JPH01252667A - Antistatic composition - Google Patents

Antistatic composition

Info

Publication number
JPH01252667A
JPH01252667A JP63080455A JP8045588A JPH01252667A JP H01252667 A JPH01252667 A JP H01252667A JP 63080455 A JP63080455 A JP 63080455A JP 8045588 A JP8045588 A JP 8045588A JP H01252667 A JPH01252667 A JP H01252667A
Authority
JP
Japan
Prior art keywords
resin
antistatic
semiconductor device
composition
resins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63080455A
Other languages
Japanese (ja)
Inventor
Hiroshi Inaba
稲葉 洋志
Teru Okunoyama
奥野山 輝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP63080455A priority Critical patent/JPH01252667A/en
Publication of JPH01252667A publication Critical patent/JPH01252667A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Abstract

PURPOSE:To make it possible to prevent a resin-sealed semiconductor element from being destroyed by static electricity, etc., and the surface of the element from being damaged in steps after being sealed, by coating the surface of the sealing resin of a resin-sealed semiconductor device with an antistatic composition obtained by mixing an organic resin with an antistatic agent in a specified ratio. CONSTITUTION:This antistatic composition for coating a semiconductor device comprises 100 pts.wt. organic resin and 0.1-20 pts.wt. antistatic agent. Example of the organic resin include those which can be cured with heat or electron beams, such as epoxy, acryl, unsaturated polyester, epoxy acrylate and polyimide resins and highly heat-resistant thermoplastic resins such as polyphenylene sulfide resins. As said antistatic agent, one which is conventionally used for plastics, fibers, paper, etc., can be used as such.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、半導体装置の封止樹脂表面に被覆形成する半
導体装置被覆用の帯電防止性組成物に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an antistatic composition for coating a semiconductor device, which is formed on the surface of a sealing resin of a semiconductor device.

(従来の技術) 従来、樹脂封止型半導体装置は、第2図に示したように
、半導体素子12が接着剤16を介してリードフレーム
の半導体素子搭載部11に裕載され、半導体素子12の
電極とリードフレームのリード端子13とがボンディン
グワイヤー14によって電気的に接続され、半4体素子
12と、ボンディングワイヤー14と、リード端子13
の一部とはトランスファー成形をした封止樹脂15によ
って、半導体素子12を外部雰囲気から保護するような
@造が採られている。
(Prior Art) Conventionally, in a resin-sealed semiconductor device, as shown in FIG. The electrode and the lead terminal 13 of the lead frame are electrically connected by the bonding wire 14, and the half-quad element 12, the bonding wire 14, and the lead terminal 13
A structure is adopted in which the semiconductor element 12 is protected from the external atmosphere by a sealing resin 15 that has been transfer molded.

(発明が解決しようとする課題) このような構造の樹脂封止型半導体装置は、静電気等の
外部からの微弱電流によって半導体装置内部の半導体素
子が破壊されるという欠点がある。
(Problems to be Solved by the Invention) A resin-sealed semiconductor device having such a structure has a drawback that a semiconductor element inside the semiconductor device is destroyed by a weak electric current from the outside such as static electricity.

また、トランスファー成形で封止した半導体装置表面は
、成形の後工程で傷がつき商品価値が低下するなどの欠
点があった。
Furthermore, the surface of a semiconductor device sealed by transfer molding has the disadvantage that it is damaged in the post-molding process, reducing its commercial value.

本発明は上記の欠点を解消するためになされたもので、
静電気等の外部からの微弱電流によっても半導体素子が
破壊されずに、かつ半導体製造の後半工程において、傷
がつき商品価値が低下することのないような半導体装置
被覆用の帯電防止性組成物を提供しようとするものであ
る。
The present invention has been made to solve the above-mentioned drawbacks.
To develop an antistatic composition for coating semiconductor devices that will not destroy semiconductor elements even by weak external currents such as static electricity, and will not cause scratches and decrease in commercial value in the later stages of semiconductor manufacturing. This is what we are trying to provide.

