JPH01251784A - Manufacture of wiring board - Google Patents
Manufacture of wiring boardInfo
- Publication number
- JPH01251784A JPH01251784A JP63078383A JP7838388A JPH01251784A JP H01251784 A JPH01251784 A JP H01251784A JP 63078383 A JP63078383 A JP 63078383A JP 7838388 A JP7838388 A JP 7838388A JP H01251784 A JPH01251784 A JP H01251784A
- Authority
- JP
- Japan
- Prior art keywords
- electroless
- plating
- resist
- electroless plating
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000007772 electroless plating Methods 0.000 claims abstract description 43
- 238000007747 plating Methods 0.000 claims abstract description 40
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052802 copper Inorganic materials 0.000 claims abstract description 23
- 239000010949 copper Substances 0.000 claims abstract description 23
- 239000010410 layer Substances 0.000 claims abstract description 21
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 9
- 229910000990 Ni alloy Inorganic materials 0.000 claims abstract description 8
- 238000007788 roughening Methods 0.000 claims abstract description 7
- 239000012790 adhesive layer Substances 0.000 claims abstract description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052737 gold Inorganic materials 0.000 claims abstract description 6
- 239000010931 gold Substances 0.000 claims abstract description 6
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 24
- 239000003054 catalyst Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 abstract description 19
- 238000009413 insulation Methods 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 238000013508 migration Methods 0.000 abstract description 2
- 230000005012 migration Effects 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 abstract 1
- 239000004615 ingredient Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 21
- 238000010438 heat treatment Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000003822 epoxy resin Substances 0.000 description 12
- 229920000647 polyepoxide Polymers 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 11
- 230000001070 adhesive effect Effects 0.000 description 11
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 10
- 239000004744 fabric Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 9
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 8
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 8
- 238000007650 screen-printing Methods 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 210000001787 dendrite Anatomy 0.000 description 5
- 238000007865 diluting Methods 0.000 description 5
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 4
- 229920000459 Nitrile rubber Polymers 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 4
- 229910001080 W alloy Inorganic materials 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 229910003475 inorganic filler Inorganic materials 0.000 description 2
- 239000011256 inorganic filler Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 239000001509 sodium citrate Substances 0.000 description 2
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- -1 Alternatively Polymers 0.000 description 1
- OQUFOZNPBIIJTN-UHFFFAOYSA-N 2-hydroxypropane-1,2,3-tricarboxylic acid;sodium Chemical compound [Na].OC(=O)CC(O)(C(O)=O)CC(O)=O OQUFOZNPBIIJTN-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 1
- 239000005749 Copper compound Substances 0.000 description 1
- ZGTMUACCHSMWAC-UHFFFAOYSA-L EDTA disodium salt (anhydrous) Chemical compound [Na+].[Na+].OC(=O)CN(CC([O-])=O)CCN(CC(O)=O)CC([O-])=O ZGTMUACCHSMWAC-UHFFFAOYSA-L 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 150000001880 copper compounds Chemical class 0.000 description 1
- KPVWDKBJLIDKEP-UHFFFAOYSA-L dihydroxy(dioxo)chromium;sulfuric acid Chemical compound OS(O)(=O)=O.O[Cr](O)(=O)=O KPVWDKBJLIDKEP-UHFFFAOYSA-L 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229920002681 hypalon Polymers 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- XTFKWYDMKGAZKK-UHFFFAOYSA-N potassium;gold(1+);dicyanide Chemical compound [K+].[Au+].N#[C-].N#[C-] XTFKWYDMKGAZKK-UHFFFAOYSA-N 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229940023144 sodium glycolate Drugs 0.000 description 1
- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 description 1
- AGGKEGLBGGJEBZ-UHFFFAOYSA-N tetramethylenedisulfotetramine Chemical compound C1N(S2(=O)=O)CN3S(=O)(=O)N1CN2C3 AGGKEGLBGGJEBZ-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- JEJAMASKDTUEBZ-UHFFFAOYSA-N tris(1,1,3-tribromo-2,2-dimethylpropyl) phosphate Chemical compound BrCC(C)(C)C(Br)(Br)OP(=O)(OC(Br)(Br)C(C)(C)CBr)OC(Br)(Br)C(C)(C)CBr JEJAMASKDTUEBZ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/426—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in substrates without metal
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/0373—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0236—Plating catalyst as filler in insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0344—Electroless sublayer, e.g. Ni, Co, Cd or Ag; Transferred electroless sublayer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0709—Catalytic ink or adhesive for electroless plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1407—Applying catalyst before applying plating resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1415—Applying catalyst after applying plating resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/386—Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
- H05K3/387—Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive for electroless plating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、耐電食性に優れた無電解めっき方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an electroless plating method with excellent electrolytic corrosion resistance.
