JPH0124289B2 - - Google Patents
Info
- Publication number
- JPH0124289B2 JPH0124289B2 JP14323979A JP14323979A JPH0124289B2 JP H0124289 B2 JPH0124289 B2 JP H0124289B2 JP 14323979 A JP14323979 A JP 14323979A JP 14323979 A JP14323979 A JP 14323979A JP H0124289 B2 JPH0124289 B2 JP H0124289B2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- polymer
- norbornene
- photosensitive resin
- resin composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920000642 polymer Polymers 0.000 claims description 28
- 239000011342 resin composition Substances 0.000 claims description 14
- 125000001424 substituent group Chemical group 0.000 claims description 7
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 6
- 150000002148 esters Chemical class 0.000 claims description 5
- 150000002825 nitriles Chemical class 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 10
- 238000007142 ring opening reaction Methods 0.000 description 10
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 125000003518 norbornenyl group Chemical class C12(C=CC(CC1)C2)* 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- RMAZRAQKPTXZNL-UHFFFAOYSA-N methyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical group C1C2C(C(=O)OC)CC1C=C2 RMAZRAQKPTXZNL-UHFFFAOYSA-N 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 229920006295 polythiol Polymers 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 4
- BMAXQTDMWYDIJX-UHFFFAOYSA-N bicyclo[2.2.1]hept-2-ene-5-carbonitrile Chemical group C1C2C(C#N)CC1C=C2 BMAXQTDMWYDIJX-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- -1 acetal compounds Chemical class 0.000 description 3
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 3
- FYGUSUBEMUKACF-UHFFFAOYSA-N bicyclo[2.2.1]hept-2-ene-5-carboxylic acid Chemical group C1C2C(C(=O)O)CC1C=C2 FYGUSUBEMUKACF-UHFFFAOYSA-N 0.000 description 3
- 239000003431 cross linking reagent Substances 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 238000000016 photochemical curing Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- VUIMBZIZZFSQEE-UHFFFAOYSA-N 1-(1h-indol-3-yl)ethanone Chemical compound C1=CC=C2C(C(=O)C)=CNC2=C1 VUIMBZIZZFSQEE-UHFFFAOYSA-N 0.000 description 2
- PMNLUUOXGOOLSP-UHFFFAOYSA-N 2-mercaptopropanoic acid Chemical compound CC(S)C(O)=O PMNLUUOXGOOLSP-UHFFFAOYSA-N 0.000 description 2
- MZCFNSAAYVFCKY-UHFFFAOYSA-N 4-methylbicyclo[2.2.1]hept-2-ene-5-carboxylic acid Chemical group C1C2CC(C(O)=O)C1(C)C=C2 MZCFNSAAYVFCKY-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- YNLAOSYQHBDIKW-UHFFFAOYSA-M diethylaluminium chloride Chemical compound CC[Al](Cl)CC YNLAOSYQHBDIKW-UHFFFAOYSA-M 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 239000005078 molybdenum compound Substances 0.000 description 2
- 150000002752 molybdenum compounds Chemical class 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 229950011008 tetrachloroethylene Drugs 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- KPGXUAIFQMJJFB-UHFFFAOYSA-H tungsten hexachloride Chemical compound Cl[W](Cl)(Cl)(Cl)(Cl)Cl KPGXUAIFQMJJFB-UHFFFAOYSA-H 0.000 description 2
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 2
- CGCQHMFVCNWSOV-UHFFFAOYSA-N (4-morpholin-4-ylphenyl)-phenylmethanone Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C1=CC=CC=C1 CGCQHMFVCNWSOV-UHFFFAOYSA-N 0.000 description 1
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 1
- DHBXNPKRAUYBTH-UHFFFAOYSA-N 1,1-ethanedithiol Chemical compound CC(S)S DHBXNPKRAUYBTH-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- UIFAWZBYTTXSOG-UHFFFAOYSA-N 1-phenanthren-9-ylethanone Chemical compound C1=CC=C2C(C(=O)C)=CC3=CC=CC=C3C2=C1 UIFAWZBYTTXSOG-UHFFFAOYSA-N 0.000 description 1
