JPH01235123A - Impregnated type cathode and manufacture thereof - Google Patents
Impregnated type cathode and manufacture thereofInfo
- Publication number
- JPH01235123A JPH01235123A JP63060351A JP6035188A JPH01235123A JP H01235123 A JPH01235123 A JP H01235123A JP 63060351 A JP63060351 A JP 63060351A JP 6035188 A JP6035188 A JP 6035188A JP H01235123 A JPH01235123 A JP H01235123A
- Authority
- JP
- Japan
- Prior art keywords
- holder
- pellet
- eutectic alloy
- cathode
- impregnated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000008188 pellet Substances 0.000 claims abstract description 27
- 239000006023 eutectic alloy Substances 0.000 claims abstract description 20
- 239000011888 foil Substances 0.000 claims abstract description 13
- 238000002844 melting Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 15
- 238000005219 brazing Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、多数回の加熱、冷却を繰返しても、陰極各部
に変形や剥離などが生じないようにした信頼性の高い含
浸形陰極と其の製造方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides a highly reliable impregnated cathode that does not cause deformation or peeling of various parts of the cathode even after repeated heating and cooling many times. Regarding its manufacturing method.
［従来の技術］
含浸形陰極は、使用時の陰極温度を１０００〜１１００
℃程度にする必要があり、そのために、熱効率の向上や
、特に室温から１１００℃位迄の熱サイクルによる変形
、剥離、脱落防止などに対し種々の工夫がなされている
。[Prior art] An impregnated cathode has a cathode temperature of 1000 to 1100 during use.
℃ or so, and for this reason, various efforts have been made to improve thermal efficiency and prevent deformation, peeling, and falling off due to thermal cycles from room temperature to about 1100°C.
例えば、特開昭５３−２８３６５号公報には、１０〜１
００μｍ厚の金属箔でホルダーを形成し、ペレットとホ
ルダーの間の残留ギャップを１０μｍ以下とする含浸形
陰極および其の製造方法が開示されている。For example, in Japanese Patent Application Laid-open No. 53-28365, 10 to 1
An impregnated cathode and its manufacturing method are disclosed in which the holder is formed of a metal foil with a thickness of 00 μm and the residual gap between the pellet and the holder is 10 μm or less.
［発明が解決しようとする課題］
上記従来の技術は、使用時の陰極温度が約１０００℃以
上になる含浸層陰極の電子放出物質の主たる成分である
Ｂａの飛散に対して配慮はしである。[Problems to be Solved by the Invention] The above conventional technology does not take into account the scattering of Ba, which is the main component of the electron-emitting substance of the impregnated layer cathode, where the cathode temperature during use is about 1000° C. or higher. .
このＢａ又はＢａ酸化物の飛散は、含浸層陰極の寿命を
一元的に支配するので、上記技術は含浸層陰極の表面の
うち電子放出に直接関与しない部分を金属箔ホルダーで
気密に封止しようというのである。Since this scattering of Ba or Ba oxide centrally controls the life of the impregnated layer cathode, the above technique attempts to hermetically seal the part of the surface of the impregnated layer cathode that is not directly involved in electron emission with a metal foil holder. That is what it means.
しかし、上記従来の技術は、室温から含浸層陰極の使用
温度１１００℃程度迄の繰返し熱サイクルにより応力歪
等でホルダーが変形する事に配慮しておらず、長時間使
用中に外部から加わる振動等によってペレットが脱落す
るという致命的な損傷が生ずる恐れがあった。However, the above conventional technology does not take into account the deformation of the holder due to stress and strain due to repeated thermal cycles from room temperature to the operating temperature of the impregnated layer cathode of approximately 1100°C, and does not take into account the possibility of deformation of the holder due to stress and strain etc. during long-term use. There was a risk that the pellets would fall off, causing fatal damage.
本発明の目的は、上記のような従来の含浸層陰極の課題
を解決し、陰極を構成する各部材間の接合強度が高く、
長時間使用に対しても安定した電子放出特性が得られる
含浸層陰極と其の製造方法を提供することを目的とする
。The purpose of the present invention is to solve the problems of the conventional impregnated layer cathode as described above, and to achieve high bonding strength between each member constituting the cathode.
