JPH01213934A - Cathode of electron tube - Google Patents
Cathode of electron tubeInfo
- Publication number
- JPH01213934A JPH01213934A JP63039903A JP3990388A JPH01213934A JP H01213934 A JPH01213934 A JP H01213934A JP 63039903 A JP63039903 A JP 63039903A JP 3990388 A JP3990388 A JP 3990388A JP H01213934 A JPH01213934 A JP H01213934A
- Authority
- JP
- Japan
- Prior art keywords
- earth metal
- layer
- rare earth
- oxidated
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052788 barium Inorganic materials 0.000 claims abstract description 7
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 5
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 5
- 150000002910 rare earth metals Chemical class 0.000 abstract description 5
- 229910052784 alkaline earth metal Inorganic materials 0.000 abstract description 4
- 230000008020 evaporation Effects 0.000 abstract description 4
- 238000001704 evaporation Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 3
- 238000010494 dissociation reaction Methods 0.000 abstract description 2
- 230000005593 dissociations Effects 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract description 2
- 239000006104 solid solution Substances 0.000 abstract description 2
- 239000002585 base Substances 0.000 abstract 3
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 230000000694 effects Effects 0.000 description 10
- 230000032683 aging Effects 0.000 description 4
- 239000011575 calcium Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- -1 alkaline earth metal carbonate Chemical class 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はTV用ジブラウン管どに用いられる電子管用
陰極に関し、特に電子放射性物質層の改良に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an electron tube cathode used in a di-braun tube for TV, and particularly relates to an improvement of an electron emissive material layer.
第2図は従来のTV用ジブラウン管撮像管に用いられて
いる陰極を示すものであり、図において(1)はシリコ
ン(Si)、マグネシウム昨)などの還元性元素を微量
含む主成分がニッケルからなる有底筒状の基体、(2)
はこの基体の底部上面に被着され、少なくともバリウム
(&)を含み、他にストロンチウム(Sr)あるいは/
及びカルシウム(Ca)を含むアルカリ土類金属酸化物
と0.1〜20重量%の希土類金属酸化物とからなる電
子放射物質層、(3)は上記基体(1)内に配設された
ヒータ(3)で、加熱により上記電子放射物質1(2)
から熱電子を放出させるためのものである。Figure 2 shows the cathode used in conventional di-cathode ray tubes for TVs. A bottomed cylindrical base consisting of (2)
is deposited on the top surface of the bottom of this substrate and contains at least barium (&), and also contains strontium (Sr) or/
and an electron emitting material layer consisting of an alkaline earth metal oxide containing calcium (Ca) and a rare earth metal oxide of 0.1 to 20% by weight; (3) is a heater disposed within the base (1); In (3), the above electron emitting substance 1 (2) is heated.
This is to cause thermionic electrons to be emitted from the
この様に構成された電子管用陰極において、基体(1)
への電子放射物質HE (2)の被着は次の様にして行
なわれるものである。まずアルカリ土類金属(Ba、S
r、Ca)の炭酸塩と例えば4重量%の酸化スカンジウ
ム(5ctOs )からなる懸濁液を基体(1)に塗布
し、真空排気工程中にヒータ(3)によって加熱する。In the electron tube cathode configured in this way, the base (1)
The electron emitting material HE (2) is deposited on the substrate as follows. First, alkaline earth metals (Ba, S
A suspension consisting of a carbonate of R, Ca) and, for example, 4% by weight of scandium oxide (5ctOs) is applied to the substrate (1) and heated by a heater (3) during the evacuation step.
この時、アルカリ土類金属の炭酸塩はアルカリ土類金属
の酸化物に変わる。その後、アルカリ土類金属の酸化物
の一部を還元して半導体的性質を有するように活性化を
行なうことにより、基体(1)上にアルカリ土類金属の
酸化物からなる電子放射物質層(2)を被着せしめてい
るものである。At this time, the alkaline earth metal carbonate turns into an alkaline earth metal oxide. Thereafter, by reducing a part of the alkaline earth metal oxide and activating it to have semiconducting properties, an electron emitting material layer ( 2) is coated.
この活性化工程において、アルカリ土類金属の酸化物の
一部は次の様に反応しているものである。In this activation step, some of the alkaline earth metal oxides react as follows.
