JPH01177265U - - Google Patents
Info
- Publication number
- JPH01177265U JPH01177265U JP7150688U JP7150688U JPH01177265U JP H01177265 U JPH01177265 U JP H01177265U JP 7150688 U JP7150688 U JP 7150688U JP 7150688 U JP7150688 U JP 7150688U JP H01177265 U JPH01177265 U JP H01177265U
- Authority
- JP
- Japan
- Prior art keywords
- grid
- filament
- evaporation source
- evaporated
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7150688U JPH0523567Y2 (en:Method) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7150688U JPH0523567Y2 (en:Method) | 1988-05-30 | 1988-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01177265U true JPH01177265U (en:Method) | 1989-12-18 |
| JPH0523567Y2 JPH0523567Y2 (en:Method) | 1993-06-16 |
Family
ID=31296712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7150688U Expired - Lifetime JPH0523567Y2 (en:Method) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523567Y2 (en:Method) |
-
1988
- 1988-05-30 JP JP7150688U patent/JPH0523567Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523567Y2 (en:Method) | 1993-06-16 |