JPH01176456A - Dust-free thermostat - Google Patents

Abstract

PURPOSE:To prevent a gas, which has not passed through a filter unit, from flowing into a thermostatic chamber by putting a seal body consisting of a heat resistant network which supports glass fiber between the thermostatic chamber in a main body of thermostat and the filter unit. CONSTITUTION:A thermostatic chamber 5 formed in a main body of thermostat, a filter unit 10 filtrating a gas supplied to the thermostatic chamber 5 and a seal body 15, which is pressed and held between the periphery of a gas inlet port 6 of the thermostatic chamber 5 and the filter unit 10, are arranged. The seal body 15 consists of a network 16 which is brought into contact with an opening face of the gas inlet port 6, glass fiber 17 which is arranged at the peripheral part of the network 16 surrounding at least the peripheral part of the gas inlet port 6, and a network 16 which is arranged at least at the glass fiber 17 part. The glass fiber 17 is, therefore, supported by both of these networks. The seal body 15 is not degraded by heat as a result and it is possible to prevent a gas which has not passed through the filter unit from flowing into the thermostatic chamber.

Description

[Detailed Description of the Invention] [Objective of the Invention] (Industrial Application Field) The present invention is suitable for temperature testing and heat treatment of semiconductor products, precision parts, etc. in an environment of clean air, especially heat carrier gas such as high-temperature air. Regarding the dust-free constant temperature chamber used.

(Prior art) In this type of conventional dust-free constant temperature chamber, clean air filtered by a filter is circulated in the constant temperature chamber of the constant temperature chamber body, and the air inlet of the constant temperature chamber is connected to a filter unit. The connection part has a structure in which a sealing body made of sponge material, ceramic fiber, or the like is bonded with an organic adhesive to prevent air that has not passed through the filter unit from flowing into the thermostatic chamber.

(Problems to be Solved by the Invention) In the conventional dust-free constant temperature chamber described above, there is no problem when circulating clean air at around room temperature into the constant temperature chamber, but for example,
When circulating clean air at a temperature of about 0°C into a constant temperature room, the sealing material and adhesive deteriorate due to heat, and they turn into powder or gas and flow into the constant temperature room or gradually pass through the filter unit. There was a problem with air entering the temperature controlled room.

The present invention was made in view of the above problems, and has a simple structure that allows gas that does not pass through the filter unit to flow into the constant temperature room without thermal deterioration of the seal body interposed between the constant temperature room and the filter unit. The purpose of this invention is to provide a dust-free constant temperature bath that prevents this from occurring. - [Structure of the invention] (Means for solving the problem) The dust-free constant temperature chamber of the first invention includes a constant temperature chamber formed within the constant temperature chamber body and filtering gas supplied to the constant temperature chamber. a filter unit; and a seal body that is pressed between the peripheral edge of the gas inlet of the constant temperature room and the filter unit, and the seal body is in contact with the surface of the constant temperature room where the gas inlet is opened. a net-like body, a glass fiber arranged around the periphery of the net-like body so as to surround at least the peripheral edge of the gas inlet, and a net-like body disposed at least in a portion of the glass fiber; It is characterized in that the glass fibers are held in a self-reticular structure.

A second invention also provides a constant temperature chamber formed within the constant temperature chamber body, a filter unit that filters gas supplied to the constant temperature chamber, and a peripheral portion of the gas inlet of the constant temperature chamber and the filter unit. The sealing body is formed of a bag-like net-like body containing glass I if, and the sealing body is attached to the surface of the thermostatic chamber where the gas inlet is opened. It is characterized by being arranged so as to surround the periphery.

(Function) In the dust-free constant temperature chamber of the present invention, the gas supplied into the constant temperature chamber body passes through the filter unit, becomes clean gas, and flows into the constant temperature chamber. The seal body interposed between the periphery of the gas inlet of the thermostatic chamber and the filter unit prevents gas that does not pass through the filter unit from flowing into the thermostatic chamber. Since the sealing body is held and formed using a heat-resistant net-like body, the sealing body will not be thermally deteriorated by high-temperature gas.

(Embodiment) The configuration of an embodiment of the present invention will be explained with reference to FIGS. 1 to 3 of the drawings.

Reference numeral 1 denotes a thermostatic chamber main body, and a front door body 3 for sealing a front opening 2 is attached to the main body 1 with a hinge 4 so as to be openable and closable.

