JPH01201604A - Production of color filter - Google Patents
Production of color filterInfo
- Publication number
- JPH01201604A JPH01201604A JP63027180A JP2718088A JPH01201604A JP H01201604 A JPH01201604 A JP H01201604A JP 63027180 A JP63027180 A JP 63027180A JP 2718088 A JP2718088 A JP 2718088A JP H01201604 A JPH01201604 A JP H01201604A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- resist
- color filter
- pattern
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000002253 acid Substances 0.000 claims abstract description 14
- 239000004063 acid-resistant material Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 34
- 229910052759 nickel Inorganic materials 0.000 abstract description 17
- 239000000758 substrate Substances 0.000 abstract description 14
- 239000011521 glass Substances 0.000 abstract description 11
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 4
- 238000007772 electroless plating Methods 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 230000007261 regionalization Effects 0.000 abstract description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract description 2
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910017604 nitric acid Inorganic materials 0.000 abstract description 2
- 229920003986 novolac Polymers 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract 1
- 238000004043 dyeing Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000007864 aqueous solution Substances 0.000 description 7
- 230000002378 acidificating effect Effects 0.000 description 5
- TUSDEZXZIZRFGC-UHFFFAOYSA-N 1-O-galloyl-3,6-(R)-HHDP-beta-D-glucose Natural products OC1C(O2)COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC1C(O)C2OC(=O)C1=CC(O)=C(O)C(O)=C1 TUSDEZXZIZRFGC-UHFFFAOYSA-N 0.000 description 4
- 239000001263 FEMA 3042 Substances 0.000 description 4
- LRBQNJMCXXYXIU-PPKXGCFTSA-N Penta-digallate-beta-D-glucose Natural products OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-PPKXGCFTSA-N 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- AVTYONGGKAJVTE-OLXYHTOASA-L potassium L-tartrate Chemical compound [K+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O AVTYONGGKAJVTE-OLXYHTOASA-L 0.000 description 4
- 239000001472 potassium tartrate Substances 0.000 description 4
- 229940111695 potassium tartrate Drugs 0.000 description 4
- 235000011005 potassium tartrates Nutrition 0.000 description 4
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 description 4
- 229940033123 tannic acid Drugs 0.000 description 4
- 235000015523 tannic acid Nutrition 0.000 description 4
- 229920002258 tannic acid Polymers 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229930014626 natural product Natural products 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 239000012192 staining solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、カラー液晶表示体の構成要素であり、かつ液
晶に電圧を加える画素領域以外の領域の光を遮りフント
ラストを向上するための遮光枠を有するカラーフィルタ
ーの製造方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention is a component of a color liquid crystal display, and is a component of a color liquid crystal display for blocking light in an area other than a pixel area where a voltage is applied to the liquid crystal to improve fundust. The present invention relates to a method of manufacturing a color filter having a light-shielding frame.
従来、カラー液晶表示体のカラーフィルターの遮光枠は
、金＠届もしくは着色層の重ね合わせによって形成して
いる。このうち着色層の重ね合わせは、製造が容易であ
る一方、遮光性が十分でないという問題点を存する。ま
た金属層の場合には遮光性に優れる一方、製造コストが
上昇するという問題点を育する。Conventionally, the light-shielding frame of a color filter of a color liquid crystal display is formed by overlapping gold or colored layers. Among these, the overlapping of colored layers is easy to manufacture, but has the problem of insufficient light-shielding properties. Further, in the case of a metal layer, although it has excellent light-shielding properties, it has the problem of increasing manufacturing costs.
そこで、遮光性を重視する場合には金属層の遮光枠を用
いることになる。この金属層の形成方法としてはメツキ
やスパッタ、真空蒸着等の真空成膜があるが、量産性や
コスト面から見てニッケルの無電解メツキが最も望まし
い。Therefore, when emphasis is placed on light-shielding properties, a light-shielding frame made of a metal layer is used. Methods for forming this metal layer include plating, sputtering, and vacuum film formation such as vacuum evaporation, but electroless plating of nickel is most desirable in terms of mass productivity and cost.
また、カラーフィルターの製造方法は、現在のところフ
ォトリソグラフィーと染色による方式、電蓄方式、印刷
方式の３つが一般的であり、その中でも高彩度、高解像
度といった特徴からフォトリソグラフィーと染色による
方式が広〈実施されている。Currently, there are three common methods for producing color filters: photolithography and dyeing, electric storage, and printing. Among these, photolithography and dyeing is widely used because of its characteristics such as high saturation and high resolution. <It has been implemented.