[発明の構成] (課題を解決するための手段) 本発明者らは、上記の欠点を解決しようと種々検討を行
った結果、帯電防止剤を配合した樹脂組成物を被覆すれ
ば、上記目的が達成されることを見いだし、本発明を完
成させたものである。 すなわち、本発明は、 有機樹脂100重量部に対し、帯電防止剤0.1〜20
重量部配合したことを特徴とする半導体用の帯電防止性
組成物である。
[Structure of the Invention] (Means for Solving the Problems) As a result of various studies in an attempt to solve the above-mentioned drawbacks, the present inventors found that the above-mentioned objectives can be achieved by coating with a resin composition containing an antistatic agent. The present invention has been completed by discovering that the following can be achieved. That is, in the present invention, 0.1 to 20 parts of the antistatic agent is added to 100 parts by weight of the organic resin.
This is an antistatic composition for semiconductors, characterized in that it contains part by weight of the antistatic composition.

本発明に用いる有機樹脂としては、エポキシ樹脂、アク
リル樹脂、不飽和ポリエステル樹脂、エポキシアクリレ
ート樹脂、ポリイミド樹脂等の熱又は電子線によって硬
化する樹脂やポリフェニレンサルファイド樹脂等の耐熱
性の高い熱可塑性樹脂等が挙げられ、これらは単独もし
くは2種以上混合して使用することができる。 熱硬化
の場合G二角虫媒としてイミダゾール、メラミン、パー
オキサイド等を使用することができるが、用いるベース
樹脂の種類によって触媒を選択することが必要である。
Examples of organic resins used in the present invention include resins that are cured by heat or electron beams such as epoxy resins, acrylic resins, unsaturated polyester resins, epoxy acrylate resins, and polyimide resins, and thermoplastic resins with high heat resistance such as polyphenylene sulfide resins. These can be used alone or in a mixture of two or more. In the case of thermal curing, imidazole, melamine, peroxide, etc. can be used as the G dichotoxin medium, but it is necessary to select the catalyst depending on the type of base resin used.

 同様に電子線(光)で硬化する場合の触媒としては、
2−エチルアントラキノン、アセトフェノン、ベンゾイ
ンメチルエーテル、ホスホニウム塩系等を、使用するベ
ース樹脂によって選択することが必要である。
Similarly, as a catalyst for curing with electron beam (light),
It is necessary to select 2-ethylanthraquinone, acetophenone, benzoin methyl ether, phosphonium salts, etc. depending on the base resin used.

本発明に用いる帯電防止剤としては、従来、プラスチッ
ク、繊維、紙等に使用されているものをそのまま使用す
ることができ、特に限定されるものではない。 帯電防
止剤としては、ポリオキシエチレンアルキルアミン、ポ
リオキシエチレンアルキルアミド、ポリオキシエチレン
アルキルエーテル、ポリオキシエチレンアルキルフェニ
ルエーテル、グリセリン脂肪酸エステル、ソルビタン脂
肪酸エステル等の非イオン系の帯電防止剤、アルキルス
ルホネート、アルキルベンゼンスルホネート、アルキル
サルフェート、アルキルホスフェート等のアニオン系の
帯電防止剤、第4級アンモニウムクロライド、第4級ア
ンモニウムサルフェート、第4級アンモニウムナイトレ
ート等のカチオン系の帯電防止剤、アルキルベタイン型
、アルキルイミダシリン型、アルキルアラニン型等の両
性系の帯電防止剤、ポリビニルベンジル型カチオン、ポ
リアクリル酸型カチオン等の導電性樹脂帯電防止剤等が
挙げられる。 これらのうち工業的に生産されている帯
電防止剤としては、エレクトロストリッパーN、エレク
トロストリッパーK、アルヒトール24B(花王アトラ
ス社製、商品名)、デートロンN、ナイスポールTF−
27、ナイスポールTF−53(日華化学工業社製、商
品名)、プリオンに−5、プリオンA−01,プリオン
A−160(竹本油脂社製、商品名) 、 Texno
lR2、Newco120、Newcol 40、Ne
vcolloooFCP<日本乳化剤社製、商品名)、
ニューニレガンA S K ’(日本油脂社製、商品名
)等が挙げられ、これらは単独もしくは2種以上混合し
て使用することができる。 帯電防止剤の配合割合は、
有機樹脂100重量部に対して0.1〜20重量部を配
合する。 より好ましくは、0.2〜10重量部である
。 帯電防止剤の配合割合が0,1重量部未満では十分
な帯電防止効果を得ることができず、また20重量部を
超えると有機樹脂の反応性を低下させ好ましくない。
As the antistatic agent used in the present invention, those conventionally used for plastics, fibers, paper, etc. can be used as they are, and are not particularly limited. Examples of antistatic agents include nonionic antistatic agents such as polyoxyethylene alkylamine, polyoxyethylene alkylamide, polyoxyethylene alkyl ether, polyoxyethylene alkyl phenyl ether, glycerin fatty acid ester, sorbitan fatty acid ester, and alkyl sulfonates. , anionic antistatic agents such as alkylbenzene sulfonate, alkyl sulfate, alkyl phosphate, cationic antistatic agents such as quaternary ammonium chloride, quaternary ammonium sulfate, quaternary ammonium nitrate, alkyl betaine type, alkyl Examples include amphoteric antistatic agents such as imidacilline type and alkylalanine type, and conductive resin antistatic agents such as polyvinylbenzyl type cation and polyacrylic acid type cation. Among these, industrially produced antistatic agents include Electrostripper N, Electrostripper K, Alhitol 24B (manufactured by Kao Atlas Co., Ltd., trade name), Daytron N, Nicepol TF-
27, Nicepol TF-53 (manufactured by Nicca Chemical Industry Co., Ltd., trade name), Prion Ni-5, Prion A-01, Prion A-160 (manufactured by Takemoto Yushi Co., Ltd., trade name), Texno
lR2, Newco120, Newcol 40, Ne
vcolloooFCP <manufactured by Nippon Nyukazai Co., Ltd., trade name),
New Niregan ASK' (manufactured by Nippon Oil & Fats Co., Ltd., trade name) and the like may be used, and these may be used alone or in a mixture of two or more. The blending ratio of antistatic agent is
It is blended in an amount of 0.1 to 20 parts by weight per 100 parts by weight of the organic resin. More preferably, it is 0.2 to 10 parts by weight. If the proportion of the antistatic agent is less than 0.1 parts by weight, a sufficient antistatic effect cannot be obtained, and if it exceeds 20 parts by weight, the reactivity of the organic resin is undesirably reduced.

