JPH01183477A - Method for bonding metal to ceramic - Google Patents
Method for bonding metal to ceramicInfo
- Publication number
- JPH01183477A JPH01183477A JP624888A JP624888A JPH01183477A JP H01183477 A JPH01183477 A JP H01183477A JP 624888 A JP624888 A JP 624888A JP 624888 A JP624888 A JP 624888A JP H01183477 A JPH01183477 A JP H01183477A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramic
- bonding
- contact
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 47
- 239000002184 metal Substances 0.000 title claims abstract description 47
- 239000000919 ceramic Substances 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 15
- 239000010935 stainless steel Substances 0.000 claims abstract description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 10
- 238000002844 melting Methods 0.000 claims abstract description 8
- 230000008018 melting Effects 0.000 claims abstract description 8
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 8
- 239000010409 thin film Substances 0.000 claims abstract description 8
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 6
- 238000007733 ion plating Methods 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 9
- 150000002739 metals Chemical class 0.000 claims description 8
- 238000005304 joining Methods 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 12
- 239000010408 film Substances 0.000 abstract description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 229910000679 solder Inorganic materials 0.000 abstract description 2
- 238000009736 wetting Methods 0.000 abstract description 2
- 230000002411 adverse Effects 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 18
- 238000005259 measurement Methods 0.000 description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 238000005219 brazing Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/121—Metallic interlayers based on aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/122—Metallic interlayers based on refractory metals
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/402—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/405—Iron metal group, e.g. Co or Ni
- C04B2237/406—Iron, e.g. steel
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/78—Side-way connecting, e.g. connecting two plates through their sides
Abstract
Description
【発明の詳細な説明】
１０発明の目的
（１）産業上の利用分野
本発明は、金属（合金を含む）とセラミックスが真空蒸
着した密着性の良い金属（合金を含む）薄膜を介して均
一に接触し、且つ濡れ易く改善した拡散接合方法に関す
る。Detailed Description of the Invention 10 Objectives of the Invention (1) Industrial Field of Application The present invention provides a method for uniformly dissolving metals (including alloys) and ceramics through a vacuum-deposited thin film of metals (including alloys) with good adhesion. It relates to a diffusion bonding method that is improved in contact with and wettability.
（２）従来の技術
従来、金属とセラミックスの接合としては次のような方
法でなされている。(2) Prior Art Conventionally, metals and ceramics have been joined by the following methods.
（ア）ろう材として銀ろうを基調とした酸化物系（非酸
化物系もあり）ろう材を塗布して、両材料を加圧するな
どの拡散接合方法。(a) A diffusion bonding method in which an oxide-based (non-oxide-based brazing material is also available) based on silver solder is applied as a brazing material, and both materials are pressurized.
（イ）機械的な方法として、ボルト、圧入、焼ばめ、溶
接、鋳ぐるみ等の手段を利用したり、化学的な方法とし
て接着剤を使用したりするなどの方法が考えられていた
が１機械的な接合部分で亀裂が発生してり、接合強度が
十分でなかったりするなどの問題を有していた。(b) Mechanical methods such as bolts, press fitting, shrink fitting, welding, casting, etc., and chemical methods such as using adhesives were considered. 1) There were problems such as cracks occurring at the mechanical joints and insufficient joint strength.
（つ）セラミックスが非常に脆いため、金属との精密溶
接に最近レーザー等を使用する研究が進められているが
、加工コストが嵩む等′の問題がある。(1) Since ceramics are extremely brittle, research into using lasers and the like for precision welding with metals has recently been progressing, but there are problems such as increased processing costs.
（３）発明が解決しようとする問題点
本発明は上述した従来の問題点に着目してなされたもの
で、高価な銀ろう材等を必要とせず精密部品に対する接
合も容易であり、材料を溶解したり、接着剤を塗布した
りすることなく金属とセラミックスとの接合を行なうこ
とができる方法を提供することを目的とする。(3) Problems to be Solved by the Invention The present invention has been made by focusing on the above-mentioned problems of the conventional art. It is an object of the present invention to provide a method that can join metal and ceramics without melting or applying adhesive.
