JPH01202676A - Connection apparatus for measuring integrated circuit - Google Patents

Connection apparatus for measuring integrated circuit

Info

Publication number
JPH01202676A
JPH01202676A JP63026795A JP2679588A JPH01202676A JP H01202676 A JPH01202676 A JP H01202676A JP 63026795 A JP63026795 A JP 63026795A JP 2679588 A JP2679588 A JP 2679588A JP H01202676 A JPH01202676 A JP H01202676A
Authority
JP
Japan
Prior art keywords
board
socket
contact
ring
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63026795A
Other languages
Japanese (ja)
Other versions
JPH056153B2 (en
Inventor
Nobuyoshi Takagi
高木 悦義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asia Electronics Co
Original Assignee
Asia Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asia Electronics Co filed Critical Asia Electronics Co
Priority to JP63026795A priority Critical patent/JPH01202676A/en
Publication of JPH01202676A publication Critical patent/JPH01202676A/en
Publication of JPH056153B2 publication Critical patent/JPH056153B2/ja
Granted legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To facilitate the replacement of a socket board according to the kind of an IC and to enhance the maintenance efficiency of a contact probe, by performing the mounting and detachment of the socket board and an IC socket by inserting a projection in an L-shaped groove to slightly rotate the same. CONSTITUTION:Attachment rings 25, 26 are ones for easily mounting and detaching a socket board 1. The hole opened to a performance board 2 is used as a guide and the pin like metal fitting of a contact board 21 is inserted in said hole to fix the board 21 to the board 2. Further, the board 1 is mounted on the contact probes 22 provided to both ends of the board 21. Since springs are inserted in the probes 22, a pin like body 32 is inserted in an L-shaped groove 51 while the ring 25 is pushed toward the ring 26 against said springs to slightly rotate the ring 25 in the peripheral direction and the pin like body 32 is deeply inserted in the groove 51 to fix the ring 51. As a result, the predetermined conductor parts of the boards 1, 2 are electrically connected through the probes 22. The probes 22 are easily detachable with respect to the board 21.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、IC(集積回路)測定装置本体の先端に設け
られるテストヘッドとICソケットとの間に設けられる
集積回路測定用接続装置に関する。
Detailed Description of the Invention [Object of the Invention] (Industrial Field of Application) The present invention relates to an IC (integrated circuit) measuring device installed between a test head and an IC socket provided at the tip of a main body of an IC (integrated circuit) measuring device. connection device.

(従来の技術) 従来の集積回路測定用接続装置の構成を図面で説明する
。第6図はその平面図1第7図は同断面的構成図である
。このものは、ソケットポート91Sノ4’7オーマン
スポード2mICソケット3−被測定IC4,配線5.
テストヘッド6等から構成されている。テストヘッド6
はIC測定装置本体(図示せず)に接続される。
(Prior Art) The configuration of a conventional integrated circuit measurement connecting device will be explained with reference to the drawings. FIG. 6 is a plan view thereof, and FIG. 7 is a sectional configuration diagram thereof. This one consists of socket port 91S - 4'7 Ohman port 2m IC socket 3 - IC to be measured 4, wiring 5.
It consists of a test head 6 and the like. test head 6
is connected to the IC measuring device main body (not shown).

第8図は集積回路測定用接続装置の他の従来例の平面図
、第9図はその断面的構成図、第10図はその一部を取
シ出して示す切欠断面図である。
FIG. 8 is a plan view of another conventional example of a connecting device for integrated circuit measurement, FIG. 9 is a cross-sectional configuration diagram thereof, and FIG. 10 is a cutaway sectional view showing a part thereof.

このものは、ソケットボード1〜ICソケツト3゜テス
トヘッド6等をそなえてbることは前述の装置と同様で
あるが、それ以外にコンタクトボード11、リング12
.マニアルボード押え13.ローレットねじ14.導電
性ニジストマー(導電性ゴム)15.これを押える虫ピ
ン16等をそなえている。
This device is the same as the above-mentioned device in that it is equipped with a socket board 1 to an IC socket 3, a test head 6, etc., but it also has a contact board 11, a ring 12, etc.
.. Manual board presser foot 13. Knurled screw 14. Conductive nidistomer (conductive rubber) 15. It is equipped with insect pins 16 to hold it down.