つまり基体(1)中に含有されたシリコン、マグネシウ
ム等の還元性元素は拡散によりアルカリ土類金属の酸化
物と基体(1)の界面に移動し、アルカリ土類金属酸化
物と反応する。例えばアルカリ土類酸化物として酸化バ
リウム(Bad)であれば次式(1) (2)の様に反
応するものである。That is, reducing elements such as silicon and magnesium contained in the substrate (1) move to the interface between the alkaline earth metal oxide and the substrate (1) by diffusion and react with the alkaline earth metal oxide. For example, if barium oxide (Bad) is used as the alkaline earth oxide, it reacts as shown in the following formulas (1) and (2).
2BaO+1/2Si =Ba+1/2Ba、SiO,
…−”−(1)BaO層 Mg =Ba+MgO・
・−=−・・ (2)この反応の結果、生成したBaは
電子放射物質層の表面へ拡散し、BaO中の不純物準位
を形成するか、アルカリ土類金属酸化物の表面へ吸着し
て仕事函数を下げ、陰極温度700〜800℃の動作温
度で0.5〜2.01’y’crdの電流密度動作が可
能になる。ここで、この様にして形成された電子管用陰
極にあっては電子放射物質層中のSc、O,の効果によ
り、上記(1)式及ヒ(2)弐K 示すレタBa、Si
n、あるいはMgOなどの中間層の形成が抑制され、寿
命中の長時間にわたって還元剤とBaOとの反応が安定
して行われ、上述の高jji流密度動作を実現すること
ができる。2BaO+1/2Si =Ba+1/2Ba, SiO,
...-”-(1) BaO layer Mg = Ba + MgO・
・−=−・・ (2) As a result of this reaction, the generated Ba diffuses to the surface of the electron emitting material layer and forms an impurity level in BaO, or is adsorbed to the surface of the alkaline earth metal oxide. This lowers the work function and enables current density operation of 0.5 to 2.01'y'crd at an operating temperature of 700 to 800° C. at the cathode temperature. Here, in the cathode for an electron tube formed in this way, due to the effects of Sc, O, in the electron emitting material layer, the letters Ba, Si shown in the above formula (1) and (2)
The formation of intermediate layers such as n, MgO, etc. is suppressed, and the reaction between the reducing agent and BaO is performed stably for a long period of time during the life, and the above-mentioned high jji flow density operation can be realized.
この様に構成された電子管用陰極においては、電流密度
2.OA//c11tを越えると、電子放射物質層のジ
ュール熱による消耗が激しく、前記したSc、03の効
果のみでは十分な寿命特性が得られない。In the electron tube cathode constructed in this way, the current density is 2. When OA//c11t is exceeded, the electron emitting material layer is severely consumed by Joule heat, and sufficient life characteristics cannot be obtained only by the effect of Sc, 03 described above.
この発明は上記のような問題点を解消するためになされ
たものであり、4A/cIIt以上の高電流密度動作に
おいてBaの消耗が抑制されたttf子管陰極を1%る
ことを目的とする。This invention was made to solve the above-mentioned problems, and aims to reduce the consumption of Ba to 1% in a TTF tube cathode in which Ba consumption is suppressed in high current density operation of 4A/cIIt or higher. .
この発明に係る電子管用陰極は、主成分がニッケルから
なる基体に、少なくともバリウムを含むアルカリ土類金
属酸化物を主成分とし、10〜w重鼠%の希土類金属酸
化物を含む層を形成し、さらにその上部に2001m以
下のBaO層を形成したものである。The cathode for an electron tube according to the present invention has a layer mainly composed of an alkaline earth metal oxide containing at least barium and containing a rare earth metal oxide of 10 to 10% by weight, on a substrate mainly composed of nickel. Furthermore, a BaO layer of 2001 m or less is formed on top of the BaO layer.
この発明においては、電子放射物質層中の希土類金属酸
化物の解離及びニッケル基体中への希土類金属の固溶現
象が十分に行われるので、前述の中間層形成が少なく、
カソード表面へのBa供給量を増加させることが可能に
なる。加えて、電子放射物質層中の希土類金属酸化物に
よるBaの蒸発抑制効果が大きく、4A/cI!!以上
の高電流密度動作が可能となる。さらに、カソード上層
に200nm以下のBaO層を設けることにより、Sc
、O,層上のBaあるいはBaOの形成に長時間のエー
ジングを必要とする上記希土類金属酸化物組成において
も、長時間のエージングを必要としないものである。In this invention, the dissociation of the rare earth metal oxide in the electron emitting material layer and the solid solution phenomenon of the rare earth metal in the nickel base material are sufficiently carried out, so that the formation of the above-mentioned intermediate layer is reduced.
