of the heat flow sensor 12 and the inner part 22a of the heat pipe 22 can conduct heat.

  Each cooling fin 26 is a plate-like member attached to the outer portion 22b of the heat pipe 22, and efficiently releases the heat of the outer portion 22b of the heat pipe 22 to the outer space S2 by increasing the surface area in the outer space S2. It is a member for. Note that a cooling means such as a Peltier element may be provided on the outer portion 22 b of the heat pipe 22 instead of the cooling fins 26.

  The cooling fan 28 increases the amount of heat released from the outer portion 22b to the outer space S2 by sending air to the outer portion 22b of the heat pipe 22. The cooling fan 28 is connected to the arithmetic processing unit 30, and starts and stops air blowing and changes the air blowing amount based on a command signal from the arithmetic processing unit 30.

  Note that the cooling fins 26 and the cooling fans 28 may not be provided as long as heat can be sufficiently released from the outer portion 22b of the heat pipe 22 to the external space S2. Further, only one of the cooling fin 26 and the cooling fan 28 may be provided.

The first temperature detector 14 measures the temperature T _e of the heat flow forming unit 20 used in the calculation for obtaining the dew point T _d. The 1st temperature detection part 14 of this embodiment is arrange | positioned at the attachment surface 24a of the heat exchanger plate 24, measures the temperature of the said attachment surface 24a, and outputs the signal (1st temperature signal) according to the measurement result. .

The second temperature detecting section 16 to measure the temperature (measurement space temperature) T _i of the measurement space S1 that is used in the calculation for obtaining the dew point T _d. The second temperature sensing unit 16 is located within the measurement space S1, the temperature T _i of the measurement space S1 is measured and outputs a signal (second temperature signal) corresponding to the measurement result.

The arithmetic processing unit 30 calculates the dew point _Td in the measurement space S1, and displays (outputs) the calculated dew point _Td . The arithmetic processing unit 30 includes a storage unit 31 that can store various information (signals) freely, a calculation unit 32 that calculates the dew point _Td , an output unit 33 that outputs a calculation result in the calculation unit 32, Is provided. The temperature detection units 14 and 16 and the heat flow sensor 12 are detachably connected to the calculation processing unit 30 of the present embodiment.

The storage unit 31 stores in advance a predetermined relational expression T _d 1 and a thermal resistance value R _ie used for calculation for obtaining the dew point T _d . In the present embodiment, for example, a hard disk or a RAM is used as the storage unit 31.

The relational expression T _d 1 is based on the heat balance in the heat flow sensor 12 when a heat flow passing through the heat flow sensor 12 is formed by the heat flow forming unit 20, and is obtained as follows.

Temperature of the temperature of the measurement space (measurement space temperature) T _i external space than the (external space temperature) provided a predetermined temperature difference between the measurement space temperature T _i and the external space temperature to be lower, the heat pipe At 22, the heat in the heat pipe is transported from the inner part 22a to the outer part 22b by the working fluid. For this reason, the temperature of the inner part 22a decreases, the temperature of the back surface 12b of the heat flow sensor 12 capable of conducting heat through the part and the heat transfer plate 24 also decreases, and the temperature of the back surface 12b becomes lower than that of the surface 12a of the heat flow sensor 12. It becomes lower than the temperature. Thus, when a temperature difference occurs between the front surface 12a and the back surface 12b, heat in the measurement space S1 enters the heat flow sensor 12 from the surface 12a, passes through the heat flow sensor 12, and enters the inner portion 22a. Thus, a heat flow is formed in the heat flow sensor 12 by the heat in the measurement space S1. At this time, the temperature of the surface 12a of the heat flow sensor 12 becomes lower than the dew point of the measurement space S1, and condensation occurs on the surface 12a. Here, the sensible heat from the measurement space S1 enters via the heat flow sensor 12 to the heat transfer plate 24 and Q _ie, the latent heat supplied to the heat transfer plate 24 via the heat flow sensor 12 from the measurement space S1 by condensation Q _ie ^{If L} , then the sensible heat _Qie is

で表され、潜熱Ｑ_ｉｅ ^Ｌは、

And the latent heat Q _ie ^L is

で表される。ここで、Ｔ_ｉＴ_ｅ間の熱抵抗値をＲ_ｉｅ、測定空間Ｓ１の絶対湿度をｘ_ｉ、測定空間Ｓ１の露点をＴ_ｄ、水の潜熱をλ、測定空間Ｓ１の比熱をＣ_ｐａ、測定空間Ｓ１の飽和蒸気圧をＰ_ｓ、測定空間Ｓ１の大気圧をＰ、第１温度検出部１４による温度計測面である取付面２４ａにおける絶対湿度をｘ_ｅとする。尚、潜熱係数ｆは、以下の式（３）により定義する。

It is represented by _Here, T i _{T e} between the thermal resistance _{R ie} of the absolute humidity _{x i} of the measurement space S1, dew point _{T d} of the measurement space S1, the latent heat of water lambda, the specific heat of the measurement space S1 _{C pa,} saturated vapor pressure of P _s of the measurement space _S1, the atmospheric pressure P of the measurement space S1, the absolute humidity of the mounting surface 24a is a temperature measuring surface by the first temperature detector 14 and x _e. The latent heat coefficient f is defined by the following equation (3).

ここで、外側部２２ｂを内側部２２ａよりも低温にして熱流センサ１２の表面１２ａを測定空間Ｓ１の露点以下にし、表面１２ａに結露を生じさせたときに、測定空間Ｓ１から伝熱板２４へ入る顕熱Ｑ_ｉｅと結露によって伝熱板２４に供給された潜熱Ｑ_ｉｅ ^Ｌとを合わせた熱量が熱流センサ１２を通過した熱流の熱流量Ｑ_ｅｏと等しくなるといった熱収支が測定空間Ｓ１の湿度に応じて潜熱が変化し成り立つ。従って、Ｑ_ｉｅ、Ｑ_ｉｅ ^Ｌ、Ｑ_ｅｏの間には、

Here, when the outer portion 22b is made lower in temperature than the inner portion 22a so that the surface 12a of the heat flow sensor 12 is below the dew point of the measurement space S1, and condensation occurs on the surface 12a, the measurement space S1 to the heat transfer plate 24 The heat balance such that the heat quantity of the sensible heat _Qie entering and the latent heat _Qie ^L supplied to the heat transfer plate 24 by condensation is equal to the heat flow Q _eo of the heat flow passing through the heat flow sensor 12 is the humidity of the measurement space S1 The latent heat changes depending on the situation. ^_Therefore, Q _ie, Q _{ie L,} between _{Q eo} is,

で表される関係が成り立つ（図３参照）。

(See FIG. 3).

