JPH0119394Y2 - - Google Patents
Info
- Publication number
- JPH0119394Y2 JPH0119394Y2 JP15303080U JP15303080U JPH0119394Y2 JP H0119394 Y2 JPH0119394 Y2 JP H0119394Y2 JP 15303080 U JP15303080 U JP 15303080U JP 15303080 U JP15303080 U JP 15303080U JP H0119394 Y2 JPH0119394 Y2 JP H0119394Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- cam
- positioning
- mounting table
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 97
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000428 dust Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 239000012634 fragment Substances 0.000 description 3
- 238000005201 scrubbing Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15303080U JPH0119394Y2 (enrdf_load_stackoverflow) | 1980-10-28 | 1980-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15303080U JPH0119394Y2 (enrdf_load_stackoverflow) | 1980-10-28 | 1980-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5775746U JPS5775746U (enrdf_load_stackoverflow) | 1982-05-11 |
| JPH0119394Y2 true JPH0119394Y2 (enrdf_load_stackoverflow) | 1989-06-05 |
Family
ID=29512302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15303080U Expired JPH0119394Y2 (enrdf_load_stackoverflow) | 1980-10-28 | 1980-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0119394Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-10-28 JP JP15303080U patent/JPH0119394Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5775746U (enrdf_load_stackoverflow) | 1982-05-11 |
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