(発明が解決しようとする課題) 第6図、第7図の装置は、各異品種の被測定IC4をそ
れぞれ測定する時には、ノ9フォーマンスポード2から
ソケットボード1に、被測定IC4毎に異なる電気的な
接続をするため、異なった配線が必要となるので、ソケ
ットボード1.パフォーマンスボードJ、ICソケット
3を全て交換しなければならなかった。
(Problems to be Solved by the Invention) When the apparatuses shown in FIGS. 6 and 7 measure the ICs 4 to be measured of different types, the devices are connected from the performance board 2 to the socket board 1 for each IC 4 to be measured. Because different electrical connections require different wiring, the socket board 1. Performance board J and IC socket 3 all had to be replaced.

また第8図ないし第1θ図の装置にお−て、ソケットボ
ード1.ICソケット3によシ構成されるアセンブリは
、ソケットボード1からICソケット3に被測定IC4
毎に異なる電気的な接続を実現するためにつくられたも
のである。従りてソケットボード1を交換する際、ロー
レットねじ14を数個所とシはずさなければならず1作
業性が悪す、tた複数のローレットねじ14でリング1
2を、マニアルボード押え13を使って締めていたので
、複数のローレットねじ14相互の締め具合で締め付は
力が不均等にかかシ、導電ニジストマー15.16.・
・・の接触が不均一だった。更に導電ニジストマー15
は、コンタクトボード11を多数貫通した孔に、それぞ
れ1本状で挿入されかつ虫ピン16で止められているた
め、不具合が生じると、その1本を交換しなければなら
なりという欠点があった。
Further, in the apparatus shown in FIGS. 8 to 1θ, the socket board 1. The assembly constituted by the IC socket 3 includes an IC 4 to be measured from the socket board 1 to the IC socket 3.
It was created to realize different electrical connections for each type. Therefore, when replacing the socket board 1, it is necessary to remove several knurled screws 14, which impairs workability.
2 was tightened using the manual board presser 13, the tightening force was uneven due to the mutual tightness of the plurality of knurled screws 14, and the conductive nystomer 15, 16.・
...The contact was uneven. Furthermore, conductive nidistomer 15
The contact board 11 is inserted in one piece into each of the holes penetrating the contact board 11, and is secured with an insect pin 16, so if a problem occurs, one of the pieces has to be replaced. .

本発明は上記実情に鑑みてなされたもので、上記各欠点
を改善したIC測定用接続装置を提供するものである。
The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a connection device for IC measurement that improves each of the above-mentioned drawbacks.

これによ)マニアルボードの交換が容易で、更にコンタ
クトプローブの保守能率を向上させるのが目的である。
The purpose of this is to make it easier to replace the manual board and to improve the efficiency of contact probe maintenance.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段と作用) 本発明は、IC測定装置本体に接続されるテストヘッド
の上部に、配線が施こされたノタフォーマンスポードが
設けられ、その上に載置されるコンタクトボードにはこ
れを貫通する複数の両端コンタクトプローブがありて、
この両端コンタクトプローブは、上下二個に分かれてい
て共にスプリングによシ上下に出没可能なものであって
、上記/4フォーマンスポードと、配線が施こされたソ
ケットボードとの間で上記各両端コンタクトグローブの
両端を押えつけるようにし、上記パフォーマンスボード
から側方に突設された突状物を、上記ソケットボードと
接触関係にあ)かつ周囲が蓋状のアタッチメントの複数
のL字状溝に嵌合しかつ上記アタッチメントをその周方
向にや一回転して上記突状物を上記り字状溝の奥に入れ
ることにょシ、上記ソケットボードとノ臂フォーマンス
ポード間を固定すると共に上記両端コンタクトグローブ
を介して上記ソケットボードと/母フォーマンスポード
の配線間を電気的Ktl続し、上記ソケットポーP上の
ICソケットと接続するようにしたことを特徴とする集
積回路測定用接続装置である。
(Means and effects for solving the problem) The present invention provides a test head connected to the main body of an IC measuring device, and a nota performance board with wiring provided thereon. The contact board has multiple double-ended contact probes that pass through it.
This double-ended contact probe is divided into upper and lower parts, both of which can be retracted and retracted vertically by means of a spring. Both ends of the contact glove are pressed against both ends, and a protrusion protruding laterally from the performance board is connected to a plurality of L-shaped grooves of an attachment that is in contact with the socket board and has a lid-shaped periphery. , and by rotating the attachment a little in the circumferential direction to insert the protruding object deep into the L-shaped groove, fixing the socket board and the arm formance board, and fixing the A connecting device for measuring integrated circuits, characterized in that the wiring of the socket board and/or the motherboard is electrically connected via contact gloves at both ends, and connected to the IC socket on the socket port P. It is.