■１発明の構成
（１）問題点を解決するための手段
上記目的を達成するために１本発明は、金属とセラミッ
クスの接合界面が強固であることと熱応力の緩和とは互
いに矛盾する性格が強い因子ではあるが、界面に接合構
造が形成されれば１両者を兼備させることは可能であり
、相互拡散、物理化学の難易、熱膨張の相違、濡れ広が
りの難易を考慮して材料どうしが均一に接触するため、
セラミックス基材表面に金属（合金を含む）の薄膜を蒸
着する。■1 Structure of the Invention (1) Means for Solving the Problems In order to achieve the above objects, the present invention is based on the following: A strong bonding interface between metal and ceramics and relaxation of thermal stress are contradictory to each other. is a strong factor, but it is possible to have both if a bonding structure is formed at the interface, and it is possible to combine materials by taking into account mutual diffusion, physical and chemical difficulties, differences in thermal expansion, and difficulty in wetting and spreading. contact evenly,
A thin film of metal (including alloys) is deposited on the surface of a ceramic substrate.
この場合、蒸着膜自体を学術上は接合と呼ぶが固着薄膜
は、接合しようとする金属（合金を含む）とセラミック
ス基材の接触角（濡れ性）を改善する役目がある。さら
に、接合金属（アルミニウム。In this case, the deposited film itself is academically called a bond, but the fixed thin film has the role of improving the contact angle (wettability) between the metal (including alloy) and the ceramic substrate to be bonded. In addition, bonding metal (aluminum).
ステンレス等）を重ねて、両材料を当接し、真空度が１
０−５ｔｏｒｒ以下の状態で、接合金属の融点以上で拡
散接合されることを特徴とする。(stainless steel, etc.), place both materials in contact, and make sure the degree of vacuum is 1.
It is characterized in that diffusion bonding is performed at a temperature of 0-5 torr or less and above the melting point of the bonding metal.
（２）作用
イオンプレーティングに際しては、セラミ・ノクス基材
を前処理として鏡面仕上研磨し、アセトンで超音波洗浄
する。１００ｍＡ、０．８ｋｖ、４ＸＩＯ−２ｔｏｒｒ
でのアルゴン雰囲気でスパッタクリーニング（物理洗浄
）をする、蒸着材料としては、別添第２図、第３図より
金属−セラミックス接合体の応力分布は、接合界面近く
のセラミツ磨基材の金属蒸着に与える基板加熱の影響は
蒸着粒子形状および表面組織に変化がみられるので適宜
選択する必要がある。(2) Effect When performing ion plating, the ceramic/nox base material is polished to a mirror finish as a pretreatment and is ultrasonically cleaned with acetone. 100mA, 0.8kv, 4XIO-2torr
Sputter cleaning (physical cleaning) is performed in an argon atmosphere at The influence of substrate heating on the evaporation particle shape and surface structure change, so it is necessary to select the effect appropriately.
電子ビーム蒸発源を用いると高融点材の蒸発が可能であ
るという利点の他に蒸発粒子のイオン化が高まるので電
子ビーム出力に応じ蒸着時間を設定する。よって、イオ
ンを作用させながら基板上に金属蒸発物質を堆積させ密
着性の良い皮膜を形成する。接合しようとする金属を蒸
着薄膜上に重ね両材料を当接し、１０ ５ｔｏｒｒ、接
合金属材の融点以上に加熱することにより金属蒸着膜が
、ろう材（接着材）の役目をなすと同時に両材料の接触
面積を均一に拡大し、濡れ性を大巾に改善する。Using an electron beam evaporation source has the advantage that it is possible to evaporate a high melting point material and also increases the ionization of evaporated particles, so the evaporation time is set in accordance with the electron beam output. Therefore, a metal evaporated substance is deposited on the substrate while ions are applied to form a film with good adhesion. The metal to be bonded is placed on the vapor-deposited thin film, and both materials are brought into contact with each other.The metal vapor-deposited film acts as a brazing material (adhesive) and at the same time, the two materials are heated to 105 torr above the melting point of the bonding metal. uniformly expands the contact area and greatly improves wettability.