Reference numeral 5 denotes a thermostatic chamber formed in the main body 1 with a heat-resistant sealed wall made of stainless steel or the like, and the front face is opened toward the opening 2 of the main body 1, and this opening 2 is sealed by the door body 3. It has become so. Further, a gas inlet 6 is opened at the back side of the thermostatic chamber 5.

Further, a space 7 is formed in the main body 1 and communicates with the bottom and back side of the thermostatic chamber 5. Located at the bottom of the thermostatic chamber 5, the space 7 is equipped with a circulation fan 8 such as a sirocco fan and a heater. 9 is housed therein, and furthermore, a filter unit 10 is disposed in the space 7 at the back side of the thermostatic chamber 5. For example, as shown in FIG. 4, this filter unit 10 is formed by surrounding and holding glass fibers 12 in a substantially cylindrical frame 11 with a rectangular cross section and a heat-resistant net 13 made of stainless steel or the like, with openings formed at the front and rear. The filter member 14 is arranged in a meandering manner.

Further, 15 is a sealing body, and as shown in FIGS. 2 and 3, this sealing body 15 is formed somewhat larger than the opening surface of the cylindrical frame 11 of the filter unit 10, and is made of stainless steel like the filter member 14. Glass between 16 pieces of heat-resistant mesh! It is formed by storing and holding miscellaneous items 17,
The glass fibers 17 held in the net-like body 16 are arranged in a substantially rectangular annular shape between the two net-like bodies 16 so as to be disposed along the periphery of the gas inlet 6 opened at the back side of the thermostatic chamber 5. Retained. The sealing body 15 is disposed on the back surface of the thermostatic chamber v5 so that the glass fibers 17 are located around the gas inlet 6, and the seal body 15 is arranged between the planar back surface of the thermostatic chamber 5 and the opening edge of the filter unit 10. They are held in pressure contact with each other.

The circulation fan 8 faces the opening formed at the front lower part of the thermostatic chamber 5, and a temperature sensor 18 is provided near the gas inlet 6 in the thermostatic chamber 5. The heater 9 is controlled by the signal.

Also, a damper 20 is provided at the upper part of the back surface of the space 7 of the main body 1.
An exhaust pipe portion 21 having a plurality of exhaust pipes is connected to each other.

Further, the main body 1 is provided with a rear door body 22 which seals the rear opening and can be opened and closed using a hinge 23.

Further, an inner door 24 having ventilation is provided at the front of the constant temperature room 5.

Next, the operation of this embodiment will be explained.

After storing semiconductor products etc. in the constant temperature room 5 of the main body 1, the front door body 3
When heat treatment is performed with the heater closed, the circulation fan 8 is rotated, and the circulating flow generated by the fan 8 moves the air to the heater 9.
The heated airflow from the back of the space 7 passes through the filter unit 10 and flows into the thermostatic chamber 5, heats the semiconductor products, etc. in the thermostatic chamber 5, and returns to the cavity 7. It is sucked into the circulation fan 8 and circulated. A seal body 1 is provided at the connection portion between the filter unit 10 and the constant temperature room 5.
Since the sealing body 15 is constructed by holding the glass fibers 17 in a heat-resistant mesh body 16, it has heat resistance, there is no risk of thermal deterioration in high-temperature air, and it can be kept at a constant temperature. Temperature chamber 5 from between chamber 5 and filter unit 10
Even if an air flow leaks into the gas inlet 6 of the thermostatic chamber 5, this air is filtered by the glass fibers and becomes clean air, which is then introduced into the thermostatic chamber 5.

In this embodiment, the glass fibers 17 of the sealing body 15 are connected to the gas inlet 6 so as to surround the gas inlet 6 of the thermostatic chamber 5.
Although a structure has been described in which only the wire-shaped body 16 is arranged on the peripheral edge of the gas inlet 6 and only the cord-like body 16 is arranged in the part corresponding to the gas inlet 6, glass fibers 17 are also arranged in the part corresponding to the gas inlet 6.
can also be installed to enhance the air filtration effect.

In this embodiment, the structure in which the sealing body 15 is held between two planar net-like bodies 16 has been described, but the net-like body 16 on the filter unit 10 side is formed in the shape of a rectangular frame with only the portion sandwiching the glass fibers 17. Alternatively, the peripheral edge of the net-like body 16 on the side of the thermostatic chamber 5 may be bent to hold the glass 1aIl.

Next, the structure of another embodiment will be explained with reference to FIG. 4.

