JPH01238800A - Prevention of gas flow phenomenum in pressure regulator, and device therefor - Google Patents
Prevention of gas flow phenomenum in pressure regulator, and device thereforInfo
- Publication number
- JPH01238800A JPH01238800A JP6413588A JP6413588A JPH01238800A JP H01238800 A JPH01238800 A JP H01238800A JP 6413588 A JP6413588 A JP 6413588A JP 6413588 A JP6413588 A JP 6413588A JP H01238800 A JPH01238800 A JP H01238800A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure regulator
- pressure
- regulator
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 title claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 5
- 239000012535 impurity Substances 0.000 abstract description 4
- 238000007711 solidification Methods 0.000 abstract description 2
- 230000008023 solidification Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 57
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 241001655798 Taku Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 244000144972 livestock Species 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
- F17C13/123—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures for gas bottles, cylinders or reservoirs for tank vehicles or for railway tank wagons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は圧力調整器のガス出流れ現象防止方法及び装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for preventing gas outflow phenomenon in a pressure regulator.
従来例えばドーピングガスとしてはジボランガス（Ｂｗ
ｌ又はジボランガスとアルゴン、窒素、シランガス等と
の混合ガスが用いられており、これらガスは通常第２図
に示すようにボンベ１内に例えば純ジボランガスは約３
０バール、ジボランガスとアルゴン等の混合ガスは１０
０バールの高圧で貯えられており、供給場所において圧
力調整器（レギュレーター）２によって数バールに減圧
されて使用されている。Conventionally, for example, diborane gas (Bw
A mixed gas of diborane gas and argon, nitrogen, silane gas, etc. is used, and these gases are usually stored in a cylinder 1 as shown in FIG.
0 bar, 10 bar for mixed gas such as diborane gas and argon.
It is stored at a high pressure of 0 bar and is used after being reduced to several bars by a pressure regulator 2 at the supply location.
前記圧力調整器２としては第３図に示すようなものが使
用されている。As the pressure regulator 2, one shown in FIG. 3 is used.
第３図において３はガス入口、４はガス出口、５はガス
入口、ガス出口間に介挿したオリフィス、６はこのオリ
フィス５の開度を調節する弁、７〜９は夫々この弁６を
制御するばね及びメンプランを示し、ガス人口３に供給
される供給ガス圧の増減によって弁６によるオリフィス
５の開度が滅、増されガス出口４からは常時設定された
圧力のガスが得られるようになる。In FIG. 3, 3 is a gas inlet, 4 is a gas outlet, 5 is an orifice inserted between the gas inlet and the gas outlet, 6 is a valve that adjusts the opening degree of the orifice 5, and 7 to 9 are the valves 6, respectively. The control spring and membrane plan are shown, and the opening degree of the orifice 5 by the valve 6 is decreased or increased by increasing or decreasing the supply gas pressure supplied to the gas port 3, so that gas at the set pressure is always obtained from the gas outlet 4. It becomes like this.
従来このようなガスを用いた場合圧力調整器２が動作不
能となる所謂出流れ現象が生ずることが知られている。Conventionally, it has been known that when such a gas is used, a so-called outflow phenomenon occurs in which the pressure regulator 2 becomes inoperable.
然しなからジボランガス等は極めて有毒であり、出流れ
現象を生じた場合には人畜に危害を生ずるおそれがあっ
た。However, diborane gas and the like are extremely toxic, and if a leakage phenomenon occurs, there is a risk of harm to humans and livestock.
本発明の目的はこのような危険を防くための圧力調整器
のガス出流れ現象防止方法及び装置を得るにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a method and apparatus for preventing gas leakage in a pressure regulator to prevent such a danger.
本発明者は種々実験、研究の結果上配出流れ現象は一般
にジボランガスに含まれるＢ系分解重合不純物の蒸気圧
が低くジボランガスが圧力調整器２のオリフィス５を通
過する際断熱自由膨脹によって温度が低下し、シボソラ
ンガス中に含まれる前記Ｂ系分解重合不純物が相変化を
起こして固化し、この固化したものがオリフィス５と弁
６間に挟まり、弁６が完全に閉まらなくなる為であるこ
と、及びこの現象をふせぐためには圧力調整器２に対す
る供給ガスの温度を圧力調整器２のガス出口におけるガ
スの温度より高くして前記断熱自由膨脹による温度低下
を補償せしめれば良いことを確かめた。As a result of various experiments and research, the present inventor has found that the flow phenomenon is generally caused by the low vapor pressure of the B-based decomposed and polymerized impurities contained in diborane gas, and when the diborane gas passes through the orifice 5 of the pressure regulator 2, the temperature increases due to adiabatic free expansion. This is because the B-based decomposed and polymerized impurities contained in the civosolane gas undergo a phase change and solidify, and this solidified material is caught between the orifice 5 and the valve 6, making it impossible for the valve 6 to close completely. It was found that in order to prevent this phenomenon, the temperature of the gas supplied to the pressure regulator 2 should be made higher than the temperature of the gas at the gas outlet of the pressure regulator 2 to compensate for the temperature drop due to the adiabatic free expansion.