（詳細は以下の作用による）
つまり、セラミックスと金属表面の凸の部分が接触する
と蒸着膜が接触面積を増加し、この状態で温度が上昇し
、当接による接触圧力も増すことにより金属側の表面が
降伏やクリープにより塑性変形し、接触面積が倍加する
。（第１段階）次に塑性変形よりも蒸着膜による表面拡
散が主になり薄膜金属と接合金属、セラミックスとＷｌ
ｌ金金属反応により空洞の消滅と接触面積の拡大が進む
、（第２段階）
最後に体積拡散が主になるが１反応層（蒸着膜）を用い
ている事により界面の移動、空洞の消滅の進度が従来の
同相拡散接合法（別添第４図）より速く接合が完了する
。又、局部加熱でないので接合温度からの冷却が緩和さ
れ、セラミックスの応力集中をも緩和され割れを生じ難
い。(Details are based on the following effects.) In other words, when the convex part of the ceramic and metal surface comes into contact, the vapor deposited film increases the contact area, and in this state, the temperature rises and the contact pressure due to contact increases, so that the metal side The surface undergoes plastic deformation due to yielding and creep, and the contact area doubles. (First stage) Next, surface diffusion due to the vapor deposited film becomes the main factor rather than plastic deformation, and the thin film metal and bonding metal, ceramics and Wl
1) The gold metal reaction causes the cavity to disappear and the contact area to expand. (2nd stage) In the end, volumetric diffusion becomes the main cause, but 1) By using a reaction layer (deposited film), the interface moves and the cavity disappears. The progress of bonding is faster than that of the conventional in-phase diffusion bonding method (see attached Figure 4). In addition, since there is no local heating, cooling from the bonding temperature is relaxed, and stress concentration in the ceramics is also relaxed, making it difficult for cracks to occur.
（３）実施例 本発明の実施例を図面にもとづいて説明する。(3) Examples Embodiments of the present invention will be described based on the drawings.
幅５■、厚さ３ｍ、長さ２５ｍの接合材を第１図に示す
ように突き合せる。セラミックス■には膜厚２ミクロン
の金属をイオンプレーティングにより蒸着しており接合
金属■との当接には当接片■を使用する。しかるのち、
真空炉■にて１Ｏ−ｓｔｏｒｒ、接合金属の溶融点以上
に加熱設定して実験した。また曲げ強度は３点曲げ試験
を行って測定した。その結果を表−１に記した。なお、
セラミックス−金属蒸着膜−接合金属との接触角（濡れ
性）の測定結果は第５図、第６図、第７図。Bonding materials having a width of 5 cm, a thickness of 3 m, and a length of 25 m are butted together as shown in FIG. A metal with a thickness of 2 microns is deposited on the ceramic (2) by ion plating, and a contact piece (2) is used to contact the bonding metal (2). Afterwards,
An experiment was conducted in a vacuum furnace (1) with heating set to 1 O-storr above the melting point of the joining metal. Further, the bending strength was measured by performing a three-point bending test. The results are shown in Table-1. In addition,
The measurement results of the contact angle (wettability) between ceramic-metal deposited film-bonding metal are shown in Figs. 5, 6, and 7.