And by substituting the above formulas (1) to (3) into the formula (4) and rearranging, the relational expression T _d 1 for obtaining the dew point T _d is

で表される。

It is represented by

The relational expression T _d 1 thus determined differs depending on the type and shape of the heat flow forming unit 20 and cannot be derived from data such as various temperatures obtained during the measurement of the dew point T _{d. Rie} is included. Therefore, in the dew point meter 10 of the present embodiment, the thermal resistance value _Rie is obtained by calculation, preliminary experiments, etc., and these values are stored in the storage unit 31 so that the calculation unit 32 can be used freely. The calculation unit 32 can calculate the dew point T _d from the temperature data obtained when the dew point T _d is measured.

When the calculation unit 32 receives the first and second temperature signals from the temperature detection units 14 and 16 and the heat flow signal from the heat flow sensor 12, the calculation unit 32 and the relational expression T _d 1 and the heat stored in the storage unit 31. A dew point _Td of the measurement space S1 is calculated (obtained) using the resistance value _Rie . Then, the calculation unit 32 outputs the calculated dew point _Td to the output unit 33.

The output unit 33 receives the calculation result of the calculation unit 32 and outputs the dew point _Td of the measurement space S1. The output unit 33 of the present embodiment is configured to display the calculation result. The output unit 33 is not limited to the configuration for displaying the calculation result, and may be configured to output a signal for displaying the calculation result on an external display device such as a liquid crystal display. It may be configured to output by printing or the like.

In the dew point meter 10 configured as described above, the dew point _Td of the measurement space S1 is measured as follows.

A temperature difference is formed between the inner part 22 a and the outer part 22 b of the heat pipe 22. Specifically, the arithmetic processing unit 30 drives the temperature and humidity chamber 101, is higher than the measurement space temperature T _i external space temperature. Thereby, the heat of the inner part 22 a is transported to the outer part 22 b by the working fluid in the heat pipe 22, the inner part 22 a becomes low temperature, and the heat flow sensor 12 capable of conducting heat through the inner part 22 a and the heat transfer plate 24. The back surface 12b of the is cooled. As a result, a temperature difference is formed between the front surface 12a and the back surface 12b of the heat flow sensor 12, and the heat in the measurement space S1 passes through the heat flow sensor 12 and enters the inner portion 22a, that is, in the heat flow sensor 12. A heat flow is formed that passes from the front surface 12a toward the back surface 12b. At this time, the temperature of the surface 12a of the heat flow sensor 12 becomes lower than the dew point, and moisture present in the measurement space S1 adheres to the surface 12a and condenses, resulting in condensation.

  As described above, the heat that has entered the inner portion 22a is transported to the outer portion 22b by the working fluid of the heat pipe 22, and when reaching the outer portion 22b, the surface of the outer portion 22b and the plurality of cooling fins 26, 26,. Released to S2. At this time, the arithmetic processing unit 30 drives the cooling fan 28 and blows air toward the cooling fins 26, whereby the heat from the measurement space S1 is efficiently released to the external space S2.

  In this way, the heat in the measurement space S1 enters the inner portion 22a through the heat flow sensor 12, is transported to the outer portion 22b by the working fluid, and is discharged from the cooling fin 26 to the outer space S2 (see FIG. 3).

At this time, the arithmetic unit 32, the heat measurement space temperature T _i and the heat flow sensor 12 temperature and the second temperature detecting section 16 of the mounting surface 24a is measured of the heat transfer plate 24 by the first temperature detector 14 is measured is measured The flow rate Q _eo is received as the first temperature signal, the second temperature signal, and the heat flow signal, and is measured using the relational expression T _d 1 and the thermal resistance value R _ie stored in the storage unit 31. The dew point _Td is calculated. Then, the output unit 33 displays (outputs) the dew point _Td of the measurement space S1 calculated by the calculation unit 32.

As described above, according to the dew point meter of the first embodiment, the temperature T _{e of} the heat flow forming unit 20 (specifically, the mounting surface 24a of the heat transfer plate 24), the measurement space temperature T _i , and the heat flow sensor 12 the heat flow Q _eo heat flow passing through between the (heat flow sensor 12) between the surface 12a and the back 12b measures, these and, a relationship equation T _{d 1,} the thermal resistance value (second temperature detection unit in the measurement space S1 16 and the thermal resistance value _Rie between the temperature measurement position at the first temperature detection unit 14 in the heat flow forming unit 20 and the dew point T _d of the measurement space S1 in a wide humidity range. It can be obtained with high accuracy. This means that if the surface 12a of the heat flow sensor 12 is in a dewed state, the dew point T _d is calculated using the relational expression T _d 1 based on the heat balance in the heat flow sensor 12 that holds regardless of the relative humidity of the measurement space S1. Because.

  In addition, the dew point meter 10 includes the heat flow sensor 12, the heat flow forming unit 20, the first temperature detecting unit 14, the second temperature detecting unit 16, and the arithmetic processing unit 30, so that conventional mirror surface cooling is performed. The structure can be simplified as compared with a structure composed of a large number of members such as a dew point meter. In addition, since the dew point meter 10 does not require a wick like a conventional wet and dry bulb hygrometer, the work load related to maintenance such as replacement of the wick every time the water sucks up becomes worse. it can. Therefore, in the dew point meter 10 according to the present invention, the structure can be simplified while reducing the work burden related to maintenance.

  Moreover, the dew point meter 10 with excellent responsiveness can be obtained by using the heat pipe 22 having a small thermal resistance in the heat flow forming unit 20.

