JPH01178787A - Switching trap device for vacuum pump - Google Patents

Switching trap device for vacuum pump

Info

Publication number
JPH01178787A
JPH01178787A JP137088A JP137088A JPH01178787A JP H01178787 A JPH01178787 A JP H01178787A JP 137088 A JP137088 A JP 137088A JP 137088 A JP137088 A JP 137088A JP H01178787 A JPH01178787 A JP H01178787A
Authority
JP
Japan
Prior art keywords
oil
vacuum pump
trap
discharge gas
traps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP137088A
Other languages
Japanese (ja)
Inventor
Yoichi Tanaka
田中 要一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP137088A priority Critical patent/JPH01178787A/en
Publication of JPH01178787A publication Critical patent/JPH01178787A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To well maintain oil traps without disassembling them by connecting a piping system for introducing a high temperature discharge gas from a vacuum pump to a trap being out of operation such that the lines may be switched. CONSTITUTION:A discharge gas from a vacuum pump is introduced from a discharge port 9 through a discharge gas introducing pipe 10 into oil traps 4, 5. When the trap 5 is out of operation, the discharge gas flows through the oil trap 5 in the direction of the arrow. The high temperature discharge gas introduced into the oil trap 5 evaporates the oil absorbed in the oil-absorbent, and the evaporated oil is discharged through a pipe line 14 outside the machine. Switching the introduction of the high temperature discharge gas into the oil traps 4, 5 is performed by change-over of three-way valves 11, 12.

Description

【発明の詳細な説明】 「産業上の利用分野] 本発明は、真空ポンプの切替式トラップ装置に係り、特
に機械を止めないで、オイルトラップの油吸着材を再生
するのに好適な真空ポンプの切替式トラップ装置に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a switchable trap device for a vacuum pump, and in particular to a vacuum pump suitable for regenerating oil adsorbent in an oil trap without stopping the machine. This invention relates to a switchable trap device.

[従来の技術] 一般に、クリーンな排気の真空ポンプを実現するだめに
は、各軸受室から圧縮作動室へ潤滑油が漏れ込むことを
防止しなければならない。そこで、軸受室と吸入口とを
オイルトラップを介して配管接続して圧力差をノ」1さ
くする方法が採用されている。
[Prior Art] Generally, in order to realize a vacuum pump with clean exhaust, it is necessary to prevent lubricating oil from leaking from each bearing chamber to the compression working chamber. Therefore, a method has been adopted in which the bearing chamber and the suction port are connected via piping through an oil trap to reduce the pressure difference by one inch.

例えば、特公昭50−30285号公報記載のルーツ形
の真空ポンプは、軸封部から流出した潤滑油は回転軸に
設けた傾斜肩部と直角面肩面との作用により油溜りに集
め、かつ、吸入側に開口するように配管したオイルトラ
ップへ、圧力差により自然的流動させて集めるようにし
ている。
For example, in the roots-type vacuum pump described in Japanese Patent Publication No. 50-30285, lubricating oil flowing out from the shaft seal is collected in an oil reservoir by the action of an inclined shoulder and a right-angled shoulder surface provided on the rotating shaft. The oil is collected by natural flow due to the pressure difference into an oil trap that is piped to open on the suction side.

また、例えば、特開昭62−197685号公報記載の
スクリュー真空ポンプの軸封装置においては、貯油槽を
具備する吸込側軸受室と吸入ポートとの間を、油吸着材
を具備した1個のオイルトラップを有する配管で連通さ
せているが、このオイルトラップは比較的短時間で機能
が低下することについて配慮されていなかった。
Further, for example, in the shaft sealing device for a screw vacuum pump described in Japanese Patent Application Laid-open No. 62-197685, a single shaft sealing device equipped with an oil adsorbent is installed between the suction side bearing chamber equipped with an oil storage tank and the suction port. They are communicated via piping with an oil trap, but no consideration has been given to the fact that the oil trap's functionality deteriorates in a relatively short period of time.

[発明が解決しようとする課題] 上記従来技術は、オイルトラップのメンテナンスについ
て配慮されておらず、油吸着材が機能低下したときには
、それを交換するために真空ポンプを停止しなければな
らないという問題があった。
[Problems to be Solved by the Invention] The above-mentioned conventional technology does not take maintenance of the oil trap into consideration, and when the function of the oil adsorbent deteriorates, there is a problem in that the vacuum pump must be stopped in order to replace it. was there.

