JPH01232048A - Contact printer - Google Patents

Abstract

PURPOSE:To prevent the destruction of the metal pattern on a master mask by the spark due to static electricity, by providing a continuity means for bringing the master mask and working plate held in a housing to an electrical continuity state with respect to the housing. CONSTITUTION:A master mask 4 is irradiated with ultraviolet rays becoming parallel rays by a collimation lens 6 for a predetermined time and the pattern of the master mask 4 is transferred to the photoresist film applied to a working plate 5. Subsequently, air is discharged from a master air access port 9, a working air access port 10 and an intermediate air access port 13 after the completion of irradiation in order to separate the master mask 4 and the working plate 5. The static electricity generated by the charging of both of the master mask 4 and the working plate 5 at the time of the separation of both of them is released from the electrical continuity part of the side surface of the master mask 4 and that of the working plate 5 toward a housing 1 through a mask arm needle 7.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a contact printer device for manufacturing a working mask used in the manufacturing process of semiconductor integrated circuits.

[Prior Art] Generally, working masks used for manufacturing semiconductor integrated circuits are manufactured using a contact printer device.

In this contact printer device, first, a master mask and a working mask plate coated with a photoresist film are brought into close contact with each other under vacuum, and then parallel ultraviolet rays are irradiated from the master mask side to form a master mask on the photoresist film. Burn the mask pattern. This is developed and etched to complete the working mask.

After exposure, the master mask and working plate are separated from each other by gradually returning the vacuum to atmospheric pressure from the vacuum state.

As mentioned above, in the conventional contact printer device, the master mask and the working plate are separated from each other after exposure, but at this time, there is a gap between the master mask and the photoresist film coated on the working plate. are often charged with static electricity. The static electricity generated during this separation causes sparks to destroy the metal pattern on the master mask. Master masks with damage to the pattern must be discarded and
This has a significant impact on manufacturing prices and delivery times.

Recently, as a countermeasure to this problem, a mask plate (hereinafter referred to as a conductive film plate) in which a transparent conductive film is formed on a glass substrate and a metal pattern is formed thereon has been proposed.

[Problems to be Solved by the Invention] However, it has been demonstrated that even if this conductive film plate is used, spark destruction due to static electricity in the metal pattern of the master mask cannot be completely eliminated. In other words, the frequency of spark destruction is approximately 5% when using a conductive film plate, and approximately 10% when no conductive film plate is used.
Therefore, even if a conductive film plate is used, spark destruction will occur.

The present invention has been made in view of such problems, and includes:
An object of the present invention is to provide a contact printer device that can completely prevent spark damage in a metal pattern of a master mask.

[Means for Solving the Problems] A contact printer device according to the present invention exposes a working plate coated with a photoresist film and a master mask in close contact with each other to form a pattern of the master mask on the photoresist film. In a contact printer device for manufacturing a working mask by printing on a strike film, the housing has an exposure chamber formed therein and is grounded, and a holding part that holds the working plate and the master mask facing each other in the exposure chamber. , further comprising a conductive means for electrically connecting both the working plate and the master mask held by the holding portion to the housing.

[Function] In the contact printer device according to the present invention with the above configuration, the master mask and the working plate are electrically connected to the housing, so when the master mask and the working plate are separated after exposure, the master mask and the working plate are connected to each other electrically. Even if static electricity is generated on the mask and working plate, this static electricity escapes to ground through the housing.

Therefore, destruction of the sparks in the master mask can be completely prevented.

[Examples] Examples of the present invention will be specifically described below with reference to the accompanying drawings.

FIG. 1 is a longitudinal cross-sectional view of a contact printer device according to an embodiment of the present invention. In FIG.
A pedestal 2 is provided on the bottom and ceiling surfaces of the housing 1. At the tip of this pedestal 2, there is an elastic member, for example,
A mask support 3 made of rubber is fixed, and this mask support 3 holds the master mask 4 and the working plate 5 facing each other.

A collimation lens 6 is installed in the front opening 1a of the master mask 4 held on the mask support 3.

Further, a base end portion of a mask earthing needle 7 is fixed to the side wall of the pedestal 2 in the housing 1.
The tips thereof are brought into contact with electrically conductive portions on each side surface of the master mask 4 and the working plate 5.

That is, static electricity generated in the master mask 4 and the working plate 5 is released to the housing 1 side through the mask grounding needle 7, and the master mask 4 and the working plate 5 are grounded through the housing 1.

A master space 8 formed between the collimation lens 6 and the master mask 4 is connected via a master air inlet/outlet 9, and a working space 10 formed between the side wall of the housing 1 and the working plate 5 is Through the working air inlet/outlet 11, the intermediate space 12 formed between the pedestal 2 and the side surfaces of the master mask 4 and the working plate 5 is connected to a vacuum pump (not shown) through the intermediate air inlet/outlet 13. is connected to.

