JPH01207190A - Device for dissolving ozone - Google Patents

Device for dissolving ozone

Info

Publication number
JPH01207190A
JPH01207190A JP63033051A JP3305188A JPH01207190A JP H01207190 A JPH01207190 A JP H01207190A JP 63033051 A JP63033051 A JP 63033051A JP 3305188 A JP3305188 A JP 3305188A JP H01207190 A JPH01207190 A JP H01207190A
Authority
JP
Japan
Prior art keywords
ozone
liquid
gas
dissolving
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63033051A
Other languages
Japanese (ja)
Inventor
Mitsuru Ikeda
満 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IMUSETSUKU KK
Original Assignee
IMUSETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IMUSETSUKU KK filed Critical IMUSETSUKU KK
Priority to JP63033051A priority Critical patent/JPH01207190A/en
Publication of JPH01207190A publication Critical patent/JPH01207190A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
    • B01F23/237613—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B01F23/23105—Arrangement or manipulation of the gas bubbling devices
    • B01F23/2312—Diffusers
    • B01F23/23123—Diffusers consisting of rigid porous or perforated material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B01F23/23105—Arrangement or manipulation of the gas bubbling devices
    • B01F23/2312—Diffusers
    • B01F23/23126—Diffusers characterised by the shape of the diffuser element
    • B01F23/231265—Diffusers characterised by the shape of the diffuser element being tubes, tubular elements, cylindrical elements or set of tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2373—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media for obtaining fine bubbles, i.e. bubbles with a size below 100 µm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2215/00—Auxiliary or complementary information in relation with mixing
    • B01F2215/04—Technical information in relation with mixing
    • B01F2215/0413—Numerical information
    • B01F2215/0418—Geometrical information
    • B01F2215/0431—Numerical size values, e.g. diameter of a hole or conduit, area, volume, length, width, or ratios thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)

Abstract

PURPOSE:To obtain an inexpensive device by introducing an ozone-contg. gas into the hollow part of a hollow filter and ejecting gaseous ozone from fine pores, thereby dissolving the gaseous ozone into liquid. CONSTITUTION:A gaseous ozone introducing pipe 2 is connected to the hollow filter 3 made of ceramics or glass having the many fine pores of 0.1-10 micron diameter and is held immersed in the city water stored in a dissolution tank 1. The ozone-contg. gas is then introduced therein and the gaseous ozone is ejected from the fine pores so that the gaseous ozone is dissolved into the liquid. The ozone dissolution efficiency is thereby enhanced and the cost of a sterilizer is reduced.

Description

【発明の詳細な説明】 （発明の分野） 本発明は、オゾン溶解装置に関するものであり、特に水
等の液体中に高濃度にオゾンを溶解することを可能とす
る散気型オゾン溶解装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to an ozone dissolving device, and more particularly to a diffused type ozone dissolving device that is capable of dissolving ozone at a high concentration in a liquid such as water. It is something.

（従来技術とその問題点） 廃水処理プラント、水処理プラント及び半導体等電子部
品の製造工程におけるクリーニング装置やレジストアッ
シング装置、医薬品・医療分野における殺菌・滅菌装置
には、水等に溶解したオゾンが広く用いられる。(Prior art and its problems) Ozone dissolved in water, etc. is used in wastewater treatment plants, water treatment plants, cleaning equipment and resist ashing equipment in the manufacturing process of semiconductors and other electronic parts, and sterilization and sterilization equipment in the pharmaceutical and medical fields. Widely used.

かかるオゾンの水への溶解は、通常のエアレーションに
おける酸素溶解と同様に、二重境膜論に従うとされてい
る。It is said that the dissolution of ozone in water follows the double-layer theory, similar to the dissolution of oxygen in normal aeration.

即ち、以下の公式に従う。That is, the following formula is followed.