(従来の技術)
配線板として、経済的に優れた製造方法として無電解め
っきを析出させるためにパラジウム等の無電解めっき用
触媒を含有する接着剤層を表面に形成しその中にも同様
の無電解めっき用触媒を含有する絶縁板に回路部となる
べき箇所以外の部分に無電解めっき用レジストを設はク
ロム酸等の化学粗化液に浸漬してレジストが形成されて
いない箇所の表面を選択的に粗化し無電解めっき液に浸
漬して回路パターンを形成するいわゆるアディティブ法
がある。(Prior art) As an economically superior manufacturing method for wiring boards, an adhesive layer containing an electroless plating catalyst such as palladium is formed on the surface to deposit electroless plating. If a resist for electroless plating is applied to parts of an insulating plate containing a catalyst for electroless plating other than the parts that should become circuit parts, the surface of the parts where no resist is formed is immersed in a chemical roughening solution such as chromic acid. There is a so-called additive method in which a circuit pattern is formed by selectively roughening the material and immersing it in an electroless plating solution.
(発明が解決しようとする課題)
近年、電子機器の小型化、軽量化に伴い、配線板には配
線の高密度化が要求され、そのために配線板の両面の回
路導体を接続するためのスルーホールを設ける間隔を狭
めたり配線のための導体の幅を狭めたりしている。この
ような高密度の配線板においては、異なった電位の導体
が近接し、長時間の間にその導体を支持している絶縁板
の表面で異なった電位の導体の間にある領域で、イオン
性不純物による銅の移行(マイグレーション)のためか
あるいはアディティブ法による配線板の製造工程の各種
処理液による影響を受けるためか、多湿の条件下におい
てデンドライトと呼ばれる樹枝状の銅化合物が形成され
ることがある。このデンドライトは、同様の条件下にお
いて次第に成長し、最終的には導体間を短絡させるに至
る。(Problem to be Solved by the Invention) In recent years, as electronic devices have become smaller and lighter, wiring boards are required to have higher wiring density. The spacing between holes is being narrowed, and the width of conductors for wiring is being narrowed. In such a high-density wiring board, conductors with different potentials are in close proximity, and over a long period of time, ions are generated in the area between the conductors with different potentials on the surface of the insulating board that supports the conductors. Under humid conditions, dendritic copper compounds called dendrites are formed, either due to the migration of copper due to sexual impurities or due to the effects of various processing solutions in the additive manufacturing process of wiring boards. There is. This dendrite gradually grows under similar conditions and eventually leads to a short circuit between the conductors.
したがって、従来のアディティブ法においては、導体の
間隔を0.15mm以下にすることができず、配線の高
密度化を行うには導体の幅のみを狭めなければならず、
配線密度を高める上で障害となっていた。Therefore, in the conventional additive method, it is not possible to reduce the distance between conductors to 0.15 mm or less, and in order to increase the density of wiring, only the width of the conductor must be reduced.
This has been an obstacle to increasing wiring density.
本発明は、この電食による絶縁劣化の抑制に優れた無電
解めっき方法を提供するものである。The present invention provides an electroless plating method that is excellent in suppressing insulation deterioration due to electrolytic corrosion.
(課題を解決するための手段)
本発明は、以下に示す工程よりなる配線板の製造方法で
ある。(Means for Solving the Problems) The present invention is a method for manufacturing a wiring board, which includes the steps shown below.
a、無電解めっき用触媒を含む絶縁基板表面に無電解め
っき用触媒を含む接着剤層を形成する。a. An adhesive layer containing a catalyst for electroless plating is formed on the surface of an insulating substrate containing a catalyst for electroless plating.
b、スルーホールとなる穴をあける。b. Drill a hole that will become a through hole.
c.スルーホールと回路部となるべき部分以外の箇所に
無電解めっき用レジストを形成する。c. A resist for electroless plating is formed in areas other than the through holes and the portions that will become circuit parts.
d、化学粗化液に浸漬し、無電解めっき用レジストが形
成されていない箇所の表面を選択的に粗化する。d. Immerse in a chemical roughening solution to selectively roughen the surface where the electroless plating resist is not formed.
e、無電解めっき用レジストが形成されていない箇所に
第1の金属層として、無電解ニッケル合金、無電解コバ
ルト合金、無電解パラジウム又は無電解金のうちの1種
又は2種以上の組み合わせによる層を形成する。e. As the first metal layer in areas where the resist for electroless plating is not formed, one or a combination of two or more of electroless nickel alloy, electroless cobalt alloy, electroless palladium, or electroless gold is used. form a layer.
f、無電解銅めっき液に浸漬し、第1の金属層の上に銅
めっき層を形成する。f. Immerse in electroless copper plating solution to form a copper plating layer on the first metal layer.
すなわち、本発明においては、配線導体である銅と絶縁
基板との間に、電界による成分の移行の少ない物質を介
在させることによってこのデンドライトに関する問題を
解決使用とするものである。That is, in the present invention, the problem related to dendrites is solved by interposing a substance whose components are less likely to migrate due to an electric field between copper, which is a wiring conductor, and an insulating substrate.