第８図に示す、第５図はチタンを蒸着したアルミナ基板
上のアルミニウムの接触角、第６図はアルミニウムを蒸
着したアルミナ基板上のアルミニウムの接触角、第７図
はニッケルを蒸着したアルミナ基板上のステンレス（Ｊ
ＩＳ規格ＳＵＳ ３１０相当品）の接触角及び第８図は
ニッケルを蒸着したジルコニア基板上のステンレス（Ｊ
Ｉ ＳＭ格５ＵＳ３１０相当品）の接触角の実験であ
り、両材料を無拘束の状態で重ね合せた条件での測定結
果を示す。Figure 8 shows the contact angle of aluminum on an alumina substrate on which titanium is deposited, Figure 6 is the contact angle of aluminum on an alumina substrate on which aluminum is deposited, and Figure 7 is on an alumina substrate on which nickel is deposited. Upper stainless steel (J
The contact angle and Figure 8 show the contact angle of stainless steel (J
This is an experiment on the contact angle of ISM grade 5US310 (equivalent to ISM grade 5US310), and the measurement results are shown under the condition that both materials were overlapped in an unrestricted state.
なお、第５図、第６図の測定試験片の作成条件を表−２
１表−３に示し、第７図、第８図の測定試験片の作成条
件を表−４、表−５に示す、。The preparation conditions for the measurement test pieces shown in Figures 5 and 6 are shown in Table 2.
1 Table-3 shows the preparation conditions for the measurement test pieces shown in FIGS.
表−１に関係する実験としてチタン及びアルミニウムを
蒸着したアルミナ基板上のアルミニウムの接触角を測定
した結果を別添第５図、第６図に示すが、その試料作成
条件を表−２、表−３に示す。As an experiment related to Table-1, the results of measuring the contact angle of aluminum on an alumina substrate on which titanium and aluminum were vapor-deposited are shown in attached Figures 5 and 6, and the sample preparation conditions are shown in Table-2 and Table-1. -3.
表−２
第５図よりチタンを蒸着したアルミナ基板上のアルミニ
ウムの接触角は９００℃〜９５０℃にて特に小さくなる
。第６図よりアルミニウムを蒸着したアルミナ基板上の
アルミニウムの接触角は、７００℃〜９３０℃にて小さ
く、濡れ性は良い。Table 2 From FIG. 5, the contact angle of aluminum on an alumina substrate on which titanium is vapor-deposited becomes particularly small at 900°C to 950°C. From FIG. 6, the contact angle of aluminum on the alumina substrate on which aluminum is vapor-deposited is small at 700° C. to 930° C., and the wettability is good.
表１に従い、ニッケルを蒸着したアルミナ基板及びジル
コニア基板上のステンレス（ＳＵＳ３１０）の接触角測
定結果を別添第７図、第８図に示すが、その試料作成条
件を表−４、表−５に示す。According to Table 1, the contact angle measurement results of stainless steel (SUS310) on an alumina substrate and a zirconia substrate on which nickel is vapor-deposited are shown in attached Figures 7 and 8, and the sample preparation conditions are shown in Tables 4 and 5. Shown below.
表−４
以上、第７図よりニッケルを蒸着したアルミナ基板上の
ステンレス（ＳＵＳ３１０）の接触角は１５００℃〜１
５７０℃にて小さく濡れ性は良い。Table 4 From the above and Figure 7, the contact angle of stainless steel (SUS310) on an alumina substrate coated with nickel is 1500℃~1
It is small and has good wettability at 570°C.
第８図よりニッケルを蒸着したジルコニア基板上のステ
ンレス（ＳＵＳ ３１０）の接触角は１４７０℃以上に
て小さく濡れ性は良い。From FIG. 8, the contact angle of stainless steel (SUS 310) on a zirconia substrate on which nickel is vapor-deposited is small at 1470° C. or higher, and the wettability is good.