Next, the operation of the contact printer device having the above configuration will be explained.

The master mask 4 and the working plate 5 are held facing each other by a mask support 3, and a vacuum pump (not shown) installed in the housing 1 supplies the master air inlet 9, the working air inlet 11, and the intermediate air Air is simultaneously discharged from the entrance/exit 13, and the master space 8, working space 10, and intermediate space 12 are evacuated.

After the three spaces 8, 10, and 12 are evacuated, air is introduced through the master air inlet/outlet 9 and the working air inlet/outlet 11 to create the master space 8 and the working space 10.
A pressure difference is generated between the master mask 4 and the intermediate space 12, and the master mask 4 and the working plate 5 are brought into close contact with each other.

Thereafter, the master mask 4 is irradiated with ultraviolet rays that have been made into parallel light by the collimation lens 6 for a predetermined period of time, and the pattern of the master mask 4 is transferred to the photoresist film coated on the working plate 5. When the irradiation is completed, in order to separate the master mask 4 and the working plate 5, air is again exhausted from the master space entrance/exit 9, the working air entrance/exit 11, and the intermediate air entrance/exit 13.

At this time, that is, when the master mask 4 and the working plate 5 are separated, the master mask 4 and the working plate 5 are charged. Therefore, the static electricity generated by this charging is applied to the side surface of the master mask 4 and the working plate 5.
from the electrically conductive portion on the side surface of the mask through the mask grounding needle 7 to the housing 1 side.

Here, the reason why the side surfaces of the master mask 4 and the working plate 5 can be electrically connected will be briefly explained. In the working plate 5, an electrically conductive metal film for pattern formation is formed on a glass substrate. Since this metal film is formed using a vapor deposition method or a sputtering method, the metal film also wraps around the side surface of the glass substrate. Therefore, by bringing the mask ground needle 7 into contact with the side surface, electrical continuity can be established. Furthermore, if a conductive film plate is used for the master mask 4, the same method as that used for forming the metal film on the working plate 5 is used to form the conductive film on the conductive film plate. Continuity becomes possible.

As described above, in this embodiment, when a conductive film plate is used for the master mask 4, all the static electricity generated in the master mask 4 and the working plate 5 can be released to the housing 1 side by the mask grounding needle 7. Therefore,
Spark damage in the metal pattern of the master mask 4 due to static electricity can be effectively prevented.

FIG. 2 is a longitudinal sectional view showing another embodiment of the present invention. Here, the same components as those in FIG. 1 are given the same reference numerals, and the description thereof will be omitted.

In this embodiment, the conductive mask support 20 is provided with a mechanism for electrically connecting both the master mask 4 and the working plate 5 to the housing 1. The conductive mask support 20 supports the master mask 4 and at the same time contacts the side surfaces of the master mask 4 and the side surfaces of the working plate 5 to electrically connect the housing 1 and the master mask 4 and the working plate 5. It is conducting.

As the conductive mask support 20, a rubber-based resin with a conductive metal layer coated on its surface, or a rubber-based resin mixed with conductive particles is used.

This embodiment has the advantage that the durability is further improved compared to the mask grounding needle 7 used in the embodiment of FIG.

[Effects of the Invention] As explained above, according to the contact printer device according to the present invention, since both the master mask and the working plate held in the housing are electrically connected to the housing, the master mask and the working plate are electrically connected to the housing. If the mask is a conductive film plate, all static electricity generated between the master mask and the working plate can be released to the housing side, thereby preventing spark damage caused by static electricity in the metal pattern of the master mask. .

Therefore, it is possible to eliminate the cost of reproducing the master mask and to ensure a sufficient delivery date for the working mask.

Furthermore, even if the master mask is not a conductive film plate, static electricity on the working plate side can be reliably dissipated by using the contact printer device of the present invention. This has the effect of significantly reducing spark destruction of the pattern.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view of a contact printer device according to an embodiment of the invention, and FIG. 2 is a longitudinal sectional view of a contact printer device according to another embodiment of the invention. 1; housing, 3; mask support, 4; master mask, 5; working plate, 6; collimation lens, 7; mask ground needle, 20; conductive mask support

Claims (1)

[Claims] (1) In a contact printer device that manufactures a working mask by exposing a working plate coated with a photoresist film and a master mask in close contact with each other, and baking a pattern of the master mask onto the photoresist film, A housing that forms an exposure chamber inside and is grounded; a holding section that holds the working plate and the master mask facing each other within the exposure chamber; and both the working plate and the master mask held by the holding section. and conduction means for electrically connecting the housing to the housing.