工程aにおいて、本発明に用いることのできる絶縁基板
としては、紙基材フェノール樹脂積層板、紙基材エポキ
シ樹脂積層板、ガラス布エポキシ樹脂積層板、又は、ガ
ラス布ポリイミド樹脂積層板等があり、この樹脂中に無
電解めっき用触媒であるパラジウム、白金、ロジウム等
を含有させた絶縁基板を用いる。市販品としては、LE
−168、LE−144(日立化成工業株式会社、商品
名)等がある。In step a, insulating substrates that can be used in the present invention include paper-based phenolic resin laminates, paper-based epoxy resin laminates, glass cloth epoxy resin laminates, or glass cloth polyimide resin laminates. , an insulating substrate containing palladium, platinum, rhodium, etc., which are catalysts for electroless plating, is used in this resin. As a commercially available product, LE
-168, LE-144 (Hitachi Chemical Co., Ltd., trade name), etc.
接着剤としては、NBRを主成分とするもの、NBRと
クロロスルフォン化ポリエチレンを主成分とするもの、
又は、エポキシ樹脂を主成分とするものが使用でき、こ
れに無電解めっき用触媒であるパラジウム、白金、ロジ
ウム等を含有させ、充填剤として珪酸ジルコニウム、シ
リカ、炭酸カルシウム又は水酸化アルミニウム等を混合
したものも使用できる。Adhesives include those whose main components are NBR, those whose main components are NBR and chlorosulfonated polyethylene,
Alternatively, epoxy resin as a main component can be used, which contains palladium, platinum, rhodium, etc. as a catalyst for electroless plating, and is mixed with zirconium silicate, silica, calcium carbonate, aluminum hydroxide, etc. as a filler. You can also use the
工程すにおいて、スルーホールとなる穴は、パンチ、ド
リル等、通常、配線板の穴あけに用いられる装置であれ
ばどのようなものでももちいることができる。In the process, any device, such as a punch or drill, which is normally used for making holes in wiring boards, can be used to form the holes that will become through holes.
工程Cにおいて形成する無電解めっき用レジストとして
は、光硬化による樹脂をフィルム状にした紫外線硬化型
レジストフィルムや、紫外線硬化型レジストインク、熱
硬化型レジストインク等をスクリーン印刷法によって塗
布できるもの等が使用でき、後述の無電解ニッケルめっ
き液、銅めっき液及びその前処理液等工程中に用いる化
学液とその使用条件において、剥離等の発生しないもの
であればどのようなものでも用いることができる。The resist for electroless plating formed in Step C includes an ultraviolet curable resist film made of a photocurable resin, an ultraviolet curable resist ink, a thermosetting resist ink, etc. that can be applied by screen printing. Any chemical solution and usage conditions used during the process, such as the electroless nickel plating solution, copper plating solution, and its pretreatment solution described below, can be used as long as it does not cause peeling or the like. can.
工程dにおいて、レジストが形成されていない部分の表
面を選択的に粗化する粗化液としては、通常アディティ
ブ法配線板の製造に用いることができる化学粗化液、例
えば、クロム酸−硫酸混合液、クロム酸−棚部酸混合液
等が使用できる。In step d, the roughening liquid that selectively roughens the surface of the portion where the resist is not formed is a chemical roughening liquid that can be normally used in manufacturing additive method wiring boards, such as a chromic acid-sulfuric acid mixture. liquid, chromic acid-tracebe acid mixed liquid, etc. can be used.
工程eにおいて、第1の金属層を形成するための無電解
めっき液としては、ニッケル、ニッケル/タングステン
合金、ニッケル/コバルト合金、コバルト、コバルト/
タングステン合金、パラジウム、又は金をめっきできる
ものであれば特に限定するものではなく、通常の次亜リ
ン酸塩を還元剤とするリン含有又は硼素を含有するめっ
き液、例えば、ニッケルの場合では市販品として、ブル
ーシューマ(日本カニゼン株式会社、商品名)、トップ
ニコロン(奥野製薬株式会社、商品名)、ニムデン(上
村工業株式会社、商品名)等が使用できる。また、パラ
ジウム又は金のめっき層の厚さは0.5〜5μmとする
ことがめっきの厚さの均一性と仕上がり状態での配線板
の厚さとから好ましく、その他の金属の場合は同様の理
由から0゜5〜10μmとすることが好ましい。In step e, the electroless plating solution for forming the first metal layer includes nickel, nickel/tungsten alloy, nickel/cobalt alloy, cobalt, cobalt/
There is no particular limitation as long as it can plate tungsten alloy, palladium, or gold. For example, in the case of nickel, a plating solution containing phosphorus or boron using ordinary hypophosphite as a reducing agent is commercially available. As products, Blue Shuma (Nippon Kanizen Co., Ltd., trade name), Top Nicolon (Okuno Pharmaceutical Co., Ltd., trade name), Nimden (Kamimura Industries Co., Ltd., trade name), etc. can be used. In addition, it is preferable that the thickness of the palladium or gold plating layer is 0.5 to 5 μm from the viewpoint of uniformity of the plating thickness and thickness of the finished wiring board, and for other metals, the same reason applies. It is preferable to set it as 0 degrees 5-10 micrometers.