本発明は、上記従来技術の問題点を解決するためになさ
れたもので、真空ポンプを停止させることなく、またオ
イルトラップを分解することなくオイルトラップの保守
を可能にし、メンテナンスコストを大幅に低減しうる真
空ポンプの切替式トラップ装置を提供することを、その
目的とするものである。
The present invention was made in order to solve the problems of the prior art described above, and enables maintenance of the oil trap without stopping the vacuum pump or disassembling the oil trap, significantly reducing maintenance costs. It is an object of the present invention to provide a switchable trap device for a vacuum pump that can be used.

[課題を解決するための手段] 」二記目的を達成するために、本発明に係る真空ポンプ
切替式トラップ装置の構成は、真空ポンプにおける、貯
油槽を具備する吸込側軸受室と吸入ポートとの間に、油
吸着材を具備した複数のトラップを流路切替弁によって
切替使用可能に配管接続するとともに、休止中のトラッ
プには、当該真空ポンプの高温吐出ガスを導通せしめる
配管系を流路切替可能に接続したものである。
[Means for Solving the Problems] In order to achieve the second object, the configuration of the vacuum pump switching type trap device according to the present invention is such that the vacuum pump has a suction side bearing chamber equipped with an oil storage tank, a suction port, During this period, a plurality of traps equipped with oil adsorbents are connected via piping so that they can be switched and used using flow path switching valves, and a piping system that conducts the high temperature discharge gas of the vacuum pump is connected to the traps that are inactive. They are connected in a switchable manner.

なお付記すると、」二記目的は、トラップをダブル構成
にして切替バルブを用いて1〜ラツプを切替え、使用さ
れていない1へラップに吐出ガスを通して高温にするこ
とによって油吸着材に吸着している油を蒸発させ、油吸
着材を再生させることにより、達成される。
In addition, the purpose of ``2'' is to make the trap a double configuration, use a switching valve to switch between laps 1 and 1, and pass the discharged gas through the unused lap 1 to raise the temperature to adsorb it on the oil adsorbent. This is achieved by evaporating the existing oil and regenerating the oil sorbent.

[作用] 上記の技術的手段による働きは、次のとおりである。[Effect] The function of the above technical means is as follows.

1つのトラップは、その中にある油吸着材が拡散してく
る油分子を吸着し、油の拡散、逆流を防ぐ。この機能が
低下したところで、切替バルブによってもう]つの新し
いトラップに切替える。ここで油が吸着した吸着材は熱
を加えることによって油が蒸発し再び油を吸着する機能
を恢復することになる。
In one trap, the oil adsorbent inside it adsorbs the diffusing oil molecules and prevents the oil from spreading and backflowing. Once this function has degraded, a switch valve switches to a new trap. By applying heat to the adsorbent material that has adsorbed oil, the oil evaporates and the adsorbent's ability to adsorb oil is restored.

一方、真空ポンプ吐出ガス温度は、高圧縮比であるが故
に、油を蒸発させるに必要な温度(例えば200〜25
0℃)であり、この高温ガスを用いて油吸着材を再生(
機能恢復)することが可能である。
On the other hand, due to the high compression ratio, the vacuum pump discharge gas temperature is the temperature required to evaporate the oil (for example, 200 to 25
0℃), and this high temperature gas is used to regenerate the oil adsorbent (
It is possible to restore function.

[実施例コ 以下、本発明の一実施例を図面を参照して説明する。[Example code] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

図面は、本発明の一実施例に係るスクリュー真空ポンプ
の切替式トラップ装置の略示構成図である。
The drawing is a schematic configuration diagram of a switching type trap device for a screw vacuum pump according to an embodiment of the present invention.

図面において、1は、スクリュー真空ポンプ本体の作動
室、2は、貯油槽(図示せず)を具備する吸込側軸受室
、3は、スクリュー真空ポンプ本体に形成された吸入ポ
ート、4,5は、複数(ここではダブル構成)のトラッ
プに係るオイルトラップで、このオイルトラップ4,5
は、特に図示しないが、容器内に網状の仕切りを介して
充填される、球状あるいは円筒形の市販の油吸着材を具
備するものである。
In the drawings, 1 is a working chamber of the screw vacuum pump body, 2 is a suction side bearing chamber equipped with an oil storage tank (not shown), 3 is a suction port formed in the screw vacuum pump body, and 4 and 5 are suction ports formed in the screw vacuum pump body. , an oil trap related to a plurality of traps (in this case, a double configuration), these oil traps 4 and 5.
Although not particularly shown, the container is equipped with a commercially available spherical or cylindrical oil adsorbent that is filled into the container through a mesh-like partition.