- KAJBSGLXSREIHP-UHFFFAOYSA-N 2,2-bis[(2-sulfanylacetyl)oxymethyl]butyl 2-sulfanylacetate Chemical compound SCC(=O)OCC(CC)(COC(=O)CS)COC(=O)CS KAJBSGLXSREIHP-UHFFFAOYSA-N 0.000 description 1
- PSYGHMBJXWRQFD-UHFFFAOYSA-N 2-(2-sulfanylacetyl)oxyethyl 2-sulfanylacetate Chemical compound SCC(=O)OCCOC(=O)CS PSYGHMBJXWRQFD-UHFFFAOYSA-N 0.000 description 1
- CMAOLVNGLTWICC-UHFFFAOYSA-N 2-fluoro-5-methylbenzonitrile Chemical compound CC1=CC=C(F)C(C#N)=C1 CMAOLVNGLTWICC-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- RUDUCNPHDIMQCY-UHFFFAOYSA-N [3-(2-sulfanylacetyl)oxy-2,2-bis[(2-sulfanylacetyl)oxymethyl]propyl] 2-sulfanylacetate Chemical compound SCC(=O)OCC(COC(=O)CS)(COC(=O)CS)COC(=O)CS RUDUCNPHDIMQCY-UHFFFAOYSA-N 0.000 description 1
- VDKDFKRKAPXHBH-UHFFFAOYSA-N [3-(2-sulfanylpropanoyloxy)-2,2-bis(2-sulfanylpropanoyloxymethyl)propyl] 2-sulfanylpropanoate Chemical compound CC(S)C(=O)OCC(COC(=O)C(C)S)(COC(=O)C(C)S)COC(=O)C(C)S VDKDFKRKAPXHBH-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- AFPRJLBZLPBTPZ-UHFFFAOYSA-N acenaphthoquinone Chemical compound C1=CC(C(C2=O)=O)=C3C2=CC=CC3=C1 AFPRJLBZLPBTPZ-UHFFFAOYSA-N 0.000 description 1
- SPEUIVXLLWOEMJ-UHFFFAOYSA-N acetaldehyde dimethyl acetal Natural products COC(C)OC SPEUIVXLLWOEMJ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- HDFRDWFLWVCOGP-UHFFFAOYSA-N carbonothioic O,S-acid Chemical class OC(S)=O HDFRDWFLWVCOGP-UHFFFAOYSA-N 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 229940117389 dichlorobenzene Drugs 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 238000010931 ester hydrolysis Methods 0.000 description 1
- YLQWCDOCJODRMT-UHFFFAOYSA-N fluoren-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C2=C1 YLQWCDOCJODRMT-UHFFFAOYSA-N 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- FUKUFMFMCZIRNT-UHFFFAOYSA-N hydron;methanol;chloride Chemical compound Cl.OC FUKUFMFMCZIRNT-UHFFFAOYSA-N 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- GICWIDZXWJGTCI-UHFFFAOYSA-I molybdenum pentachloride Chemical compound Cl[Mo](Cl)(Cl)(Cl)Cl GICWIDZXWJGTCI-UHFFFAOYSA-I 0.000 description 1
- 150000002899 organoaluminium compounds Chemical class 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
【発明の詳細な説明】
本発明は極性置換基を有するノルボルネン誘導
体の開環重合による重合体を用いた新規感光性樹
脂組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a novel photosensitive resin composition using a polymer obtained by ring-opening polymerization of a norbornene derivative having a polar substituent.
近年感光性樹脂の印刷版、レジスト材への応用
が広く行われ、その需要が増大しているが、それ
と共に感光性樹脂に要求される性能も厳しくなつ
てきている。従来感光性樹脂組成物としてはエチ
レン性二重結合を有するポリマーまたはオリゴマ
ーとポリチオールと光増感剤とよりなる感光性樹
脂組成物が知られている(例えば特公昭46−
29528号、同46−33530号等)。しかしながらこれ
らの感光性樹脂組成物は、光硬化速度が遅く、樹
脂と基板との密着性、光硬化樹脂の耐摩耗性、柔
軟性等で未だ問題点を残している。 BACKGROUND ART In recent years, photosensitive resins have been widely applied to printing plates and resist materials, and the demand for them has increased, but at the same time, the performance required of photosensitive resins has also become stricter. Conventionally, known photosensitive resin compositions include photosensitive resin compositions comprising a polymer or oligomer having an ethylenic double bond, a polythiol, and a photosensitizer (e.g.
No. 29528, No. 46-33530, etc.). However, these photosensitive resin compositions have a slow photocuring speed, and still have problems in the adhesion between the resin and the substrate, the abrasion resistance of the photocured resin, the flexibility, etc.