フォトリングラフイーと染色による方法は、染色性と光
硬化性を併せ持つ樹脂を基板上に塗膜して乾燥し、露光
アスクを用いて所定の領域に紫外線を照射したのち、こ
れを現像液に浸漬して非架橋部を溶解してパターンを形
成し、さらに加熱によってこれを硬化させる。このよう
にして形成したパターンを染色液中に浸漬して着色し、
さらに防染を行なう。赤、緑、青の三色から成るカラー
フィルターを形成するには、以上の一連の工程を三すイ
クル繰り返す。The method using photophosphorography and dyeing involves coating a resin that has both dyeing and photocuring properties on a substrate, drying it, irradiating a predetermined area with ultraviolet light using an exposure mask, and then applying it to a developer. A pattern is formed by dipping to dissolve the non-crosslinked portions, and the pattern is further cured by heating. The pattern thus formed is immersed in a dyeing solution to be colored.
Furthermore, perform resist dyeing. To form a color filter consisting of red, green, and blue, the above series of steps is repeated three times.
ところで防染を行なう方法には、染料分子を通さない透
明膜で着色層を覆う方法とタンニン酸と酒石酸アンチモ
リラムカリウム水溶液に浸漬して防染処理を行なう方法
があるが、製造コスト面からは後者が育利である。By the way, there are two methods of resist dyeing: one is to cover the colored layer with a transparent film that does not allow dye molecules to pass through, and the other is to perform resist dyeing by immersing it in an aqueous solution of tannic acid and antimolyrum potassium tartrate. The latter is Ikuri.
以上をまとめると、遮光枠の十分な遮光性と高彩度、高
解像度を育し、かつ製造コストの上昇をおさえるには、
無電解メツキによるニッケルから成る遮光枠とタンニン
酸と酒石酸アンチ皐すウムカリウムによる防染処理を用
いたフォトリングラフイーと染色方式による着色層の組
み合わせが望ましい。To summarize the above, in order to develop sufficient light-shielding properties, high color saturation, and high resolution of the light-shielding frame, and to suppress the increase in manufacturing costs,
It is desirable to combine a light-shielding frame made of nickel by electroless plating, photophosphorography using anti-staining treatment with tannic acid and potassium tartrate, and a colored layer by a dyeing method.
〔発明が解決しようとする課題〕
しかし、この場合、タンニン酸と酒石酸アンチモリラム
カリウム水溶液は強酸性とする必要があるため、これに
ニッケル遮光枠の形成されたガラス基板を浸漬した場合
、ニッケルが酸によって腐食され遮光枠が不均一に変色
したり、剥離したりするという問題点を存する。そこで
本発明の目的は、強酸に浸漬してもニッケル遮光枠が腐
食されないカラーフィルターの製造方法を提供すること
にある。[Problem to be solved by the invention] However, in this case, the tannic acid and antimolylum potassium tartrate aqueous solution needs to be strongly acidic, so when the glass substrate with the nickel light-shielding frame is immersed in it, the nickel There is a problem in that the light-shielding frame becomes unevenly discolored or peels off due to corrosion by the acid. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a color filter in which the nickel light-shielding frame is not corroded even when immersed in a strong acid.
本発明によるカラーフィルターの製造方法は、酸によっ
て腐食される金属層から成る遮光枠上に耐酸性物質が積
層されているカラーフィルターの製造方法において、前
記金Ｔ１４Ｂをパターン形成する除用いるレジストを、
パターン形成後も剥離せず、そのまま前記酸性物質とし
て用いることを特徴とする。A method for manufacturing a color filter according to the present invention includes a method for manufacturing a color filter in which an acid-resistant material is laminated on a light-shielding frame made of a metal layer that is corroded by acid.
It is characterized in that it does not peel off even after pattern formation and can be used as the acidic substance as it is.
本発明によるカラーフィルターの製造方法を以下に述べ
る。A method for manufacturing a color filter according to the present invention will be described below.
まず、ガラス基板上に無電解メツキにより１００λ〜１
ｏｏｏｏ人の厚みのニッケル層を形成する。First, 100λ~1 by electroless plating on a glass substrate.
Form a nickel layer oooo thick.