即ち本発明は、突状物をL字状溝に差し込んで少し回転
させればソケットボード及びICソケットの着脱が可能
だから、容易に各異品種のIC測定に対応できる。また
二つ割シ散の両端コンタクトプロープ構成であるため1
片方のゾロープ損耗の際1片方のグローブのみの交換が
可能である。
That is, in the present invention, the socket board and the IC socket can be attached and detached by inserting the protrusion into the L-shaped groove and slightly rotating it, so that it is possible to easily measure different types of ICs. In addition, since it has a contact probe configuration at both ends that is split into two parts,
If one of the gloves wears out, only one glove can be replaced.

またコンタクトボードよシ下側は、被測定ICの品種に
係わらず一定物で、ソケットボード及びICソケットの
みが被測定ICの品種に係わるものだから、一つのパフ
ォーマンスボードで異品種のICが測定できる。また突
状物とL字状溝とアタッチメントの形状が予め皿で決っ
た形状となるから、各両端コンタクトプローブに加わる
力が均等になるものである。
In addition, the lower side of the contact board is constant regardless of the type of IC being measured, and only the socket board and IC socket are related to the type of IC being measured, so different types of ICs can be measured with one performance board. . Furthermore, since the shapes of the protrusion, the L-shaped groove, and the attachment are predetermined by the plate, the force applied to the contact probes at both ends becomes equal.

(実施例) 以下図面を参照して本発明の一実施例を説明する。第1
図はその装置の平面図、第2図はその一部切反側面図で
ある。これら図において1はソケットボード、2はノぐ
フォーマンスポード、3はICソケット、4は被測定I
C,6はテストヘッドである。21はボード1,2間に
配置されるコンタクトボード、22はコンタクトボード
21を貫通し、ボード1.2の配線間をつなぐ両端コン
タクトプローブ、23はボード2.21間を固定するピ
ン状金具、24はボード1.21間を固定するピン状金
具、25はボード21のまわシを囲う周囲が蓋状のアタ
ッチメントリング、26はボード2上に複数の突起27
.・・・で固定されるアタッチメントリング、28はア
タッチメントリング26上の周囲に沿ってこれにビス2
9で固定されるリング、30はボーPl上とアタッチメ
ントリング25間に配置され該リング25にビス31で
固定されるリングで、このリング30はボード1とは接
してbるだけである。32はリング28に取シ付けられ
先端を外周方向に突出させたピン状物(突状物)で、こ
のピン状物32はリング280JHJ囲に沿って間隔的
に数個(例えばa % dの個所)設仕られ、同個所に
設けられたアタッチメントリング25のL字状溝にそれ
ぞれ嵌合されている。
(Example) An example of the present invention will be described below with reference to the drawings. 1st
The figure is a plan view of the device, and FIG. 2 is a partially cutaway side view thereof. In these figures, 1 is the socket board, 2 is the performance board, 3 is the IC socket, and 4 is the I to be measured.
C, 6 is a test head. 21 is a contact board arranged between boards 1 and 2; 22 is a contact probe at both ends that penetrates the contact board 21 and connects the wiring on board 1.2; 23 is a pin-like metal fitting that fixes between the boards 2 and 21; 24 is a pin-like metal fitting that fixes between the boards 1 and 21; 25 is an attachment ring with a lid-like circumference that surrounds the circumference of the board 21; 26 is a plurality of protrusions 27 on the board 2;
.. The attachment ring 28 is fixed by screws 2 along the circumference on the attachment ring 26.
A ring 9 is fixed, and a ring 30 is placed between the board Pl and the attachment ring 25, and is fixed to the ring 25 with a screw 31. This ring 30 is in contact with the board 1 only at point b. Reference numeral 32 denotes a pin-like object (protruding object) that is attached to the ring 28 and whose tip protrudes toward the outer circumference. They are respectively fitted into L-shaped grooves of the attachment ring 25 provided at the same locations.