It is an object of the present invention to provide an impregnated layer cathode that provides stable electron emission characteristics even when used for a long time, and a method for manufacturing the cathode.
［課題を解決するための手段］
上記課題を解決するために本発明においては、ペレット
底面とホルダー底部内面の間に高融点ろう材であるＲ
ｕ −Ｍ ｏ共晶合金の接合層を介在させることにした
。このＲｕ −Ｍ ｏ共晶合金の接合層は、箔片として
上記面接合面間に挿入したものでも、或いは、面接合面
の何れか一方または両方の表面に形成させた蒸着層であ
っても良い。[Means for Solving the Problems] In order to solve the above problems, in the present invention, R, which is a high melting point brazing filler metal, is provided between the bottom surface of the pellet and the inner surface of the bottom of the holder.
It was decided to interpose a bonding layer of u-Mo eutectic alloy. The bonding layer of this Ru-Mo eutectic alloy may be a piece of foil inserted between the surface bonding surfaces, or a vapor deposited layer formed on one or both of the surface bonding surfaces. good.
［作用］
上記の如き手段をとれば、厚さ３０μｍ以下のＲｕ −
Ｍ ｏ共晶合金箔片または同蒸着膜が加熱によって溶融
し、広範囲にわたって、ペレット底面およびホルダー底
部内面と金属間溶融接合を起し、結果的には１９３０”
Ｃ以下で両面を強固に接合するように作用する。これに
よって各構成部品間の接合強度は著しく向上し、長時間
使用しても含浸陰極ペレットが脱落するような致命的損
傷は発生せず、安定した電子放出特性が得られる。[Function] If the above measures are taken, Ru − with a thickness of 30 μm or less
The Mo eutectic alloy foil piece or the same vapor-deposited film is melted by heating, causing metal-to-metal fusion bonding with the bottom surface of the pellet and the inner surface of the bottom of the holder over a wide area, resulting in 1930"
C or less, it acts to firmly join both sides. This significantly improves the bonding strength between each component, prevents fatal damage such as the impregnated cathode pellets falling off even after long-term use, and provides stable electron emission characteristics.
Ｒｕ −Ｍ ｏ共晶合金の替わりにｐｔの箔などの高融
点鑞材を用いると、同様な接合効果は得られるが、電子
放出特性を少なからず劣化させる。If a high melting point brazing material such as PT foil is used instead of the Ru--Mo eutectic alloy, a similar bonding effect can be obtained, but the electron emission characteristics will be considerably degraded.
［実施例］
第１図は本発明実施例の一部を断面にして示す図である
。１はＷ粉末の多孔質焼結体に、ＢａＯ１Ｃａｂ、Ａｌ
２Ｏ，等の混合物からなる電子放出物質を溶融含浸させ
たペレット、２は其の中にペレット１を格納するＭＯ等
の高融点金属で作られたホルダー、３はペレット１の底
面とホルダー２の底部内面の間に介在し両面を強固に接
合しているＲ ｕ −Ｍ ｏ共晶合金層、４はＭＯやＴ
ａなとで作られたスリーブ、５はスリーブ頂面とホルダ
ー底部外面の間に挾持され両面の中心で十字に交差する
２本の極細いＲｅ−Ｗ製の陰極支持線、６は加熱用ヒー
タである。陰極支持線５は夫々の両端を９０度おきに４
個所で図示してない陰極支持筒の端面部に固定されてお
り、陰極支持部材による熱損失を極力抑制する構造にな
っている。[Embodiment] FIG. 1 is a cross-sectional view showing a part of an embodiment of the present invention. 1 is a porous sintered body of W powder, BaO1Cab, Al
2 is a holder made of a high melting point metal such as MO in which the pellet 1 is stored; 3 is a holder made of a high melting point metal such as MO; Ru-Mo eutectic alloy layer intervening between the inner surfaces of the bottom and firmly joining both sides, 4 is MO or T
A sleeve made of A, 5 is a pair of extremely thin Re-W cathode support wires that are sandwiched between the top surface of the sleeve and the outer surface of the bottom of the holder and intersect crisscross at the center of both sides, and 6 is a heater for heating. It is. The cathode support wires 5 are connected at 90 degree intervals at each end.
