JPH01174922U - - Google Patents

Info

Publication number
JPH01174922U
JPH01174922U JP7138888U JP7138888U JPH01174922U JP H01174922 U JPH01174922 U JP H01174922U JP 7138888 U JP7138888 U JP 7138888U JP 7138888 U JP7138888 U JP 7138888U JP H01174922 U JPH01174922 U JP H01174922U
Authority
JP
Japan
Prior art keywords
substrate
cart
film forming
holder
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7138888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0650983Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7138888U priority Critical patent/JPH0650983Y2/ja
Publication of JPH01174922U publication Critical patent/JPH01174922U/ja
Application granted granted Critical
Publication of JPH0650983Y2 publication Critical patent/JPH0650983Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP7138888U 1988-05-30 1988-05-30 薄膜形成装置の基板カート Expired - Lifetime JPH0650983Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7138888U JPH0650983Y2 (ja) 1988-05-30 1988-05-30 薄膜形成装置の基板カート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7138888U JPH0650983Y2 (ja) 1988-05-30 1988-05-30 薄膜形成装置の基板カート

Publications (2)

Publication Number Publication Date
JPH01174922U true JPH01174922U (US06815460-20041109-C00097.png) 1989-12-13
JPH0650983Y2 JPH0650983Y2 (ja) 1994-12-21

Family

ID=31296596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7138888U Expired - Lifetime JPH0650983Y2 (ja) 1988-05-30 1988-05-30 薄膜形成装置の基板カート

Country Status (1)

Country Link
JP (1) JPH0650983Y2 (US06815460-20041109-C00097.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01313924A (ja) * 1988-06-13 1989-12-19 Fuji Electric Co Ltd 縦型プラズマcvd装置
WO2009148087A1 (ja) * 2008-06-06 2009-12-10 株式会社アルバック 薄膜太陽電池製造装置
JP2011124348A (ja) * 2009-12-09 2011-06-23 Ulvac Japan Ltd 基板ホルダー及び基板搬送装置
JP2012089589A (ja) * 2010-10-15 2012-05-10 Ulvac Japan Ltd 基板ホルダー及び基板搬送装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01313924A (ja) * 1988-06-13 1989-12-19 Fuji Electric Co Ltd 縦型プラズマcvd装置
WO2009148087A1 (ja) * 2008-06-06 2009-12-10 株式会社アルバック 薄膜太陽電池製造装置
JP5328786B2 (ja) * 2008-06-06 2013-10-30 株式会社アルバック 薄膜太陽電池製造装置
TWI424579B (zh) * 2008-06-06 2014-01-21 Ulvac Inc 薄膜太陽電池製造裝置
JP2011124348A (ja) * 2009-12-09 2011-06-23 Ulvac Japan Ltd 基板ホルダー及び基板搬送装置
JP2012089589A (ja) * 2010-10-15 2012-05-10 Ulvac Japan Ltd 基板ホルダー及び基板搬送装置

Also Published As

Publication number Publication date
JPH0650983Y2 (ja) 1994-12-21

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