<Second Embodiment>
FIG. 4 is a schematic configuration diagram for explaining a dew point meter according to the second embodiment of the present invention, and FIG. 5 is a diagram showing the heat transfer and thermal resistance in the heat flow forming unit and the heat flow sensor of the dew point meter shown in FIG. It is a conceptual diagram for demonstrating. Next, the configuration of the dew point meter according to the second embodiment of the present invention will be described with reference to FIGS. 4 and 5. The same reference numerals are used for the same configurations as in the first embodiment, and a detailed description will be given. Omitted, only different configurations will be described in detail.

  As shown in FIG. 4, the dew point meter 10 </ b> A of the present embodiment includes a heat flow sensor 12, a heat flow forming unit 20 </ b> A, a cooling fan 28, a heat insulating unit (first heat insulating unit) 40, and a first temperature detecting unit. 14, a second temperature detection unit 16, and an arithmetic processing unit 30.

  Unlike the first embodiment, the heat flow sensor 12 is attached to the heat flow forming unit 20A in the external space S2.

  20 A of heat flow formation parts are provided with the heat pipe 22 and the heat exchanger plate 24, and the heat exchanger plate 24 is attached to the outer side part 22b of the heat pipe 22 in external space S2, unlike 1st Embodiment.

  The cooling fan 28 is disposed so as to be able to blow air toward the surface 12 a of the heat flow sensor 12 attached to the heat flow forming unit 20.

The heat insulating part 40 is attached to the heat flow forming part 20A. Specifically, the heat insulating part 40 is formed of a material having low thermal conductivity, and is positioned on the outer space S2 side with respect to the heat flow sensor 12 and the heat insulating wall 100 of the heat flow forming part 20A, leaving the surface 12a of the heat flow sensor 12. The part (specifically, the outer portion 22b of the heat pipe 22 and the heat transfer plate 24 attached thereto) is enclosed. Thereby, all the heat released from the outer portion 22b of the heat pipe 22 to the external space S2 passes through the heat flow sensor 12. That is, when the heat flow sensor 12 is attached to a portion located in the external space S2 of the heat flow forming portion 20A, by providing the heat insulating portion 40, the inside of the measurement space S1 entering the heat pipe 22 from the inner portion 22a. All the heat passes through the heat flow sensor 12 and is released to the external space S2. As a result, the amount of heat between the heat in the measurement space S1 that has entered the heat pipe 22 from the inner portion 22a and the heat that passes through the heat flow sensor 12 and is released to the external space S2 becomes equal, and the relational expression T _d 1 is used. The dew point _Td can be measured.

  The 1st temperature detection part 14 is arrange | positioned at the surface of the inner part 22a of the heat pipe 22, measures the temperature of the said surface, and outputs the 1st temperature signal according to the measurement result.

The thermal resistance value _Rie stored in the storage unit 31 of the arithmetic processing unit 30 is a predetermined position in the measurement space S1 (temperature measurement position by the second temperature detection unit 16) and the surface of the inner part 22a of the heat pipe 22 ( It is a thermal resistance value between the first temperature detector 14 and a temperature measurement position).

In the dew point meter 10A configured as described above, the dew point _Td of the measurement space S1 is measured as follows.

The arithmetic processing unit 30 drives the temperature and humidity chamber 101, by higher than the measurement space temperature T _i external space temperature, the temperature difference between the inner portion 22a and outer portion 22b of the heat pipe 22 is formed The Thereby, the heat of the inner part 22 a of the heat pipe 22 is transported to the outer part 22 b, and the heat is transferred to the back surface 12 b of the heat flow sensor 12 through the heat transfer plate 24. Thereby, a temperature difference is formed between the front surface 12a and the rear surface 12b of the heat flow sensor 12, and heat from the inner portion 22a of the heat pipe 22 passes through the heat flow sensor 12 and is released to the external space S2. A heat flow that passes through the heat flow sensor 12 from the back surface 12b toward the front surface 12a is formed. At this time, since the cooling fan 28 blows air toward the surface 12a of the heat flow sensor 12, the amount of heat released from the surface 12a of the heat flow sensor 12 to the external space S2 increases, so that the heat from the outer portion 22b is efficiently externalized. Released into the space S2.

  On the other hand, in the inner part 22a of the heat pipe 22, since the heat of the inner part 22a is transported to the outer part 22b and released to the outer space S2, the temperature of the inner part 22a becomes low and the heat in the measurement space S1 Enters the inner portion 22a. At this time, since the inner portion 22a is equal to or lower than the dew point of the measurement space S1, moisture present in the measurement space S1 adheres to the surface and condenses, resulting in condensation.

  In this way, the heat in the measurement space S1 enters the inner portion 22a of the heat pipe 22, is transported to the outer portion 22b by the working fluid, and is released to the outer space S2 through the heat flow sensor 12 (see FIG. 5).

At this time, the arithmetic unit 32, the measurement space temperature T _i and the heat flow sensor 12 the temperature T _e and the second temperature detecting section 16 of the surface of the inner portion 22a is measured of the heat pipe 22 to the first temperature detector 14 is measured The measured heat flow rate Q _eo is received as a first temperature signal, a second temperature signal, and a heat flow signal, and these are used together with a relational expression T _d 1 and a thermal resistance value R _ie stored in the storage unit 31. The dew point _{Td of the} measurement space is calculated. Then, the output unit 33 displays (outputs) the dew point _Td of the measurement space S1 calculated by the calculation unit 32.

As described above, the dew point _Td of the measurement space S1 can be measured even if the heat flow sensor 12 is attached to a part located in the external space S2 of the heat flow forming unit 20A as in the dew point meter 10A of the present embodiment. it can. In addition, by disposing the heat flow sensor 12 in the external space S2, condensation on the heat flow sensor 12 can be prevented, and as a result, deterioration of the heat flow sensor 12 due to condensation can be prevented.

<Third embodiment>
FIG. 6 is a schematic configuration diagram for explaining a dew point meter according to the third embodiment of the present invention, and FIG. 7 is a diagram showing the heat transfer and thermal resistance in the heat flow forming unit and the heat flow sensor of the dew point meter shown in FIG. It is a conceptual diagram for demonstrating. Next, the configuration of the dew point meter according to the third embodiment of the present invention will be described with reference to FIGS. 6 and 7. The same reference numerals are used for the same configurations as in the first and second embodiments, and the details will be described. Detailed description will be omitted, and only different configurations will be described in detail.

