JPH01249660A - Silicon carbide-based sheet and its production - Google Patents
Silicon carbide-based sheet and its productionInfo
- Publication number
- JPH01249660A JPH01249660A JP63076499A JP7649988A JPH01249660A JP H01249660 A JPH01249660 A JP H01249660A JP 63076499 A JP63076499 A JP 63076499A JP 7649988 A JP7649988 A JP 7649988A JP H01249660 A JPH01249660 A JP H01249660A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- silicon carbide
- mol
- polymer
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 18
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 15
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 15
- 239000002344 surface layer Substances 0.000 claims abstract description 10
- 239000000203 mixture Substances 0.000 claims abstract description 6
- 229920001577 copolymer Polymers 0.000 claims abstract description 5
- 239000011261 inert gas Substances 0.000 claims abstract description 4
- 229920001558 organosilicon polymer Polymers 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims 1
- 229920003257 polycarbosilane Polymers 0.000 claims 1
- 229920000642 polymer Polymers 0.000 abstract description 8
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000001354 calcination Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 239000000835 fiber Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- PVNIQBQSYATKKL-UHFFFAOYSA-N Glycerol trihexadecanoate Natural products CCCCCCCCCCCCCCCC(=O)OCC(OC(=O)CCCCCCCCCCCCCCC)COC(=O)CCCCCCCCCCCCCCC PVNIQBQSYATKKL-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 229920003203 poly(dimethylsilylene-co-phenylmethyl- silylene) polymer Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- -1 polyoxymethylene Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は面発熱体とりで好適な高温ｍ酸化性（こすぐれ
た新規な炭化珪素系シート及びそのＶ造法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a novel silicon carbide sheet with excellent high-temperature oxidation properties suitable for surface heating elements, and a method for manufacturing the same.
［従来技術］
従来、炭化珪素の繊維やシートに通電し発熱体として使
用覆ることは公知であり、例えば特公昭５７−３８５４
８号公報、特公昭６Ｏ−２８７ｆｌ１号公報、特公ｌ１
１６１−２５２０１号公報等に記載されている。[Prior Art] It has been known that silicon carbide fibers or sheets are electrically energized and used as a heating element, for example, in Japanese Patent Publication No. 57-3854.
Publication No. 8, Special Publication No. 6O-287fl1, Special Publication No. 11
It is described in JP 161-25201 and the like.
純粋の炭化珪素は電気不導体であるが、炭素等の不純物
を含むことによって導電１４を示し、通電によつで発熱
づ−るため、炭化珪素のシートや繊維はニクロム線より
高温に耐える発熱体の累月として注目されている。Pure silicon carbide is an electrical nonconductor, but when it contains impurities such as carbon, it becomes conductive and generates heat when energized, so silicon carbide sheets and fibers can withstand higher temperatures than nichrome wire. It is attracting attention as a cumulative moon of the body.
しかし、従来の炭化珪素系シートは、約１０００℃以上
の温度まで′発熱覆るとシート中に含まれる炭素が酸化
され、劣化するという問題がある。However, conventional silicon carbide sheets have a problem in that when they are heated to a temperature of about 1000° C. or higher, the carbon contained in the sheets is oxidized and deteriorated.
［発明が解決しようどする課題］
本発明は、１ｏｏｏ−１２００℃程度に長時間発熱さけ
ても劣化が生じない炭化珪素系シー［へを提供しようと
することを１］的とするものである。[Problems to be Solved by the Invention] An object of the present invention is to provide a silicon carbide-based sheet that does not deteriorate even if it is exposed to heat for a long time at about 100-1200°C. .
［課題を解決するための手段］
本発明者らは、上記の目的を達成すべく鋭意研究の結果
、炭化珪素系シートにおける表層部の二酸化珪素含有量
を高くし、中心部は逆に炭素含有率を高くした一種の多
層構造とすることによって、高温で長時間発熱さけても
劣化の問題を生じない炭化珪素系シートが得られること
を見い出し、本発明に到達したものである。[Means for Solving the Problem] As a result of intensive research to achieve the above object, the present inventors increased the silicon dioxide content in the surface layer of a silicon carbide sheet, and conversely increased the silicon dioxide content in the central portion. The present invention was achieved based on the discovery that by forming a type of multilayer structure with a high ratio, it is possible to obtain a silicon carbide sheet that does not suffer from deterioration even when exposed to heat at high temperatures for a long period of time.
