JPH01241045A - Stamper for production of optical disk - Google Patents
Stamper for production of optical diskInfo
- Publication number
- JPH01241045A JPH01241045A JP6775588A JP6775588A JPH01241045A JP H01241045 A JPH01241045 A JP H01241045A JP 6775588 A JP6775588 A JP 6775588A JP 6775588 A JP6775588 A JP 6775588A JP H01241045 A JPH01241045 A JP H01241045A
- Authority
- JP
- Japan
- Prior art keywords
- film
- metallic
- resist
- optical disk
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000012360 testing method Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 abstract description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 7
- 239000011347 resin Substances 0.000 abstract description 6
- 229920005989 resin Polymers 0.000 abstract description 6
- 239000004925 Acrylic resin Substances 0.000 abstract description 5
- 229920000178 Acrylic resin Polymers 0.000 abstract description 5
- 239000004417 polycarbonate Substances 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 229910052759 nickel Inorganic materials 0.000 abstract description 3
- 239000011241 protective layer Substances 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 238000003848 UV Light-Curing Methods 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 229920005668 polycarbonate resin Polymers 0.000 abstract 1
- 239000004431 polycarbonate resin Substances 0.000 abstract 1
- 238000004528 spin coating Methods 0.000 abstract 1
- 238000007747 plating Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は光ディスクの製造工程で用いるスタン光ディス
クを制作する場合、−度すンプル品を作って、実際のプ
レーヤにかけてみて、製品となるかどうか判断していた
。[Detailed Description of the Invention] <Industrial Application Field> When producing a stun optical disc for use in the optical disc manufacturing process, the present invention is to make a sample product and test it on an actual player to see if it will become a product. I was judging.
このサンプルは、従来、マスターテープ(3/、Uマチ
ックテープ)をレーザービーム露光装置にかけ、ポジレ
ジストを塗布したガラス盤に露光装置にかけ、次に現像
、導電膜の形成(以上マスタリング工程)、メツキ、レ
ブリテーション(インジェクシヨン)、反射膜形成迄行
なって、実際のプレーヤにかけてみて、製品となるがど
うが判断していた。この工程の中のスタンバ−を得るた
めのメツキは3〜5時間かかっている。Conventionally, this sample was made by applying a master tape (3/, Umatic tape) to a laser beam exposure device, applying it to a glass disk coated with a positive resist, and then developing, forming a conductive film (mastering process), and plating. , revlation (injection), and reflective film formation, and then tried it on an actual player before making a final judgment. Plating to obtain a stand bar in this process takes 3 to 5 hours.
特にCD−ROM等の光ディスクを作製する際、多品種
少量生産のためマスターテープの情報が正確に記録され
ているか、また、マスターテープがらの情報が光ディス
クに、正しく読み込まれているかを短時間に知る必要が
ある。In particular, when producing optical discs such as CD-ROMs, it is necessary to quickly check whether the information on the master tape is recorded accurately and whether the information on the master tape is correctly read onto the optical disc due to the high-mix, low-volume production. I need to know.
ところが上述した如く実際の複製工程がやや複雑でメツ
キ工程に時間がかかっているため、マスターテープ作製
者もしくは、光ディスク作製者が知りたい情報を得るた
めに、時間ががかってしまい、もし、マスターテープの
再作製という場合、得意先の納期等に間に合わなくなっ
てしまう可能性があり、時間的なロス、またコストのむ
だを生じてしまう。However, as mentioned above, the actual duplication process is somewhat complicated and the plating process takes time. If you have to remanufacture the product, you may not be able to meet the customer's delivery deadline, resulting in time loss and wasted costs.
実際の光ディスクを作製するのに、低コストでしかも短
時間で行えることは従来からの課題であった。It has long been a challenge to manufacture actual optical discs at low cost and in a short time.
く課題を解決するだめの手段〉
本発明は以上の如くの現況に対してなされたものであり
、金属盤上にネガレジストを塗布し、レーザービーム露
光後、現像し、金属膜を形成することで構成される光デ
ィスク製造用スタンパ−とすることで、短時間で簡単に
サンプル用光ディスクが得られるようにした光学式ディ
スク製造用スタンパ−を提供するものである。Means for Solving the Problems> The present invention has been made in response to the current situation as described above, and involves coating a negative resist on a metal plate, exposing it to a laser beam, developing it, and forming a metal film. The present invention provides a stamper for manufacturing optical discs which allows sample optical discs to be easily obtained in a short period of time.
〈実施例〉
以下本発明について、具体的に一実施例により説明する
。<Example> The present invention will be specifically described below with reference to an example.
本発明の構成は、金属盤の上にネガレジストを塗布し、
レーザービーム露光装置で露光、現像、金属膜の形成を
行ない、それをレプリケーシシン(インジェクシヨン)
工程に使用してしまうものである。The structure of the present invention is to apply a negative resist on a metal plate,
A laser beam exposure device is used to expose, develop, and form a metal film, which is then used for replication (injection).
It is used in the process.
