JPH01204486A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH01204486A JPH01204486A JP2806488A JP2806488A JPH01204486A JP H01204486 A JPH01204486 A JP H01204486A JP 2806488 A JP2806488 A JP 2806488A JP 2806488 A JP2806488 A JP 2806488A JP H01204486 A JPH01204486 A JP H01204486A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- mirror
- gas flow
- oscillation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims abstract description 15
- 238000010168 coupling process Methods 0.000 claims abstract description 15
- 238000005859 coupling reaction Methods 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 230000010355 oscillation Effects 0.000 claims description 15
- 238000011109 contamination Methods 0.000 abstract description 7
- 230000003449 preventive effect Effects 0.000 abstract 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
- H01S3/076—Folded-path lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は軸流型ＣＯ２レーザ発振装置に関し、より詳細
には多重折り返し型軸流ＣＯ□レーザの長期使用後の出
力低下を防止するように改良したレーザ発振装置に関す
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an axial CO2 laser oscillation device, and more specifically, to a method for preventing a decrease in the output of a multi-folded axial CO□ laser after long-term use. This invention relates to an improved laser oscillation device.
第２図に従来技術の多重折り返し軸流ＣＯ□し−ザの構
成を示す。同図においては、本発明の説明に必要な共振
器の構成のみを示しており、放電励起のための高周波電
源や、ガス流を制御するルーツブローワ等は省略しであ
る。FIG. 2 shows the configuration of a prior art multiple folded axial flow CO□ laser. In the figure, only the configuration of the resonator necessary for explaining the present invention is shown, and a high frequency power source for excitation of discharge, a Roots blower for controlling gas flow, etc. are omitted.
図において、■は全反射鏡、２及び３は折り返し鏡、４
は出力結合鏡であり、６は放電管である。In the figure, ■ is a total reflection mirror, 2 and 3 are folding mirrors, and 4
is an output coupling mirror, and 6 is a discharge tube.
７は共振器内の光軸であり、折り返し鏡２及び３によっ
て、折り曲げられ、出力結合鏡４からレーザ光８が取り
出される。放電管６内にはガス流入口９．１１．１２及
び１４からガスが流入し、ガス流出口１０及び１３から
流出する。図において、矢印はレーザガスの流れる方向
を示している。放電管６内のガス速度は約１００ （ｍ
／ｓ ｅ ｃ）であってこれによってレーザ出力を増大
している。Reference numeral 7 denotes an optical axis within the resonator, which is bent by the folding mirrors 2 and 3, and a laser beam 8 is extracted from the output coupling mirror 4. Gas flows into the discharge tube 6 through gas inlets 9, 11, 12 and 14 and exits through gas outlets 10 and 13. In the figure, arrows indicate the direction in which the laser gas flows. The gas velocity inside the discharge tube 6 is approximately 100 (m
/sec), thereby increasing the laser output.
放電管６は構造的に２本並列で、レーザ光に対しては直
列になっているが、必要に応じて多数の放電管を使用す
ることができる。Structurally, two discharge tubes 6 are arranged in parallel and in series with respect to the laser beam, but a large number of discharge tubes can be used if necessary.
［発明が解決しようとする課題］
第２図に示す従来のレーザ発振装置では、時間の経過と
ともに出力の低下が見られる。経験によるとこれらは光
学部品の汚染によることが判明している。第２図の構成
で各光学部品（全反射鏡１、折り返し鏡２及び３、出力
結合鏡４）の反射率が等しく１％低下するとレーザ出力
は約１０％低下することが確かめられている。しかも汚
染されるのは折り返し鏡２及び３であり、全反射鏡１や
出力結合鏡４はそれ程の汚染はない。従って、折り返し
鏡３及び４の汚染を、全反射鏡１及び出力結合鏡４並に
抑えれば出力低下を防止することができる。[Problems to be Solved by the Invention] In the conventional laser oscillation device shown in FIG. 2, a decrease in output is observed over time. Experience has shown that these are due to contamination of the optical components. It has been confirmed that in the configuration shown in FIG. 2, if the reflectance of each optical component (total reflection mirror 1, folding mirrors 2 and 3, output coupling mirror 4) decreases by 1%, the laser output decreases by about 10%. Moreover, it is the folding mirrors 2 and 3 that are contaminated, and the total reflection mirror 1 and the output coupling mirror 4 are not so contaminated. Therefore, by suppressing the contamination of the folding mirrors 3 and 4 as well as the total reflection mirror 1 and the output coupling mirror 4, a decrease in output can be prevented.