すなわち、本発明の１つは、主として炭化珪素からなる
厚さ５０μｍ−３ｍｍのシートであって、その表面から
０．１μｍ、以内の表層部におりる二酸化珪素含有率が
５０モル％以上（好ましくは６０〜８０モル％）炭素含
有率２０モル％以下であり、かつ表面から０，２１１ｍ
以上内側の部分く中心部）にお（プる二酸化珪素含有率
が４０モル％以下（好ましくは３０モル％以下）炭素含
有率３０モル％以」−であることを特徴どづ−る新規な
炭化珪素系シートに係るものである。That is, one aspect of the present invention is a sheet mainly made of silicon carbide with a thickness of 50 μm to 3 mm, and the silicon dioxide content in the surface layer within 0.1 μm from the surface is 50 mol% or more (preferably (60 to 80 mol%) carbon content is 20 mol% or less, and 0,211 m from the surface
A new invention characterized by having a silicon dioxide content of 40 mol % or less (preferably 30 mol % or less) and a carbon content of 30 mol % or more in the inner part (center part). This relates to silicon carbide sheets.
また、本発明の今１つは、上記シートを製造する方法で
あり、有機珪素ポリマ一又は有機珪素系ポリマーと炭化
珪素微粉末の混合物をシート状に成形し、該シートを酸
素含有雰囲気中で１〜ｂ／分の昇温速度で１００〜２５
０℃まで加熱し、かつ最終温度に３０分〜５時間保持し
た後、不活性ガス雰囲気中で焼成することを特徴どする
方法に係るものである。Another aspect of the present invention is a method for producing the sheet, in which an organic silicon polymer or a mixture of an organic silicon polymer and a fine silicon carbide powder is formed into a sheet, and the sheet is placed in an oxygen-containing atmosphere. 100-25 at a heating rate of 1-b/min
This method is characterized by heating to 0° C., maintaining the final temperature for 30 minutes to 5 hours, and then firing in an inert gas atmosphere.
本発明のシートは、炭化珪素のほかに炭素、二酸化珪素
等を含有する焼成体からなるシート状又はフィルム状の
ものである。The sheet of the present invention is a sheet or film made of a fired body containing carbon, silicon dioxide, etc. in addition to silicon carbide.
本発明のシートの厚さは５０ｆ１ｍ〜３ ｍｍで゛あり
、この稈度の厚さのものは可撓性があり、かつコンバク
１〜な面発熱体を構成し得るので好ましい。The thickness of the sheet of the present invention is 50 fl m to 3 mm, and a sheet having this thickness is preferable because it is flexible and can constitute a compact surface heating element.
該シートは表層部、すなわち、シート表面から０．１μ
ｍ以内の部分におりる二酸化珪素
（Ｓｉ ○２）含有率が他の部分より高く、５０モル％
以上、好ましくは１０〜８０モル％の範囲内にあり、且
つ炭素含有率が仙の部分より低く、２０モル％以下であ
る。The sheet has a surface layer, that is, 0.1μ from the sheet surface.
The silicon dioxide (Si ○2) content in the part within m is higher than other parts, 50 mol%
The carbon content is preferably within the range of 10 to 80 mol%, and the carbon content is lower than that of the central portion, and is 20 mol% or less.
このように表層部の二酸化珪素含有率を高くし、炭素含
有率を低くすることによって、表層部の通電性は悪化す
るが高温時の安定性がすぐれたものとなる。一方、該シ
ートの中心部、即ち表面から０．２μｍ以上離れた内側
の部分は二酸化珪素含有率が４０モル％以下、好ましく
は３０モル％以下、で且つ炭素含有率３０モル％以上と
することによって通電性が良好となり発熱性が向上する
。In this way, by increasing the silicon dioxide content and lowering the carbon content in the surface layer, the electrical conductivity of the surface layer deteriorates, but stability at high temperatures is improved. On the other hand, the center part of the sheet, that is, the inner part that is 0.2 μm or more away from the surface, has a silicon dioxide content of 40 mol% or less, preferably 30 mol% or less, and a carbon content of 30 mol% or more. This results in good conductivity and improved heat generation.