工程fにおいて、第1の金属層の上に行う銅めっきに用
いる無電解銅めっき液についても、特に限定するもので
はなく、CC−41めっき液(日立化成工業株式会社、
商品名)等、通常の無電解めっき液が使用できる。In step f, the electroless copper plating solution used for copper plating on the first metal layer is not particularly limited, and CC-41 plating solution (Hitachi Chemical Co., Ltd.,
Ordinary electroless plating solutions such as (trade name) can be used.
(作用)
銅のデンドライトは、電位差のある導体間において電位
の高い方の銅導体の溶解及び電位に低い方へのイオン移
動と電位の低い方の導体における析出現象であり、銅と
絶縁基板の界面に、電界による成分の移行の少ない物質
である第1の金属層を介在させることによって絶縁基板
の表面における配線導体間の電圧印加時での電食による
絶縁劣化を防ぐことができる。(Function) Copper dendrites are a phenomenon in which between conductors with a potential difference, the copper conductor with a higher potential dissolves, ions move to the lower potential, and precipitation occurs in the conductor with a lower potential. By interposing the first metal layer, which is a substance whose components are less likely to migrate due to an electric field, at the interface, it is possible to prevent insulation deterioration due to electrolytic corrosion when a voltage is applied between wiring conductors on the surface of the insulating substrate.
実施例1
無電解めっき用触媒として塩化パラジウムを含有するガ
ラスクロス基材エポキシ樹脂積層板LE−144(日立
化成工業株式会社、商品名)に、同じ塩化パラジウムを
含有する接着剤でアクリロニトリルブタジェンゴムを主
成分としアルキルフェノール樹脂、エポキシ樹脂、無機
充填剤としてのシリカ、珪酸ジルコニウムを溶媒中で配
合した接着剤を塗布、乾燥し、加熱硬化して接着剤層を
形成した。Example 1 A glass cloth base epoxy resin laminate LE-144 (trade name, Hitachi Chemical Co., Ltd.) containing palladium chloride as a catalyst for electroless plating was coated with acrylonitrile butadiene rubber using an adhesive containing the same palladium chloride. An adhesive containing alkylphenol resin, epoxy resin, silica as an inorganic filler, and zirconium silicate as main components in a solvent was applied, dried, and cured by heating to form an adhesive layer.
次いで、パンチプレスにより所定の位置に穴をあけた後
、無電解めっき用フォトレジストフィルムであるフォテ
ックSR−’3000(日立化成工業株式会社、商品名
)を真空ラミネータによってラミネートし、回路となら
ない箇所に露光し露光されなかった部分を現像して除去
しレジストを形成した。このとき、回路幅と導体間の間
隔は、いずれも0.15mmとした。Next, after punching holes at predetermined positions using a punch press, Photec SR-'3000 (trade name, Hitachi Chemical Co., Ltd.), a photoresist film for electroless plating, is laminated using a vacuum laminator to form holes in areas that will not form a circuit. The unexposed portions were developed and removed to form a resist. At this time, the circuit width and the spacing between the conductors were both 0.15 mm.
レジストを形成した絶縁板を、Cr0g55gと濃硫酸
210mj!とを水で希釈し11としたクロム酸混液の
温度55℃の溶液の中に10分間浸漬し、回路部となる
部分を選択的に化学粗化して、水洗、中和した。The insulating plate on which the resist was formed was heated with 55 g of Cr and 210 mj of concentrated sulfuric acid! The sample was immersed for 10 minutes in a solution of chromic acid mixture diluted with water to make 11 at a temperature of 55° C., and the portion that would become the circuit portion was selectively roughened chemically, washed with water, and neutralized.
この絶縁板を、下記の無電解ニッケル/タングステン合
金めっき液に60分間浸漬し、約2μmの合金めっき層
を形成した。This insulating plate was immersed in the following electroless nickel/tungsten alloy plating solution for 60 minutes to form an alloy plating layer of about 2 μm.
硫酸ニッケル :1g/lタングステン酸
ナトリウム :35g/lクエン酸ナトリウム
:20g/1次亜リン酸ナトリウム :LOg/
l〔条件〕
pH:9.8
液温度 :93℃
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20μmの銅めっきを析出させた後、スル
ーホール以外の基板表面にソルダレジストをスクリーン
印刷法によって印刷塗布し加熱硬化して試験用配線板と
した。Nickel sulfate: 1g/l Sodium tungstate: 35g/l Sodium citrate
:20g/1 Sodium hypophosphite :LOg/
l [Conditions] pH: 9.8 Solution temperature: 93°C Next, after washing with water, CC-4 was used as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing a copper plating of about 20 μm, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to obtain a test wiring board.
実施例2
塩化パラジウムを含有するガラス布エポキシ樹脂積層板
LE−168(日立化成工業株式会社、商品名)に実施
例1で使用した接着剤を塗布し、加熱硬化して絶縁基板
とした。Example 2 The adhesive used in Example 1 was applied to a glass cloth epoxy resin laminate LE-168 (trade name, Hitachi Chemical Co., Ltd.) containing palladium chloride, and cured by heating to obtain an insulating substrate.