6は、吸込側軸受室2と吸入ポート3との間に、オイル
トラップ4,5を流路切替弁によって切替使用可能に配
管接続する連通管、7,8は、前記流路切替弁に係る三
方弁である。
6 is a communication pipe connecting the oil traps 4 and 5 between the suction side bearing chamber 2 and the suction port 3 so that the oil traps 4 and 5 can be switched and used by a flow path switching valve; 7 and 8 are related to the flow path switching valve; It is a three-way valve.

9は、スクリュー真空ポンプ本体に形成された吐出ポー
1へ、10は、スクリュー真空ポンプの高温吐出ガスを
オイルトラップ4,5に流路切替え可能に導通せしめる
ための吐出ガス導入管、11゜12は、吐出ガス導通の
流路を切替えるための三方弁、13は吐出側軸受および
ギヤ室、14は、油分を排出するための配管である。
Reference numeral 9 denotes a discharge port 1 formed in the screw vacuum pump body; 10 denotes a discharge gas introduction pipe for conducting the high temperature discharge gas of the screw vacuum pump to the oil traps 4 and 5 in a switchable manner; 11°12 13 is a discharge side bearing and a gear chamber; and 14 is a pipe for discharging oil.

図面に示すスクリュー真空ポンプの切替式トラップ装置
について、その構成と、その構成にともなう作用を、よ
り詳しく説明する。
The configuration of the switching trap device for the screw vacuum pump shown in the drawings and the effects associated with the configuration will be explained in more detail.

スクリュー真空ポンプは、ここで図示しないが、互いに
噛み合う雄雌一対のスクリューロータを微小間隙を保つ
ようにケーシングに収納して作動室1を形成し、吸込側
軸受室2、吐出側軸受およびギヤ室13を備え、吸引さ
れるガス吸入ポート3から作動室1に吸入され圧縮され
て吐出ポート9から吐出される。
Although not shown here, a screw vacuum pump includes a pair of male and female screw rotors that mesh with each other and are housed in a casing so as to maintain a minute gap to form a working chamber 1, a suction side bearing chamber 2, a discharge side bearing, and a gear chamber. 13, gas is sucked into the working chamber 1 from the suction port 3, compressed, and discharged from the discharge port 9.

吸込側軸受室2の中には、軸受に給油するための潤滑油
が貯溜されており、この吸込側軸受室2と作動室1とは
非接触ねじシールで軸封されている。
Lubricating oil for lubricating the bearing is stored in the suction side bearing chamber 2, and the suction side bearing chamber 2 and the working chamber 1 are sealed with a non-contact screw seal.

起動時に、前記吸込側軸受室2内の圧力を早く真空にし
、その後吸入ポート3と一定差圧を保つようにするため
に、一般に、吸込側軸受室2と吸入ポート3とはオイル
I−ラップ4を介して連通管6で結ばれている。吸入側
軸受室2の圧力は吸入ポー1−3よりも高く、オイルミ
ストを含んだガスはオイルI−ラップ4を介して吸入ポ
ート3に常時流れており、吸入圧力の変動が大きい場合
にはこの量はさらに増加することになる。このため、オ
イルトラップ4は従来のようにひとつだけでは長時間の
連続運転は難しい。そこで、図面に示すように、オイル
1〜ラツプをダブル構成にして、例えば本図に示すよう
に、三方弁7,8の白い部分が開、黒い部分が閉とする
とガスは矢印のように流れ、オイルトラップ4が生きて
いることになり、他方のオイルトラップ5にはガスが流
れず休止していることになる。
At startup, in order to quickly reduce the pressure in the suction side bearing chamber 2 to a vacuum and then maintain a constant pressure difference with the suction port 3, the suction side bearing chamber 2 and the suction port 3 are generally equipped with an oil I-wrap. 4 and are connected by a communication pipe 6. The pressure in the suction side bearing chamber 2 is higher than that in the suction ports 1-3, and gas containing oil mist constantly flows to the suction port 3 via the oil I-wrap 4. This amount will further increase. For this reason, it is difficult to operate continuously for a long time with only one oil trap 4 as in the conventional case. Therefore, as shown in the drawing, if the oil 1 to lap are double-configured, and the white parts of the three-way valves 7 and 8 are open and the black parts are closed, as shown in the figure, the gas will flow as shown by the arrow. , the oil trap 4 is alive, and the other oil trap 5 is at rest with no gas flowing.