ここで、シート各部の炭素、二酸化珪素等の含有率はオ
ージェ電子分光法（八ＥＳ）によって測定される。Here, the content of carbon, silicon dioxide, etc. in each part of the sheet is measured by Auger electron spectroscopy (8ES).
第１図及び第２図は」ニ述の方法で測定した炭化珪素シ
ートの各部の炭素（Ｃ）、二酸化珪素（Ｓ！ ０２）、
炭化珪素（ＳｉＣ）等の含有率を示すグラフである。図
より、本発明のシートは、二酸化珪素の含有率が表層部
は高く中心部に向つて急激に減少するのに対し、炭素含
有率はこの逆の傾向を示すことが判る。Figures 1 and 2 show carbon (C), silicon dioxide (S! 02), and
It is a graph showing the content rate of silicon carbide (SiC) and the like. From the figure, it can be seen that in the sheet of the present invention, the silicon dioxide content is high in the surface layer and rapidly decreases toward the center, while the carbon content shows the opposite tendency.
このようなシートは、導電性が固有抵抗にして１０１〜
１０−２Ω／ ｃｍにあり、通電によって約８００〜１
２００℃に発熱させることができる。Such a sheet has a conductivity of 101 to 100% in specific resistance.
It is 10-2Ω/cm, and it is about 800 to 1 by energizing.
It can generate heat to 200°C.
次に、本発明の炭化珪素系シートの製造法を説明する。Next, a method for manufacturing a silicon carbide sheet of the present invention will be explained.
主たる原料としては、有機珪素ポリマーが用いられる。An organic silicon polymer is used as the main raw material.
有機珪素ポリマーとしては、炭化珪素前駆体として公知
の各種ポリマーを用いることができ、例えば、ポリカフ
レボシラン、ポリシラスチレン、ボリノＪルボシラスチ
レン共重合体等があげられる。As the organosilicon polymer, various polymers known as silicon carbide precursors can be used, such as polycafflebosilane, polysilastyrene, borino J rubosilastyrene copolymer, and the like.
なかでも欧州特許公開第０２１２４８５号に記載のノＪ
ルボシラン結合とシラスチレン結合との共重合比（°シ
ル比）が７／３〜３／７の範囲内にあり、且つ平均分子
量が１０００以上のポリカルボシラスチレン共重合体が
好ましい。Among them, No. J described in European Patent Publication No. 0212485
A polycarbosilastyrene copolymer having a copolymerization ratio of rubosilane bonds and silastyrene bonds (°sil ratio) in the range of 7/3 to 3/7 and an average molecular weight of 1000 or more is preferred.
シート化の方法としては、有機珪素ポリマーを溶融しス
リン１〜から押出してシーｈ状どする方法。A method for forming a sheet is to melt an organic silicon polymer and extrude it from Surin 1 to form a sheet.
有機■１−索ボリマーを溶媒に溶解した溶液を流延して
シーＩ〜化する方法、有機珪素ポリマーの粉末にポリビ
ニルブヂラール、ポリビニルアルコール。Organic 1-Method of casting a solution in which a polymer is dissolved in a solvent to form a sheet I~, an organosilicon polymer powder, polyvinyl butyral, and polyvinyl alcohol.
カルボギシメチルセルロース、ポリオキシメヂレン等の
成形助剤や高級脂肪酸くステアリン酸、パルミチンＷＩ
ｊ、Ｗ）の分散剤を加えドクターブレードによりシート
化する方法等が採用できる。Molding aids such as carboxymethylcellulose and polyoxymethylene, higher fatty acids, stearic acid, and palmitin WI
A method such as adding a dispersant (J, W) and forming a sheet using a doctor blade can be adopted.
