JPH01176359U - - Google Patents

Info

Publication number
JPH01176359U
JPH01176359U JP7232988U JP7232988U JPH01176359U JP H01176359 U JPH01176359 U JP H01176359U JP 7232988 U JP7232988 U JP 7232988U JP 7232988 U JP7232988 U JP 7232988U JP H01176359 U JPH01176359 U JP H01176359U
Authority
JP
Japan
Prior art keywords
chamber
ion
rear chamber
clamp
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7232988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7232988U priority Critical patent/JPH0521244Y2/ja
Publication of JPH01176359U publication Critical patent/JPH01176359U/ja
Application granted granted Critical
Publication of JPH0521244Y2 publication Critical patent/JPH0521244Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP7232988U 1988-05-31 1988-05-31 Expired - Lifetime JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7232988U JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7232988U JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-31 1988-05-31

Publications (2)

Publication Number Publication Date
JPH01176359U true JPH01176359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-12-15
JPH0521244Y2 JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-31

Family

ID=31297501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7232988U Expired - Lifetime JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0521244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-31

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