JPH01216277A - Testing equipment for semiconductor integrated circuit - Google Patents

Abstract

PURPOSE:To easily detect a fault fan unit by providing a switching circuit between a rotation stop sensor and an alarm control unit and selecting and connecting an output of each sensor to a sensor checking circuit. CONSTITUTION:An alarm circuit 4 is constituted by connecting the outputs of rotation stop sensors 3 of fan units 2 in series by a switching circuit 7 in case of a regular operating state and connected to an alarm control unit 6. If an alarm output of the rotation stop sensor 3 is generated due to abnormality of the fan unit 2, and in case of executing its diagnosis, the switching circuit 7 is operated so as to go to an opposite connection to the regular operating state, and the output of the sensor 3 of each fan unit 2 is allowed to come into contact with a sensor checking circuit 8. In such a way, even if plural fan units 2 are provided, the fan unit in which abnormality is generated can be detected easily by diagnosing the sensor checking circuit 8.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a testing device for semiconductor integrated circuits (hereinafter referred to as a testing device), and particularly to an abnormality detection mechanism for a fan unit installed for cooling the device.

[Conventional technology]

In general, this type of test equipment detects various abnormalities within the equipment to maintain its performance, and has an alarm control unit that automatically turns off the power to the test equipment when an abnormality is detected. . Generally, as shown in FIG. 2, a plurality of fan units 2 each having a rotation stop sensor 3 are installed in the test equipment, and the output of the sensor 3 is wired in series or in parallel to one location of the alarm control unit 6. An alarm circuit 4 is formed, and when an abnormality is detected in even one of the plurality of fan units 2, an alarm control unit 6 is operated to cut off the power to the test apparatus. 1 is an alarm detection unit, and 5 is an alarm circuit disconnection switch.

Furthermore, the occurrence of an abnormality in the fan unit 2 means that the propeller of the fan unit 2 stops rotating or.

It is possible that the rotation stop sensor 3 in the fan unit 2 is malfunctioning, but when diagnosing this, the alarm circuit 4 is disconnected so that the power supply to the device does not operate, and the installed fan unit 2 is turned off. Each was confirmed visually or by touch.

[Problem to be solved by the invention]

Fan unit 2 installed in the conventional test equipment described above
The abnormality detection function is connected in series or parallel to the sensor outputs of multiple fan units 2 and wired to the alarm control unit 6, so in the unlikely event that the fan unit 2 stops rotating or the fan unit sensor malfunctions. etc. occurs, the work to identify the failure point is to disconnect the alarm circuit 4 and then visually or touch-check the abnormality diagnosis in the fan unit 2, or to find the fan unit that is generating the alarm. This has the disadvantage that it may take a considerable amount of time to perform the test, and the downtime of the test equipment increases. In particular, if the sensor output of fan unit 2 malfunctions and an alarm is output, it is almost impossible to detect visually, etc., and confirmation must be made by disconnecting the fan units, which further increases the diagnostic time. There were many problems such as an increase in

An object of the present invention is to provide a test device that solves the above problems.

[Differences between the invention and the prior art]

The present invention differs from the conventional testing apparatus described above in that the sensor output of each fan unit is cut off by a switch, and each fan unit can be tested individually without cutting off the power to the apparatus.

[Means to solve the problem]

In order to achieve the above object, the test device of the present invention includes a rotation stop sensor installed in each of a plurality of fan units, and an alarm that detects an abnormality in the fan unit to which the sensor is attached based on the output of each rotation stop sensor. a control unit, a sensor check circuit that checks the output state of the rotation stop sensor, electrically disconnecting the rotation stop sensor from the alarm control unit, and electrically connecting the rotation stop sensor individually to the sensor check circuit; This includes a switch circuit that performs the following steps.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention.

In FIG. 1, the present invention includes a plurality of fan units 2 installed in a test apparatus, a rotation stop sensor 3 provided in each fan unit 2, and a sensor check circuit 8 for checking the output state of the rotation stop sensor 3. , 8... and a plurality of rotation stop sensors 3 are connected in series (or in parallel) to the alarm control unit 6 via the alarm circuit 4, -
It has a switch circuit 7 that individually connects the right rotation stop sensor 3 to a sensor check circuit 8. 1 is an alarm detection unit.

According to the present invention, the rotation stop sensor 3 of the fan unit 2
The outputs of the alarm circuit 4 are connected in series by the switch circuit 7 in the normal operating state to constitute the alarm circuit 4, and are connected to the alarm control unit 6 as the output from the alarm detection unit 1. In the unlikely event that an alarm output from the rotation stop sensor 3 occurs due to an abnormality in the fan unit 2, and you wish to diagnose it, operate the switch circuit 7 so that it is connected in the opposite way to the normal operating state, and connect each fan unit. The output of the second rotation stop sensor 3 is connected to a sensor check circuit 8. This allows multiple fan units 2
Even if the fan unit is equipped with a fan unit, by diagnosing the sensor check circuit 8, it is possible to easily and quickly find a fan unit in which an abnormality has occurred.

Further, the outputs of the switch circuits 7 to the sensor check circuits 8 can be outputted to the outside of the alarm detection unit 1, and the sensor check circuits 8 can be manually connected to the terminals outputted to the outside using connectors or the like. By doing so, only one sensor check circuit 8 is required, which has the advantage of being economical.

[Effects of the Invention] As explained above, the present invention physically converts the sensor output in the fan units connected in series to another sensor output when an alarm in the fan unit is output and the test equipment stops operating. Equipped with a sensor check circuit for easy separation and diagnosis on its own.
This has the effect of making it possible to discover a failed fan unit more quickly than before, thereby shortening the outage time.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional example. ■...Alarm detection unit 2...Fan unit 3...Rotation stop sensor 4...Alarm circuit 5...Alarm circuit disconnection switch 6...Alarm control unit 7...Switch circuit 8...・Sensor check circuit

Claims (1)

[Claims] 1. A rotation stop sensor installed in each of the plurality of fan units, an alarm control unit that detects an abnormality in the fan unit to which the sensor is attached based on the output of each rotation stop sensor, and checking the output status of the rotation stop sensor. and a switch circuit that electrically disconnects the rotation stop sensor from the alarm control unit and electrically connects the rotation stop sensor individually to the sensor check circuit. Circuit testing equipment.