次にニッケル層の形成されたガラス基板上に耐酸性物質
としてノボラック樹脂にナフトキノンジアジドを添加し
たポジ型レジストを塗膜し、乾燥し、露光、現像を行な
い所定のパターンを形成する。耐酸性物質の種類は特に
制限されず、ポリイソプレン環化物などの環化ゴムにビ
スアジド化合物を添加したネガ型レジストやポリイミド
などを用いることができる。ポジ型レジストをパターン
形成したガラス基板は、ポジ型レジストの密着を強化さ
せるために１００〜１５０＠Ｃの熱を加えてこれを焼成
し、硝酸、リン酸、硫酸、酢酸から成る混酸に浸漬し、
ポジ型レジストに覆われていな〜）領域のニッケルを溶
解して、ニッケル層のパターン形成を行なう。Next, a positive resist consisting of novolac resin and naphthoquinone diazide added as an acid-resistant material is coated on the glass substrate on which the nickel layer is formed, dried, exposed, and developed to form a predetermined pattern. The type of acid-resistant substance is not particularly limited, and a negative resist made by adding a bisazide compound to a cyclized rubber such as a polyisoprene cyclized product, polyimide, or the like can be used. The glass substrate on which the positive resist has been patterned is baked by applying heat of 100 to 150 C to strengthen the adhesion of the positive resist, and then immersed in a mixed acid consisting of nitric acid, phosphoric acid, sulfuric acid, and acetic acid. ,
The nickel in the areas not covered by the positive resist is dissolved to form a pattern of the nickel layer.
ポジ型レジストの膜厚としては０．１〜５μｍが適当で
あり、これより薄いと耐酸性が十分得られず、これより
厚いと解像度が低下するといった問題が生ずる。これに
よって第１図（ａ）に示す、ニッケル層から成る遮光枠
がポジ型レジストで覆われた構造が形成される。The appropriate film thickness of the positive resist is 0.1 to 5 μm; if it is thinner than this, sufficient acid resistance cannot be obtained, and if it is thicker than this, there will be problems such as a decrease in resolution. As a result, a structure shown in FIG. 1(a) in which a light-shielding frame made of a nickel layer is covered with a positive resist is formed.
次にこの上にフォトリソグラフィーと染色によってカラ
ーフィルター層を形成する方法を説明する。カラーフィ
ルター層の材料としてパターン形成を行なうための光硬
化性と染色性が必要である。その２つの性質を併せ持つ
物質として、ゼラチン、カゼイン、グリユーなどの天然
物や、カチオン性基を含育する重合性単量体に由来する
構成単位を有する重合体から成る合成物があげられる。Next, a method of forming a color filter layer thereon by photolithography and dyeing will be explained. The material for the color filter layer must have photocurability and dyeability for pattern formation. Substances that have both of these properties include natural products such as gelatin, casein, and grue, and synthetic products made of polymers having constitutional units derived from polymerizable monomers containing cationic groups.
合成物としては、ＪＤＳシリーズ（日本合成ゴム社！！
り ＲＷＩ ０１ （ｔａ水７ ｙイン’ｒ ミｈ ）
＆社製）、Ｒ１０２、Ｒ８３３（以上日本化薬社製）が
実用化されている。上記のいずれかのカラーフィルター
層の材料をニッケル層から成る遮光枠をポジ型レジスト
で覆ったガラス基板上に塗布し、乾燥させる。また、カ
ラーフィルターの材料とガラス基板もしくはポジ型レジ
ストの密着が悪い場合には、カラーフィルター材料塗布
前に中間層を形成する場合もある。塗布膜を乾燥した後
、露光マスクを介してこれに紫外線を照射し、所定の領
域のみ架橋させて、現像によって未架橋部を溶解しカラ
ーフィルター材料をパターン形成する。そして、さらに
加熱を行ない、下層との密着を強化する。このようなフ
ォトリソグラフィーによってカラーフィルター材料層を
形成したガラス基板を染色液に浸漬して、着色する。染
色液は、０゜工〜ｆＯｗｔ％の染料を含む水溶液を１０
〜１００′″Ｃに保ったもので、場合によっては酸が添
加される。このようにして着色を行なった後、タンニン
酸の酸性水溶液と酒石酸アンチモリラムカリウムの酸性
水溶液に順次浸漬および水洗することによって固着処理
を行なう。それぞれの水溶液は必要に応じて加温されて
いる。As a synthetic product, JDS series (Japan Synthetic Rubber Co., Ltd.!!
ri RWI 01 (ta water 7 yin'r mih)
& Co.), R102, and R833 (all made by Nippon Kayaku Co., Ltd.) have been put into practical use. Any of the above materials for the color filter layer is applied onto a glass substrate on which a light-shielding frame made of a nickel layer is covered with a positive resist, and dried. Furthermore, if the adhesion between the color filter material and the glass substrate or positive resist is poor, an intermediate layer may be formed before applying the color filter material. After drying the coating film, it is irradiated with ultraviolet rays through an exposure mask to crosslink only predetermined areas, and the uncrosslinked areas are dissolved by development to form a pattern of color filter material. Then, heating is further performed to strengthen the adhesion with the lower layer. A glass substrate on which a color filter material layer is formed by such photolithography is immersed in a dyeing liquid to be colored. The dyeing solution is an aqueous solution containing a dye of 0° to 10% by weight.