第3図は各両端コンタクトプローブ22のうちの1本を
示す。この構成は、金属プローブ片22□。
FIG. 3 shows one of each double-ended contact probe 22. As shown in FIG. This configuration has a metal probe piece 22□.

22、に分割されて、それぞれがスプリング33.。22, each with a spring 33. .

33!によシ金属スリーブ部34の両端で出没可能にな
りている。金属プローブ片221  # ”z間の電気
的導通は、スプリング33..33.。
33! Both ends of the metal sleeve portion 34 are retractable. Electrical continuity between metal probe pieces 221 #'z is established by springs 33..33.

ストツ1435.,35冨 、スリーブ部34を介して
とってもよいが、プローブ片22.,22.をそれぞれ
くの字形に曲げ、スリーブ部34の内壁に接触させるこ
と等によシとってもより0第4図はノ9フォーマンスポ
ード2とアタッチメントリング26の固着方法を示す。
Stotsu 1435. , 35, may be taken through the sleeve portion 34, but the probe piece 22. , 22. FIG. 4 shows a method of fixing the forman spode 2 and the attachment ring 26 by bending them into a dogleg shape and bringing them into contact with the inner wall of the sleeve portion 34.

そのためには。for that purpose.

ボード2の突起物27をリング26の変形長孔41に差
し込み、ボード2とリング26を相対的に図示矢印方向
に回せば1両者の着脱が可能である。
By inserting the protrusion 27 of the board 2 into the deformable elongated hole 41 of the ring 26 and rotating the board 2 and the ring 26 relative to each other in the direction of the arrow in the figure, it is possible to attach and detach them both.

箒5図は1周囲が蓋状のアタッチメントリング25の側
部構成を示す。即ち該リングの側部には5字状溝51が
切欠構成されているため、ピン状物32の先端を5字状
溝51の下側から該湾内に差し込み、リング25を各両
端コンタクトプローブ22に抗して押し下げてからや一
周方向に回転させれば、ピン状物32の先端は5字状溝
51の奥51.に入る。このよ5な操作は第1図のa〜
dの個所でそれぞれ行なわれ、リング2B 、26゜突
起27等を介してリング25がボード2に取シ付けられ
る。
Broom 5 Figure 5 shows a side configuration of an attachment ring 25 whose periphery is lid-shaped. That is, since a 5-shaped groove 51 is cut out in the side of the ring, the tip of the pin-shaped object 32 is inserted into the groove from below the 5-shaped groove 51, and the ring 25 is inserted into the contact probe 22 at each end. If the pin-like object 32 is pushed down against the pressure and then rotated in the circumferential direction, the tip of the pin-like object 32 will be located at the back 51. of the 5-shaped groove 51. to go into. These five operations are from a to a in Figure 1.
The ring 25 is attached to the board 2 via the ring 2B, the 26° protrusion 27, etc., respectively.

次に第1図、第2囚の接続装置の組み立て方を説明する
。アタッチメントリングzs、z6)t’rソクットボ
ード1を容易に着脱するためのものであシ1両端コンタ
クトプローブ22はソケットボード1とパフォーマンス
ボード2(共にプリント基板状)を電気的に接続するも
のであシ、かつ両端コンタクトプローブ22は容易にコ
ンタクトボード21対し着脱可能な状態にある。しかし
てパフォーマンスボード2に開けられた孔をガイドとし
て、該孔にコンタクトボード21のピン状金具23を挿
入することによりて、コンタクトボード21をノぐフォ
ーマンスポード2に固定する。更にソケットボード1を
コンタクトボード21の各両端コンタクトグローブ22
上に載せる。各両端コンタクトプローブ22にはバネ3
3m 、33.が挿入されて込るので、これに抗してア
タッチメントリング25をアタッチメントリング26方
向に押しながらピン状物32をL字状溝51内に入れ。
Next, the method of assembling the connection device of the second prisoner shown in FIG. 1 will be explained. Attachment rings zs, z6) t'r This is for easily attaching and detaching the socket board 1. The contact probes 22 at both ends are for electrically connecting the socket board 1 and the performance board 2 (both printed circuit board type). Moreover, the contact probes 22 at both ends can be easily attached to and detached from the contact board 21. The contact board 21 is fixed to the performance board 2 by inserting the pin-shaped metal fitting 23 of the contact board 21 into the hole using the hole drilled in the performance board 2 as a guide. Furthermore, the socket board 1 is attached to each end of the contact board 21 with contact gloves 22.
Put it on top. A spring 3 is attached to each end contact probe 22.
3m, 33. is inserted, so push the attachment ring 25 in the direction of the attachment ring 26 against this and put the pin-shaped object 32 into the L-shaped groove 51.

