JPH01241045A - Stamper for production of optical disk - Google Patents

Stamper for production of optical disk

Info

Publication number
JPH01241045A
JPH01241045A JP6775588A JP6775588A JPH01241045A JP H01241045 A JPH01241045 A JP H01241045A JP 6775588 A JP6775588 A JP 6775588A JP 6775588 A JP6775588 A JP 6775588A JP H01241045 A JPH01241045 A JP H01241045A
Authority
JP
Japan
Prior art keywords
film
metallic
resist
optical disk
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6775588A
Other languages
Japanese (ja)
Inventor
Katsuyuki Saito
斎藤 克之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP6775588A priority Critical patent/JPH01241045A/en
Publication of JPH01241045A publication Critical patent/JPH01241045A/en
Pending legal-status Critical Current

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  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To easily obtain an optical disk for a sample in a short period of time by coating a negative resist on a metallic disk and subjecting the coating to laser beam exposing, then developing the resist and depositing a metallic film by evaporation thereon. CONSTITUTION:The negative resist 4 is coated by a spinner on the polished metallic disk 2. The resist is then subjected to the laser beam exposing, then to post baking after developing. A metallic film 6 consisting of nickel is thereafter formed by an electron beam vapor deposition method. A UV curing acrylic resin 8 is spin-coated on the metallic film 6 and further a polycarbonate resin layer 10 is pressed thereto, then UV rays are irradiated on said layer from the PC resin layer 10 side to cure the UV curing acrylic resin 8. The metallic Ni film 6 is then stripped and a reflecting film 12 consisting of aluminum, etc. is formed by vapor deposition on the UV curing acrylic resin layer 8. A protective layer 14 consisting of PC or the like to serve as a base material is formed by spin coating, etc., on said film. The optical disk is thereby formed in a short period of time.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は光ディスクの製造工程で用いるスタン光ディス
クを制作する場合、−度すンプル品を作って、実際のプ
レーヤにかけてみて、製品となるかどうか判断していた
[Detailed Description of the Invention] <Industrial Application Field> When producing a stun optical disc for use in the optical disc manufacturing process, the present invention is to make a sample product and test it on an actual player to see if it will become a product. I was judging.

このサンプルは、従来、マスターテープ(3/、Uマチ
ックテープ)をレーザービーム露光装置にかけ、ポジレ
ジストを塗布したガラス盤に露光装置にかけ、次に現像
、導電膜の形成(以上マスタリング工程)、メツキ、レ
ブリテーション(インジェクシヨン)、反射膜形成迄行
なって、実際のプレーヤにかけてみて、製品となるがど
うが判断していた。この工程の中のスタンバ−を得るた
めのメツキは3〜5時間かかっている。
Conventionally, this sample was made by applying a master tape (3/, Umatic tape) to a laser beam exposure device, applying it to a glass disk coated with a positive resist, and then developing, forming a conductive film (mastering process), and plating. , revlation (injection), and reflective film formation, and then tried it on an actual player before making a final judgment. Plating to obtain a stand bar in this process takes 3 to 5 hours.

特にCD−ROM等の光ディスクを作製する際、多品種
少量生産のためマスターテープの情報が正確に記録され
ているか、また、マスターテープがらの情報が光ディス
クに、正しく読み込まれているかを短時間に知る必要が
ある。
In particular, when producing optical discs such as CD-ROMs, it is necessary to quickly check whether the information on the master tape is recorded accurately and whether the information on the master tape is correctly read onto the optical disc due to the high-mix, low-volume production. I need to know.

ところが上述した如く実際の複製工程がやや複雑でメツ
キ工程に時間がかかっているため、マスターテープ作製
者もしくは、光ディスク作製者が知りたい情報を得るた
めに、時間ががかってしまい、もし、マスターテープの
再作製という場合、得意先の納期等に間に合わなくなっ
てしまう可能性があり、時間的なロス、またコストのむ
だを生じてしまう。
However, as mentioned above, the actual duplication process is somewhat complicated and the plating process takes time. If you have to remanufacture the product, you may not be able to meet the customer's delivery deadline, resulting in time loss and wasted costs.

実際の光ディスクを作製するのに、低コストでしかも短
時間で行えることは従来からの課題であった。
It has long been a challenge to manufacture actual optical discs at low cost and in a short time.

く課題を解決するだめの手段〉 本発明は以上の如くの現況に対してなされたものであり
、金属盤上にネガレジストを塗布し、レーザービーム露
光後、現像し、金属膜を形成することで構成される光デ
ィスク製造用スタンパ−とすることで、短時間で簡単に
サンプル用光ディスクが得られるようにした光学式ディ
スク製造用スタンパ−を提供するものである。
Means for Solving the Problems> The present invention has been made in response to the current situation as described above, and involves coating a negative resist on a metal plate, exposing it to a laser beam, developing it, and forming a metal film. The present invention provides a stamper for manufacturing optical discs which allows sample optical discs to be easily obtained in a short period of time.

〈実施例〉 以下本発明について、具体的に一実施例により説明する
<Example> The present invention will be specifically described below with reference to an example.

本発明の構成は、金属盤の上にネガレジストを塗布し、
レーザービーム露光装置で露光、現像、金属膜の形成を
行ない、それをレプリケーシシン(インジェクシヨン)
工程に使用してしまうものである。
The structure of the present invention is to apply a negative resist on a metal plate,
A laser beam exposure device is used to expose, develop, and form a metal film, which is then used for replication (injection).
It is used in the process.