折り返し鏡３及び４のみが汚染されるのは、折り返し鏡
３及び４がレーザガスの流れ中に位置しているからであ
る。レーザガス中には機構部からの固体粉末やオイルミ
ストが含まれているので光学部品表面にこれが付着する
。出力結合鏡４や全反射鏡１が汚染されないのは、第２
図に示す放電管６の斜線部分６ａ、６ｂは行き止まりと
なっており、全反射鏡１及び出力結合鏡４付近ではガス
流がないためである。 これに対して、折り返し鏡３及
び４では行き止まり位置にないので、ガス流入口９及び
１２から流入するレーザガスの一部のバイパスとしてガ
ス流にさらされており、汚染され易い。折り返し鏡３及
び４の領域を行き止まり構造にしてやれば折り返し鏡２
及び３も、全反射鏡１や出力結合鏡４のように汚染され
ないであろうが、レーザ光の通路を妨げることはできな
い。Only the folding mirrors 3 and 4 are contaminated because they are located in the flow of the laser gas. Since the laser gas contains solid powder and oil mist from the mechanism, this adheres to the surface of the optical component. The reason why the output coupling mirror 4 and the total reflection mirror 1 are not contaminated is because of the second
The hatched portions 6a and 6b of the discharge tube 6 shown in the figure are dead ends because there is no gas flow near the total reflection mirror 1 and the output coupling mirror 4. On the other hand, since the folding mirrors 3 and 4 are not at dead end positions, they are exposed to the gas flow as a bypass for part of the laser gas flowing in from the gas inlets 9 and 12, and are easily contaminated. If the areas of folding mirrors 3 and 4 are made into a dead end structure, folding mirror 2
and 3 will not be contaminated like the total reflection mirror 1 and the output coupling mirror 4, but they cannot obstruct the path of the laser light.
本発明はこのような点に鑑みてなされたものであり、多
重折り返し型軸流ＣＯ□レーザの長期使用後の出力低下
を防止するように改良したレーザ発振装置を提供するこ
とを目的とする。The present invention has been made in view of these points, and it is an object of the present invention to provide a laser oscillation device that is improved so as to prevent a decrease in the output of a multi-folded axial CO□ laser after long-term use.
本発明では上記の課題を解決するために、全反射鏡及び
出力結合鏡の他に折り返し鏡を用いて光軸を多段に折り
返した多重折り返し型高速軸流レーザであるレーザ発振
装置において、該折り返し鏡を含む領域が、レーザ管ガ
ス流と連結するガス流閉回路内に位置することを防止す
る閉塞物を有し、
該閉塞物はレーザ光に対しては透明であることを特徴と
するレーザ発振装置が、
提供される。In order to solve the above-mentioned problems, the present invention provides a laser oscillation device that is a multi-folding type high-speed axial flow laser in which the optical axis is folded in multiple stages using a folding mirror in addition to a total reflection mirror and an output coupling mirror. A laser characterized in that the region including the mirror has an obstruction that prevents the region from being located in a closed gas flow circuit connected to the laser tube gas flow, and the obstruction is transparent to the laser beam. An oscillator is provided.
折り返し鏡を含む領域が閉塞物によってレーザガスが流
入しないので、レーザガス流にさらされることがない、
一方、閉塞物はレーザ光に対しては透明であるので、レ
ーザ光を妨げない。The area containing the folding mirror is not exposed to the laser gas flow because the laser gas does not enter the area due to the blockage.
On the other hand, since the obstruction is transparent to the laser beam, it does not interfere with the laser beam.
従って、折り返し鏡の汚染が防止され、出力低下が防止
できる。Therefore, contamination of the folding mirror can be prevented and a decrease in output can be prevented.
以下、本発明の一実施例を図面に基づいて説明する。 Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図に本発明の一実施例のレーザ発振装置の構成図を
示す。同図においては、本発明の説明に必要な共振器の
構成のみを示しており、放電励起のための高周波電源や
、ガス流を制御するルーツブローワ等は省略しである。FIG. 1 shows a configuration diagram of a laser oscillation device according to an embodiment of the present invention. In the figure, only the configuration of the resonator necessary for explaining the present invention is shown, and a high frequency power source for excitation of discharge, a Roots blower for controlling gas flow, etc. are omitted.
１は全反射鏡、２及び３は折り返し鏡、４は出力結合鏡
である。1 is a total reflection mirror, 2 and 3 are folding mirrors, and 4 is an output coupling mirror.