本発明の帯電防止性組成物は粘度調整用とじて各種の溶
剤を使用することができる。 例えば、ブチルセロソル
ブ、エチルセロソルブ、ブチルセロソルブアセテート、
ブチルカルピトールアセテート、ブチルカルピトール、
N−メチルピロリドン等が挙げられ、これらは単独もし
くは2種以上混合して使用することができる。 また、
無ン容剤型にするには、使用するベース樹脂に応じてモ
ノマーを選定使用することができる。
Various solvents can be used in the antistatic composition of the present invention to adjust the viscosity. For example, butyl cellosolve, ethyl cellosolve, butyl cellosolve acetate,
Butyl carpitol acetate, butyl carpitol,
Examples include N-methylpyrrolidone, which can be used alone or in combination of two or more. Also,
In order to make it into a containerless type, monomers can be selected and used depending on the base resin used.

さらに、本発明の主旨に反しない限度において、必要に
応じて組成物の作業性を調整するために、シリカ粉末、
炭酸カルシウム等の無機フィラーを添加配合することも
できる。
Furthermore, within the scope of the gist of the present invention, silica powder,
Inorganic fillers such as calcium carbonate may also be added.

本発明の帯電防止性組成物は、以上の前述した各成分を
配合し、デイスパー等によって均一に分散して容易に製
造することができる。 こうして得られた組成物をスク
リーン、ロールコータ−等によって塗布した後、数秒か
ら数時間熱又は電子線によって硬化されることができる
が、熱硬化では150°Cで1時間オーブン硬化、電子
線では80W/C1l、  1〜3灯で10〜20秒紫
外線硬化することが好ましい。
The antistatic composition of the present invention can be easily produced by blending the above-mentioned components and uniformly dispersing them using a disper or the like. After applying the composition obtained in this way using a screen, roll coater, etc., it can be cured by heat or electron beam for several seconds to several hours. It is preferable to cure with ultraviolet light for 10 to 20 seconds at 80 W/Cl and 1 to 3 lamps.

(作用) 半導体装置に帯電防止性組成物を被覆したことによって
、帯電防止効果によってゴミ等の付着や静電気から半導
体素子を保護することができるし、また封止後の損傷を
防止することができる。
(Function) By coating the semiconductor device with the antistatic composition, the antistatic effect can protect the semiconductor element from adhesion of dust and static electricity, and also prevent damage after sealing. .