この後、高速ドリルマシンにより所定の位置に穴あけし
たものに、無電解めっき用フォトレジストフィルレムで
あるフォテック5R−3000(日立化成工業株式会社
、商品名)を真空ラミネータでラミネートし、露光・現
像して回路とならない部分にレジストを形成した。After that, a hole was drilled at a predetermined position using a high-speed drill machine, and Photec 5R-3000 (trade name, Hitachi Chemical Co., Ltd.), which is a photoresist film for electroless plating, was laminated with a vacuum laminator, and exposed and developed. Then, a resist was formed on the parts that would not form a circuit.
レジストを形成した絶縁板を、Cr0g55gと濃硫酸
210mlとを水で希釈し11としたクロム酸混液の温
度55℃の溶液の中に10分間浸漬し、回路、部となる
部分を選択的に化学粗化して、水洗、中和した。The insulating plate on which the resist was formed was immersed for 10 minutes in a solution of chromic acid mixture (11) made by diluting 55 g of Cr and 210 ml of concentrated sulfuric acid with water at a temperature of 55°C to selectively chemically remove the parts that would become the circuits. It was roughened, washed with water, and neutralized.
この絶縁基板を下記の無電解コバルト/ニッケル合金め
っき液に50分間浸漬して、約10μmの合金めっき層
を形成した。This insulating substrate was immersed in the following electroless cobalt/nickel alloy plating solution for 50 minutes to form an alloy plating layer of about 10 μm.
(組成〕
塩化コバルト :30g/It塩化ニッケル
:30g/lグリコール酸ソーダ :
l00g/A1次亜リン酸ソーダ :22g/
i!〔条件〕
p)l :4.5〜5.0液温度
:92℃
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20μmの銅めっきを析出させた後、スル
ーホール以外の基板表面にソルダレジストをスクリーン
印刷法によって印刷塗布し加熱硬化して試験用配線板と
した。(Composition) Cobalt chloride: 30g/It Nickel chloride: 30g/L Sodium glycolate:
100g/A1 Sodium hypophosphite: 22g/
i! [Conditions] p)l: 4.5-5.0 Solution temperature: 92°C Next, after washing with water, CC-4 was used as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing a copper plating of about 20 μm, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to obtain a test wiring board.
実施例3
塩化パラジウムを含有するガラス布エポキシ樹脂積層板
LE−168(日立化成工業株式会社、商品名)に実施
例1で使用した接着剤を塗布し、加熱硬化して絶縁基板
とした。Example 3 The adhesive used in Example 1 was applied to a glass cloth epoxy resin laminate LE-168 (trade name, Hitachi Chemical Co., Ltd.) containing palladium chloride, and cured by heating to obtain an insulating substrate.
この後、高速ドリルマシンにより所定の位置に穴あけし
たものに、無電解めっき用フォトレジストフィルレムで
あるフォテック5R−3000(日立化成工業株式会社
、商品名)を真空ラミネータでラミネートし、露光・現
像して回路とならない部分にレジストを形成した。After that, a hole was drilled at a predetermined position using a high-speed drill machine, and Photec 5R-3000 (trade name, Hitachi Chemical Co., Ltd.), which is a photoresist film for electroless plating, was laminated with a vacuum laminator, and exposed and developed. Then, a resist was formed on the parts that would not form a circuit.
レジストを形成した絶縁板を、CrOz55gと濃硫酸
210mJとを水で希釈し11としたクロム酸混液の温
度55℃の溶液の中に10分間浸漬し、回路部となる部
分を選択的に化学粗化して、水洗、中和した。The insulating plate on which the resist was formed was immersed for 10 minutes in a solution of chromic acid mixture (11) made by diluting 55 g of CrOz and 210 mJ of concentrated sulfuric acid with water at a temperature of 55°C to selectively chemically roughen the parts that would become the circuit parts. It was washed with water and neutralized.
この絶縁基板を下記の無電解コバルトめっき液に60分
間浸漬して、約5μmのめっき層を形成した。This insulating substrate was immersed in the following electroless cobalt plating solution for 60 minutes to form a plating layer of about 5 μm.
塩化コバルト :35g/j!クエン酸ソー
ダ :116g/j!次亜リン酸ソーダ
:11.5g/A〔条件〕
pH:s、oん10.0
液温度 :90を
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20Iimの銅めっきを析出させた後、ス
ルーホール以外の基板表面にソルダレジストをスクリー
ン印刷法によって印刷塗布し加熱硬化して試験用配線板
とした。Cobalt chloride: 35g/j! Sodium citric acid: 116g/j! Sodium hypophosphite
: 11.5 g/A [Conditions] pH: s, on 10.0 Solution temperature: After washing with water, CC-4 was used as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing about 20 Iim of copper plating, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to prepare a test wiring board.
実施例4
塩化パラジウムを含有するガラス布エポキシ樹脂積層板
LE−168(日立化成工業株式会社、商品名)に実施
例1で使用した接着剤を塗布し、加熱硬化して絶縁基板
とした。Example 4 The adhesive used in Example 1 was applied to a glass cloth epoxy resin laminate LE-168 (trade name, Hitachi Chemical Co., Ltd.) containing palladium chloride and cured by heating to obtain an insulating substrate.