  The dew point meter 10B of the present embodiment includes a heat flow sensor 12, a heat flow forming unit 20B, a cooling fan 28, a first temperature detection unit 14, a second temperature detection unit 16, and an arithmetic processing unit 30.

  Unlike the first and second embodiments, the heat flow forming unit 20 </ b> B includes a heat transfer member 42 and a Peltier element 44.

  The heat transfer member 42 is disposed on the opposite side to the heat absorption side portion 44a of the Peltier element 44 with the heat flow sensor 12 interposed therebetween, and a part of the heat transfer member 42 is exposed in the measurement space S1 to transfer the heat in the measurement space S1 to the heat flow sensor 12. To the heat absorption side portion 44a. Specifically, the heat transfer member 42 is a columnar member formed of a material having a high thermal conductivity, and is inserted through a through hole 100 a formed in the heat insulating wall 100 that constitutes the side wall of the constant temperature and humidity chamber 101. One end (the end opposite to the Peltier element 44) 42a is disposed so as to protrude (expose) into the measurement space S1. The heat flow sensor 12 is attached to the end portion 42b opposite to the end portion 42a protruding into the measurement space S1 of the heat transfer member 42 so that the surface 12a of the heat flow sensor 12 is in contact with the end surface of the end portion 42b. In the present embodiment, the heat transfer member 42 is disposed so that a part of the heat transfer member 42 protrudes into the measurement space S1, but for example, the Peltier element 44 is disposed in the through hole 100a so that the entire heat transfer member 42 is formed. You may arrange | position so that it may protrude in the measurement space S1 (exposure).

  In the Peltier element 44, the heat absorption side portion 44a can absorb the heat in the measurement space S1 via the heat flow sensor 12, and the heat radiation side portion 44b can dissipate the heat absorbed by the heat absorption side portion 44a to the external space S2. Placed in. Specifically, the Peltier element 44 is attached to the heat flow sensor 12 so that the heat absorption side portion 44a contacts the back surface 12b of the heat flow sensor 12 in the external space S2, and the heat radiation side portion 44b is exposed to the external space S2. Be placed. The Peltier element 44 is connected to the arithmetic processing unit 30 and is driven based on an instruction signal from the arithmetic processing unit 30.

  The heat flow sensor 12 is attached to the Peltier element 44 so that the back surface 12b can conduct heat with the heat absorption side portion 44a of the Peltier element 44 in the external space S2. Specifically, the heat flow sensor 12 is attached to the heat flow forming unit 20 </ b> B so as to be sandwiched between the Peltier element 44 and the heat transfer member 42. In the present embodiment, the heat flow sensor 12 is directly attached to the Peltier element 44. However, the present invention is not limited to this. For example, the heat transfer member (the heat transfer member 42 and the heat transfer member 42) is disposed on the heat absorption side portion 44a of the Peltier element 44. A different heat transfer member) may be attached, and the heat flow sensor 12 may be attached to the heat transfer member.

  The 1st temperature detection part 14 is arrange | positioned at the end surface of the protrusion side edge part 42a into the measurement space S1 of the heat-transfer member 42, measures the temperature of the said end surface, and outputs the 1st temperature signal according to the measurement result To do.

The thermal resistance value _Rie stored in the storage unit 31 of the arithmetic processing unit 30 is a predetermined position in the measurement space S1 (temperature measurement position by the second temperature detection unit 16) and the measurement space S1 of the heat transfer member 42. It is a thermal resistance value between the end surface (temperature measurement position by the 1st temperature detection part 14) of the protrusion side edge part 42a.

In the dew point meter 10B configured as described above, the dew point _Td of the measurement space S1 is measured as follows.

  When the arithmetic processing unit 30 drives the Peltier element 44, the heat of the heat absorption side portion 44a is transported to the heat radiation side portion 44b and released from the heat radiation side portion 44b to the external space S2, thereby being transmitted through the heat flow sensor 12. The end 42b of the thermal member 42 on the Peltier element 44 side is cooled, and a temperature difference is formed between the thermal member 42 and a portion protruding into the measurement space S1. Thereby, the heat in the measurement space S1 enters the heat transfer member 42 from the surface of the protruding portion of the heat transfer member 42 and moves to the end portion 42b on the Peltier element side, and the heat absorption of the Peltier element 44 through the heat flow sensor 12. It is supplied to the side part 44a. At this time, a heat flow that passes through the heat flow sensor 12 from the front surface 12a toward the back surface 12b is formed. At this time, the protrusion side end portion 42a of the heat transfer member 42 becomes the dew point or less, and moisture present in the measurement space S1 adheres to the end surface and condenses, thereby causing dew condensation.

  The heat that has entered the heat absorption side portion 44a of the Peltier element 44 is transported to the heat radiation side portion 44b and released to the external space S2. At this time, the arithmetic processing unit 30 drives the cooling fan 28 and blows air toward the heat radiation side portion 44b, whereby heat from the measurement space S1 is efficiently released to the external space S2.

  In this way, the heat in the measurement space S1 is supplied from the heat transfer member 42 to the heat absorption side portion 44a of the Peltier element 44 through the heat flow sensor 12, and released from the heat dissipation side portion 44b to the external space S2 (see FIG. 7). .

Calculation unit 32, a measurement space temperature T _i and the heat flow sensor 12 the temperature T _e and the second temperature detecting section 16 is measured in the end face of the projecting end portions 42a of the heat transfer member 42 by the first temperature detector 14 has measurement The measured heat flow rate Q _eo is received as a first temperature signal, a second temperature signal, and a heat flow signal, and these are used together with a relational expression T _d 1 and a thermal resistance value R _ie stored in the storage unit 31. The dew point _{Td of the} measurement space is calculated. Then, the output unit 33 displays (outputs) the dew point _Td of the measurement space S1 calculated by the calculation unit 32.