まず、第1図aに示す如く充分に研磨された金属盤2に
ネガレジスト4 (Fuji−Hunt製−AYCOA
TVHR)をスピンナーにより0.13μmの厚さで塗
布する。研磨はネガレジストのない側も充分にされなけ
ればならない、この面はインジェクシゴン工程において
、凹凸のないレプリカを作製するために重要である。
First, as shown in Fig. 1a, a negative resist 4 (manufactured by Fuji-Hunt - AYCOA
TVHR) is applied to a thickness of 0.13 μm using a spinner. The side without the negative resist must also be sufficiently polished; this side is important in the injection process to produce a replica with no irregularities.

金属盤2には、ニッケル盤を使用し、塗布後85℃で2
0分間ベーキングを行なった。
For metal plate 2, a nickel plate is used, and after coating it is heated to 85°C.
Baking was performed for 0 minutes.

次にレーザービーム露光を行なうが9本発明においては
、通常のマスクリングにおけるレーザービーム露光装置
は、使用できるが、回転方向を逆にしなければならない
Next, laser beam exposure is performed.9 In the present invention, a laser beam exposure device for a normal mask ring can be used, but the direction of rotation must be reversed.

露光後、現像を行なう際に、現像液はネガレジストの専
用のものを使用(FuJi−Hunt I!!  WN
RD)した。
When developing after exposure, use a developer specifically designed for negative resists (FuJi-Hunt I!! WN
RD) I did.

現像後ボストベーキングを135℃20分間という条件
で行ない、その後、エレクトロンビーム蒸着法によりニ
ッケルによる金属膜6を700人形成した。これはレジ
スト膜に耐性をもたせるためである。
After development, post baking was performed at 135° C. for 20 minutes, and then a metal film 6 of nickel was formed by 700 people by electron beam evaporation. This is to provide resistance to the resist film.

次に同rEJbに示す如く該Niによる金属膜6上にU
シ硬化アクリル樹脂8をスピンコードし、さらにポリカ
ーボネート(PC)樹脂層10(厚み1.2 +wm)
を押し付け、紫外線を、該PC樹脂層10側より照射し
、該Uv硬化アクリル樹脂8を硬化させる。
Next, as shown in rEJb, U is applied on the metal film 6 made of Ni.
A hardened acrylic resin 8 is spin-coded, and a polycarbonate (PC) resin layer 10 (thickness 1.2 +wm) is formed.
is pressed and irradiated with ultraviolet rays from the PC resin layer 10 side to harden the UV-curable acrylic resin 8.

次に同図Cに示す如く、該Ni金属膜6を剥離して、該
UV硬化アクリル樹脂層8上にアルミなどの反射膜12
を蒸着で形成し、スピンコードなどで基材となるPCな
どの保護層14を形成する。
Next, as shown in FIG.
is formed by vapor deposition, and a protective layer 14 of PC or the like serving as a base material is formed by spin cord or the like.

実際にテスト用光学用ディスクとして使用する時は、同
図すに示す如くの金属層2と樹脂層loで信号部分がサ
ンドインチされたままの形で使用してもよ(、また図面
Cのアルミ反射層を形成した状態で使用してもよい。
When actually used as a test optical disc, it may be used with the signal portion sandwiched between the metal layer 2 and the resin layer lo as shown in Figure C (or as shown in Figure C). It may be used with an aluminum reflective layer formed.

〈効果〉 本発明は以上の如くであり、何工程ものメツキ工程が不
要となり、きわめて短時間で光ディスクを作成可能とな
り、コストの低下が計られる用になる、テスト用の光学
式ディスクが得られる。
<Effects> The present invention is as described above, and it is possible to obtain an optical disk for testing, which eliminates the need for multiple plating steps, makes it possible to create an optical disk in a very short time, and reduces costs. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の光学式ディスクとその製造工程を示す
説明図。 2・・・金属板     4・・・レジスト6・・・N
1蒸着層    8・・・υV硬化樹脂層810・・・
樹脂層     12・・・反射層14・・・保護コー
ト層(保護層) 特  許  出  願  人 凸版印刷株式会社 代表者 鈴木和夫
FIG. 1 is an explanatory diagram showing the optical disc of the present invention and its manufacturing process. 2...Metal plate 4...Resist 6...N
1 vapor deposited layer 8...υV cured resin layer 810...
Resin layer 12... Reflective layer 14... Protective coat layer (protective layer) Patent application: Toppan Printing Co., Ltd. Representative: Kazuo Suzuki

Claims (1)

【特許請求の範囲】[Claims] 1)情報信号に対応した凹凸を有するフォトレジスト層
が、該金属盤上に設けられてあり、該フォトレジスト層
上に金属膜層が形成されてあることを特徴とするテスト
用に使用される光ディスク製造用スタンパー。
1) A photoresist layer having irregularities corresponding to an information signal is provided on the metal disk, and a metal film layer is formed on the photoresist layer. Used for testing. Stamper for manufacturing optical discs.
JP6775588A 1988-03-22 1988-03-22 Stamper for production of optical disk Pending JPH01241045A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6775588A JPH01241045A (en) 1988-03-22 1988-03-22 Stamper for production of optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6775588A JPH01241045A (en) 1988-03-22 1988-03-22 Stamper for production of optical disk

Publications (1)

Publication Number Publication Date
JPH01241045A true JPH01241045A (en) 1989-09-26

Family

ID=13354072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6775588A Pending JPH01241045A (en) 1988-03-22 1988-03-22 Stamper for production of optical disk

Country Status (1)

Country Link
JP (1) JPH01241045A (en)

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