■１発明の詳細
な説明したように、本発明によれば、金属とセラミック
スが真空蒸着した密着性の良い金属薄膜を介して均一に
接触し、従来のろう材等の介装材にみられる加熱昇温時
に見られるダレ及びモレ現象がなく且つ接触面積を拡大
するので濡れ易く改善される。従って高価な銀ろう材等
を必要とせず精密部品に対する接合も容易であり、材料
を溶解したり、接着剤を塗布することもなく作業環境が
改善される。■1 As explained in detail about the invention, according to the present invention, metal and ceramic are brought into uniform contact through a vacuum-deposited metal thin film with good adhesion, which is similar to that seen in conventional intervening materials such as brazing filler metal. There is no sagging or leaking phenomenon that occurs when the temperature is heated, and the contact area is expanded, which improves wettability. Therefore, it is easy to join precision parts without requiring expensive silver brazing material, and the work environment is improved without melting materials or applying adhesives.
又１局部加熱でないので接合温度からの冷却が緩和され
、セラミックスの応力集中をも緩和され割れを生じ難く
、加工コストが比較的安価ある等のすぐれた効果を有す
る。In addition, since there is no local heating, cooling from the bonding temperature is eased, stress concentration in the ceramic is also eased, and cracks are less likely to occur, and processing costs are relatively low.
第１図はセラミックスに金属蒸着膜を作成した片に金属
を突き合せて当接し真空炉に設定した状況図。
第２図、第３図、第４図は本発明に係る接合理由（理論
）に関するものである。
第２図は代表的なセラミックスと金属の熱膨張係数比較
図。
第３図はセラミックス−金属接合体を接合温度より冷却
した時に発生する最大引張応力の発生位置と方向図（破
線は破壊の生じる面を示すが■は接合金属、■はセラミ
ックス材）
第４図は同相拡散接合の３段階過程を示す図（■は接合
金属、■はセラミックス材、■は接触面の空洞図、）
第５図はチタンを蒸着したアルミナ基板上のアルミニウ
ムの接触角を測定した結果を示す図。
第６図はアルミニウムを蒸着したアルミナ基板上のアル
ミニウムの接触角を測定した結果を示す図。
第７図はニッケルを蒸着したアルミナ基板上のステンレ
ス（ＳＵＳ３１０相当品）の接触角を測定した結果を示
す図。
第８図はニッケルを蒸着したジルコニア基板上のステン
レス（ＳＵＳ３１０相当品）の接触角を測定した結果を
示す図。
表−２及び表−３は上記の第４図、第６図に示す接触角
測定用試験片の材質と作成条件を示す表。
表−４及び表−５は上記の第７図、第８図に示す接触角
測定用試験片の材質と作成条件を示す表。Figure 1 shows a situation in which a piece of ceramic with a metal vapor deposited film is brought into contact with metal and set in a vacuum furnace. FIGS. 2, 3, and 4 relate to the reason (theory) for joining according to the present invention. Figure 2 is a comparison diagram of the thermal expansion coefficients of typical ceramics and metals. Figure 3 shows the location and direction of the maximum tensile stress that occurs when the ceramic-metal bonded body is cooled below the bonding temperature (the broken line indicates the surface where fracture occurs, ■ indicates the bonded metal, and ■ indicates the ceramic material).Figure 4 Figure 5 shows the three-step process of in-phase diffusion bonding (■ is the joining metal, ■ is the ceramic material, and ■ is a cavity diagram of the contact surface). Figure 5 shows the measurement of the contact angle of aluminum on an alumina substrate on which titanium has been deposited. Diagram showing the results. FIG. 6 is a diagram showing the results of measuring the contact angle of aluminum on an alumina substrate on which aluminum is vapor-deposited. FIG. 7 is a diagram showing the results of measuring the contact angle of stainless steel (equivalent to SUS310) on an alumina substrate on which nickel is vapor-deposited. FIG. 8 is a diagram showing the results of measuring the contact angle of stainless steel (equivalent to SUS310) on a zirconia substrate on which nickel is vapor-deposited. Tables 2 and 3 are tables showing the materials and preparation conditions of the test pieces for contact angle measurement shown in FIGS. 4 and 6 above. Tables 4 and 5 are tables showing the materials and preparation conditions of the test pieces for contact angle measurement shown in FIGS. 7 and 8 above.