この後、高速ドリルマシンにより所定の位置に穴あけし
たものに、無電解めっき用フォトレジストフィルレムで
あるフォテック5R−3000(日立化成工業株式会社
、商品名)を真空ラミネータでラミネートし、露光・現
像して回路とならない部分にレジストを形成した。After that, a hole was drilled at a predetermined position using a high-speed drill machine, and Photec 5R-3000 (trade name, Hitachi Chemical Co., Ltd.), which is a photoresist film for electroless plating, was laminated with a vacuum laminator, and exposed and developed. Then, a resist was formed on the parts that would not form a circuit.
レジストを形成した絶縁板を、CrOz55gと濃硫酸
210m1tとを水で希釈し11としたクロム酸混液の
温度55℃の溶液の中に10分間浸漬し、回路部となる
部分を選択的に化学粗化して、水洗、中和した。The insulating plate on which the resist was formed was immersed for 10 minutes in a solution of chromic acid mixture (11) made by diluting 55 g of CrOz and 210 ml of concentrated sulfuric acid with water at a temperature of 55°C to selectively chemically roughen the parts that would become the circuit parts. It was washed with water and neutralized.
この絶縁基板を下記の無電解パラジウムめっき液に60
分間浸漬して、約1μmのめっき層を形成したゆ
(組成〕
テトラミンパラジウムクロライド
:7.5g/A
EDTA−2Na : 8.Og/Rアンモニ
ア水 :280g/6ヒドラジン(1モル/
1):8mj!//!〔条件〕
液温度 :38℃
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20μmの銅めっきを析出させた後、スル
ーホール以外の基板表面にソルダレジストをスクリーン
印刷法によって印刷塗布し加熱硬化して試験用配線板と
した。This insulating substrate was immersed in the following electroless palladium plating solution for 60 minutes.
A plating layer of about 1 μm was formed by immersion for a minute (composition) Tetramine palladium chloride: 7.5 g/A EDTA-2Na: 8. Og/R Ammonia water: 280 g/6 hydrazine (1 mol/
1):8mj! //! [Conditions] Solution temperature: 38°C Next, after washing with water, CC-4 was used as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing a copper plating of approximately 20 μm, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to obtain a test wiring board.
実施例5
塩化パラジウムを含有するガラス布エポキシ樹脂積層板
LE−168(日立化成工業株式会社、商品名)に実施
例1で使用した接着剤を塗布し、加熱硬化して絶縁基板
とした。Example 5 The adhesive used in Example 1 was applied to a glass cloth epoxy resin laminate LE-168 (trade name, Hitachi Chemical Co., Ltd.) containing palladium chloride, and the adhesive was cured by heating to obtain an insulating substrate.
この後、高速ドリルマシンにより所定の位置に穴あけし
たものに、無電解めっき用フォトレジストフィルレムで
あるフォテフク5R−3000(日立化成工業株式会社
、商品名)を真空ラミネータでラミネートし、露光・現
像して回路とならない部分にレジストを形成した。After this, a hole was drilled at a predetermined position using a high-speed drill machine, and Fotefuku 5R-3000 (trade name, Hitachi Chemical Co., Ltd.), which is a photoresist film for electroless plating, was laminated with a vacuum laminator, and exposed and developed. Then, a resist was formed on the parts that would not form a circuit.
レジストを形成した絶縁板を、croz55gと濃硫酸
210mj+とを水で希釈し11としたクロム酸混液の
温度55℃の溶液の中に10分間浸漬し、回路部となる
部分を選択的に化学粗化して、水洗、中和した。The insulating plate on which the resist has been formed is immersed for 10 minutes in a solution of chromic acid mixture (11) made by diluting 55 g of croz and 210 mj+ of concentrated sulfuric acid with water at a temperature of 55°C to selectively chemically roughen the parts that will become the circuit parts. It was washed with water and neutralized.
この絶縁基板を下記の無電解金めっき液に30分間浸漬
して、約0.5μmのめっき層を形成した。This insulating substrate was immersed in the following electroless gold plating solution for 30 minutes to form a plating layer of about 0.5 μm.
シアン化金カリウム :2g/j!塩化アンモニウ
ム :15g/lクエン酸ナトリウム :5
0g/β次亜リン酸ソーダ :10g/j!〔条
件〕
p)(ニア、O〜7.5
液温度 :92℃
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20μmの銅めっきを析出させた後、スル
ーホール以外の基板表面にソルダレジストをスクリーン
印刷法によって印刷塗布し加熱硬化して試験用配線板と
した。Potassium gold cyanide: 2g/j! Ammonium chloride: 15g/l Sodium citrate: 5
0g/β sodium hypophosphite: 10g/j! [Conditions] p) (Near, O~7.5 Solution temperature: 92°C Next, after washing with water, CC-4 was used as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing a copper plating of about 20 μm, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to obtain a test wiring board.
比較例1
以下のように、実施例1において、無電解銅めっきのみ
を行った。Comparative Example 1 As described below, in Example 1, only electroless copper plating was performed.