５は両面に反射防止膜をつけた平行平板であり、ＣＯｚ
レーザに対してはＺｎ５ｅが好ましい。−般市場で入
手できる平行平板は表裏面の膜及び基板の合計吸収率が
０．１８％以下であり、十分にレーザ共振器内に設置し
て、レーザ光を透過させる目的を果たすことができる。5 is a parallel plate with antireflection coatings on both sides, and COz
Zn5e is preferred for lasers. - Parallel flat plates available on the general market have a total absorption rate of 0.18% or less for the front and back films and substrate, and can be installed in a laser resonator sufficiently to fulfill the purpose of transmitting laser light. .
６は放電管である。７は共振器内の光軸であり、折り返
し鏡２及び３によって、折り曲げられ、出力結合鏡４か
らレーザ光８が取り出される。放電管６内にはガス流入
口９．１１．１２及び１４からガスが流入し、ガス流出
口１０及び１３から流出する。図において、矢印はレー
ザガスの流れる方向を示している。6 is a discharge tube. Reference numeral 7 denotes an optical axis within the resonator, which is bent by the folding mirrors 2 and 3, and a laser beam 8 is extracted from the output coupling mirror 4. Gas flows into the discharge tube 6 through gas inlets 9, 11, 12 and 14 and exits through gas outlets 10 and 13. In the figure, arrows indicate the direction in which the laser gas flows.
先に述べた平行平板５はガス流入口９及び１２からのレ
ーザガスの流入に対して、第１図に斜線で示すようにガ
スの淀み個所６Ｃ１６ｄを形成し、折り返し鏡２及び３
もレーザガス流による汚染から解放される。The above-mentioned parallel plate 5 forms gas stagnation points 6C16d as shown by diagonal lines in FIG. 1 with respect to the inflow of laser gas from the gas inlets 9 and 12, and
is also freed from contamination by the laser gas flow.
さらに、新鮮ボンベ１９から、それぞれフィルター１５
．１６．１７及び１８を通し、新鮮ガスの補給口２０．
２１．２２及び２３から新鮮ガスを補給すれば、拡散に
よって汚染されたレーザガスが光学部品に至るのを防止
することができるので、汚染防止はより完全になる。Furthermore, from the fresh cylinder 19, each filter 15
．． 16. Through 17 and 18, fresh gas supply port 20.
Replenishing fresh gas from 21, 22 and 23 can prevent the laser gas contaminated by diffusion from reaching the optical components, making the contamination prevention more complete.
上記の説明では、平行平板は折り返し鏡と折り返し鏡の
間に設けたが、これ以外に、折り返し鏡とレーザガス流
入口との間に設けても良いし、ブリュスター入射角に設
置した透明板でもよい。ただし、ブリュスター入射角Ｃ
巳゛設置したときは、折り返し鏡とブリュスター板の間
で偏光面整合をする必要がある。放電管の本数及び結合
の形はレーザ発振装置の目的に応じて、増加させること
ができる。In the above explanation, the parallel plate is provided between the folding mirror and the folding mirror, but it may also be provided between the folding mirror and the laser gas inlet, or it may be a transparent plate installed at the Brewster incidence angle. good. However, Brewster incidence angle C
When installed, it is necessary to align the plane of polarization between the folding mirror and the Brewster plate. The number of discharge tubes and the shape of their coupling can be increased depending on the purpose of the laser oscillation device.
なお、本発明は上記の実施例に限定されるものでなく、
他の種々の変形等にも、本発明の範囲で適用することが
できる。Note that the present invention is not limited to the above embodiments,
Various other modifications can also be applied within the scope of the present invention.
以上説明したように本発明では、レーザガス流が直接折
り返し鏡の表面を流れないように構成したので、折り返
し鏡の汚染を防止でき、長期間使用しても出力の低下が
発生しない。As described above, the present invention is configured so that the laser gas flow does not flow directly over the surface of the folding mirror, so that contamination of the folding mirror can be prevented and no reduction in output occurs even after long-term use.