As described above, according to the dew point meter 10B of the present embodiment, by using the Peltier element 44, the heat flow passing through the heat flow sensor 12 can be changed by the amount of current to be supplied. It becomes possible to measure the dew point _Td of S1.

  Further, according to the dew point meter 10B of the present embodiment, heat generated by driving the Peltier element 44 can be released to the external space S2, so that the temperature in the measurement space S1 can be easily controlled. Moreover, since the heat radiation side portion 44b is located in the external space S2, the heat generated by driving the Peltier element 44 can be released to the external space more efficiently.

  Further, according to the dew point meter 10B of the present embodiment, the heat transfer member 42 is arranged on the measurement space S1 side with respect to the heat flow sensor 12, thereby preventing the heat flow sensor 12 from being exposed in the measurement space S1. Condensation to the sensor 12 can be prevented, thereby preventing deterioration of the heat flow sensor 12 due to condensation.

<Fourth embodiment>
FIG. 8 is a schematic configuration diagram for explaining a dew point meter according to the fourth embodiment of the present invention. FIG. 9 is a diagram showing the heat transfer and thermal resistance in the heat flow forming unit and the heat flow sensor of the dew point meter shown in FIG. It is a conceptual diagram for demonstrating. Next, the configuration of the dew point meter according to the fourth embodiment of the present invention will be described with reference to FIGS. 8 and 9. The same reference numerals are used for the same configurations as in the first to third embodiments, and the details will be described. Detailed description will be omitted, and only different configurations will be described in detail.

  The dew point meter 10 </ b> C of the present embodiment includes a heat flow sensor 12, a Peltier element (heat flow forming unit) 20 </ b> C, a first temperature detection unit 14, a second temperature detection unit 16, and an arithmetic processing unit 30.

  The heat flow sensor 12 is attached to the Peltier element 20C so that the back surface 12b can conduct heat with the heat absorption side portion 20Ca of the Peltier element 20C in the measurement space S1. In the present embodiment, the heat flow sensor 12 is directly attached to the Peltier element 20C. However, the present invention is not limited to this. For example, a heat transfer member is attached to the heat absorption side portion 20Ca of the Peltier element 20C. A heat flow sensor 12 may be attached.

  Unlike the third embodiment, the Peltier element 20C is disposed so that the heat radiation side portion 20Cb and the heat flow sensor 12 attached to the heat absorption side portion 20Ca are located in the measurement space S1. That is, the Peltier element 20C is disposed so that the entire Peltier element 20C is located in the measurement space S1 with the heat flow sensor 12 attached.

  The 1st temperature detection part 14 is arrange | positioned at the surface which contact | connects the heat flow sensor 12 in the heat absorption side site | part 20Ca of 20 C of Peltier elements, measures the temperature of the said surface, and outputs the 1st temperature signal according to the measurement result.

The thermal resistance value _Rie stored in the storage unit 31 of the arithmetic processing unit 30 is a heat flow in a predetermined position (temperature measurement position by the second temperature detection unit 16) in the measurement space S1 and the heat absorption side portion 20Ca of the Peltier element 20C. It is a thermal resistance value between the surface in contact with the sensor 12 (temperature measurement position by the first temperature detection unit 14).

In the dew point meter 10C configured as described above, the dew point _Td of the measurement space S1 is measured as follows.

  When the arithmetic processing unit 30 drives the Peltier element 44, the heat of the heat absorption side part 44a is transported to the heat radiation side part 44b and released from the heat radiation side part 44b into the measurement space S1, thereby the back surface 12b of the heat flow sensor 12 is As a result of cooling, a temperature difference is formed between the back surface 12b and the surface 12a. Thereby, the heat in the measurement space S1 is absorbed by the heat absorption side portion 44a of the Peltier element 44 through the heat flow sensor 12, that is, a heat flow is formed that passes through the heat flow sensor 12 from the front surface 12a toward the back surface 12b. At this time, the surface 12a of the heat flow sensor 12 becomes below the dew point, and moisture present in the measurement space S1 adheres and condenses, resulting in condensation.

  The heat that has entered the heat absorption side portion 44a of the Peltier element 44 is transported to the heat radiation side portion 44b and released to the measurement space S1.

  In this way, the heat in the measurement space S1 is absorbed by the heat absorption side portion 44a of the Peltier element 44 through the heat flow sensor 12, and released from the heat dissipation side portion 44b to the measurement space S1 (see FIG. 9).

At this time, the arithmetic unit 32, the measurement space temperature T _i and heat flow temperature T _e and the second temperature detector 16 heat flow sensors 12 are surface mounted to the Peltier element 44 by the first temperature detector 14 is measured is measured The heat flow rate Q _eo measured by the sensor 12 is received as the first temperature signal, the second temperature signal, and the heat flow signal, and these, the relational expression T _d 1 and the thermal resistance value R _ie stored in the storage unit 31. Is used to calculate the dew point _{Td of the} measurement space. Then, the output unit 33 displays (outputs) the dew point _Td of the measurement space S1 calculated by the calculation unit 32.

As described above, according to the dew point meter 10C of the present embodiment, the dew point T is provided without providing a hole or the like for releasing heat to the external space S2 in the heat insulating wall 100 or the like that separates the external space S2 and the measurement space S1. _d can be measured. Further, since it is not necessary to release the heat of the heat radiation side portion 44b to the external space S2, the degree of freedom of arrangement of the Peltier elements 44 in the measurement space S1 is improved.

<Fifth embodiment>
FIG. 10 is a schematic configuration diagram for explaining a hygrometer according to a fifth embodiment of the present invention. Next, the configuration of the hygrometer according to the fifth embodiment of the present invention will be described with reference to FIG. 10. The same reference numerals are used for the same configurations as in the first to fourth embodiments, and a detailed description will be given. Omitted, only different configurations will be described in detail.

  The hygrometer 50 of the present embodiment measures the relative humidity in the measurement space S1, and further includes a humidity calculation processing unit 36 in addition to the components constituting the dew point meter 10 of the first embodiment. In addition, the structure of a dew point meter is not limited to the dew point meter 10 of 1st Embodiment, Dew point meters 10A, 10B, 10C, etc. of 2nd-4th embodiment may be sufficient.