無電解めっき用触媒として塩化パラジウムを含有するガ
ラスクロス基材エポキシ樹脂積層板LE−144(日立
化成工業株式会社、商品名)に、同じ塩化パラジウムを
含有する接着剤でアクリロニトリルブタジェンゴムを主
成分としアルキルフェノール樹脂、エポキシ樹脂、無機
充填剤としてのシリカ、珪酸ジルコニウムを溶媒中で配
合した接着剤を塗布、乾燥し、加熱硬化して接着剤層を
形成した。Glass cloth base epoxy resin laminate LE-144 (Hitachi Chemical Co., Ltd., trade name) containing palladium chloride as a catalyst for electroless plating is coated with acrylonitrile butadiene rubber as a main component using an adhesive containing the same palladium chloride. An adhesive prepared by blending alkylphenol resin, epoxy resin, silica as an inorganic filler, and zirconium silicate in a solvent was applied, dried, and cured by heating to form an adhesive layer.
次いで、パンチプレスにより所定の位置に穴をあけた後
、無電解めっき用フォトレジストフィルムであるフォテ
ック5R−3000(日立化成工業株式会社、商品名)
を真空ラミネータによってラミネートし、回路とならな
い箇所に露光し露光されなかった部分を現像して除去し
レジストを形° 成した。このとき、回路幅と導体間の
間隔は、いずれも0.15mmとした。Next, after punching holes at predetermined positions using a punch press, Photec 5R-3000 (trade name, Hitachi Chemical Co., Ltd.), a photoresist film for electroless plating, was used.
were laminated using a vacuum laminator, exposed to light in areas that would not form a circuit, and the unexposed areas were developed and removed to form a resist. At this time, the circuit width and the spacing between the conductors were both 0.15 mm.
レジストを形成した絶縁板を、CrOz55gと4硫酸
210nl!とを水で希釈しlβとしたクロム酸混液の
温度55℃の溶液の中に10分間浸漬し、回路部となる
部分を選択的に化学粗化して、水洗、中和した。The insulating plate with the resist formed was treated with 55g of CrOz and 210nl of 4-sulfuric acid! It was immersed for 10 minutes in a solution of a chromic acid mixture diluted with water to give lβ at a temperature of 55° C., to selectively chemically roughen the portion that would become the circuit portion, and then washed with water and neutralized.
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20μmの銅めっきを析出させた後、スル
ーホール以外の基板表面にソルダレジストをスクリーン
印刷法によって印刷塗布し加熱硬化して試験用配線板と
した。Next, after washing with water, CC-4 was applied as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing a copper plating of about 20 μm, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to obtain a test wiring board.
比較例2
以下のように、実施例2において、無電解銅めっきのみ
を行った。Comparative Example 2 As described below, in Example 2, only electroless copper plating was performed.
塩化パラジウムを含有するガラス布エポキシ樹脂積層板
LE−168(日立化成工業株式会社、商品名)に実施
例1で使用した接着剤を塗布し、加熱硬化して絶縁基板
とした。The adhesive used in Example 1 was applied to a glass cloth epoxy resin laminate LE-168 (trade name, Hitachi Chemical Co., Ltd.) containing palladium chloride and cured by heating to obtain an insulating substrate.
この後、高速ドリルマシンにより所定の位置に穴あけし
たものに、無電解めっき用フォトレジストフィルレムで
あるフォテック5R−3000(日立化成工業株式会社
、商品名)を真空ラミネータでラミネートし、露光・現
像して回路とならない部分にレジストを形成した。After that, a hole was drilled at a predetermined position using a high-speed drill machine, and Photec 5R-3000 (trade name, Hitachi Chemical Co., Ltd.), which is a photoresist film for electroless plating, was laminated with a vacuum laminator, and exposed and developed. Then, a resist was formed on the parts that would not form a circuit.
レジストを形成した絶縁板を、CrOz55gと濃硫酸
210m1とを水で希釈し11としたクロム酸混液の温
度55℃の溶液の中に10分間浸漬し、回路部となる部
分を選択的に化学粗化して、水洗、中和した。The insulating plate on which the resist was formed was immersed for 10 minutes in a solution of chromic acid mixture (11) made by diluting 55 g of CrOz and 210 ml of concentrated sulfuric acid with water at a temperature of 55°C to selectively chemically roughen the parts that would become the circuit parts. It was washed with water and neutralized.
次いで、水洗した後に、無電解めっき液としてCC−4
1めっき液(日立化成工業株式会社、商品名)に70℃
で浸漬し、約20μmの銅めっきを析出させた後、スル
ーホール以外の基板表面にソルダレジストをスクリーン
印刷法によって印刷塗布し加熱硬化して試験用配線板と
した。Next, after washing with water, CC-4 was applied as an electroless plating solution.
1 Plating solution (Hitachi Chemical Co., Ltd., trade name) at 70℃
After depositing a copper plating of about 20 μm, a solder resist was applied by screen printing to the surface of the substrate other than the through holes and cured by heating to obtain a test wiring board.
また、実施例、比較例ともに、導体幅と間隔が共に0.
