JPH01179432U - - Google Patents
Info
- Publication number
- JPH01179432U JPH01179432U JP7630288U JP7630288U JPH01179432U JP H01179432 U JPH01179432 U JP H01179432U JP 7630288 U JP7630288 U JP 7630288U JP 7630288 U JP7630288 U JP 7630288U JP H01179432 U JPH01179432 U JP H01179432U
- Authority
- JP
- Japan
- Prior art keywords
- holding device
- wafer
- support rod
- semiconductor wafer
- small
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7630288U JPH01179432U (da) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7630288U JPH01179432U (da) | 1988-06-10 | 1988-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179432U true JPH01179432U (da) | 1989-12-22 |
Family
ID=31301335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7630288U Pending JPH01179432U (da) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179432U (da) |
-
1988
- 1988-06-10 JP JP7630288U patent/JPH01179432U/ja active Pending