It is maintained at ~100'''C, and acid is added in some cases. After coloring in this way, it is sequentially immersed in an acidic aqueous solution of tannic acid and an acidic aqueous solution of antimolyrum potassium tartrate, and washed with water. The fixing process is performed by heating each aqueous solution as necessary.
第１図（ｂ）に示すような赤、緑、青の三色から成るカ
ラーフィルターを製造する場合には、以上述べたカラー
フィルター材料の性膜から固着処理に至る一連の工程を
それぞれの色に応じた染色液を使って三回繰り返すこと
により製造することができる。When manufacturing a color filter consisting of three colors of red, green, and blue as shown in Figure 1 (b), the series of steps from the above-mentioned color filter material coating to fixing treatment are performed for each color. It can be manufactured by repeating the process three times using the appropriate staining solution.
その工程の中で、固着処理においてカラーフィルター材
料中へ酸性水溶液が浸透するが、ニッケルから成る遮光
枠は、ポジ型レジストで覆われているため、酸によって
腐食することがない。During the fixing process, an acidic aqueous solution penetrates into the color filter material, but the nickel light-shielding frame is covered with a positive resist, so it will not be corroded by the acid.
以上述べたように本発明によれば、酸によって腐食され
る金属層から成る遮光枠を形成する際、用いるレジスト
をパターン形成後に？す離せずそのまま遮光枠を覆う耐
酸性物質として用いることによって、通常の工程に対し
てＩＩ＋ １１１工程を減らす一方、酸によって腐食さ
れる金属層から成る遮光枠上に耐酸性物質を積層して耐
酸性を付加したカラーフィルターを製造することができ
るという効果を佇する。As described above, according to the present invention, when forming a light-shielding frame made of a metal layer that is corroded by acid, the resist used is changed after pattern formation. By using it as an acid-resistant material that covers the light-shielding frame without removing it, the number of II+111 steps is reduced compared to the normal process. It has the effect of being able to manufacture color filters with added characteristics.
第１図（ａ）、（ｂ）は、本発明によるカラーフィルタ
ーの製造工程を示す図。
第２図は従来のカラーフィルターの断面図。
１・・・ガラス基板
２・・・ニッケル遮光枠
３・・・耐酸性レジスト
４Ｒ・・・赤色に染色されたカラーフィルター材料
４Ｇ・・・緑色に染色されたカラーフィルター材料
４Ｂ・・・青色に染色されたカラーフィルター材料
以 上
出願人 セイコーエプソン株式会社FIGS. 1(a) and 1(b) are diagrams showing the manufacturing process of a color filter according to the present invention. Figure 2 is a cross-sectional view of a conventional color filter. 1... Glass substrate 2... Nickel light-shielding frame 3... Acid-resistant resist 4R... Color filter material dyed red 4G... Color filter material dyed green 4B... Blue Dyeed color filter materials and above Applicant: Seiko Epson Corporation
Claims (1)
物質が積層されているカラーフィルターの製造方法にお
いて、前記金属層をパターン形成する際に用いるレジス
トを、パターン形成後も剥離せず、そのまま前記耐酸性
物質として用いることを特徴とするカラーフィルターの
製造方法。In a method for manufacturing a color filter in which an acid-resistant material is laminated on a light-shielding frame made of a metal layer that is corroded by acid, the resist used to pattern the metal layer is left as it is without being peeled off even after the pattern is formed. A method for producing a color filter, characterized in that it is used as the acid-resistant substance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63027180A JPH01201604A (en) | 1988-02-08 | 1988-02-08 | Production of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63027180A JPH01201604A (en) | 1988-02-08 | 1988-02-08 | Production of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01201604A true JPH01201604A (en) | 1989-08-14 |
Family
ID=12213880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63027180A Pending JPH01201604A (en) | 1988-02-08 | 1988-02-08 | Production of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01201604A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006227295A (en) * | 2005-02-17 | 2006-08-31 | Toppan Printing Co Ltd | Color filter, color filter substrate, and liquid crystal display device using the substrate |
-
1988
- 1988-02-08 JP JP63027180A patent/JPH01201604A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006227295A (en) * | 2005-02-17 | 2006-08-31 | Toppan Printing Co Ltd | Color filter, color filter substrate, and liquid crystal display device using the substrate |
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