It is fixed to the end face of the cathode support cylinder (not shown), and has a structure that suppresses heat loss due to the cathode support member as much as possible.
第２図は本発明に係る含浸層陰極の製造方法を説明する
図である。図中、９はＲｕ−Ｍｏ共共合合金箔８１．８
２は抵抗溶接機の電極端子で、その他の符号は第１図の
場合と同じである。先ずペレット１の底面となる個所の
含浸剤の表層部分を深さ数百人除去して、ろう材と良く
馴染むようにする。FIG. 2 is a diagram illustrating a method for manufacturing an impregnated layer cathode according to the present invention. In the figure, 9 is Ru-Mo co-contact alloy foil 81.8
2 is an electrode terminal of a resistance welding machine, and other symbols are the same as in FIG. 1. First, the surface layer of the impregnating agent on the bottom surface of the pellet 1 is removed to a depth of several hundred layers so that it blends well with the brazing material.
Ｒｕ −Ｍ ｏ共晶合金箔９は、ペレット１と同径のφ
１ 、２ｍｍか其れ以下の径とし、肉厚はホルダー２と
同等か其れ以下の３０μｍとする。この共晶合金箔９を
ペレット１の底面とホルダー２の底部内面の間に挾み１
図示の如く溶接機の面電極端子間にくわえさせて大電流
を通電して加熱し、共晶合金箔を溶融させ、ペレットの
底面とホルダーの底部内面を強固に接合させる。本実施
例では商用電源を整流して大容量コンデンサを充電して
おいて、これを電流源に用いて良好な結果を得た。The Ru-Mo eutectic alloy foil 9 has the same diameter as the pellet 1.
The diameter shall be 1 or 2 mm or less, and the wall thickness shall be 30 μm, which is equal to or less than that of holder 2. This eutectic alloy foil 9 is sandwiched between the bottom surface of the pellet 1 and the bottom inner surface of the holder 2.
As shown in the figure, the pellet is held between the surface electrode terminals of a welding machine and heated by applying a large current to melt the eutectic alloy foil and firmly join the bottom surface of the pellet to the bottom inner surface of the holder. In this example, a commercial power supply was rectified to charge a large capacity capacitor, and this was used as a current source, and good results were obtained.
上記実施例では、Ｒｕ −Ｍ ｏ共晶合金を箔にして使
用したが、ペレット１の底面となる個所に、広く用いら
れている電子ビーム蒸着法やスパッタ蒸着法で、Ｒｕ
−Ｍ ｏ共晶合金の蒸着層を形成させても良い。この場
合も大容量コンデンサを溶接機の電流源に用いて良好な
結果を得た。上記の如くペレットの底面にＲｕ −Ｍ
ｏ共晶合金層を蒸着する替わりに、ホルダー２の底部内
面に蒸着させても良く、また更にペレットの底面とホル
ダーの底部内面の両方に蒸着させれば最も確実良好な結
果が得られる。In the above example, Ru-Mo eutectic alloy was used as a foil, but Ru
A vapor deposited layer of -Mo eutectic alloy may be formed. In this case as well, good results were obtained by using a large capacity capacitor as the current source of the welding machine. As mentioned above, Ru-M is attached to the bottom of the pellet.
o Instead of depositing the eutectic alloy layer, it may be deposited on the bottom inner surface of the holder 2, and the best results will most certainly be obtained if it is deposited on both the bottom surface of the pellet and the bottom inner surface of the holder.
なお、電子放出物質を含浸させてないＷの多孔質焼結体
を、先ずホルダー内に格納し、ホルダー底部内面に本発
明に係る方法で強固に溶接、接合してから、電子放出物
質を含浸させても良い。Note that a porous sintered body of W that is not impregnated with an electron-emitting substance is first stored in a holder, and then firmly welded and joined to the inner surface of the bottom of the holder by the method according to the present invention, and then impregnated with an electron-emissive substance. You can let me.