本発明はこのような点に着目して成されたものである。The present invention has been made with attention to such points.
本発明の圧力調整器のガス出流れ現象防止方法は高圧ガ
ス供給源から圧力調整器を介して減圧して供給されるガ
スを圧力調整器に入る前に加熱して圧力調整器内でのガ
スの断熱自由膨脹による温度低下を補償せしめるように
したことを特徴とする。The method for preventing gas outflow phenomenon in a pressure regulator according to the present invention is to heat the gas supplied from a high-pressure gas supply source through the pressure regulator after being depressurized before entering the pressure regulator. It is characterized in that the temperature drop due to the adiabatic free expansion of is compensated for.
本発明の圧力調整器のガス出流れ現象防止装置は高圧ガ
ス供給源と減圧用圧力調整器間のガス通路を加熱する加
熱機構と、前記高圧ガス供給源からのガスの温度と前記
減圧用圧力調整器のガス出口におけるガスの温度の関数
として前記加熱機構を制御する制御機構とより成ること
を特徴とする。The gas outflow phenomenon prevention device for a pressure regulator of the present invention includes a heating mechanism that heats a gas passage between a high-pressure gas supply source and a pressure regulator for pressure reduction, and a temperature of the gas from the high-pressure gas supply source and the pressure for pressure reduction. and a control mechanism for controlling the heating mechanism as a function of the temperature of the gas at the gas outlet of the regulator.
本発明方法及び装置によればガスの出流れ現象を完全に
防止することができる。According to the method and apparatus of the present invention, the outflow phenomenon of gas can be completely prevented.
以下図面によって本発明の詳細な説明する。 The present invention will be explained in detail below with reference to the drawings.
本発明においては第１図に示すようにガスポンベ１と圧
力調整器２間を連結するガス配管１ｏを加熱機構１１に
よって加熱できるようにすると共に、この加熱機構１１
を自動制御機構１２によって制御し圧力調整器２のガス
人口３における供給ガスの温度が出口４のガス温度より
圧力調整器２内におけるガスの断熱自由膨脹による温度
低下分だけ少なくとも高くなるようガス配管１ｏに熱量
を与える。In the present invention, as shown in FIG.
is controlled by the automatic control mechanism 12 so that the temperature of the supplied gas at the gas port 3 of the pressure regulator 2 is higher than the gas temperature at the outlet 4 by at least the temperature drop due to the adiabatic free expansion of the gas within the pressure regulator 2. Gives heat to 1o.
即ち本発明においては予め圧力調整器２のガス人口３と
出口４間のガスの温度差を測定しておき、この温度差だ
けガス人口３のガス温度が高くなるよう自動制御機構１
２を介して加熱機構１１を作動せしめ、この結果ガスポ
ンベ１よりの供給ガスの温度と圧力調整器２のガス出口
４におけるガスの温度を略等しくなるようにする。That is, in the present invention, the temperature difference of the gas between the gas port 3 and the outlet 4 of the pressure regulator 2 is measured in advance, and the automatic control mechanism 1 is operated so that the gas temperature of the gas port 3 becomes higher by this temperature difference.
As a result, the temperature of the gas supplied from the gas pump 1 and the temperature of the gas at the gas outlet 4 of the pressure regulator 2 are made approximately equal.
本発明は上記の通りであるから圧力調整器２の出口にお
けるガスの温度は常時ガスポンベ１がら一５＝
の供給ガスと略同−温度に保たれ、圧力調整器２内にお
いて温度低下による不純物の固化を生ずることはない。Since the present invention is as described above, the temperature of the gas at the outlet of the pressure regulator 2 is always maintained at approximately the same temperature as the supplied gas from the gas pump 1 to 5, and impurities due to temperature drop within the pressure regulator 2 are kept at approximately the same temperature. No solidification occurs.
本発明によれば圧力調整器のガス出流れ現象を完全に防
止できる大きな利益がある。According to the present invention, there is a great advantage that the gas outflow phenomenon of the pressure regulator can be completely prevented.