ところで、オイルトラップ4,5には、オイルミストを
吸着する効果のある油吸着材が充填されているが、この
油吸着材の機能が低下するとオイルミスl−が吸入ポー
ト3に入り込み、真空ポンプの性能低下、排気のスクリ
ーン性に対して悪影響をおよぼす。
Incidentally, the oil traps 4 and 5 are filled with an oil adsorbent that has the effect of adsorbing oil mist, but if the function of this oil adsorbent deteriorates, oil mist l- will enter the suction port 3, causing the vacuum pump to performance and has an adverse effect on exhaust screenability.

この油吸着材の機能を常に一定以上に保つために、上記
休止しているオイル1〜ラツプ5の油吸着材髪新品に交
換すれば良いが、ここでは真空ポンプの高温の吐出ガス
を利用してオイルトラップ5の中の油吸着材に付いてい
る油分を蒸発させ油吸着材を再生させることで交換しな
くてもすむようになる。
In order to keep the function of this oil adsorbent always above a certain level, it is possible to replace the above-mentioned inactive oil adsorbents for oils 1 to 5 with new ones, but here we will use the high temperature discharge gas of the vacuum pump. By evaporating the oil adhering to the oil adsorbent in the oil trap 5 and regenerating the oil adsorbent, there is no need to replace it.

オイルl−ラップ4,5の切替えは三方弁7,8の流路
切替えによって行われる。
The oil l-wraps 4 and 5 are switched by switching the flow paths of the three-way valves 7 and 8.

真空ポンプの吐出ガスは吐出ポート9から吐出ガス導入
管10を経てオイルトラップ4,5に導入される。図面
に示すオイルトラップ5が休止のときは、吐出ガスは矢
印のようにオイルトラップ5を流通するように流れる。
The discharge gas of the vacuum pump is introduced into the oil traps 4 and 5 from the discharge port 9 through the discharge gas introduction pipe 10. When the oil trap 5 shown in the drawing is at rest, the discharged gas flows through the oil trap 5 as shown by the arrow.

三方弁11.12は白い部分が開、黒い部分が閉を示し
ている。オイルトラップ5に導入された高温吐出ガスは
油吸着材に吸着している油分を蒸発させ、蒸発した油分
は配管工4を経て機外に排出される。
The white part of the three-way valves 11 and 12 indicates open, and the black part indicates closed. The high temperature discharge gas introduced into the oil trap 5 evaporates the oil adsorbed on the oil adsorbent, and the evaporated oil is discharged outside the machine via the plumber 4.

この高温吐出ガスをオイル1〜ラップ4,5に導入する
切替えは三方弁11,12の流路切替えによって行われ
る。
Switching to introduce this high-temperature discharged gas into the oil 1 to the wraps 4 and 5 is performed by switching the flow paths of the three-way valves 11 and 12.

三方弁7,8の流路切替えは、連通管6系におけるトラ
ップ4,5の作動、休止を切替えるもので、三方弁11
.12の流路切替えは、吐出ガス導入管10系における
トラップ4,5の油吸着機能慨世作用を切替えるもので
、互いに定められた関係で流路の開閉が行われる。した
がって、これら三方弁の流路切替えを所定の稼働時間ご
とに自動切替えするように、予め制御回路を構成してお
けば、流路切替えの自動化は容易に実施可能である。
The flow path switching of the three-way valves 7 and 8 is to switch between activation and deactivation of the traps 4 and 5 in the communication pipe 6 system, and the three-way valve 11
.. The flow path switching 12 is for switching the oil adsorption function of the traps 4 and 5 in the discharge gas introduction pipe 10 system, and the flow paths are opened and closed in a mutually determined relationship. Therefore, if a control circuit is configured in advance to automatically switch the flow paths of these three-way valves every predetermined operating time, automation of flow path switching can be easily implemented.