シート化に際し、有ｌｉｔ ＴＪ素ポリマーを炭化珪素
微粉末とポリマーの合計重量当り１０重量％以上の混合
物を用いてもよい。又、アルミルナ０．１〜１重量％添
加してもよく、炭素粉末を０．１〜３重間％添加しても
よい。When forming the sheet, a mixture of the lit TJ polymer may be used in an amount of 10% by weight or more based on the total weight of the silicon carbide fine powder and the polymer. Further, 0.1 to 1% by weight of alumina may be added, and 0.1 to 3% by weight of carbon powder may be added.
本発明の新規な炭化珪素系シートを製造する一トで特に
重要なことは、従来公知の条件とは相違する特殊な多件
で不融化Ｊ−ることである。What is particularly important in producing the novel silicon carbide sheet of the present invention is to make it infusible under special conditions different from conventionally known conditions.
すなわち、成型したシートを、空気等の酸素含有雰囲気
中において、１〜５℃／分の昇温速度で１００〜２５０
℃まで加熱し、かつ最終温度に３０分〜５時間保持する
ことにより不融化する。That is, the molded sheet is heated to 100 to 250°C at a heating rate of 1 to 5°C/min in an oxygen-containing atmosphere such as air.
It is infusible by heating to 0.degree. C. and holding at the final temperature for 30 minutes to 5 hours.
不融化雰囲気は通常の空気でもよいが、オゾン含有空気
でもよい。かかる条件での不融化によりシーｌ−の表層
部にのみ酸素が多損に取込まれ、シートの表層部と中心
部との間の酸素ａ度に顕著な差が生ずる。The infusible atmosphere may be normal air, but may also be ozone-containing air. Due to infusibility under such conditions, a large amount of oxygen is taken in only in the surface layer of the sheet, resulting in a significant difference in oxygen a degree between the surface layer and the center of the sheet.
このような条件で不融化したシートは、次いで、公知の
条件、すなわち不活性ガス雰囲気中で ８００−１５０
０℃に徐々に昇温して所定温度に約１〜３時間保持した
のち徐々に降温する方法で焼成することにより、炭化珪
素を主体どする本発明シートどなる。The sheet made infusible under these conditions is then heated under known conditions, ie, in an inert gas atmosphere, at a temperature of 800-150
The sheet of the present invention, which is mainly composed of silicon carbide, is produced by gradually raising the temperature to 0° C., holding the temperature at a predetermined temperature for about 1 to 3 hours, and then firing the sheet by gradually lowering the temperature.
［発明の効果］ 本発明のシートは、上述の如き構造を有するため、 ■ 比較的低電圧で赤熱化する。[Effect of the invention] Since the sheet of the present invention has the structure as described above, ■ Becomes red hot at relatively low voltage.
■ 耐酸化性が良好なため高温で長時間安定に使用でき
る。■ Good oxidation resistance allows stable use at high temperatures for long periods of time.
■ フィルムにしたものは機械的物性が良好で３５に９
／ ｍＡに達する。■ The film has good mechanical properties, with a score of 35 to 9.
/ mA is reached.
へとの効果を有し、発熱体の素材どじ−Ｃぎわめで有用
である。It has a relaxing effect and is very useful as a heating element material.
［実施例コ
次に、本発明の実施例をあげるが、本発明はこれににり
限定されるものではない。[Examples] Next, examples of the present invention will be described, but the present invention is not limited thereto.
実施例１
有機珪素ポリマーとしてメトシー軟化点２２０℃のポリ
ｈルボシラスヂレン共重合体を用いて、２２０℃て・押
出してフィルム状とした。これを空気中ｒ１２０’ｃｒ
３時間、１５０℃７” ３時間、 ｉｇｏ’ｃ テ３
時間、２３０℃で１時間不融化しＩＣ０゛これを、窒素
ガス中で室温〜５００℃まで１℃／分、５００°〜８０
０’Ｃ２℃／分、８００℃で３時間保持、８００〜１０
００℃まで２℃／分、 １０００〜１３００’Ｃ３℃／
分、 １３００℃３時間保持し、５℃／分で室温まで降
温した。Example 1 A polyh-rubocilasdyrene copolymer having a methoxy softening point of 220°C was used as an organosilicon polymer and extruded at 220°C to form a film. R120'cr of this in air
3 hours, 150℃ 7” 3 hours, igo'c te 3
Infusible at 230°C for 1 hour and IC0
0'C2℃/min, held at 800℃ for 3 hours, 800-10
2℃/min up to 00℃, 1000~1300'C3℃/
The temperature was maintained at 1300°C for 3 hours, and the temperature was lowered to room temperature at a rate of 5°C/min.
