JPH01177274U - - Google Patents

Info

Publication number

JPH01177274U

JPH01177274U JP7329288U JP7329288U JPH01177274U JP H01177274 U JPH01177274 U JP H01177274U JP 7329288 U JP7329288 U JP 7329288U JP 7329288 U JP7329288 U JP 7329288U JP H01177274 U JPH01177274 U JP H01177274U

Authority

JP

Japan

Prior art keywords

chamber

compartment

gate valve

operating rod

argon gas

Prior art date

1988-06-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002019 doping agent Substances 0.000 claims description 7
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
• 229910052710 silicon Inorganic materials 0.000 claims description 5
• 239000010703 silicon Substances 0.000 claims description 5
• 229910052786 argon Inorganic materials 0.000 claims description 3
• 239000013078 crystal Substances 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 2
• 239000002994 raw material Substances 0.000 claims description 2
• 239000007789 gas Substances 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 229910002804 graphite Inorganic materials 0.000 description 1
• 239000010439 graphite Substances 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• 239000003566 sealing material Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1