(実施例) 次に本発明を実施例によって説明する。(Example) Next, the present invention will be explained by examples.

実施例 1 エポキシ樹脂95重量部、硬化触媒イミダゾール5重量
部、帯電防止剤ニューニレガンASK (日本油脂社製
、商品名)1重量部、およびシリカ粉末10重量部をデ
イスパーによって分散させて帯電防止性組成物を製造し
た。 この組成物を第1図に示したように樹脂封止型半
導体装置の封止樹脂表面に塗布硬化させた。 この樹脂
封止型半導体装置は、半導体素子2が接着剤7を介して
リードフレーム搭載部1に搭載され、リードフレームの
リード端子3と電極とがボンディングワイヤー4で接続
され、それらは封止樹脂5によって封止されでいる。 
封止樹脂5の表面に帯電防止性組成物6が被覆されてい
る。 この樹脂封止型半導体装置について、表面抵抗値
による帯電防止効果および封止後の損傷試験を行ったの
で、その結果を第1表に示した。 本発明の組成物を塗
布した半導体装置は、帯電防止効果がよく、損傷もなく
、本発明の効果が確認できた。
Example 1 An antistatic composition was prepared by dispersing 95 parts by weight of an epoxy resin, 5 parts by weight of a curing catalyst imidazole, 1 part by weight of an antistatic agent New Nilegan ASK (manufactured by NOF Corporation, trade name), and 10 parts by weight of silica powder. manufactured something. This composition was applied and cured on the surface of the encapsulating resin of a resin-encapsulated semiconductor device as shown in FIG. In this resin-sealed semiconductor device, a semiconductor element 2 is mounted on a lead frame mounting portion 1 via an adhesive 7, and lead terminals 3 and electrodes of the lead frame are connected with bonding wires 4, and they are bonded to the encapsulating resin. It is sealed by 5.
The surface of the sealing resin 5 is coated with an antistatic composition 6. This resin-sealed semiconductor device was tested for antistatic effect based on surface resistance value and damage test after sealing, and the results are shown in Table 1. The semiconductor device coated with the composition of the present invention had a good antistatic effect and was not damaged, confirming the effect of the present invention.

実施例 2〜5 第1表に示した組成によって実施例1と同様にして帯電
防止性組成物をつくり、樹脂封止型半導体装置の封止樹
脂表面に塗布硬化させ、また実施例1と同様に特性試験
を行ったので、その結果を第1表にしな、 いずれも本
発明の効果を確認することができた。
Examples 2 to 5 An antistatic composition was prepared in the same manner as in Example 1 using the composition shown in Table 1, and applied and cured on the surface of the sealing resin of a resin-encapsulated semiconductor device, and in the same manner as in Example 1. The results are shown in Table 1, and the effects of the present invention were confirmed in all cases.

比較例 1 第1表に示した組成によって樹脂組成物をつくり、以下
実施例1と同様にして半導体装置の封止樹脂表面に塗布
硬化させ、また同様に試験を行ったので、その結果を第
1表に示しな。
Comparative Example 1 A resin composition was prepared according to the composition shown in Table 1, and applied and cured on the surface of the sealing resin of a semiconductor device in the same manner as in Example 1. The test was also conducted in the same manner. Shown in Table 1.

「発明の効果コ 以上の説明および第1表から明らかなように、本発明の
帯電防止性組成物は、優れた帯電防止効果を有するため
、これを塗布することによって、静電気等の外部からの
微弱電流による半導体素子の破壊を防止し、封止後の後
工程による傷を防止することができ商品価値の低下を防
ぐことができる。
``Effects of the Invention'' As is clear from the above explanation and Table 1, the antistatic composition of the present invention has an excellent antistatic effect, so by applying it, it can reduce external forces such as static electricity. It is possible to prevent semiconductor elements from being destroyed by weak currents, to prevent damage caused by post-processing after sealing, and to prevent a decrease in commercial value.