The humidity calculation processing unit 36 calculates the relative humidity Φ of the measurement space S1 from the dew point _Td calculated by the calculation unit 32 (calculation processing unit 30) of the dew point meter 10.

  Details will be described below.

The humidity calculation processing unit 36 calculates the absolute humidity X _i of the measurement space S1 by substituting the dew point T _d calculated by the calculation unit 32 into the following equation (6).

ここで、Ｐは、大気の全圧である。

Here, P is the total atmospheric pressure.

Then, the humidity calculation processing unit 36 calculates the water vapor partial pressure P _vi in the measurement space S1 from the absolute humidity X _i based on the following equation (7).

湿度演算処理部３６は、空気温度と飽和水蒸気圧との関係を示すテーブルを有し、このテーブルと式（７）により算出した水蒸気分圧Ｐ_ｖｉとから、以下の式（８）に基づいて測定空間Ｓ１の相対湿度Φを算出する。

The humidity calculation processing unit 36 has a table indicating the relationship between the air temperature and the saturated water vapor pressure, and based on the following equation (8) from this table and the water vapor partial pressure P _vi calculated by the equation (7). The relative humidity Φ of the measurement space S1 is calculated.

ここで、測定空間温度Ｔ_ｉでの飽和蒸気圧をＰ_ｖｓとする。

Here, the saturated vapor pressure at the measurement space temperature _{T i} and _{P vs.}

In the hygrometer 50 configured as described above, the calculation unit 32 calculates the dew point _Td of the measurement space S1 in the same manner as in the first embodiment, and the humidity calculation processing unit 36 based on this calculates the dew point _Td of the measurement space S1. Calculate the relative humidity Φ. Then, the output unit 33 displays (outputs) the dew point _Td of the measurement space S1 calculated by the calculation unit 32 and the relative humidity Φ of the measurement space S1 calculated by the humidity calculation processing unit 36. The hygrometer 50 may be configured to display only the relative humidity Φ.

According to the hygrometer 50, the measurement space S1 is measured in a wide humidity range by measuring the temperature T _e of the heat flow forming unit 20, the measurement space temperature T _i , and the heat flow rate Q _eo of the heat flow that has passed through the heat flow sensor 12. since the obtained good dew point T _d accuracy, by calculating the relative humidity Φ on the basis of the dew point T _d, the relative humidity Φ measurement space S1 can be accurately obtained.

  Moreover, in the hygrometer 50 by this invention, the dew point meter 10 provided with the heat flow sensor 12, the heat flow formation part 20, each temperature detection part (1st temperature detection part 14, 2nd temperature detection part 16 etc.), and the arithmetic processing part 30 is shown. And the humidity calculation processing unit 36, the structure can be simplified as compared with a conventional hygrometer using a mirror-cooled dew point meter, which is composed of a large number of members. . And since the wick is not required like the conventional wet and dry bulb hygrometer, the work burden concerning a maintenance can be reduced.

  The dew point meter and the hygrometer of the present invention are not limited to the first to fifth embodiments, and it is needless to say that various changes can be made without departing from the gist of the present invention.

  If the 1st temperature detection part 14 is a position which can measure the temperature of the heat flow formation part 20, 20A, 20B, 20C or the heat flow sensor 12, a specific arrangement position will not be limited. In the dew point meters 10, 10A, 10B, and 10C of the first to fifth embodiments, the first temperature detection unit 14 determines the temperature of the part located in the measurement space of the heat flow forming units 20, 20A, 20B, and 20C. Although it measures, it is not limited to the temperature of this position. For example, it may be the temperature of the outer portion 22b of the heat pipe 22 or the heat transfer plate 24 attached to the outer portion 22b in the heat flow forming portions 20 and 20A of the first and second embodiments, and the heat flow forming portion of the third embodiment. The temperature such as the surface of the Peltier element 44 or the heat transfer member 42 in contact with the heat flow sensor 12 in 20B or the temperature inside the heat transfer member 42 may be used. Further, the position where the temperature is measured by the first temperature detection unit 14 may be the front surface 12a or the back surface 12b of the heat flow sensor 12.

Thus, even if the position where the temperature _Te is measured by the first temperature detection unit 14 is changed from the position in the first to fifth embodiments, the thermal resistance value _Rie used for deriving the dew point _Td is measured in the measurement space. with thermal resistance between the position of measuring the temperature T _e by the temperature T _i measured position and the first temperature detector 14, the dew point T _d of the measurement space S1 by using the relationship T _{d 1} It can be calculated with high accuracy.

Further, as in the third and fourth embodiments, in the case where the heat flow forming units 20B and 20C include the Peltier element 44, the thermal resistance value _Rie is not stored in the storage unit 31 in advance, and the measurement space S1 is not stored. When the dew point _Td is measured, the calculation unit 32 or the like of the calculation processing unit 30 may obtain the thermal resistance value _Rie and use it.

Specifically, the heat flow sensor 12 is turned on under the condition that the current supplied to the Peltier element 44 by the arithmetic processing unit 30 is reversed (that is, heat is released toward the back surface 12b of the heat flow sensor 12) without condensation. By measuring the heat flow rate Q _eo of the passing heat flow, the temperature measurement position in the second temperature detection unit 16 in the measurement space S1 and the temperature measurement position in the first temperature detection unit 14 in the heat flow forming units 20B and 20C A thermal resistance value _Rie between them can be obtained.

Specifically, heat is released from the Peltier element 44 to the measurement space S <b> 1 through the heat flow sensor 12 by reversing the current supplied to the Peltier element 44 by the arithmetic processing unit 30. The heat flow sensor 12 measures the heat flow rate Q _eo at this time. And the calculation part 32 etc.

