JPH01243352A - X-ray microanalyzer - Google Patents

Abstract

PURPOSE:To perform the analysis based on the characteristic X-ray data in the specified region and display the date together with obtained averaged processing results for individual elements by dividedly displaying maps on picture scopes for individual elements and specifying the region of one picture scope among the dividedly displayed picture scopes. CONSTITUTION:The surface of a sample 1 is divided into many picture elements, an electron beam 2 is radiated to individual picture elements in sequence to generate characteristic Z-rays 3 inherent to the elements contained in the sample 1. The X-rays 3 are separated by spectral crystals 4a-4f for each element and converged to X-ray detectors 5a-5f, the X-ray intensity is digitized by a counting section 6 in sequence, the data are stored in memories 7a-7f in the picture element unit for each element. Two-dimensional map data are formed by the memories 7a-7f, the map data region-specified by a region specifying section 9 are read out by a readout circuit 8, the read-out characteristic X-ray intensity value data are sent to an image forming section 10. Maps for each element are arranged in small picture scopes divided for the number of elements based on the intensity value data by this image forming section 10 to constitute the divided display data.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an X-ray microanalyzer, and more particularly to an apparatus for displaying analytical data through images.

[Prior Art] Conventionally, there has been known an apparatus that creates a two-dimensional map on a sample surface and displays the image based on characteristic X-ray data collected during surface analysis of a sample using an X-ray microanalyzer or the like.

This device creates two-dimensional map data on the sample surface for each element based on data obtained by separately detecting multiple characteristic X-rays generated from multiple types of elements contained at the electron beam irradiation point on the sample. As shown in FIG. 5(a), maps of multiple elements are displayed in a superimposed manner on one screen.

[Problems to be Solved by the Invention] However, when performing average analysis by specifying a region in such an image display device, it is necessary to select data of one element of interest from the created map data, and It was only possible to display a map of the selected elements as an image as shown in FIG. 5(b) and perform an average analysis on the selected and displayed components. Therefore, when performing an average analysis across all elements, the map of the collected elements must be sequentially displayed on the screen to proceed with the analysis, which has been problematic in that it takes time and effort to operate.

SUMMARY OF THE INVENTION The present invention takes the above-mentioned problems into consideration and aims to provide an apparatus that can simultaneously perform average analysis of a designated area for each component.

[Means for Solving the Problems] The present invention analyzes two-dimensional images on the sample surface based on data obtained by separately detecting a plurality of characteristic X-rays generated from a plurality of types of elements contained in the sample. In an X-ray microanalyzer equipped with an image display device that creates and stores map data on the element side and displays the map on the screen, means for displaying the map on the element side in a divided screen; means for specifying an area for any one screen within the screen divided and displayed by the means; means for reading data included in the area specified by the specifying means from each map data on the element side; The present invention is characterized in that it includes a processing means for performing element-side averaging processing based on intra-region data, and a display means for displaying the obtained element-side averaging processing results.

[Function] The present invention provides means for displaying a two-dimensional map created for each component in a sample on a divided screen, and for specifying an area for any one of the divided screens. When a region is designated for any one of the split screens, an average analysis is performed based on the characteristic X-ray data within the designated region, and Also, an average analysis of the area corresponding to the designated area is performed and the analysis results are displayed.

[Example] Hereinafter, an example of the present invention will be described based on the drawings. 1st
The figure is an apparatus configuration diagram for explaining one embodiment of the present invention, and FIGS. 2 and 3 are diagrams for explaining the present invention in detail.

In FIG. 1, 1 is a sample, 2 is an electron beam, 3 is an X-ray, 4 is a spectroscopic crystal, 5 is an X-ray detector, 6 is a counter, 7 is a memory for storing 71) J constant data for each component, 8 is a readout circuit, 9 is a readout area specifying section, 10 is an image composition section, 11 is an area display section, 12 is an image composition section, 13 is a CRT, 14 is an average value calculation section, and 15 is a display section.