It becomes possible to increase the amount of Ba supplied to the cathode surface. In addition, the rare earth metal oxide in the electron emitting material layer has a large Ba evaporation suppressing effect, with 4A/cI! ! High current density operation as described above becomes possible. Furthermore, by providing a BaO layer of 200 nm or less on the upper layer of the cathode, Sc
, O, and the rare earth metal oxide composition that requires long-time aging to form Ba or BaO on the layer does not require long-time aging.
以下にこの発明の一実施例°を第1図に基づいて説明す
る。図蚤ζおいて、(2)は基体(1)の底部上面に被
着され、少なくともバリウムを含み、他にストロンチウ
ムあるいは/及びカルシウムを含むアルカリ土類金属酸
化物0υを主成分とし、10〜団重量%ノ酸化スカンジ
ウム、酸化イツトリウム等の希土類金属酸化物(2)を
含んだ混合酸化物層であり、その上部にはBaOからな
る層(6)が形成されている。An embodiment of the present invention will be described below based on FIG. 1. In the figure ζ, (2) is deposited on the upper surface of the bottom of the substrate (1), contains at least barium, and also contains strontium or/and calcium as a main component, and contains 10~ This is a mixed oxide layer containing a rare earth metal oxide (2) such as scandium oxide or yttrium oxide in a weight percent of the total weight, and a layer (6) made of BaO is formed on top of the mixed oxide layer.
次ニ、この様に構成された電子管用陰極にオイて、基体
(1)への電子放射物質層(2)の被着方法について説
明すると、まず、バリウム、ストロンチウム、カルシ゛
ウムの三元炭酸塩に酸化スカンジウム粉末を所望の重量
%例えば30重量%(上記三元炭酸塩が全て酸化物にな
るとしての重量%)添加混合し、懸濁液を作成する。こ
の懸濁液をニッケル゛を主成分とする基体(1)上にス
プレィにより約PDZクロンの厚みで塗布し、その後、
陰極をスパッタリング装置内に設置し厚さ50nmのB
aO膜を形成し、従来のものと同様に、炭酸塩から酸化
物への分解過程及び酸化物の一部を還元する活性化過程
を経て、電子放射物質層(2)を基体(1)に被着せし
めるものである。Next, we will explain how to deposit the electron emissive material layer (2) on the substrate (1) in the cathode for an electron tube constructed in this way. A desired weight % of scandium oxide powder, for example 30 weight % (weight % assuming all of the above ternary carbonates become oxides) is added and mixed to prepare a suspension. This suspension is applied by spraying onto a substrate (1) mainly composed of nickel to a thickness of approximately PDZ chrome, and then
The cathode was installed in a sputtering device and a B layer with a thickness of 50 nm was installed.
An aO film is formed, and the electron emitting material layer (2) is attached to the substrate (1) through a decomposition process from carbonate to oxide and an activation process to reduce a portion of the oxide, as in the conventional case. It is something to be covered with.
第3図は前述の従来例と比較して、実施例の電子管陰極
を用いて2極真空管を作成し、4,3 A/ dの電流
密度で動作させて寿命試験を行った場合のエミッション
電流の変化を調べた結果を示したものである。この実施
例は優れた一ミッション特性を示している。Figure 3 shows the emission current when a diode vacuum tube was made using the electron tube cathode of the example and a life test was performed by operating it at a current density of 4.3 A/d, in comparison with the conventional example described above. This shows the results of examining changes in . This example shows excellent one-mission characteristics.
このような本発明の効果はSc、O5粒子上のBa又は
5c20.とBaOの複合化合物からのBa又はBaO
の蒸発がアルカリ土類金属酸化物粒子上のBaあるいは
アルカリ土類金属酸化物そのものの蒸発に比べ十分少な
いことに起因していると考えられる。Such effects of the present invention can be obtained from Sc, Ba on O5 particles, or 5c20. Ba or BaO from a complex compound of and BaO
This is thought to be due to the fact that the evaporation of Ba on the alkaline earth metal oxide particles or the evaporation of the alkaline earth metal oxide itself is sufficiently small.