A fitting recess 25 opened to the back side is formed around the back side gas inlet 6 of the thermostatic chamber 5, and an annular seal body 15 is fitted into the fitting recess 25. This seal body 15 is constructed by filling and holding glass fibers 1i17 in a heat-resistant mesh body 1 made of stainless steel or the like formed into an annular bag shape. Then, the opening edge of the filter unit 10 is press-fitted to the seal body 15 that fits into the fitting recess 25 of the constant temperature chamber 5 and surrounds the gas inlet 6 of the constant temperature chamber 5, and the seal body 15 is attached. Hold. The structure of this embodiment also has the same effect as the previous embodiment.

Still another embodiment will be described with reference to FIG. 5 of the drawings.

In the above embodiment, the seal body 15 was arranged to surround the gas inlet 6 of the constant temperature room 5, but in this embodiment, the filter unit 10 and the seal body 15 are integrally formed. The periphery of a filter unit 10, which is constructed by storing glass fibers 17 in a flat bag-like heat-resistant mesh member 16, is pressed against the periphery of the rear gas inlet 6 of No. The filter unit 10 is held at the periphery of the gas inlet 6 on the back side of the thermostatic chamber 5, and the periphery of the filter unit 10, which becomes the seal body 15, is held in the thermostatic chamber by the holding edge 28 protruding from the opening edge of the holding frame 27. Press and hold on the back side of 5.

Then, the 7-tile unit 10 is pressed against this holding frame 27. With this structure, the filter unit 10 and the seal body 15 can be formed integrally, and the operation is the same as that of the previous embodiment.

Note that the glass fibers of the seal body 15 in each of the above embodiments are preferably long fibers.

Further, in the above embodiments, an example was explained in which air was used as the heat medium, but other than air, an appropriate gas such as nitrogen can be used as the heat medium.

〔Effect of the invention〕

According to the company, a seal made of a heat-resistant mesh holding glass fibers is sandwiched between the constant temperature chamber of the constant temperature chamber and the filter unit, so that the seal can be protected against high-temperature gas. It is durable without being degraded by heat, and the gas that flows into the constant temperature chamber from between the constant temperature chamber of the constant temperature chamber body and the filter unit is passed through the glass of the sealing body! filtered through miscellaneous
Only purified gas is supplied to the thermostatic chamber, the thermostatic chamber is not contaminated with dust, and the structure is simple.
It is possible to reduce the price.

Furthermore, in the first invention, since the gas inlet of the thermostatic chamber is closed by the mesh of the sealing body, the test object stored in the thermostatic chamber does not enter the filter unit side.
No damage to the filter unit. Further, in the second aspect of the invention, the seal body is housed in a bag-like net-like body, so that the seal body is easy to handle.

[Brief explanation of the drawing]

Fig. 1 is a longitudinal cross-sectional side view of the connection part between the thermostatic chamber and the filter unit of a dust-free thermostatic oven showing an embodiment of the present invention, Fig. 2 is a rear view of the same, and Fig. 3 is a longitudinal cross-sectional side view of the thermostatic oven as above. , FIG. 4 is a vertical cross-sectional side view of the connection between the thermostatic chamber of the thermostatic chamber and the filter unit showing another embodiment, and FIG. FIG. 1. Constant temperature chamber body, 6. Gas inlet, 10. Filter unit, 15. Seal body, 16. Glass mH1
17...Heat-resistant network. t-hard ((member-

Claims (2)

[Claims] (1) A constant temperature chamber formed in the constant temperature chamber body, a filter unit that filters gas supplied to the constant temperature chamber, and a peripheral portion of the gas inlet of the constant temperature chamber and the filter unit that are pressure-bonded and sandwiched together. a sealing body, the sealing body having a net-like body that comes into contact with the surface of the thermostatic chamber in which the gas inlet is opened, and a periphery of the net-like body so as to surround at least a peripheral edge of the gas inlet. 1. A dust-free constant temperature bath comprising glass fibers arranged therein and a net-like body arranged at least in a portion of the glass fibers, the glass fibers being held by both the net-like bodies. (2) A constant temperature chamber formed within the constant temperature chamber body, a filter unit that filters gas supplied to this constant temperature chamber, and a peripheral portion of the gas inlet of the constant temperature chamber and the filter unit sandwiched together. a sealing body, the sealing body is formed of a bag-like net-like body containing glass fiber, and the sealing body is placed on the surface of the thermostatic chamber where the gas inlet is opened, so as to surround the periphery of the gas inlet. A dust-free constant temperature bath characterized by being installed in.