When the surface of a sample 1 is divided into a large number of pixels and these pixels are sequentially irradiated with an electron beam 2, characteristic X-rays 3 unique to the elements contained in the sample are generated from each pixel. The X-rays are separated into elements (by wavelength) by spectroscopic crystals 48-4f, and then focused on X-ray detectors 5a-5f. Detection signals obtained pixel by pixel from the X-ray detector to the element side are sequentially sent to the counter 6, which converts the X-ray intensity into n-values and stores them in memories 7a to 7f as characteristic X-ray intensity value data. Store on the element side in pixel units. Therefore, two-dimensional map data composed of characteristic X-ray intensity value data is formed in the memory. The map data in the memory 7 is read out by the readout circuit 8.
The reading circuit 8 is read out by the area specifying section 9.
The characteristic X-ray intensity value data of a desired portion within the map data specified by is read out, and the read characteristic X-ray intensity value data is sent to the image composition section 10. The image construction unit 10 creates a map on the element side based on the characteristic X-ray intensity value data of the read area, and arranges the map on the element side in a small screen in which one screen is divided into the number of elements, and divides the map. Configure display data. The divided display data is displayed on the CRT 13 via the image composition section 12. For example, when a desired portion of data in the map data in the memories 7a to 7f is read, the image forming section 10 forms a screen divided into six screens as shown in FIG. 2 and displays it on the CRT 13. In FIG. 2, the hatched areas shown in each small screen indicate areas where elements are distributed.

Here, one screen on which the distribution of the element of interest is displayed, for example, a point P (x) on the screen in the upper center of FIG.

y) by the position specifying unit 9, as shown in FIG. 3 (partially enlarged view), the area around the pixel of the specified point P(x, y), for example, 5 pixels x 5 pixels, is Frame data indicating the area is formed by the area display unit 11, and the frame image is displayed superimposed on the map image by the image synthesis unit 12, and the characteristic X-ray intensity value within the 5 pixel x 5 pixel area is displayed. Data is read from memory 7b. At the same time, as shown in FIG. 4, pixels in the same area indicated by broken lines in other divided small screens are specified,
The characteristic X-ray intensity value data of the corresponding area is stored in memories 7a and 7c.
, 7d, 7e, and 7f, respectively. The read characteristic X-ray intensity value data is supplied to the average value calculation unit 14,
The average intensity and concentration for each element are calculated based on the characteristic X-ray intensity value data. Then, the calculation results in the calculation section are sent to a display device 15 such as a printer and displayed.

[Effects of the Invention] As is clear from the above description, according to the present invention, a two-dimensional map created for each element in a sample is displayed on a divided screen, and one of the divided screens is displayed. A means for specifying an area is provided, and when an area is specified for any one of the divided screens by the means, an average is calculated based on the characteristic X-ray data within the specified area. At the same time as performing the analysis, the average analysis of the area corresponding to the area in the specified screen is also performed on the other divided screens, and the analysis results are displayed. By simply specifying the region of the element that is most interesting while comparing the map images that have been created, average analysis of the same region for other elements can be performed at the same time.

[Brief explanation of the drawing]

FIG. 1 is an apparatus configuration diagram for explaining an embodiment of the present invention, FIGS. 2, 3, and 4 are diagrams for explaining the present invention in detail, and FIG. 5 is a diagram for explaining a conventional example. This is a diagram for 5: X-ray detector 6: Counting section 7 memory
8: Readout circuit 9: Readout area designation section
10: Image composition section 11: Area display section 12: Image composition section 13: CRT 14 Average value calculation section 15: Display section Patent applicant: JEOL Ltd.

Claims (1)

[Claims] Two-dimensional map data on the sample surface is created and stored for each element based on data obtained by separately detecting multiple characteristic X-rays generated from multiple types of elements contained in the sample, and the map is In an X-ray microanalyzer equipped with an image display device configured to display images on a screen, a means for displaying a map divided into screens for each element, and a method for displaying a map on any one of the screens divided by the split display means. means for specifying an area by the element, means for reading out data included in the area specified by the specifying means from each map data for each element, and processing for performing averaging processing for each element based on the read data in the area. and a display means for displaying the obtained averaging processing results for each element.
line microanalyzer.