［発明の効果コ
以上説明したように本発明によれば、含浸形陰極のベレ
ットとホルダーの間の接合強度が著しく向上し、安定し
た電子放出特性が得られる信頼性の高い含浸形陰極が得
られる。[Effects of the Invention] As explained above, according to the present invention, the bonding strength between the pellet and the holder of the impregnated cathode is significantly improved, and a highly reliable impregnated cathode with stable electron emission characteristics can be obtained. It will be done.
第１図は本発明実施例の一部を断面にして示す図、第２
図は本発明に係る含浸形陰極の製造方法を説明する図で
ある。
１・・・ペレット、 ２・・・ホルダー、 ３・・
・Ｒｕ−Ｍｏ共晶合金層、９・・・Ｒｕ −Ｍ ｏ共晶
合金箔、第 １ 図
第 ２ 図FIG. 1 is a cross-sectional view of a part of an embodiment of the present invention, and FIG.
The figure is a diagram illustrating a method for manufacturing an impregnated cathode according to the present invention. 1... Pellet, 2... Holder, 3...
・Ru-Mo eutectic alloy layer, 9...Ru-Mo eutectic alloy foil, Fig. 1 Fig. 2
Claims (1)
ットをホルダー内に格納した含浸形陰極において、ペレ
ット底面とホルダー底部内面の間にＲｕ−Ｍｏ共晶合金
よりなる接合層を介在させたことを特徴とする含浸形陰
極。 ２、Ｗの多孔質焼結体に電子放出物質を含浸させたペレ
ットをホルダー内に格納する際に、ペレット底面とホル
ダー底部内面の間に介在させた厚さ３０μｍ以下のＲｕ
−Ｍｏ共晶合金箔を加熱溶融させて、ペレットをホルダ
ーに接合させたことを特徴とする含浸形陰極の製造方法
。 ３、ペレットをホルダー内に格納する際に、ペレットの
底面とホルダー底部内面の何れか一方または双方に、予
め蒸着によりＲｕ−Ｍｏ共晶合金層を形成しておいて、
この共晶合金層を加熱溶融することによりペレットとホ
ルダーを接合させるようにしたことを特徴とする含浸形
陰極の製造方法。[Claims] 1. In an impregnated cathode in which pellets of a porous sintered body of W impregnated with an electron-emitting substance are stored in a holder, a Ru-Mo eutectic alloy is placed between the bottom surface of the pellets and the inner surface of the bottom of the holder. An impregnated cathode characterized by having a bonding layer interposed therebetween. 2. When storing a pellet of W porous sintered body impregnated with an electron-emitting substance in a holder, a Ru with a thickness of 30 μm or less is interposed between the bottom of the pellet and the inner surface of the bottom of the holder.
- A method for producing an impregnated cathode, characterized in that a Mo eutectic alloy foil is heated and melted to join a pellet to a holder. 3. When storing the pellet in the holder, a Ru-Mo eutectic alloy layer is formed in advance by vapor deposition on either or both of the bottom surface of the pellet and the inner surface of the bottom of the holder,
A method for manufacturing an impregnated cathode, characterized in that the pellet and holder are joined by heating and melting this eutectic alloy layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63060351A JPH01235123A (en) | 1988-03-16 | 1988-03-16 | Impregnated type cathode and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63060351A JPH01235123A (en) | 1988-03-16 | 1988-03-16 | Impregnated type cathode and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01235123A true JPH01235123A (en) | 1989-09-20 |
Family
ID=13139650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63060351A Pending JPH01235123A (en) | 1988-03-16 | 1988-03-16 | Impregnated type cathode and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01235123A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2129303A1 (en) * | 1994-12-28 | 1999-06-01 | Samsung Display Devices Co Ltd | Directly heated cathode structure |
-
1988
- 1988-03-16 JP JP63060351A patent/JPH01235123A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2129303A1 (en) * | 1994-12-28 | 1999-06-01 | Samsung Display Devices Co Ltd | Directly heated cathode structure |
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