第１図は本発明の説明図、第２図は従来のガスの供給装
置の説明図、第３図はその圧力調整器の詳細説明図であ
る。
１・・・ガスポンベ、２・・・圧力調整器、３・・・ガ
ス入口、４・・・ガス出口、５・・・オリフィス、６・
・・弁、７〜９・・・ばね及びメンプラン、１０・・・
ガス配管、１１・・・加熱機構、１２・・・自動制御機
構。
代理人 弁理士 澤 木 誠 −
拓 ３ 目FIG. 1 is an explanatory diagram of the present invention, FIG. 2 is an explanatory diagram of a conventional gas supply device, and FIG. 3 is a detailed explanatory diagram of the pressure regulator. 1... Gas pump, 2... Pressure regulator, 3... Gas inlet, 4... Gas outlet, 5... Orifice, 6...
・・Valve, 7-9・・Spring and membrane plan, 10・・・
Gas piping, 11... heating mechanism, 12... automatic control mechanism. Agent Patent Attorney Makoto Sawaki - Taku 3rd
Claims (2)
供給されるガスを圧力調整器に入る前に加熱して圧力調
整器内でのガスの断熱自由膨脹による温度低下を補償せ
しめるようにしたことを特徴とする圧力調整器のガス出
流れ現象防止方法。(1) Gas supplied from a high-pressure gas source through a pressure regulator is heated before entering the pressure regulator to compensate for the temperature drop due to adiabatic free expansion of the gas within the pressure regulator. A method for preventing gas outflow phenomenon in a pressure regulator, characterized in that:
を加熱する加熱機構と、前記高圧ガス供給源からのガス
温度と前記減圧用圧力調整器のガス出口におけるガスの
温度の関数として前記加熱機構を制御する制御機構とよ
り成ることを特徴とする圧力調整器のガス出流れ現象防
止装置。(2) a heating mechanism that heats a gas passage between a high-pressure gas supply source and a pressure-reducing pressure regulator, and a function of the gas temperature from the high-pressure gas supply source and the temperature of the gas at the gas outlet of the pressure-reducing pressure regulator; A gas outflow prevention device for a pressure regulator, comprising a control mechanism for controlling the heating mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63064135A JPH0633858B2 (en) | 1988-03-17 | 1988-03-17 | Method and device for preventing gas outflow phenomenon of pressure regulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63064135A JPH0633858B2 (en) | 1988-03-17 | 1988-03-17 | Method and device for preventing gas outflow phenomenon of pressure regulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01238800A true JPH01238800A (en) | 1989-09-22 |
| JPH0633858B2 JPH0633858B2 (en) | 1994-05-02 |
Family
ID=13249331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63064135A Expired - Lifetime JPH0633858B2 (en) | 1988-03-17 | 1988-03-17 | Method and device for preventing gas outflow phenomenon of pressure regulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0633858B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007255666A (en) * | 2006-03-24 | 2007-10-04 | Taiyo Nippon Sanso Corp | Gas supply device and gas supply method |
| KR101373444B1 (en) * | 2011-11-28 | 2014-03-14 | 한국가스공사 | Liquefied Natural Gas Supply System and Method Using Mixing Valve |
| EP2508786A4 (en) * | 2009-12-03 | 2016-01-06 | Taiyo Nippon Sanso Corp | Gas supply device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006283812A (en) * | 2005-03-31 | 2006-10-19 | Japan Air Gases Ltd | System and method for feeding liquefied gas |
| CN101876398B (en) * | 2009-05-01 | 2014-12-10 | 丛洋 | Decompression and gas storage device, gas ejecting system and vehicle |
| JP6745825B2 (en) * | 2018-02-01 | 2020-08-26 | 大陽日酸株式会社 | Gas supply device and gas supply method |
| JP6784711B2 (en) * | 2018-02-01 | 2020-11-11 | 日本酸素ホールディングス株式会社 | Liquefied gas supply device and liquefied gas supply method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6077899U (en) * | 1984-08-30 | 1985-05-30 | カグラインベスト株式会社 | Self-powered pressure control valve |
| JPS6237699U (en) * | 1985-08-26 | 1987-03-05 |
-
1988
- 1988-03-17 JP JP63064135A patent/JPH0633858B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6077899U (en) * | 1984-08-30 | 1985-05-30 | カグラインベスト株式会社 | Self-powered pressure control valve |
| JPS6237699U (en) * | 1985-08-26 | 1987-03-05 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007255666A (en) * | 2006-03-24 | 2007-10-04 | Taiyo Nippon Sanso Corp | Gas supply device and gas supply method |
| EP2508786A4 (en) * | 2009-12-03 | 2016-01-06 | Taiyo Nippon Sanso Corp | Gas supply device |
| KR101373444B1 (en) * | 2011-11-28 | 2014-03-14 | 한국가스공사 | Liquefied Natural Gas Supply System and Method Using Mixing Valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0633858B2 (en) | 1994-05-02 |
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