その上、最上層にBaO膜を形成したので、寿命初期か
ら仕事函数の低いBa−BaO層が形成されるので、S
c、O,fiが多いが長時間のエージング時間を必要と
しない。BaO層の膜厚は200nm以下が望ましく、
待に刃〜mnmの笥囲で良好な初期特性、寿命特性が得
られた。Moreover, since a BaO film is formed on the top layer, a Ba-BaO layer with a low work function is formed from the beginning of the life, so the S
Although it has a large amount of c, O, and fi, it does not require a long aging time. The thickness of the BaO layer is preferably 200 nm or less,
Good initial characteristics and life characteristics were obtained with a thickness of Machiniba to mnm.
また、電子放射物質中の希土類金属酸化物の重量比が1
0%以下では、中間層の形成抑制効果が不十分であり、
W%を越えるとBaO層が存在しても長時間のエージン
グを必要として実用上の制約が大きい。In addition, the weight ratio of rare earth metal oxide in the electron emitting material is 1
If it is less than 0%, the effect of suppressing the formation of the intermediate layer is insufficient,
If it exceeds W%, long-term aging is required even if a BaO layer is present, which poses significant practical limitations.
なお、上記実施例においては、希土類金属酸化物として
5CtO8を用いたものを説明したが他の希土類金属酸
化物でも同様の効果は得られたものの、特1c SC2
O3* Y2O3p Ce、0.ニ)j L’ でその
効果が顕著であった。In the above example, 5CtO8 was used as the rare earth metal oxide, but similar effects could be obtained with other rare earth metal oxides.
O3* Y2O3p Ce, 0. d) The effect was remarkable for j L'.
この発明は以上のように述べたように基体に被着される
少なくともバリウムを含むアルカリ土類金属酸化物を主
成分とする電子放射物質層にlO〜ω重量%′の希土類
金属酸化物を含有させるとともに、該混合物層上に20
0nm以下の厚さのBaO層を形成したので、4 A/
crIt以上の高電流密度動作での長寿命を実現し、安
価で製造の制約の少ない信頼性の高い電子管用陰極が得
られるという効果を有するものである。As described above, the present invention includes an electron emitting material layer mainly composed of an alkaline earth metal oxide containing at least barium, which is deposited on a substrate and contains lO to ω% by weight of a rare earth metal oxide. At the same time, 20
Since a BaO layer with a thickness of 0 nm or less was formed, 4 A/
This has the effect of providing a highly reliable cathode for an electron tube that is inexpensive, has few restrictions on manufacturing, and has a long life when operating at a high current density higher than crIt.
第1図はこの発明の一実施例を示す断面図、第2図はそ
の実施例の電子管用陰極のエミッション特性図、第3図
は従来の電子管用陰極を示す断面図である。
図において、(1)は基体、(2)は電子放射物質層で
ある。
なお各図中、同一符号は同−又は相当部分を示す。FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is an emission characteristic diagram of a cathode for an electron tube according to the embodiment, and FIG. 3 is a sectional view of a conventional cathode for an electron tube. In the figure, (1) is a base body, and (2) is an electron emitting material layer. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
を含むアルカリ土類金属酸化物を主成分とし、10重量
%〜50重量%の希土類金属酸化物を含んだ層を被着形
成するとともに、その上に厚さ200nm以下のBaO
層を形成したことを特徴とする電子管用陰極。A layer mainly composed of an alkaline earth metal oxide containing at least barium and containing 10% to 50% by weight of a rare earth metal oxide is deposited on a substrate mainly composed of nickel. BaO with a thickness of 200 nm or less
A cathode for an electron tube characterized by forming a layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63039903A JPH01213934A (en) | 1988-02-22 | 1988-02-22 | Cathode of electron tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63039903A JPH01213934A (en) | 1988-02-22 | 1988-02-22 | Cathode of electron tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01213934A true JPH01213934A (en) | 1989-08-28 |
Family
ID=12565918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63039903A Pending JPH01213934A (en) | 1988-02-22 | 1988-02-22 | Cathode of electron tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01213934A (en) |
-
1988
- 1988-02-22 JP JP63039903A patent/JPH01213934A/en active Pending
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