得られ７ｊシートをオージェ電子分光法で測定した結果
第１図及び第２図に示づ−通りであった。The obtained 7j sheet was measured by Auger electron spectroscopy, and the results were as shown in FIGS. 1 and 2.
このシートは空気中で１２００℃に加熱しても劣化が生
じることがなく、耐熱性がすぐれている事実が確認され
た。This sheet did not deteriorate even when heated to 1200° C. in air, confirming the fact that it has excellent heat resistance.
第１図及び第２図は、それぞれ本発明に係る炭化珪素系
シートをオージェ電子分光法（ＡＥＳ＞によって解析し
、シートの表面イ」近の組成割合（Ｃ，Ｓｉ ０２ 、
Ｓｉ Ｃの含有率）を測定した結果を示すグラフである
。
特許出願人 帝 人 株 式 会 礼FIGS. 1 and 2 show the composition ratios (C, Si 02 , Si 02 ,
2 is a graph showing the results of measuring the Si C content. Patent applicant Teijin Ltd.
Claims (3)
のシートであって、その表面から０．１μｍ以内の表層
部における二酸化珪素含有率が５０モル％以上、好まし
くは６０〜８０モル％、炭素含有率が２０モル％以下で
あり、かつ表面から０．２μｍ以上内側の部分（中心部
）における二酸化珪素含有率が４０モル％以下、好まし
くは３０モル％以下、炭素含有率が３０モル％以上であ
ることを特徴とする炭化珪素系シート。(1) Mainly made of silicon carbide with a thickness of 50 μm to 3 mm
The sheet has a silicon dioxide content of 50 mol% or more, preferably 60 to 80 mol%, and a carbon content of 20 mol% or less in the surface layer within 0.1 μm from the surface, and has a carbon content of 20 mol% or less. . A silicon carbide sheet characterized by having a silicon dioxide content of 40 mol % or less, preferably 30 mol % or less, and a carbon content of 30 mol % or more in the inner part (center) of 2 μm or more.
素微粉末との混合物をシート状に成形し、該シートを酸
素含有雰囲気中で１〜５℃／分の昇温速度で１００〜２
５０℃まで加熱し、かつ最終温度に３０分〜５時間保持
した後、不活性ガス雰囲気中で焼成することを特徴とす
る請求項（１）記載の炭化珪素系シートの製造法。(2) Form an organosilicon polymer or a mixture of an organosilicon polymer and a fine silicon carbide powder into a sheet, and heat the sheet at a heating rate of 1 to 5 °C/min in an oxygen-containing atmosphere to 100 to 200 °C.
2. The method for producing a silicon carbide sheet according to claim 1, wherein the sheet is heated to 50[deg.] C., maintained at the final temperature for 30 minutes to 5 hours, and then fired in an inert gas atmosphere.
重合体である請求項（２）記載の炭化珪素系シートの製
造法。(3) The method for producing a silicon carbide sheet according to claim (2), wherein the organosilicon polymer is a polycarbosilane styrene copolymer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63076499A JPH01249660A (en) | 1988-03-31 | 1988-03-31 | Silicon carbide-based sheet and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63076499A JPH01249660A (en) | 1988-03-31 | 1988-03-31 | Silicon carbide-based sheet and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01249660A true JPH01249660A (en) | 1989-10-04 |
Family
ID=13606918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63076499A Pending JPH01249660A (en) | 1988-03-31 | 1988-03-31 | Silicon carbide-based sheet and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01249660A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03183612A (en) * | 1989-12-08 | 1991-08-09 | Showa Denko Kk | Silicon carbide sheet and production thereof |
-
1988
- 1988-03-31 JP JP63076499A patent/JPH01249660A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03183612A (en) * | 1989-12-08 | 1991-08-09 | Showa Denko Kk | Silicon carbide sheet and production thereof |
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