本実施れによれば、真空ポンプを停止させることなく、
オイルトラップのメンテナンスができ、しかも休止中の
オイルトラップは真空ポンプの吐出ガスを利用して再生
させることができるので。
According to this implementation, without stopping the vacuum pump,
You can maintain the oil trap, and if the oil trap is inactive, it can be regenerated using the discharge gas from the vacuum pump.

メンテナンス期間が大幅に伸びるとともにメンテナンス
コストは低下する効果がある。
This has the effect of significantly extending the maintenance period and reducing maintenance costs.

なお、前述の実施例では、スクリュー真空ポンプにおけ
る切替式I・ラップ装置の例を説明したが、本発明はス
クリュー真空ポンプに限るものではなく、同様の効果が
来たいされる範囲で他の形式の真空ポンプにも適用可能
なものである。
In the above-mentioned embodiment, an example of a switching type I-lap device in a screw vacuum pump was explained, but the present invention is not limited to a screw vacuum pump, and can be applied to other types as long as the same effect can be achieved. It can also be applied to other vacuum pumps.

[発明の効果] 以」二説明したように、本発明によれば、真空ポンプを
停止させることなく、またオイルトラップを分解するこ
となく、オイルトラップの保守を可能にし、メンテナン
スコストを大幅に低減しうる真空ポンプの切替式トラッ
プ装置を提供することができる。
[Effects of the Invention] As explained below, according to the present invention, it is possible to maintain the oil trap without stopping the vacuum pump or disassembling the oil trap, thereby significantly reducing maintenance costs. It is possible to provide a switchable trap device for a vacuum pump that can be used.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、本発明の一実施例に係るスクリュー真空ポンプ
の切替式トラップ装置の略示構成図である。 1、・・・作動室、2・・吸込側軸受室、3・・吸入ポ
ート、4,5・・オイルトラップ、6・・連通管、7゜
8.11.12・・・三方弁、9・・・吐出ポート、1
0・・吐出ガス導入管。 2・・・α先E1ムAシリ軸受室 6・ 土通蒼 70・・gt−ガス導入π
The drawing is a schematic configuration diagram of a switching type trap device for a screw vacuum pump according to an embodiment of the present invention. 1. Working chamber, 2. Suction side bearing chamber, 3. Suction port, 4, 5. Oil trap, 6. Communication pipe, 7゜8.11.12... Three-way valve, 9 ...Discharge port, 1
0...Discharge gas introduction pipe. 2... α end E1 mu A series bearing chamber 6, Tsuchitsu Ao 70... gt-gas introduction π

Claims (1)

【特許請求の範囲】[Claims] 1、真空ポンプにおける、貯油槽を具備する吸込側軸受
室と吸入ポートとの間に、油吸着材を具備した複数のト
ラップを流路切替弁によって切替使用可能に配管接続す
るとともに、休止中のトラップには、当該真空ポンプの
高温吐出ガスを導通せしめる配管系を流路切替可能に接
続したことを特徴とする真空ポンプの切替式トラップ装
置。
1. In a vacuum pump, between the suction side bearing chamber equipped with an oil storage tank and the suction port, a plurality of traps equipped with an oil adsorbent are connected via piping so that they can be switched and used using a flow path switching valve, and 1. A switchable trap device for a vacuum pump, characterized in that a piping system through which high-temperature gas discharged from the vacuum pump is conducted is connected to the trap in a switchable manner.
JP137088A 1988-01-08 1988-01-08 Switching trap device for vacuum pump Pending JPH01178787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP137088A JPH01178787A (en) 1988-01-08 1988-01-08 Switching trap device for vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP137088A JPH01178787A (en) 1988-01-08 1988-01-08 Switching trap device for vacuum pump

Publications (1)

Publication Number Publication Date
JPH01178787A true JPH01178787A (en) 1989-07-14

Family

ID=11499610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP137088A Pending JPH01178787A (en) 1988-01-08 1988-01-08 Switching trap device for vacuum pump

Country Status (1)

Country Link
JP (1) JPH01178787A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6158226A (en) * 1996-12-16 2000-12-12 Ebara Corporation Trapping device
JP2008173544A (en) * 2007-01-17 2008-07-31 Anest Iwata Corp Device for forming negative pressure and method for discharging drain

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6158226A (en) * 1996-12-16 2000-12-12 Ebara Corporation Trapping device
JP2008173544A (en) * 2007-01-17 2008-07-31 Anest Iwata Corp Device for forming negative pressure and method for discharging drain

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