本発明の目的は硬化速度が速く、従つて光照射
時間が短く、かつ、硬化後の未露光部の洗出しが
簡単で、硬化樹脂の諸性質のすぐれている感光性
樹脂組成物を提供することにある。 An object of the present invention is to provide a photosensitive resin composition that has a fast curing speed, therefore short photoirradiation time, easy cleaning of unexposed areas after curing, and excellent properties of the cured resin. There is a particular thing.
この目的を達成する本発明は一般式
(式中X、Yはそれぞれ水素、エステル、ニトリ
ルまたはカルボキシルより選ばれた置換基を表わ
す。但し、X、Yのうち1つは、エステル、ニト
リルまたはカルボキシルより選ばれた置換基であ
る。)で示される単位を含有する重合体と分子中
に少くとも2個のチオール基を有する化合物とを
含有することを特徴とする感光性樹脂組成物であ
る。 The present invention achieves this objective by the general formula (In the formula, X and Y each represent a substituent selected from hydrogen, ester, nitrile, or carboxyl. However, one of X and Y is a substituent selected from ester, nitrile, or carboxyl.) This is a photosensitive resin composition characterized by containing a polymer containing a unit represented by: and a compound having at least two thiol groups in the molecule.
本発明で用いられる上記重合体はノルボルネン
誘導体の単独重合または共重合によつて作ること
ができる。このようなノルボルネン誘導体は一般
式
で示される化合物で、XおよびYはそれぞれエス
テル、ニトリルまたはカルボキシルより選ばれた
置換基であつて、具体的には
−(CH2)o−COOR、−(CH2)o−OCOR、−(CH2)o
−CN、−(CH2)o−COOH
(n=0〜10、Rは炭素数1〜10のアルキル基で
ある。)を挙げることができる。 The above polymer used in the present invention can be produced by homopolymerization or copolymerization of norbornene derivatives. Such norbornene derivatives have the general formula In the compound represented by, X and Y are each a substituent selected from ester, nitrile, or carboxyl, and specifically, -(CH 2 ) o -COOR, -(CH 2 ) o -OCOR, -( CH2 ) o
-CN, -( CH2 ) o -COOH (n=0 to 10, R is an alkyl group having 1 to 10 carbon atoms).
重合体の製造はタングステンまたはモリブデン
の化合物と有機アルミニウム化合物とからなり、
場合により第3成分を添加した触媒を用いて、有
機溶媒中で常温ないし200℃で上記ノルボルネン
誘導体モノマーを開環重合させて行うことができ
る。 The production of the polymer consists of a tungsten or molybdenum compound and an organoaluminium compound,
This can be carried out by ring-opening polymerization of the norbornene derivative monomer at room temperature to 200° C. in an organic solvent using a catalyst to which a third component is optionally added.
上記タングステンおよびモリブデンの化合物の
代表的なものとしては六塩化タングステン、五塩
化モリブデン、三酸化タングステンがあげられ
る。有機アルミニウム化合物は一般式AlR3また
はAlRoX3-o(ただし、Rはアルキル基またはアリ
ル基であり、Xはハロゲンもしくは水素またはア
ルコキシ基であり、nは1、1.5または2であ
る。)で示されるものであり、代表的なものとし
ては、トリエチルアルミニウム、ジエチルアルミ
ニウムクロライド、エチルアルミニウムセスキク
ロライドがあげられる。また第3成分としては、
水等種のものがあげられるが、中でもn−ブタノ
ールのようなアルコール系化合物、アセトアルデ
ヒドジエチルアセタールのようなアセタール化合
物が好適である。有機溶媒としてはトルエンのよ
うな芳香族炭化水素、クロルベンゼンのようなハ
ロゲン化芳香族炭化水素、トリクロルエチレンの
ようなハロゲン化脂肪族炭化水素が代表例として
あげられる。 Typical examples of the above-mentioned tungsten and molybdenum compounds include tungsten hexachloride, molybdenum pentachloride, and tungsten trioxide. The organoaluminum compound has the general formula AlR 3 or AlR o Typical examples include triethylaluminum, diethylaluminium chloride, and ethylaluminum sesquichloride. In addition, as the third component,
Among them, alcohol compounds such as n-butanol and acetal compounds such as acetaldehyde diethyl acetal are suitable. Representative examples of the organic solvent include aromatic hydrocarbons such as toluene, halogenated aromatic hydrocarbons such as chlorobenzene, and halogenated aliphatic hydrocarbons such as trichloroethylene.