％式％） ここで、Ｎ　ニオシンの移動速度 ＫＬ：源側の総括物質移動速度 Ａ　：気液接触面積 Ｃ：液中のオゾン濃度 Ｃ８：その圧力で平衡して存在す るオゾン濃度 従って、オゾンを高濃度に溶解させるにはＮを大きくす
ることははがならず、上式がら明らかなように、ＫＬや
Ａを大きくするする必要がある。(% formula %) Here, N Niosine transfer rate KL: Overall mass transfer rate on the source side A: Gas-liquid contact area C: Ozone concentration in the liquid C8: Ozone concentration existing in equilibrium at that pressure. In order to dissolve at a high concentration, it is not necessary to increase N, and as is clear from the above equation, it is necessary to increase KL and A.

従来このＫＬあるいはＡを大きくする方法が種々検討さ
れてきた６例えば、気液接触面積ウ 有ガスに対して高圧ポンプあるいは撹伴機構等の外部動
力によるエアーレーショを併用する方法である。さらに
他の方法として、気液接触面積を大きくする方法として
、液体が導入される長い気泡塔を準備し、この気泡塔に
対してオゾン含有ガスを導入する方法である。Conventionally, various methods for increasing KL or A have been studied.6 For example, there is a method of using an external power such as a high-pressure pump or a stirring mechanism to aerate the gas having a gas-liquid contact area. Yet another method for increasing the gas-liquid contact area is to prepare a long bubble column into which liquid is introduced, and to introduce ozone-containing gas into this bubble column.

しかしながらこれらの従来技術は、いずれも高圧ポンプ
や、長い気泡塔を使用するとうの点で設備コストが高い
、あるいは設備スペースが広く必要とする等の問題点が
あり、小型低価格のオゾン溶解装置としては適当ではな
い。However, all of these conventional technologies have problems such as high equipment costs due to the use of high-pressure pumps and long bubble columns, and the need for a large amount of equipment space. It is not appropriate as such.

（発明の目的） 本発明は、上記した従来技術の欠点を解決するためのも
のであり、安価な設備でかつ大きな設備スペースを必要
としないオゾン溶解装置を提供せんとするものである。(Objective of the Invention) The present invention is intended to solve the above-mentioned drawbacks of the prior art, and aims to provide an ozone dissolving device that is inexpensive and does not require a large facility space.

（発明の構成） 本発明は、水等の液体中に配した０、１〜１０ミクロン
径の細孔を多数有するセラミック又はガラス製の中空フ
ィルターの該中空部分にオゾン含有ガスを導入し、該細
孔からオゾンガスを噴出せしめて液体中にオゾンガスを
溶解させることを特徴とするオゾン溶解装置である。(Structure of the Invention) The present invention introduces ozone-containing gas into the hollow portion of a ceramic or glass hollow filter having a large number of pores with a diameter of 0, 1 to 10 microns arranged in a liquid such as water. This is an ozone dissolving device characterized by ejecting ozone gas from pores and dissolving the ozone gas in a liquid.

（実施例） 以下、本発明を図面に示した実施例に基づいて詳細に説
明するが、本発明は、この実施例に限定されるものでは
ない。(Example) Hereinafter, the present invention will be described in detail based on an example shown in the drawings, but the present invention is not limited to this example.

第１図において、１は溶解槽であり、例えば市水が貯蔵
されている。２はオゾン含有ガスの導入管であり、例え
ば図示しないオゾン発生装置に接続されている。３は該
オゾンガスの導入管２に接続され、前記溶解槽１に貯蔵
された市水に浸漬された０、１〜１０ミクロン径の細孔
を多数有するセラミック又はガラス製の中空フィルター
である。該中空フィルターの解放端部は閉そくされてい
る。In FIG. 1, 1 is a dissolution tank in which, for example, city water is stored. Reference numeral 2 denotes an ozone-containing gas introduction pipe, which is connected to, for example, an ozone generator (not shown). 3 is a hollow filter made of ceramic or glass, which is connected to the ozone gas introduction pipe 2 and immersed in the city water stored in the dissolution tank 1, and has a large number of pores with a diameter of 0.1 to 10 microns. The open end of the hollow filter is closed.