アタッチメントリング25を周方向に少し回転させて、
ピン状物32を5字状溝51の奥51.に入れることに
よシアタッチメントリング25を固定すれば、ソケット
ボード1とパフォーマンスボード2の所定の導体部間が
、各両端コンタクトプローブ22を介して電気的に接続
されるものである。
Rotate the attachment ring 25 slightly in the circumferential direction,
Insert the pin-shaped object 32 into the inner part 51 of the 5-shaped groove 51. When the seat attachment ring 25 is fixed by inserting the seat attachment ring 25 into the socket, predetermined conductor portions of the socket board 1 and the performance board 2 are electrically connected via the contact probes 22 at both ends.

上記のような構成であれば次のような利点が具備される
。  ・ (イ) ピン状物32を5字状溝51に差し込んで少し
アタッチメントリング25を回転させる取)付は構造だ
から、被測定IC4の品種に応じたソケットボードlの
着脱が容易である。
The above configuration has the following advantages. (a) Since the mounting structure is such that the pin-shaped object 32 is inserted into the 5-shaped groove 51 and the attachment ring 25 is slightly rotated, it is easy to attach and detach the socket board l according to the type of IC 4 to be measured.

(c4  両端コンタクトプローブ22を用いたため。(c4 Because the double-ended contact probe 22 was used.

プローブ損耗がある方の片半部22□か223の込ずれ
かを交換すればよい。
Either the probe half 22□ or the half 223 that is damaged should be replaced.

(ハ) コンタクトボード21.パフォーマンスボード
2は被測定IC4の品種に係わらず一定物を用すればよ
く、ソケットボード1及びその上のICソケット3を、
上記ソケットボード1の取シ付は方とは逆操作で取シ外
せるから、一つのノやフォーマンスポード2で異品種の
ICが測定できる。
(c) Contact board 21. A fixed performance board 2 may be used regardless of the type of IC 4 to be measured, and the socket board 1 and the IC socket 3 on it may be
Since the socket board 1 can be installed and removed by performing the reverse operation, it is possible to measure different types of ICs with a single board or formance board 2.

に) アタッチメント25.L字状*51.ビン状物3
2等の形状が予め決った型でつくられるから、アタッチ
メントリング25.26の回転機構固定によシ、各両端
コンタクト!ローブ22に加わる力が均等になった。
) Attachment 25. L-shaped *51. Bottle-like object 3
Since the shape of the second grade is made in a predetermined mold, it is possible to fix the rotation mechanism of the attachment ring 25, 26, and contact both ends! The forces applied to the lobes 22 are now equalized.