第１図は本発明の一実施例のレーザ発振装置の構成図、
第２図は従来技術の多重折り返し軸流ＣＯ２レーザの構
成図である。
１−・−ｍ−−−−−・−全反射鏡
２．３−・・−・折り返し鏡
４−・・−−−−〜−−・−出力結合鏡５−−−−−−
−−−−−−−−−・ガス流閉塞板６−・−−一−−−
−−−−レーザ管
７−・−・−一一一一一一一共振器内光軸８−−−−−
−−−・−−−−−−レーザ光線９．１１．１２．１４
−・−−−−−一一−−レーザガス流入口１０．１３−
−−−−−〜・−−一−−−・−レーザガス流出口１５
〜１８・−・−−−−一−−−−−・−フィルター１９
−−−−−−−−−−−−−−−一補給ガスボンベ２０
〜２３−−−−−・−・・−補給ガスロ特許出願人 フ
ァナック株式会社
代理人 弁理士 服部毅巖FIG. 1 is a block diagram of a laser oscillation device according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional multiple folded axial flow CO2 laser. 1-・-m-------Total reflection mirror 2.3--Folding mirror 4---------Output coupling mirror 5--
−−−−−−−−・Gas flow blocking plate 6−・−−1−−−
-----Laser tube 7----111111 Optical axis in resonator 8------
---・---- Laser beam 9.11.12.14
-・------11--Laser gas inlet 10.13-
----------------Laser gas outlet 15
~18・−・−−−−−−−−−・−Filter 19
−−−−−−−−−−−−−−−1 supply gas cylinder 20
〜23－－－－－・－・・・Refueling Gasoline Patent Applicant Fanuc Co., Ltd. Agent Patent Attorney Takeshi Hattori
Claims (6)
て光軸を多段に折り返した多重折り返し型高速軸流レー
ザであるレーザ発振装置において、該折り返し鏡を含む
領域が、レーザ管ガス流と連結するガス流閉回路内に位
置することを防止する閉塞物を有し、 該閉塞物はレーザ光に対しては透明であることを特徴と
するレーザ発振装置。(1) In a laser oscillation device that is a multi-folding type high-speed axial flow laser in which the optical axis is folded in multiple stages using a folding mirror in addition to a total reflection mirror and an output coupling mirror, the region including the folding mirror is 1. A laser oscillation device comprising: a blockage that prevents gas from being located in a closed gas flow circuit connected to a gas flow, the blockage being transparent to laser light.
の透明板であることを特徴とする特許請求の範囲第１項
記載のレーザ発振装置。(2) The laser oscillation device according to claim 1, wherein the obstruction is a parallel flat transparent plate provided with an antireflection film on both sides.
の透明板であることを特徴とする特許請求の範囲第１項
記載のレーザ発振装置。(3) The laser oscillation device according to claim 1, wherein the obstruction is a parallel plate-shaped transparent plate having a Brewster angle of incidence.
れていることを特徴とする特許請求の範囲第１項記載の
レーザ発振装置。(4) The laser oscillation device according to claim 1, wherein the obstruction is provided between the two folding mirrors.
れていることを特徴とする特許請求の範囲第１項記載の
レーザ発振装置。(5) The laser oscillation device according to claim 1, wherein the obstruction is provided between the folding mirror and the laser tube.
口が設けられていることを特徴とする特許請求の範囲第
１項記載のレーザ発振装置。(6) The laser oscillation device according to claim 1, wherein a fresh gas supply port is provided between the folding mirror and the laser tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806488A JPH01204486A (en) | 1988-02-09 | 1988-02-09 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806488A JPH01204486A (en) | 1988-02-09 | 1988-02-09 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01204486A true JPH01204486A (en) | 1989-08-17 |
Family
ID=12238334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2806488A Pending JPH01204486A (en) | 1988-02-09 | 1988-02-09 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01204486A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0444283A (en) * | 1990-06-07 | 1992-02-14 | Fanuc Ltd | Laser oscillator |
| JPH05136487A (en) * | 1991-11-11 | 1993-06-01 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
| JPH0766473A (en) * | 1993-08-26 | 1995-03-10 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
| US5856993A (en) * | 1994-08-24 | 1999-01-05 | Matsushita Electric Industrial Co. Ltd. | Gas laser oscillator |
| JP2010171145A (en) * | 2009-01-21 | 2010-08-05 | Fanuc Ltd | Gas laser oscillator |
| JP5832609B1 (en) * | 2014-08-25 | 2015-12-16 | ファナック株式会社 | Laser oscillator with laser medium flow path |
-
1988
- 1988-02-09 JP JP2806488A patent/JPH01204486A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0444283A (en) * | 1990-06-07 | 1992-02-14 | Fanuc Ltd | Laser oscillator |
| JPH05136487A (en) * | 1991-11-11 | 1993-06-01 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
| JPH0766473A (en) * | 1993-08-26 | 1995-03-10 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
| US5856993A (en) * | 1994-08-24 | 1999-01-05 | Matsushita Electric Industrial Co. Ltd. | Gas laser oscillator |
| JP2010171145A (en) * | 2009-01-21 | 2010-08-05 | Fanuc Ltd | Gas laser oscillator |
| JP5832609B1 (en) * | 2014-08-25 | 2015-12-16 | ファナック株式会社 | Laser oscillator with laser medium flow path |
| US9350134B2 (en) | 2014-08-25 | 2016-05-24 | Fanuc Corporation | Laser oscillator provided with laser medium flow path |
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