に熱流センサ１２により計測された熱流量Ｑ_ｅｏと、このときに第１温度検出部１４及び第２温度検出部１６によって検出された温度Ｔ_ｅ、Ｔ_ｉとを代入することにより、熱抵抗値Ｒ_ｉｅが求められる。演算部３２は、これを記憶部３１に格納する。その後、演算部３２は、この記憶部３１に格納された熱抵抗値Ｒ_ｉｅを用いて、第３実施形態及び第４実施形態と同様にして、測定空間Ｓ１の露点Ｔ_ｄを求める。

By substituting the heat flow rate Q _eo measured by the heat flow sensor 12 and the temperatures T _e and T _i detected by the first temperature detection unit 14 and the second temperature detection unit 16 at this time, the thermal resistance value _Rie is determined. The calculation unit 32 stores this in the storage unit 31. Thereafter, the calculation unit 32 uses the thermal resistance value _Rie stored in the storage unit 31 to obtain the dew point _Td of the measurement space S1 in the same manner as in the third embodiment and the fourth embodiment.

Thus, since the heat flow forming units 20B and 20C include the Peltier element 44, the thermal resistance value _Rie is obtained in advance by performing calculation, test measurement, or the like, and stored in a storage unit such as a memory. Also, the dew point _Td can be measured.

  In the third embodiment, the heat transfer member 42 is disposed on the opposite side of the Peltier element 44 with the heat flow sensor 12 interposed therebetween. However, the surface 12a of the heat flow sensor 12 is not disposed without the heat transfer member 42. The structure exposed to measurement space S1 may be sufficient.

  Further, the heat transfer member 42 is not limited to the heat transfer member 42 formed of a material having high thermal conductivity, and a heat pipe type heat transfer member 144 in which the internal heat moves by the working fluid confined in the inside may be used ( FIG. 11). According to such a configuration, since the heat capacity of the heat flow forming part is reduced, a responsive dew point meter can be obtained.

Moreover, in the said 1st-5th embodiment, although the heat flow sensor 12 and the heat flow formation part 20 (20A, 20B, 20C) are each arrange | positioned 1 each, as FIG. The heat flow sensor 112A and the second heat flow sensor 112B, and the first heat flow forming unit 120A to which the first heat flow sensor 112A is attached and the second heat flow forming unit 120B to which the second heat flow sensor 112B is attached (in FIG. 12). Any of them may be configured to include a Peltier element. According to such a configuration, the dew point _Td of the measurement space S1 can be accurately obtained in a wide humidity range without using the thermal resistance value _Rie in the first to fifth embodiments. For this reason, a heat flow that passes through the first heat flow sensor 112A is formed by the first heat flow forming unit 120A, and a heat flow that passes through the second heat flow sensor 112B is formed by the second heat flow forming unit 120B. If the relational expression T _d 2 based on the heat balance in each of the heat flow sensors 112A and 112B is prepared, the thermal resistance value _Rie is obtained in advance by calculation, test measurement, or the like, and this is obtained by the storage unit 31 such as a memory. The values obtained by actual measurement when the dew point _Td is measured (the temperatures T _e and T _e ′ of the heat flow forming portions 120A and 120B, the temperature of the measurement space S1, and the heat flow sensors) The dew point T _d can be obtained from the heat flow rates Q _eo and Q _eo ′) of the heat flow that has passed through 112A and 112B.

Specifically, the dew point _Td is obtained as follows.

The arithmetic processing unit 30 controls the heat flow forming units 120A and 120B so that the heat flow rates Q _eo and Q _eo ′ of the heat flow passing through the first and second heat flow sensors 112A and 112B are different from each other. . Specifically, when the first and second heat flow forming portions 120A and 120B are both Peltier elements, the amounts of current supplied to the respective Peltier elements are different from each other. And the 3rd temperature detection part (temperature detection part) which measures the temperature of 1st and 2nd heat flow formation part 120A, 120B (or 1st and 2nd heat flow sensor 112A, 112B) is 1st and 2nd. The temperature of the heat flow forming portions 120A and 120B (or the temperature of the first and second heat flow sensors 112A and 112B) T _e and T _e ′ are measured.

The calculation unit 32 calculates the temperature T _e , T _e ′ of each heat flow forming unit 120A, 120B measured by the third temperature detection unit in the following relational expression T _d 2 and the heat measured by each heat flow sensor 112A, 112B. The dew point is calculated by substituting the flow rates Q _eo and Q _eo ′ and the measurement space temperature T _i measured by the second temperature detector 16.

尚、関係式Ｔ_ｄ２は、以下のようにして求められる。

The relational expression T _d 2 is obtained as follows.

  The following equations (11-1) and (11-2) are established for the first and second heat flow sensors 112A and 112B, respectively.

これらの式（１１−１）と式（１１−２）とから、

From these formulas (11-1) and (11-2),

が求められる。

Is required.

  And from the equation (12-1) = the equation (12-2),

が求められる。

Is required.

  In the first and second embodiments, the heat flow sensor 12 is attached to the heat transfer plate 24 provided in the heat pipe 22, but the heat pipe 22 in which the attachment portion 23 as shown in FIG. 13 is formed. It may be attached directly to. Specifically, a mounting portion 23 having a mounting surface 23 a having the same shape as the back surface 12 b of the heat flow sensor 12 is formed on the outer portion 22 b of the heat pipe 22. And the heat flow sensor 12 is attached to the heat pipe 22 so that the back surface 12b of the heat flow sensor 12 may contact the attachment surface 23a. In the case of a dew point meter in which the heat flow sensor 12 is disposed in the measurement space S <b> 1, the attachment portion 23 is formed on the inner portion 22 a of the heat pipe 22.

According to this configuration, the heat flow sensor 12 can be easily attached. Further, by attaching the heat flow sensor 12 to the heat pipe 22 so that the back surface 12b of the heat flow sensor 12 and the mounting surface 23a of the heat pipe 22 are in contact with each other, other heat transfer members and the like are disposed between the heat pipe 22 and the heat flow sensor 12. The heat capacity can be made smaller as compared with the case where the dew point _Td is measured.