Claims (1)
ングにてアルミニウム、チタン、ニッケル等の金属を真
空蒸着して金属薄膜を作成し、アルミニウム、ステンレ
ス等の接合金属を重ねて両材料を当接し、１０＾−＾５
ｔｏｒｒ以下の真空下で接合金属の融点以上に加熱し拡
散接合して金属とセラミックスを接合する事を特徴とす
る金属とセラミックスの接合方法。A metal thin film is created by vacuum-depositing a metal such as aluminum, titanium, or nickel using ion plating on the bonding surface of a sintered body such as AI_2O_3, and then a bonding metal such as aluminum or stainless steel is layered and both materials are brought into contact. 10^-^5
A method for joining metals and ceramics, characterized by joining metals and ceramics by heating above the melting point of the joining metals and performing diffusion bonding under a vacuum of less than Torr.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63006248A JPH0686340B2 (en) | 1988-01-16 | 1988-01-16 | Method of joining solid metal and ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63006248A JPH0686340B2 (en) | 1988-01-16 | 1988-01-16 | Method of joining solid metal and ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01183477A true JPH01183477A (en) | 1989-07-21 |
| JPH0686340B2 JPH0686340B2 (en) | 1994-11-02 |
Family
ID=11633190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63006248A Expired - Lifetime JPH0686340B2 (en) | 1988-01-16 | 1988-01-16 | Method of joining solid metal and ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0686340B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05117842A (en) * | 1991-10-25 | 1993-05-14 | Ulvac Japan Ltd | Method for joining of metal with ceramic |
| US6616032B1 (en) | 1998-12-23 | 2003-09-09 | Commissariat A L'energie Atomique | Brazing composition and method for brazing parts made of alumina-based materials with said composition |
| EP1404517B1 (en) * | 2001-06-18 | 2017-11-15 | Alfred E. Mann Foundation for Scientific Research | Application and manufacturing method for a zirconia ceramic to titanium alloy metal seal |
| US10103410B2 (en) | 2014-05-23 | 2018-10-16 | General Electric Company | Method for joining ceramic to metal, and sealing structure thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918184A (en) * | 1982-07-19 | 1984-01-30 | 住友電気工業株式会社 | Ceramic metallization |
| JPS59227783A (en) * | 1983-06-07 | 1984-12-21 | 日本特殊陶業株式会社 | Ceramic-aluminum alloy bonded body |
| JPS61168577A (en) * | 1985-01-21 | 1986-07-30 | 住友電気工業株式会社 | Ceramic composite member |
-
1988
- 1988-01-16 JP JP63006248A patent/JPH0686340B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918184A (en) * | 1982-07-19 | 1984-01-30 | 住友電気工業株式会社 | Ceramic metallization |
| JPS59227783A (en) * | 1983-06-07 | 1984-12-21 | 日本特殊陶業株式会社 | Ceramic-aluminum alloy bonded body |
| JPS61168577A (en) * | 1985-01-21 | 1986-07-30 | 住友電気工業株式会社 | Ceramic composite member |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05117842A (en) * | 1991-10-25 | 1993-05-14 | Ulvac Japan Ltd | Method for joining of metal with ceramic |
| US6616032B1 (en) | 1998-12-23 | 2003-09-09 | Commissariat A L'energie Atomique | Brazing composition and method for brazing parts made of alumina-based materials with said composition |
| EP1404517B1 (en) * | 2001-06-18 | 2017-11-15 | Alfred E. Mann Foundation for Scientific Research | Application and manufacturing method for a zirconia ceramic to titanium alloy metal seal |
| US10103410B2 (en) | 2014-05-23 | 2018-10-16 | General Electric Company | Method for joining ceramic to metal, and sealing structure thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0686340B2 (en) | 1994-11-02 |
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