開環重合により得られた単独重合体または共重
合体は引張強度、耐熱性、耐衝撃性等の機械的性
質にすぐれた熱可塑性樹脂であり、有機溶剤に溶
解する。従つて溶液現像型感光材料として用いる
場合には有機溶剤に溶解して用いられ、印刷版、
フオトレジスト等に用いて未露光部の洗出しにも
有機溶剤を用いることができる。これらの溶剤と
しては例えば炭素数1〜4のアルコール、ジオキ
サン、テトラヒドロフラン等の環状エーテル類、
ベンゼン、トルエン、キシレン等の芳香族炭化水
素、クロルベンゼン、ジクロルベンゼン等のハロ
ゲン化芳香族炭化水素、ジクロルエタン、四塩化
炭素等のハロゲン化脂肪族炭化水素、アセトン、
メチルエチルケトン、メチルイソブチルケトン等
のケトン類、N,N−ジメチルホルムアミド、ジ
メチルスルフオキシド等がある。また上記置換基
のXおよびYが酸性基のときは水溶性で希アルカ
リ水を洗出しに用いることができる。 Homopolymers or copolymers obtained by ring-opening polymerization are thermoplastic resins with excellent mechanical properties such as tensile strength, heat resistance, and impact resistance, and are soluble in organic solvents. Therefore, when used as a solution-developable photosensitive material, it is dissolved in an organic solvent and used as a printing plate,
Organic solvents can also be used in photoresists and the like to wash out unexposed areas. Examples of these solvents include alcohols having 1 to 4 carbon atoms, cyclic ethers such as dioxane, and tetrahydrofuran;
Aromatic hydrocarbons such as benzene, toluene and xylene, halogenated aromatic hydrocarbons such as chlorobenzene and dichlorobenzene, halogenated aliphatic hydrocarbons such as dichloroethane and carbon tetrachloride, acetone,
Examples include ketones such as methyl ethyl ketone and methyl isobutyl ketone, N,N-dimethylformamide, and dimethyl sulfoxide. Further, when the above substituents X and Y are acidic groups, they are water-soluble and dilute alkaline water can be used for washing out.
ノルボルネン誘導体の開環重合または共重合に
よつて得られた重合体と組合せて感光性樹脂組成
物に架橋剤として用いられるポリチオール類とし
ては、チオグリコール酸、α−メルカプトプロピ
オン酸等のメルカプトカルボン酸とグリコール、
トリオール、テトラオール等のポリオールとのエ
ステル化物、例えば二チオグリコール酸エチレン
グリコール、三チオグリコール酸トリメチロール
プロパン、四チオグリコール酸ペンタエリトリツ
ト、二β−メルカプトプロピオン酸エチレングリ
コール、三β−メルカプトプロピオン酸トリメチ
ロールプロパン、および四β−メルカプトプロピ
オン酸ペンタエリトリツト、ポリエチレングリコ
ール、ポリプロピレングリコール等のジグリシジ
ルエーテルと硫化水素との反応物、その他エタン
ジチオール、ヘキサメチレンジチオール、トリレ
ン−2,4ジチオール等がある。これ等架橋剤と
してのポリチオールはノルボルネン誘導体の重合
物に対して、ノルボルネン誘導体の重合物中の二
重結合1個に対して、ポリチオール中のチオール
基0.01〜1個に相当する量が通常使用される。 Polythiols used as crosslinking agents in photosensitive resin compositions in combination with polymers obtained by ring-opening polymerization or copolymerization of norbornene derivatives include mercaptocarboxylic acids such as thioglycolic acid and α-mercaptopropionic acid. and glycol,
Esterified products with polyols such as triols and tetraols, such as ethylene glycol dithioglycolate, trimethylolpropane trithioglycolate, pentaerythritol tetrathioglycolate, ethylene glycol di-β-mercaptopropionate, and tri-β-mercaptopropion. Acid trimethylolpropane, and reaction products of diglycidyl ethers such as pentaerythritol tetraβ-mercaptopropionate, polyethylene glycol, polypropylene glycol, and hydrogen sulfide, ethanedithiol, hexamethylenedithiol, tolylene-2,4dithiol, etc. be. Polythiol as a crosslinking agent is usually used in an amount equivalent to 0.01 to 1 thiol group in the polythiol per double bond in the norbornene derivative polymer. Ru.