10, 10A, 10B, 10C Dew point meter 12 Heat flow sensor 12a Front surface 12b Rear surface 14 First temperature detection unit (temperature detection unit)
16 2nd temperature detection part (measurement space temperature detection part)
20, 20A, 20B, 20C Heat flow forming part 22 Heat pipe 24 Heat transfer plate 30 Arithmetic processing part 36 Humidity arithmetic processing part 40 Heat insulating part (first heat insulating part)
42 Heat Transfer Member 44 Peltier Element 44a Heat Absorption Side Part 44b Heat Dissipation Side Part 50 Hygrometer 100 Insulation Wall (Insulation Part / Second Insulation Part)
101 thermo-hygrostat _{Q eo} heat flow _{Q ie} sensible heat _{Q ie} ^L latent _{R ie} thermal resistance values S1 measuring space S2 outside space _{T d} dew point _{T e} heat transfer surface of the temperature (temperature measured by the temperature detecting unit)
_Ti Measurement space temperature Φ Relative humidity

Claims (10)

A dew point meter for measuring the dew point of the measurement space,
A heat flow sensor having a surface and a back surface and measuring a heat flow rate of the heat flow passing between the surface and the back surface;
The heat flow sensor is attached, and a heat flow forming part capable of conducting heat on the back surface of the heat flow sensor,
A temperature detection unit for measuring the temperature of the heat flow forming unit or the temperature of the heat flow sensor;
A measurement space temperature detector for measuring the temperature of the measurement space;
An arithmetic processing unit for calculating a dew point of the measurement space,
The heat flow forming unit changes the temperature of the back surface of the heat flow sensor by the movement of heat in the heat flow forming unit and creates a temperature difference between the back surface and the surface to thereby transfer the heat flow passing through the heat flow sensor. Forming,
The arithmetic processing unit uses a relational expression based on a heat balance in the heat flow sensor when the heat flow is formed, and measures a temperature measurement position in the measurement space temperature detection unit and a temperature in the temperature detection unit. Of the measurement space from the thermal resistance value between the position, the temperature measured by the temperature detection unit, the temperature measured by the measurement space temperature detection unit, and the heat flow rate measured by the heat flow sensor. A dew point meter that calculates the dew point. The heat flow forming unit has a heat pipe disposed across the measurement space and an external space separated from the measurement space by a heat insulating unit,
2. The dew point meter according to claim 1, wherein the heat flow sensor is attached to a part located in the measurement space of the heat flow forming part so that the back surface can conduct heat with a part located in the measurement space of the heat pipe. . A first heat insulating part attached to the heat flow forming part;
The heat flow forming part has a heat pipe disposed across the measurement space and an external space separated from the measurement space by a second heat insulating part,
The heat flow sensor is attached to a portion located in the external space of the heat flow forming portion so that the back surface can conduct heat with a portion located in the external space of the heat pipe,
2. The dew point meter according to claim 1, wherein the first heat insulating portion surrounds the heat flow sensor and a portion located in an external space of the heat flow forming portion while leaving a surface of the heat flow sensor. The heat pipe has a mounting surface having a shape corresponding to the back surface of the heat flow sensor,
The dew point meter according to claim 2 or 3, wherein the heat flow sensor is attached to the heat pipe such that a back surface thereof is in contact with the attachment surface. The heat flow forming part has a Peltier element,
2. The dew point meter according to claim 1, wherein the heat flow sensor is attached to the heat flow forming portion so that a back surface of the heat flow sensor can conduct heat with a heat absorption side portion of the Peltier element. The heat flow sensor is attached to a heat absorption side portion of the Peltier element,
In the Peltier element, the heat absorption side portion can absorb heat in the measurement space via the heat flow sensor, and the heat dissipation side portion absorbs the heat absorbed by the heat absorption side portion with respect to the measurement space. The dew point meter according to claim 5, wherein the dew point meter is disposed so as to be able to radiate heat to an external space separated by a heat insulating portion. The heat flow forming unit is disposed on the opposite side of the heat absorption side portion with the heat flow sensor interposed therebetween, and at least a part of the heat flow forming unit is exposed in the measurement space to transfer the heat in the measurement space through the heat flow sensor. It has a heat transfer member that can be supplied to the heat absorption side part,
The dew point meter according to claim 6, wherein the Peltier element is disposed such that the heat radiation side portion is located in the external space.   The dew point meter according to claim 5, wherein the Peltier element and a heat flow sensor attached to the endothermic side portion are arranged so as to be located in the measurement space. A dew point meter for measuring the dew point of the measurement space,
A first heat flow sensor having a surface and a back surface and measuring a heat flow rate of the heat flow passing between the surface and the back surface;
A second heat flow sensor having a surface and a back surface and measuring a heat flow rate of the heat flow passing between the surface and the back surface;
The first heat flow sensor is attached, and a first heat flow forming part capable of conducting heat to the back surface of the first heat flow sensor;
The second heat flow sensor is attached, and a second heat flow forming part capable of conducting heat to the back surface of the second heat flow sensor;
A temperature detection unit that measures the temperature of the first and second heat flow forming units, or the temperature of the first and second heat flow sensors, respectively;
A measurement space temperature detector for measuring the temperature of the measurement space;
An arithmetic processing unit for calculating a dew point of the measurement space,
The first heat flow forming unit changes the temperature of the back surface of the first heat flow sensor by moving the heat in the first heat flow forming unit, thereby providing a temperature difference between the back surface and the surface. Forming a heat flow passing through the first heat flow sensor;
The second heat flow forming unit changes the temperature of the back surface of the second heat flow sensor by moving the heat in the second heat flow forming unit, thereby providing a temperature difference between the back surface and the surface. A heat flow that passes through the second heat flow sensor is formed, and a heat flow rate of the heat flow that passes through the second heat flow sensor is different from a heat flow rate of the heat flow that passes through the first heat flow sensor. And
The arithmetic processing unit uses the relational expression based on the heat balance in each heat flow sensor when the heat flow is formed, and the first and second heat flow forming units measured by the temperature detection unit or the first And the temperature of the second heat flow sensor, the temperature of the measurement space measured by the measurement space temperature detector, and the heat flow rates measured by the first and second heat flow sensors, respectively. A dew point meter that calculates the dew point. A hygrometer for measuring the relative humidity of a measurement space,
The dew point meter according to any one of claims 1 to 9,
A hygrometer comprising: a humidity calculation processing unit that calculates a relative humidity of the measurement space based on a dew point determined by the calculation processing unit of the dew point meter.

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