二重境膜論に従う式、即ち、 Ｎ＝ＫＬ−Ａ　　（ＣＳ−Ｃ） ここで、Ｎ　ニオシンの移動速度 ＫＬ：液間の総括物質移動速度 Ａ　：気液接触面積 Ｃ：液中のオゾン濃度 Ｃ８：その圧力で平衡して存在す るオゾン濃度 においては、オゾンの短時間かつ高濃度の水等液体への
溶解を行わせる際には、液間の総括物質移動係数（ＫＬ
）、気液接触面積（Ａ）、気液オゾン濃度差（ＣＳ−Ｃ
）を大きくする必要がある。特に、ＫＬやＡ）は、気／
液比、気泡径、気泡上昇速度、レイノルズ係数、水温、
ＰＨに関係し、オゾン含有ガスの液中への注入方法が重
要となる。Formula according to the double boundary film theory, namely, N=KL-A (CS-C) where, N Transfer rate of niosin KL: Overall mass transfer rate between liquids A: Gas-liquid contact area C: Ozone concentration in the liquid C8: At the ozone concentration that exists in equilibrium at that pressure, when dissolving ozone in a liquid such as water in a short time and at a high concentration, the overall mass transfer coefficient (KL) between the liquids is
), gas-liquid contact area (A), gas-liquid ozone concentration difference (CS-C
) needs to be increased. In particular, KL and A) are
Liquid ratio, bubble diameter, bubble rising speed, Reynolds coefficient, water temperature,
In relation to pH, the method of injecting the ozone-containing gas into the liquid is important.

上記した本発明のオゾン溶解装置においては、溶解槽１
に貯蔵された市水に浸漬された０、１〜ｌＯミクロン径
の細孔を多数有するセラミック又はガラス製の中空フィ
ルターを用いることによって、気液接触面積 められるように、できる限り小さい気泡径を作り、かつ
無数に液中に放出可能としたものである。In the ozone dissolving apparatus of the present invention described above, the dissolving tank 1
By using a ceramic or glass hollow filter with a large number of pores of 0.1 to 10 micron diameter, which is immersed in city water stored in a It is made into a liquid that can be released into the liquid in countless quantities.

上記したオゾン溶解装置において、０．５ミクロンの細
孔を無数に有する多孔質セラミックチューブ（内径８ｍ
ｍ）の一端を封じて、他端を導入管２に接続した。この
時のオゾンガスの圧力は０．３Ｋｇ／ａｍ”以下で、流
量は１〜２リットル／分程度であった。その結果、セラ
ミックチューブの外側に噴出したオゾンガスは、セラミ
ック／液界面で液と激しく混ざりあい、細かな気泡同志
が集合し、ある程度大きくなって後、液上面に向かつて
移動して行くことが分かった。その結果、気液接触面積
が極めて大きくなり、気／液比も高くなることからＫＬ
も大きくなり、溶解オゾン量が短時間で多くなることが
分かった。In the ozone dissolving apparatus described above, a porous ceramic tube (inner diameter 8 m) having countless 0.5 micron pores is used.
m) one end was sealed and the other end was connected to the introduction tube 2. The pressure of the ozone gas at this time was less than 0.3 kg/am'' and the flow rate was about 1 to 2 liters/min. As a result, the ozone gas ejected outside the ceramic tube violently interacted with the liquid at the ceramic / liquid interface. It was found that the small bubbles mix, gather together, grow to a certain size, and then move toward the top of the liquid.As a result, the gas-liquid contact area becomes extremely large, and the gas/liquid ratio becomes high. From that point on, KL
It was found that the amount of dissolved ozone increases in a short period of time.

第３図にその結果をグラフで示す、溶解槽には約２０リ
ツトルの市水を貯蔵し、前記セラミックチューブ１本に
６０．ＯＯＯｐｐｍのオゾンガスを導入し、無数の細か
い気泡を発生させたところ、約５分位で１１〜１２ｐｐ
ｍのオゾン溶解水が得られた。これは、従来のオゾン溶
解装置における同じ条件のオゾン溶解水濃度の約３倍の
値であった。The results are shown graphically in Figure 3. Approximately 20 liters of city water was stored in the dissolution tank, and each ceramic tube contained 60 liters of city water. When OOOppm of ozone gas was introduced and countless fine bubbles were generated, the concentration increased to 11 to 12 ppm in about 5 minutes.
m of ozone-dissolved water was obtained. This value was about three times the ozone dissolved water concentration under the same conditions in a conventional ozone dissolving device.