本発明の感光性樹脂組成物には増感剤を添加す
ることによつて感光性樹脂組成物の感光域の調節
および硬化速度の加速を行うことができる。増感
剤の添加量は樹脂組成物に対し0.01〜15重量%で
あり好ましくは0.05〜10重量%である。増感剤と
してはベンゾフエノン、アセトフエノン、アセナ
フテン−キノン、メチルエチルケトン、バレフエ
ノン、p−モルホリプロピオフエノン、4−モル
ホリノベンゾフエノン、9−アセチルフエナント
レン、3−アセチルインドール、9−フルオレノ
ン等をあげることができる。 By adding a sensitizer to the photosensitive resin composition of the present invention, the photosensitive range of the photosensitive resin composition can be adjusted and the curing speed can be accelerated. The amount of the sensitizer added is 0.01 to 15% by weight, preferably 0.05 to 10% by weight, based on the resin composition. Examples of the sensitizer include benzophenone, acetophenone, acenaphthene-quinone, methyl ethyl ketone, valefuenone, p-morpholipropiophenone, 4-morpholinobenzophenone, 9-acetylphenanthrene, 3-acetylindole, 9-fluorenone, etc. be able to.
本発明の組成物は必要に応じて増感剤と共に前
記溶剤に溶解させて基材上に塗布して薄膜状の塗
膜とし、これに光を照射すれば架橋反応によつて
溶剤に不溶の塗膜となる。この塗膜は基材との接
着性が良好で耐衝撃性、強度ともにすぐれてお
り、また透明性も良好である。従つて、本発明の
感光性樹脂組成物の塗膜を照射する際に特定の画
像を照射し、未感光部を洗出しすることにより光
硬化部を画像として残すことができる。これによ
り印刷版、フオトレジスト等に用いることができ
る。 The composition of the present invention is dissolved in the above-mentioned solvent together with a sensitizer if necessary, and applied onto a substrate to form a thin coating film. When this is irradiated with light, a cross-linking reaction occurs, resulting in insoluble in the solvent. It becomes a coating film. This coating film has good adhesion to the substrate, excellent impact resistance and strength, and good transparency. Therefore, when a coating film of the photosensitive resin composition of the present invention is irradiated, a specific image is irradiated and the unexposed area is washed out, thereby allowing the photocured area to remain as an image. This allows it to be used for printing plates, photoresists, etc.
本発明の感光性樹脂組成物は架橋剤としてポリ
チオール類を用いているので、取扱い上安全性が
高く、また暗反応がおこりにくく、熱的にも安定
であるので、貯蔵安定性が良好である。 Since the photosensitive resin composition of the present invention uses polythiols as a crosslinking agent, it is highly safe to handle, and is also resistant to dark reactions and is thermally stable, so it has good storage stability. .
以下具体例によつて本発明を説明するが、本発
明はこれらによつて限定されるものではない。 The present invention will be explained below using specific examples, but the present invention is not limited thereto.
参考例 1
5−ノルボルネン−2−カルボン酸メチル開環
重合体
5−ノルボルネン−2−カルボン酸メチルモノ
マー45.6gをN2気流下でよく乾燥した四ツ口フ
ラスコに仕込む。ついで190mlのトルエン、1.2g
の六塩化タングステン、1.1gのジエチルアルミ
ニウムクロライド、0.44gのn−ブタノールを添
加し、15℃にて6時間重合を継続する。反応終了
後に塩酸メタノールの混合溶媒を400ml系中に添
加し、生成物を析出させる。重合体をアセトン
200mlに溶解し、前述の塩酸メタノール混合溶媒
により再沈精製する。白色の紛末が得られ、収量
は45.0gであつた。Reference Example 1 Methyl 5-norbornene-2-carboxylate ring-opening polymer 45.6 g of methyl 5-norbornene-2-carboxylate monomer was charged into a well-dried four-necked flask under a N 2 stream. Next, 190ml of toluene, 1.2g
of tungsten hexachloride, 1.1 g of diethylaluminum chloride, and 0.44 g of n-butanol were added, and the polymerization was continued at 15° C. for 6 hours. After the reaction is completed, a mixed solvent of hydrochloric acid and methanol is added to the 400 ml system to precipitate the product. acetone polymer
Dissolve in 200 ml and purify by reprecipitation using the aforementioned hydrochloric acid-methanol mixed solvent. A white powder was obtained, and the yield was 45.0 g.