〔発明の効果〕〔Effect of the invention〕

以上説明した如く本発明によれば、被測定ICの品種に
応じたソケットボードの交換が容易であシ、シかもコン
タクトグローブの保守能率を向上させ得る等の利点を有
した集積回路測定用接続装置が提供できるものである。
As explained above, according to the present invention, the socket board can be easily replaced according to the type of IC to be measured, and the maintenance efficiency of the contact glove can be improved. This is what the equipment can provide.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の装置の平面図、第2図は同
装置の一部切欠側面図、第3図なりし第5図は同装置の
要部の構成図、第6図は従来装置の平面図、第7図はそ
の断面的構成図、第8図は他の従来装置の平面図、第9
図は第8図のA−A′線に沿う断面的構成図、第10図
はその一部を取シ出して示す切欠図である。 1・・・ソケットボード、2・・・パフォーマンスボー
ド、3・・・ICソケット、4・・・被測定IC,6・
・・テストヘッド、21・・・コンタクトボード、22
・・・両端コンタクトプローブ、23,24.27・・
・ビン状金具、28.30・・・リング、 29 、 
、? 1・・・ねじ。 32・・・ビン状物(突状物)、33..33□・・・
スプリング#34・・・金属スリーブ部、51・・・L
字状溝。
FIG. 1 is a plan view of a device according to an embodiment of the present invention, FIG. 2 is a partially cutaway side view of the same device, FIG. is a plan view of a conventional device, FIG. 7 is a cross-sectional configuration diagram thereof, FIG. 8 is a plan view of another conventional device, and FIG. 9 is a plan view of a conventional device.
The figure is a cross-sectional configuration diagram taken along the line AA' in FIG. 8, and FIG. 10 is a cutaway diagram showing a part thereof. 1... Socket board, 2... Performance board, 3... IC socket, 4... IC to be measured, 6...
...Test head, 21...Contact board, 22
・・・Both ends contact probe, 23, 24, 27...
・Bottle-shaped metal fittings, 28.30...Ring, 29,
,? 1...Screw. 32... Bottle-shaped object (protruding object), 33. .. 33□...
Spring #34...Metal sleeve part, 51...L
gutter groove.

Claims (1)

【特許請求の範囲】[Claims]  IC測定装置本体に接続されるテストヘッドの上部に
、配線が施こされたパフォーマンスボードが設けられ、
その上に載置されるコンタクトボードにはこれを貫通す
る複数の両端コンタクトプローブがあって、この両端コ
ンタクトプローブは、上下二個に分かれていて共にスプ
リングにより上下に出没可能なものであって上記パフォ
ーマンスボードと、配線が施こされたソケットボードと
の間で上記各両端コンタクトプローブの両端を押えつけ
るようにし、上記パフォーマンスボードから側方に突設
された実状物を、上記ソケットボードと接触関係にあり
かつ周囲が蓋状のアタッチメントの複数のL字状溝に嵌
合しかつ上記アタッチメントをその周方向にやゝ回転し
て上記突状物を上記L字状溝の奥に入れることにより、
上記ソケットボードとパフォーマンスボード間を固定す
ると共に上記両端コンタクトプローブを介して上記ソケ
ットボードとパフォーマンスボードの配線間を電気的に
接続し、上記ソケットボード上のICソケットと接続す
るようにしたことを特徴とする集積回路測定用接続装置
A performance board with wiring is installed on top of the test head that is connected to the IC measurement device body.
The contact board placed on top of the contact board has a plurality of contact probes at both ends passing through it, and these contact probes at both ends are divided into upper and lower parts, both of which can be retracted and retracted up and down by means of springs. Both ends of the contact probes at both ends are pressed between the performance board and the socket board on which the wiring is installed, and the actual object protruding from the side of the performance board is brought into contact with the socket board. by fitting the protrusion into a plurality of L-shaped grooves of an attachment having a lid-like circumference and rotating the attachment slightly in the circumferential direction to insert the protrusion deep into the L-shaped groove;
The socket board and the performance board are fixed together, and the wiring of the socket board and the performance board is electrically connected via the contact probes at both ends, and connected to the IC socket on the socket board. Connecting device for measuring integrated circuits.
JP63026795A 1988-02-08 1988-02-08 Connection apparatus for measuring integrated circuit Granted JPH01202676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63026795A JPH01202676A (en) 1988-02-08 1988-02-08 Connection apparatus for measuring integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63026795A JPH01202676A (en) 1988-02-08 1988-02-08 Connection apparatus for measuring integrated circuit

Publications (2)

Publication Number Publication Date
JPH01202676A true JPH01202676A (en) 1989-08-15
JPH056153B2 JPH056153B2 (en) 1993-01-25

Family

ID=12203257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63026795A Granted JPH01202676A (en) 1988-02-08 1988-02-08 Connection apparatus for measuring integrated circuit

Country Status (1)

Country Link
JP (1) JPH01202676A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04289467A (en) * 1991-02-04 1992-10-14 Hitachi Electron Eng Co Ltd Apparatus for measuring electrical characteristics of ic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04289467A (en) * 1991-02-04 1992-10-14 Hitachi Electron Eng Co Ltd Apparatus for measuring electrical characteristics of ic device

Also Published As

Publication number Publication date
JPH056153B2 (en) 1993-01-25

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