【図面の簡単な説明】 第1図は本発明の組成物を被覆形成した樹脂封止型半導
体装置の断面図、第2図は従来の樹脂封止型半導体装置
の断面図である。 1.11・・・半導体素子搭載部、 2.12・・・半
導体素子、 3.13・・・リード端子、 4,14・
・・ボンディングワイヤ、 5,15・・・封止樹脂、
6・・・帯電防止性組成物、 7.16・・・接着剤。 特許出願人 東芝ケミカル株式会社 第1図 第2図
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view of a resin-sealed semiconductor device coated with the composition of the present invention, and FIG. 2 is a sectional view of a conventional resin-sealed semiconductor device. 1.11...Semiconductor element mounting part, 2.12...Semiconductor element, 3.13...Lead terminal, 4,14.
...Bonding wire, 5,15...Sealing resin,
6...Antistatic composition, 7.16...Adhesive. Patent applicant: Toshiba Chemical Corporation Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1 有機樹脂100重量部に対し、帯電防止剤0.1〜
20重量部を配合することを特徴とする半導体装置被覆
用の帯電防止性組成物。
1 Antistatic agent 0.1 to 100 parts by weight of organic resin
An antistatic composition for coating a semiconductor device, characterized in that it contains 20 parts by weight.
JP63080455A 1988-04-01 1988-04-01 Antistatic composition Pending JPH01252667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63080455A JPH01252667A (en) 1988-04-01 1988-04-01 Antistatic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63080455A JPH01252667A (en) 1988-04-01 1988-04-01 Antistatic composition

Publications (1)

Publication Number Publication Date
JPH01252667A true JPH01252667A (en) 1989-10-09

Family

ID=13718734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63080455A Pending JPH01252667A (en) 1988-04-01 1988-04-01 Antistatic composition

Country Status (1)

Country Link
JP (1) JPH01252667A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0536147A1 (en) * 1990-06-25 1993-04-14 Dow Chemical Co Antistatic polyolefin foams and films and method of making the foam and antistatic composition.
EP0971000A1 (en) * 1997-03-25 2000-01-12 Tokyo Electron Limited Electronic/electric components used in clean room and substrate treatment apparatus
JP2012186634A (en) * 2011-03-04 2012-09-27 Murata Mfg Co Ltd Electronic component

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50740A (en) * 1973-05-02 1975-01-07
JPS5437A (en) * 1977-06-03 1979-01-05 Kohkoku Chem Ind Antistatic coating composition
JPS5578072A (en) * 1978-12-05 1980-06-12 Toyo Tire & Rubber Co Ltd Antistatic corrosion-resistant paint
JPS6041051B2 (en) * 1975-11-03 1985-09-13 リサ−チ コ−ポレ−シヨン Peptide for regulating intestinal intrinsic motility
JPS6131476A (en) * 1984-07-20 1986-02-13 Sekisui Chem Co Ltd Electrically conductive paint composition, and electrically conductive synthetic resin plate or sheet
JPS62112670A (en) * 1985-11-11 1987-05-23 Fujikura Ltd Electrically conductive ultraviolet curing paint

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50740A (en) * 1973-05-02 1975-01-07
JPS6041051B2 (en) * 1975-11-03 1985-09-13 リサ−チ コ−ポレ−シヨン Peptide for regulating intestinal intrinsic motility
JPS5437A (en) * 1977-06-03 1979-01-05 Kohkoku Chem Ind Antistatic coating composition
JPS5578072A (en) * 1978-12-05 1980-06-12 Toyo Tire & Rubber Co Ltd Antistatic corrosion-resistant paint
JPS6131476A (en) * 1984-07-20 1986-02-13 Sekisui Chem Co Ltd Electrically conductive paint composition, and electrically conductive synthetic resin plate or sheet
JPS62112670A (en) * 1985-11-11 1987-05-23 Fujikura Ltd Electrically conductive ultraviolet curing paint

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0536147A1 (en) * 1990-06-25 1993-04-14 Dow Chemical Co Antistatic polyolefin foams and films and method of making the foam and antistatic composition.
EP0971000A1 (en) * 1997-03-25 2000-01-12 Tokyo Electron Limited Electronic/electric components used in clean room and substrate treatment apparatus
EP0971000A4 (en) * 1997-03-25 2000-07-19 Tokyo Electron Ltd Electronic/electric components used in clean room and substrate treatment apparatus
US6337365B1 (en) 1997-03-25 2002-01-08 Tokyo Electron Limited Electronic/electric components used in clean room and substrate treatment apparatus
JP2012186634A (en) * 2011-03-04 2012-09-27 Murata Mfg Co Ltd Electronic component

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