（発明の効果） 以上詳細に説明したごとく本発明のオゾン溶解装置は、
高圧ポンプ、撹伴手段あるいは長い気泡塔等の高価で大
きな設備スペースを必要とせずの高濃度のオゾン溶解水
を売ることができる。(Effects of the invention) As explained in detail above, the ozone dissolving device of the present invention has the following features:
Highly concentrated ozone-dissolved water can be sold without requiring expensive and large equipment space such as high-pressure pumps, stirring means, or long bubble columns.

従って、このようなオゾン溶解装置を用いることにより
、廃水処理プラント・水処理プラントのの小型化・低価
格化、半導体等電子部品等の製造工程におけるクリーニ
ング装置や、レジストアッシング装！、あるいは医薬品
・医療分野における殺菌・滅菌装置を小型化・低価格化
することが可能である。Therefore, by using such an ozone dissolving device, wastewater treatment plants and water treatment plants can be made smaller and cheaper, cleaning equipment in the manufacturing process of semiconductors and other electronic components, and resist ashing equipment! Alternatively, it is possible to downsize and lower the cost of sterilization and sterilization equipment in the pharmaceutical and medical fields.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明のオゾン溶解装置の概略斜視図である。 １：溶解槽　　　２：導入管 ３：中空フィルター FIG. 1 is a schematic perspective view of the ozone dissolving apparatus of the present invention. 1: Dissolution tank 2: Introduction pipe 3: Hollow filter

Claims (1)

【特許請求の範囲】 水等の液体中に配した０．１〜１０ミクロ ン径の細孔を多数有するセラミック又はガラス製の中空
フィルターの該中空部分にオゾン含有ガスを導入し、該
細孔からオゾンガスを噴出せしめて液体中にオゾンガス
を溶解させることを特徴とするオゾン溶解装置。[Claims] Ozone-containing gas is introduced into the hollow part of a ceramic or glass hollow filter having a large number of pores with a diameter of 0.1 to 10 microns arranged in a liquid such as water, and An ozone dissolving device characterized by ejecting ozone gas and dissolving the ozone gas in a liquid.
JP63033051A 1988-02-16 1988-02-16 Device for dissolving ozone Pending JPH01207190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63033051A JPH01207190A (en) 1988-02-16 1988-02-16 Device for dissolving ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63033051A JPH01207190A (en) 1988-02-16 1988-02-16 Device for dissolving ozone

Publications (1)

Publication Number Publication Date
JPH01207190A true JPH01207190A (en) 1989-08-21

Family

ID=12375969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63033051A Pending JPH01207190A (en) 1988-02-16 1988-02-16 Device for dissolving ozone

Country Status (1)

Country Link
JP (1) JPH01207190A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03154690A (en) * 1989-11-10 1991-07-02 Permelec Electrode Ltd Method and apparatus for making high concentration ozone water
FR2683158A1 (en) * 1991-11-06 1993-05-07 Tarting Philippe Production of microbubbles of gas within a liquid
DE19701971C1 (en) * 1997-01-22 1998-11-26 Invent Gmbh Entwicklung Neuer Technologien Method and device for cleaning substrate surfaces
ES2161129A1 (en) * 1999-03-23 2001-11-16 Orti Javier Porcar Ozone filter for air quality control

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03154690A (en) * 1989-11-10 1991-07-02 Permelec Electrode Ltd Method and apparatus for making high concentration ozone water
FR2683158A1 (en) * 1991-11-06 1993-05-07 Tarting Philippe Production of microbubbles of gas within a liquid
DE19701971C1 (en) * 1997-01-22 1998-11-26 Invent Gmbh Entwicklung Neuer Technologien Method and device for cleaning substrate surfaces
ES2161129A1 (en) * 1999-03-23 2001-11-16 Orti Javier Porcar Ozone filter for air quality control

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