11■で、スルーホール径0.6tm、スルーホール数
約200穴とし、スルーホールを介して交互に絶縁基板
の両面にスルーホールを接続する導体パターンを有する
電食評価用パターンを用いた。Further, in both the example and the comparative example, the conductor width and interval are both 0.
In No. 11, an electrolytic corrosion evaluation pattern was used, which had a through-hole diameter of 0.6 tm, approximately 200 through-holes, and a conductor pattern that alternately connected the through-holes to both sides of the insulating substrate via the through-holes.
電食評価の試験は、多数の試験片において、これを促進
して行うため、65℃/90%の加温加湿下で、導体間
に直流50Vを印加して連続的に通電し一定時間毎に取
り出して、導体間の絶縁抵抗値を測定し、また、スルー
ホールの断面を観察してデンドライト発生の有無調べた
。その結果を、以下の第1表に示す。In order to accelerate the electrolytic corrosion evaluation test on a large number of test pieces, under heating and humidification at 65°C/90%, 50 V DC was applied between the conductors and the current was applied continuously at regular intervals for a certain period of time. The insulation resistance value between the conductors was measured, and the cross section of the through hole was observed to check for the occurrence of dendrites. The results are shown in Table 1 below.
また、同時に配線板に必要とされるはんだ耐熱性、引き
剥がし強度を、JIS−C−6481に準拠して測定し
た。その結果も、第1表に示す。At the same time, the solder heat resistance and peel strength required for the wiring board were measured in accordance with JIS-C-6481. The results are also shown in Table 1.
これらの結果から分かるように、本実施例の効果として
、配線板に要求される他の特性を損なう ゛ことなく
、絶縁基板表面における電食による絶縁劣化の抑制に優
れ、また、スルーホール間の電食にも改善が見られた。As can be seen from these results, the effects of this example are that it is excellent in suppressing insulation deterioration due to electrolytic corrosion on the surface of an insulating substrate, without impairing other properties required for wiring boards, and that Improvement was also seen in electrolytic corrosion.
第1表 (発明の効果)Table 1 (Effect of the invention)
Claims (1)
っき用触媒を含む接着剤層を形成する。 b.スルーホールとなる穴をあける。 c.スルーホールと回路部となるべき部分以外の箇所に
無電解めっき用レジストを形成する。 d.化学粗化液に浸漬し、無電解めっき用レジストが形
成されていない箇所の表面を選択的に粗化する。 e.無電解めっき用レジストが形成されていない箇所に
第1の金属層として、無電解ニッケル合金、無電解コバ
ルト合金、無電解パラジウム又は無電解金のうちの1種
又は2種以上の組み合わせによる層を形成する。 f.無電解銅めっき液に浸漬し、第1の金属層の上に銅
めっき層を形成する。1. A method for manufacturing a wiring board comprising the steps shown below. a. An adhesive layer containing a catalyst for electroless plating is formed on the surface of an insulating substrate containing a catalyst for electroless plating. b. Drill a hole that will become a through hole. c. A resist for electroless plating is formed in areas other than the through holes and the portions that will become circuit parts. d. It is immersed in a chemical roughening solution to selectively roughen the surface where the electroless plating resist is not formed. e. As the first metal layer, a layer made of one or a combination of two or more of electroless nickel alloy, electroless cobalt alloy, electroless palladium, or electroless gold is applied to the area where the electroless plating resist is not formed. Form. f. A copper plating layer is formed on the first metal layer by immersing it in an electroless copper plating solution.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63078383A JPH01251784A (en) | 1988-03-31 | 1988-03-31 | Manufacture of wiring board |
EP89302794A EP0335565B1 (en) | 1988-03-28 | 1989-03-21 | Process for producing printed wiring board |
DE68916085T DE68916085T2 (en) | 1988-03-28 | 1989-03-21 | Process for the production of printed circuit boards. |
KR1019890003938A KR920002276B1 (en) | 1988-03-28 | 1989-03-28 | Manufacture of printed wiring board |
US07/970,925 US5309632A (en) | 1988-03-28 | 1992-11-02 | Process for producing printed wiring board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63078383A JPH01251784A (en) | 1988-03-31 | 1988-03-31 | Manufacture of wiring board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01251784A true JPH01251784A (en) | 1989-10-06 |
Family
ID=13660491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63078383A Pending JPH01251784A (en) | 1988-03-28 | 1988-03-31 | Manufacture of wiring board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01251784A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59158587A (en) * | 1983-02-26 | 1984-09-08 | 日立コンデンサ株式会社 | Method of producing printed circuit board |
JPS60124891A (en) * | 1983-12-09 | 1985-07-03 | セイコーエプソン株式会社 | Method of producing printed circuit board |
-
1988
- 1988-03-31 JP JP63078383A patent/JPH01251784A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59158587A (en) * | 1983-02-26 | 1984-09-08 | 日立コンデンサ株式会社 | Method of producing printed circuit board |
JPS60124891A (en) * | 1983-12-09 | 1985-07-03 | セイコーエプソン株式会社 | Method of producing printed circuit board |
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