参考例 2
5−ノルボルネン−2−カルボン酸開環重合体
の製造
乾燥したフラスコに5−ノルボルネン−2−カ
ルボン酸メチル開環重合体ペレツト15重量部を仕
込み、その後アセトンを100重量部加え、温度を
56℃に上げ、かくはん下でポリマーを完全に溶解
させる。Reference Example 2 Production of 5-norbornene-2-carboxylic acid ring-opening polymer 15 parts by weight of methyl 5-norbornene-2-carboxylic acid ring-opening polymer pellets were placed in a dry flask, then 100 parts by weight of acetone was added, and the temperature of
Raise the temperature to 56°C and stir to completely dissolve the polymer.
次いで開環重合体に対し4.0重量部(開環重合
体に対して当モル)の苛性ソーダを、仕込んだア
セトン量100重量部に対し、15重合部の水に溶解
させ、これを開環重合体のアセトン溶液に系を均
一に保たせながら逐次添加する。エステル加水分
解の進行とともに開環重合体は系中に析出する。
2時間反応させた後に生成物を別分離する。 Next, 4.0 parts by weight of caustic soda (equivalent moles to the ring-opened polymer) was dissolved in 15 parts of water based on 100 parts by weight of acetone charged, and this was dissolved into the ring-opened polymer. Add to the acetone solution one by one while keeping the system homogeneous. As ester hydrolysis progresses, the ring-opened polymer precipitates in the system.
After 2 hours of reaction, the product is separated off.
析出した開環重合体を150重量部の水に入れ、
かくはん下で開環重合体を溶解させた後に9.8重
量部の濃塩酸を50重量部の水で希釈して開環重合
体の水溶液に加え、常温下でかくはんする。側鎖
がカルボン酸塩からカルボン酸に変わるにつれて
開環重合体は白色の粉末となつて沈澱し、これを
別、乾燥することにより、目的とする5−ノル
ボルネン−2−カルボン酸の開環重合体が得られ
た。 The precipitated ring-opened polymer was placed in 150 parts by weight of water,
After the ring-opening polymer is dissolved under stirring, 9.8 parts by weight of concentrated hydrochloric acid is diluted with 50 parts by weight of water, added to the aqueous solution of the ring-opening polymer, and stirred at room temperature. As the side chain changes from carboxylate to carboxylic acid, the ring-opening polymer precipitates as a white powder, which is separated and dried to form the desired ring-opening polymer of 5-norbornene-2-carboxylic acid. A combination was obtained.
参考例 3
2−シアノ−5−ノルボルネン開環重合体の製
造
5−ノルボルネン−2−カルボン酸メチルモノ
マー45.6gの代りに、2−シアノ−5−ノルボル
ネン40.2gを用いる以外は参考例1と同様にして
2−シアノ−5−ノルボルネン開環重合体を得
た。Reference Example 3 Production of 2-cyano-5-norbornene ring-opening polymer Same as Reference Example 1 except that 40.2 g of 2-cyano-5-norbornene was used instead of 45.6 g of methyl 5-norbornene-2-carboxylate monomer. A ring-opened 2-cyano-5-norbornene polymer was obtained.
実施例 1
参考例1で得られた5−ノルボルネン−2−カ
ルボン酸メチル開環重合体を2.5gとり、ペンタ
エリスリトールテトラキス(メルカプトプロピオ
ネート)2.1gおよびベンゾフエノン0.13gと共
にテトラクロルエチレン16mlに溶解し、得られた
感光性樹脂組成物溶液をアルミニウム板上に
100μ厚に塗布し、塗膜が乾燥した後に1KWの高
圧水銀灯で照射して光硬化させた。照射時間30秒
で良好な硬化膜が得られた。Example 1 2.5 g of the ring-opened methyl 5-norbornene-2-carboxylate polymer obtained in Reference Example 1 was dissolved in 16 ml of tetrachlorethylene along with 2.1 g of pentaerythritol tetrakis (mercaptopropionate) and 0.13 g of benzophenone. Then, the obtained photosensitive resin composition solution was placed on an aluminum plate.
It was applied to a thickness of 100μ, and after the coating had dried, it was irradiated with a 1KW high-pressure mercury lamp and photocured. A good cured film was obtained with an irradiation time of 30 seconds.