まず、第1図aに示す如く充分に研磨された金属盤2に
ネガレジスト4 (Fuji−Hunt製−AYCOA
TVHR)をスピンナーにより0.13μmの厚さで塗
布する。研磨はネガレジストのない側も充分にされなけ
ればならない、この面はインジェクシゴン工程において
、凹凸のないレプリカを作製するために重要である。First, as shown in Fig. 1a, a negative resist 4 (manufactured by Fuji-Hunt - AYCOA
TVHR) is applied to a thickness of 0.13 μm using a spinner. The side without the negative resist must also be sufficiently polished; this side is important in the injection process to produce a replica with no irregularities.
金属盤2には、ニッケル盤を使用し、塗布後85℃で2
0分間ベーキングを行なった。For metal plate 2, a nickel plate is used, and after coating it is heated to 85°C.
Baking was performed for 0 minutes.
次にレーザービーム露光を行なうが9本発明においては
、通常のマスクリングにおけるレーザービーム露光装置
は、使用できるが、回転方向を逆にしなければならない
。Next, laser beam exposure is performed.9 In the present invention, a laser beam exposure device for a normal mask ring can be used, but the direction of rotation must be reversed.
露光後、現像を行なう際に、現像液はネガレジストの専
用のものを使用(FuJi−Hunt I!! WN
RD)した。When developing after exposure, use a developer specifically designed for negative resists (FuJi-Hunt I!! WN
RD) I did.
現像後ボストベーキングを135℃20分間という条件
で行ない、その後、エレクトロンビーム蒸着法によりニ
ッケルによる金属膜6を700人形成した。これはレジ
スト膜に耐性をもたせるためである。After development, post baking was performed at 135° C. for 20 minutes, and then a metal film 6 of nickel was formed by 700 people by electron beam evaporation. This is to provide resistance to the resist film.
次に同rEJbに示す如く該Niによる金属膜6上にU
シ硬化アクリル樹脂8をスピンコードし、さらにポリカ
ーボネート(PC)樹脂層10(厚み1.2 +wm)
を押し付け、紫外線を、該PC樹脂層10側より照射し
、該Uv硬化アクリル樹脂8を硬化させる。Next, as shown in rEJb, U is applied on the metal film 6 made of Ni.
A hardened acrylic resin 8 is spin-coded, and a polycarbonate (PC) resin layer 10 (thickness 1.2 +wm) is formed.
is pressed and irradiated with ultraviolet rays from the PC resin layer 10 side to harden the UV-curable acrylic resin 8.
次に同図Cに示す如く、該Ni金属膜6を剥離して、該
UV硬化アクリル樹脂層8上にアルミなどの反射膜12
を蒸着で形成し、スピンコードなどで基材となるPCな
どの保護層14を形成する。Next, as shown in FIG.
is formed by vapor deposition, and a protective layer 14 of PC or the like serving as a base material is formed by spin cord or the like.
実際にテスト用光学用ディスクとして使用する時は、同
図すに示す如くの金属層2と樹脂層loで信号部分がサ
ンドインチされたままの形で使用してもよ(、また図面
Cのアルミ反射層を形成した状態で使用してもよい。When actually used as a test optical disc, it may be used with the signal portion sandwiched between the metal layer 2 and the resin layer lo as shown in Figure C (or as shown in Figure C). It may be used with an aluminum reflective layer formed.
〈効果〉
本発明は以上の如くであり、何工程ものメツキ工程が不
要となり、きわめて短時間で光ディスクを作成可能とな
り、コストの低下が計られる用になる、テスト用の光学
式ディスクが得られる。<Effects> The present invention is as described above, and it is possible to obtain an optical disk for testing, which eliminates the need for multiple plating steps, makes it possible to create an optical disk in a very short time, and reduces costs. .
第1図は本発明の光学式ディスクとその製造工程を示す
説明図。
2・・・金属板 4・・・レジスト6・・・N
1蒸着層 8・・・υV硬化樹脂層810・・・
樹脂層 12・・・反射層14・・・保護コー
ト層(保護層)
特 許 出 願 人
凸版印刷株式会社
代表者 鈴木和夫FIG. 1 is an explanatory diagram showing the optical disc of the present invention and its manufacturing process. 2...Metal plate 4...Resist 6...N
1 vapor deposited layer 8...υV cured resin layer 810...
Resin layer 12... Reflective layer 14... Protective coat layer (protective layer) Patent application: Toppan Printing Co., Ltd. Representative: Kazuo Suzuki
Claims (1)
が、該金属盤上に設けられてあり、該フォトレジスト層
上に金属膜層が形成されてあることを特徴とするテスト
用に使用される光ディスク製造用スタンパー。1) A photoresist layer having irregularities corresponding to an information signal is provided on the metal disk, and a metal film layer is formed on the photoresist layer. Used for testing. Stamper for manufacturing optical discs.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6775588A JPH01241045A (en) | 1988-03-22 | 1988-03-22 | Stamper for production of optical disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6775588A JPH01241045A (en) | 1988-03-22 | 1988-03-22 | Stamper for production of optical disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01241045A true JPH01241045A (en) | 1989-09-26 |
Family
ID=13354072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6775588A Pending JPH01241045A (en) | 1988-03-22 | 1988-03-22 | Stamper for production of optical disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01241045A (en) |
-
1988
- 1988-03-22 JP JP6775588A patent/JPH01241045A/en active Pending
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