JPH01180411U - - Google Patents

Info

Publication number
JPH01180411U
JPH01180411U JP7656188U JP7656188U JPH01180411U JP H01180411 U JPH01180411 U JP H01180411U JP 7656188 U JP7656188 U JP 7656188U JP 7656188 U JP7656188 U JP 7656188U JP H01180411 U JPH01180411 U JP H01180411U
Authority
JP
Japan
Prior art keywords
belt
heat treatment
type heat
treatment furnace
meandering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7656188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0738248Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988076561U priority Critical patent/JPH0738248Y2/ja
Publication of JPH01180411U publication Critical patent/JPH01180411U/ja
Application granted granted Critical
Publication of JPH0738248Y2 publication Critical patent/JPH0738248Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Control Of Conveyors (AREA)
JP1988076561U 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置 Expired - Lifetime JPH0738248Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988076561U JPH0738248Y2 (ja) 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988076561U JPH0738248Y2 (ja) 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置

Publications (2)

Publication Number Publication Date
JPH01180411U true JPH01180411U (US07579456-20090825-P00002.png) 1989-12-26
JPH0738248Y2 JPH0738248Y2 (ja) 1995-08-30

Family

ID=31301581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988076561U Expired - Lifetime JPH0738248Y2 (ja) 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置

Country Status (1)

Country Link
JP (1) JPH0738248Y2 (US07579456-20090825-P00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977740B1 (ko) * 2008-05-30 2010-08-24 세메스 주식회사 기판 이송 장치 및 이를 기판 처리 장치
JP4718048B2 (ja) * 2000-07-31 2011-07-06 三ツ星ベルト株式会社 環状ベルト体の移送方法及び移送装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49108775A (US07579456-20090825-P00002.png) * 1973-02-20 1974-10-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49108775A (US07579456-20090825-P00002.png) * 1973-02-20 1974-10-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4718048B2 (ja) * 2000-07-31 2011-07-06 三ツ星ベルト株式会社 環状ベルト体の移送方法及び移送装置
KR100977740B1 (ko) * 2008-05-30 2010-08-24 세메스 주식회사 기판 이송 장치 및 이를 기판 처리 장치

Also Published As

Publication number Publication date
JPH0738248Y2 (ja) 1995-08-30

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