実施例 2
実施例1と同じ塗布面を作り、塗布面の1部を
円形透光部をいくつか有する黒色フイルムで遮光
し、実施例1と同様に照射した。光硬化後テトラ
クロルエチレンで未露光部の洗出しを行つた。遮
光部との境界ならびに円形露光部による良好な画
線が得られた。Example 2 The same coating surface as in Example 1 was prepared, a part of the coating surface was shielded from light with a black film having several circular light-transmitting parts, and irradiation was performed in the same manner as in Example 1. After photocuring, the unexposed areas were washed out with tetrachloroethylene. A good image line was obtained due to the boundary with the light-shielding area and the circular exposed area.
実施例 3
5−ノルボルネン−2−カルボン酸メチル開環
重合体の代りに、参考例2で得られた5−ノルボ
ルネン−2−カルボン酸開環重合体2.2gを用い、
他は実施例1と同様に行い、照射時間30秒で良好
な硬化膜を得た。Example 3 Instead of the methyl 5-norbornene-2-carboxylic acid ring-opened polymer, 2.2 g of the 5-norbornene-2-carboxylic acid ring-opened polymer obtained in Reference Example 2 was used,
The rest was carried out in the same manner as in Example 1, and a good cured film was obtained with an irradiation time of 30 seconds.
実施例 4
実施例3の塗布面の一部を遮光して照射し、光
硬化後稀アルカリ水で未露光部の洗出しを行い、
良好な画線が得られた。Example 4 A part of the coated surface of Example 3 was irradiated with light shielded, and after photocuring, the unexposed area was washed out with dilute alkaline water.
A good drawing line was obtained.
実施例 5
5−ノルボルネン−2−カルボン酸メチル開環
重合体の代りに、参考例3で得られた2−シアノ
−5−ノルボルネン開環重合体2.0gを用いて実
施例1と同様に行つた。照射時間30秒で良好な硬
化膜が得られた。Example 5 The same procedure as in Example 1 was carried out using 2.0 g of the 2-cyano-5-norbornene ring-opening polymer obtained in Reference Example 3 instead of the methyl 5-norbornene-2-carboxylate ring-opening polymer. Ivy. A good cured film was obtained with an irradiation time of 30 seconds.
Claims (1)
ルまたはカルボキシルより選ばれた置換基を表わ
す。但し、X、Yのうち1つは、エステル、ニト
リルまたはカルボキシルより選ばれた置換基であ
る。)で示される単位を含有する重合体と分子中
に少なくとも2個のチオール基を有する化合物と
を含有することを特徴とする感光性樹脂組成物。[Claims] 1. General formula (In the formula, X and Y each represent a substituent selected from hydrogen, ester, nitrile, or carboxyl. However, one of X and Y is a substituent selected from ester, nitrile, or carboxyl.) A photosensitive resin composition comprising a polymer containing a unit represented by the above formula and a compound having at least two thiol groups in the molecule.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14323979A JPS5667847A (en) | 1979-11-07 | 1979-11-07 | Novel photosensitive resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14323979A JPS5667847A (en) | 1979-11-07 | 1979-11-07 | Novel photosensitive resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5667847A JPS5667847A (en) | 1981-06-08 |
JPH0124289B2 true JPH0124289B2 (en) | 1989-05-11 |
Family
ID=15334125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14323979A Granted JPS5667847A (en) | 1979-11-07 | 1979-11-07 | Novel photosensitive resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5667847A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102025802B1 (en) * | 2019-03-14 | 2019-09-26 | 사슴클러스터 농업회사법인 주식회사 | Method of Manufacturing Foods for Animal Companion |
JP2020089343A (en) * | 2018-12-07 | 2020-06-11 | ユニ・チャーム株式会社 | Method of producing pet food |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2638887B2 (en) * | 1988-02-26 | 1997-08-06 | 東ソー株式会社 | Photosensitive composition |
US5227280A (en) * | 1991-09-04 | 1993-07-13 | International Business Machines Corporation | Resists with enhanced sensitivity and contrast |
-
1979
- 1979-11-07 JP JP14323979A patent/JPS5667847A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020089343A (en) * | 2018-12-07 | 2020-06-11 | ユニ・チャーム株式会社 | Method of producing pet food |
KR102025802B1 (en) * | 2019-03-14 | 2019-09-26 | 사슴클러스터 농업회사법인 주식회사 | Method of Manufacturing Foods for Animal Companion |
Also Published As
Publication number | Publication date |
---|---|
JPS5667847A (en) | 1981-06-08 |
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